CN111928879A - Polarized Mach-Zehnder interference system with output - Google Patents
Polarized Mach-Zehnder interference system with output Download PDFInfo
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
- G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
- G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
- G01D5/353—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells influencing the transmission properties of an optical fibre
- G01D5/35306—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells influencing the transmission properties of an optical fibre using an interferometer arrangement
- G01D5/35329—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells influencing the transmission properties of an optical fibre using an interferometer arrangement using interferometer with two arms in transmission, e.g. Mach-Zender interferometer
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- G—PHYSICS
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- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
- G02B27/28—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00 for polarising
- G02B27/283—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00 for polarising used for beam splitting or combining
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Abstract
The invention discloses a polarization Mach-Zehnder interference system with output, which comprises: the device comprises a beam splitter and a reflecting mirror, wherein the beam splitter comprises a first beam splitter and a second beam splitter; the reflector comprises a first reflector and a second reflector; the first beam splitter and the second beam splitter are connected in series with an incident light path, and the beam splitting surface of the first beam splitter is parallel to the reflecting surface of the second beam splitter. According to the structure, the two beam splitters are adopted for splitting and combining beams, the beam splitting surface direction of the beam splitters is adjusted, the measuring beams are led out from the beam combiners, different test light paths can be constructed outside the interferometer, and the coincidence of the test optical axis and the reference optical axis is realized through the two reflectors.
Description
Technical Field
The invention belongs to an optical detection device, and particularly relates to a polarization Mach-Zehnder interference system with output.
Background
With the development of optical technology, besides traditional interferometers such as Twyman interference and Fizeau interference, which have increasingly complex detection requirements for precise optical components, various interference light paths are also manufactured into an interference measuring instrument with specific functions. In addition, the conventional polarization interference optical path also has a new application, for example, a dynamic interferometer of 4D company adopts PBS (polarization beam splitter) as a light splitting device of the Michelson interference optical path, and realizes spatial phase shift and high-speed sampling by a polarization camera to realize an anti-seismic function.
Fig. 1 shows a conventional Michelson interference optical path. In the PBS manufacturing process, two right-angle prisms are glued, only one of which is large-side coated with a polarizing splitting film. Due to the special gluing, the quality of the reflected light when the laser is incident on the non-coated prism side is disturbed by the glue layer. In addition, the difference of refractive indexes exists between the adhesive layer and the glass material of the prism, so that multi-beam interference is brought; the glue layer is much less uniform than the glass material and also causes reflective parasitic stripes of different structures. The above situations are extremely disadvantageous for improving the measurement accuracy of the interferometer, and are one of the reasons that the accuracy of the dynamic interferometer is limited to be lower than that of the conventional Fizeau interferometer. In addition, too many discrete optical elements in a Michelson interferometric structure are disadvantageous for reducing the volume of the interferometer.
Disclosure of Invention
The purpose of the invention is as follows: the invention provides a polarization Mach-Zehnder interference system with output, which enables laser beams to be only reflected inside a coated right-angle prism on a PBS (polarization beam splitter) through the arrangement of two beam splitters.
The technical scheme is as follows: the polarization Mach-Zehnder interference system with the output comprises a beam splitter and a reflecting mirror, wherein the beam splitter comprises a first beam splitter and a second beam splitter; the reflector comprises a first reflector and a second reflector; the first beam splitter and the second beam splitter are connected in series with an incident light path, and the beam splitting surface of the first beam splitter is parallel to the reflecting surface of the second beam splitter;
the first beam splitter: splitting an incident beam emitted by a light source into a measuring beam and a reference beam;
the second beam splitter: for measuring the beam output and combining the returned measuring beam with the reference beam;
the first mirror: reflecting the measuring beam split by the first beam splitter to a second reflecting mirror;
the second mirror: the reference beam from the first mirror is reflected to the second beam splitter.
The first reflecting mirror and the second reflecting mirror are positioned on one side of the beam splitter, and the first reflecting mirror and the second reflecting mirror are vertically arranged.
The beam splitter is a combined double-beam splitter, the combined double-beam splitter is of a square cylindrical structure and comprises a first prism with a parallelogram cross section and a first right-angle prism and a second right-angle prism which are arranged on two sides of the first prism;
the first prism is not coated with a film, and the large surfaces of the first right-angle prism and the second right-angle prism are coated with a polarization beam splitting film;
the first right-angle prism acts as a first beam splitter: splitting an incident beam emitted by a light source into a measuring beam and a reference beam;
the second right-angle prism acts as a second beam splitter: outputting the measuring beam and combining the returned measuring beam with the reference beam.
The reflecting mirror is a right-angle double reflector, the right-angle double reflector is a right-angle prism used for reflecting the reference light beam divided by the first right-angle prism to the second right-angle prism, and the reflecting surface of the right-angle double reflector and the incident light beam form a 45-degree angle.
A first wave plate used for changing the linear polarization direction of the light beam emitted by the light source is arranged between the incident light beam and the combined double beam splitter, and the first wave plate can rotate to adjust the light intensity contrast of the test/reference light beam and is suitable for the measurement requirements of test objects with different reflectivities.
And a second wave plate for rotating the polarization direction of the reference beam from S-polarized light to P-polarized light is arranged between the first reflecting mirror and the second reflecting mirror.
And a second wave plate for rotating the polarization direction of the output reference beam from S-polarized light to P-polarized light is arranged between the beam splitter and the right-angle double reflector.
And a third wave plate is arranged on one side of the reference beam output by the beam splitter.
The interference system of the present invention has an optional structure: the device comprises a combined double beam splitter, a first reflector, a second reflector, a first wave plate, a second wave plate and a third wave plate;
the combined double beam splitter is of a square cylindrical structure and comprises a first prism with a parallelogram cross section, and a first right-angle prism and a second right-angle prism which are arranged on two sides of the first prism, wherein the first prism is not coated with a film, and the large surfaces of the first right-angle prism and the second right-angle prism are coated with a polarization beam splitting film;
the first right-angle prism: splitting an incident beam emitted from a light source into a measuring beam of P-polarized light and a reference beam of S-polarized light by transmission/reflection;
the second right-angle prism: the first-stage measuring beam emitted by the first right-angle prism and the reference beam emitted by the reflecting mechanism are transmitted in a cross mode, and the second-stage measuring beam which is returned by the outer light path and carries the information of the measured piece is reflected;
the first and second mirrors: reflecting the reference beam split by the first beam splitter to the second beam splitter;
the first wave plate: the linear polarization direction is used for changing the linear polarization direction of the light beam emitted by the light source;
the second wave plate: rotating the polarization direction of the reference beam from S-polarized light to P-polarized light;
the third wave plate: and the combined double-beam splitter is arranged on the reference light output side and used for converting the measuring beam in the first stage into circularly polarized light to be emitted out and then converting the returned measuring beam into linearly polarized light again. The interference system of the present invention has an optional structure: the first reflector is a plane mirror, a right-angle prism or a trapezoidal prism; the second reflecting mirror is a plane mirror, a right-angle prism or a trapezoidal prism; or the first reflector and the second reflector are replaced by right-angle double reflectors which are right-angle prisms.
Has the advantages that: (1) according to the invention, the two polarization beam splitters are arranged in the directions, so that the reflection can be only carried out on the surface of the coated prism, and therefore, additional interference fringes caused by the reflection of the cementing layer are avoided, and the wave front quality of the reflected light beam is improved; (2) according to the invention, through the arrangement of the beam splitter, the measuring beam firstly transmits to enter the external light path of the interference system, and then is combined with the reference beam when returning, so that different test light paths can be constructed outside the interference system; (3) according to the invention, through the coaxial arrangement of the two polarization beam splitters, the functions that the test optical axis is not required to be adjusted on the same straight line and the axis is adjusted by the reference optical axis double reflector are realized, so that the axis-closing accuracy is improved; (4) according to the invention, the whole light splitting and beam combining system is made into a compact structure by combining the double beam splitters and the right-angle double reflectors, so that the stability of the instrument is improved; (5) the first wave plate inserted in the incident light path, the second wave plate inserted in the Mach-Zehnder light path and the third wave plate inserted in the testing light path ensure the full utilization of input light energy and the energy of the two light paths can be adjusted to test the tested pieces with different reflectivities without inserting an attenuation sheet.
Drawings
FIG. 1 is a Michelson interference optical path;
FIG. 2 is a Mach-Zehnder interference optical path;
FIG. 3 is a schematic diagram of an interference optical path structure for outputting a measuring beam to an external optical path for measuring a reflecting element;
FIG. 4 is a polarized Mach-Zehnder interference optical path with output for example 1;
FIG. 5 is a schematic diagram of a combined double beam splitter;
fig. 6 is a schematic diagram of the structure of a compact polarized Mach-Zehnder interference optical path with band output formed by a combined double beam splitter and a right-angle double reflector in example 2.
Detailed Description
The invention will be further explained with reference to the drawings.
Example 1: as shown in fig. 1, in the conventional Michelson interference structure, the two functions of splitting and combining beams solved by one Beam Splitter (BS) are one of the reasons that the accuracy of the dynamic interferometer is lower than that of the conventional Fizeau interferometer, and the background parasitic fringes are introduced.
As shown in fig. 2, the conventional Mach-Zehnder optical path structure includes two beam splitters, a first beam splitter 10 for splitting light and a second beam splitter 20 for combining light, and a first reflecting mirror 30 and a second reflecting mirror 40, but this structure has a disadvantage in that a light beam cannot be output to an outer optical path and only a transmissive member inserted in an inner optical path (between the two beam splitters) can be tested.
To solve the above-described problems, as shown in fig. 3, the Mach-Zehnder optical path structure of the general BS is replaced with two Polarization Beam Splitters (PBS), and the direction of the second beam splitter 20 is adjusted, that is, the second beam splitter of the conventional Mach-Zehnder optical path structure is rotated 90 ° clockwise, wherein the first beam splitter 10 is responsible for splitting an incident beam emitted from a light source into a measurement beam and a reference beam, and the second beam splitter 20 is responsible for combining the measurement beam output and the returned measurement beam with the reference beam, and three objects are achieved by adjusting the direction of the second beam splitter 20: firstly, the light energy is fully utilized, half of the energy loss generated when the BS is used cannot be caused, and the ratio of the test light intensity to the reference light intensity can be adjusted by rotating the first wave plate 60, so that the method is suitable for measuring the tested pieces with different reflectivities; rotating the direction of the second beam splitter to output the measuring beam to an external optical path for measuring the reflecting element; thirdly, the technical requirement that the laser beams are only reflected inside the coated right-angle prism is met, the times of passing the cementing layer by the two beams are tested and referred to be equal, and the influence of the refractive index of the cementing layer on interference light is reduced.
However, this structure has the disadvantage that the separation of the reference beam (Rb) and the measuring beam (Mb) cannot be realized, and in order to realize the separation of the optical path adjustment of the measuring beam and the reference beam, on the basis of the structure of fig. 3, the present embodiment provides the structure shown in fig. 4:
the light path from the light source (providing the incident light beam) to the external light path is located on a straight line, that is, the first beam splitter 10 and the second beam splitter 20 are connected in series in the light path, and the first beam splitter 10 is rotated clockwise by 90 °, so that the splitting surface of the first beam splitter and the reflecting surface of the second beam splitter are arranged in parallel, the reference light beam is placed in the side light path by using two mirrors (the first mirror 30 and the second mirror 40), according to the functional requirements, the reflecting surfaces of the first mirror 30 and the second mirror 40 are arranged vertically, the reflecting surfaces of the first mirror 30 and the second mirror 40 are 45 ° to the incident light beam, the first mirror 30 and the second mirror 40 fulfill the requirement of coaxial adjustment between the reference light beam and the measuring light beam returned from the external light path, and the specific structures of the first mirror and the second mirror can be a plane mirror, a right-angle prism or a trapezoidal prism.
As shown in FIG. 4, the beam splitter includes a first beam splitter 10 and a second beam splitter 20, the mirrors including a first mirror 30 and a second mirror 40, the first beam splitter 10 being disposed on a propagation path of an incident beam S emitted from the light source, the first mirror 30 being disposed on a propagation path of a reference beam Rb split by the first beam splitter 10, the measurement beam split by the first beam splitter being reflected to the second mirror 40, the second mirror 40 being disposed on a propagation path of a reflected light of the first mirror 30, a non-coated prism reflecting the reference beam from the first mirror 30 to the second beam splitter 20, the second beam splitter 20 being disposed on a propagation path of a measurement beam Mb split by the first beam splitter 10 and a propagation path of a reflected light of the second mirror 40, the measurement beam Mb being transmitted in situ through the first beam splitter, the reference beam being transmitted in situ through the first mirror and the second mirror, and the reference beam being refracted in situ through the first mirror and the second mirror, And reflecting the measuring beam returned by the outer optical path in situ.
In this embodiment, a first wave plate 60 for changing the linear polarization direction of the light beam emitted from the light source is disposed between the incident light beam and the beam splitter (first beam splitter 10), a second wave plate 70 for rotating the polarization direction of the reference light beam from S-polarized light to P-polarized light is disposed between the first reflecting mirror 30 and the second reflecting mirror 40, a third wave plate 80 is disposed on the output side of the reference light beam of the second beam splitter 20, the third wave plate 80 serves as a window of the external optical path, the measurement light beam of the first stage is converted into circularly polarized light and then the returned measurement light beam is converted into linearly polarized light again, after the two conversions, the measurement light beam is converted from the P-polarized light of the first stage into the S-polarized light of the second stage, the S-polarized light of the second stage enters from the direction of the coating prism when entering the second beam splitter, the light beam does not pass through the glue layer of the cemented prism, and after being directly reflected by the coating layer, the light beam and the reference light beam jointly irradiate the polarized imaging light path.
The method specifically comprises the following steps: an incident light beam including a P-polarization direction and an S-polarization direction is split at a splitting plane 101 of the first beam splitter 10, the incident light beam emitted from the light source is split into a measuring beam Mb (P-polarization) and a reference beam Rb (S-polarization), the intensity ratio of the measuring beam and the reference beam can be adjusted by changing the azimuth angle of the first wave plate 60, the measuring beam (P-polarization) is transmitted through the first beam splitter 10 and the second beam splitter 20, the beam passes through an 1/4 wave plate (third wave plate 80) and is converted into circularly polarized light to enter a test optical path (outer optical path) outside the interference system, the circularly polarized light beam returning from the outer optical path is converted into S-polarization again by a 1/4 wave plate (third wave plate 80) and is reflected from a reflection plane 201 of the second beam splitter 20 to enter an imaging optical path, the reference beam Rb (S-polarization) is reflected by the first beam splitter 10, reflected by the first mirror 30 and the second mirror 40, and an 1/2 wave plate (second wave plate 70) is added between the first mirror 30 and the second mirror 40 to convert the S-polarization into the P-polarization, and transmitted by the second beam splitter 20 to enter the imaging optical path, and combined with the measuring beam with the information of the measured object reflected by the reflecting surface 201 of the second beam splitter 20.
Example 2: as shown in fig. 5, in order to solve the problem of compactness of the interference system and provide high beam quality, on the basis of the structure of fig. 4, a combined double beam splitter is formed by using double-glued PBS to replace two PBS which are originally needed, in this embodiment, after the two PBS in fig. 4 are glued, a combined double beam splitter 50 (glued prism) is obtained, the combined beam splitter 50 is a cylindrical structure which is composed of a prism with a parallelogram cross section (x-y axis plane) and two right-angle prisms and has a rectangular cross section, the combined beam splitter 50 is further improved on the basis of the structure described in fig. 4, as shown in fig. 5, two sides are a first right-angle prism 501 and a second right-angle prism 502, the center is a first prism 503 with a parallelogram cross section, the first right-angle prism 501 replaces the first beam splitter 10, the second right-angle prism 502 replaces the second beam splitter 20, the beam splitting and combining functions are realized, the central parallelogram prism 503 is not coated with a film, the large surfaces of the right-angle prisms at the two sides are coated with polarization beam splitting films, and the two beam splitting surfaces/reflecting surfaces are planes arranged in parallel.
In this embodiment, the first right-angle prism 501 as the first beam splitter 10: the coated prism (first rectangular prism) in the cemented prism is an incident direction, and splits an incident beam emitted from a light source into a measuring beam of P-polarized light and a reference beam of S-polarized light by transmission/reflection, and the reflected reference beam of S-polarized light does not pass through a glue layer of the cemented prism, as a second rectangular prism 502 of the second beam splitter 20: the first-stage measuring beam from the first right-angle prism 501 (a first beam splitter) and the reference beam reflected from the second reflecting mirror are crossed and transmitted, and the second-stage measuring beam with the information of the measured object from the external optical path is reflected and output to the analyzing and imaging optical path together with the reference beam; in this embodiment, all the reflected light beams are incident in the directions of the coated right-angle prisms as the first beam splitter and the second beam splitter, and do not pass through the bonding surfaces of the two prisms.
As shown in fig. 6, in order to further improve the compactness of the whole structure, in an alternative scheme, a right-angle prism is used as a double reflector 90 to replace a first reflecting mirror and a second reflecting mirror, namely two right-angle surfaces of one right-angle prism are used, a first reflecting surface 901 replaces a first reflecting mirror 30, a second reflecting surface 902 replaces a second reflecting mirror, so that the reflecting and turning functions of the reference beam are realized.
When a right-angle prism is used as the dual reflector 90, the second waveplate 70 is disposed between the dual reflector 90 and the combining beam splitter 50 on the optical path of the reference beam output from the second reflecting surface 902.
It should be noted that the 1/2 wave plate inserted in the incident light path, the 1/4 wave plate inserted in the test light path, and the like in the present invention ensure that the input light energy is fully utilized and the energy of the two light paths can be adjusted to test the tested devices with different reflectances without inserting an attenuation plate.
It can be seen from the structure of this embodiment that, this embodiment has set up two glued beam splitters, and two glued beam splitters can guarantee to reflect only at the coated prism surface, and can not reflect at the cemented surface, therefore can restrain the gluing influence, improve measurement accuracy. The combined double beam splitter glued by the embodiment performs splitting and beam combining substantially through two Polarization Beam Splitters (PBS), and the measuring beam is led out from the beam combining prism, so that different test light paths can be constructed outside the interference system like a Fizeau or a Taemann interference structure, and the debugging of the light paths is facilitated. The embodiment further realizes the purposes of facilitating system installation and correction, improving light beam quality and realizing full internal high reflection by the schemes of independence of the reference light path, integration of the light splitting component, prism of the reflector and the like. Parts of the invention not described in detail are well known in the art.
Claims (10)
1. The polarization Mach-Zehnder interference system with the output is characterized by comprising a beam splitter and a reflecting mirror, wherein the beam splitter comprises a first beam splitter and a second beam splitter; the reflector comprises a first reflector and a second reflector; the first beam splitter and the second beam splitter are connected in series with an incident light path, and the beam splitting surface of the first beam splitter is parallel to the reflecting surface of the second beam splitter;
the first beam splitter: splitting an incident beam emitted by a light source into a measuring beam and a reference beam;
the second beam splitter: for measuring the beam output and combining the returned measuring beam with the reference beam;
the first mirror: reflecting the measuring beam split by the first beam splitter to a second reflecting mirror;
the second mirror: the reference beam from the first mirror is reflected to the second beam splitter.
2. A polarized mach-zehnder interferometer system with an output according to claim 1, characterized in that the first and second mirrors are located at the beam splitter side, the first and second mirrors being arranged at 45 ° to the incident beam.
3. The polarized mach-zehnder interferometer system with an output of claim 1, wherein the beam splitter is a combined double beam splitter, the combined double beam splitter is a square column-shaped structure and comprises a first prism with a parallelogram cross section and a first right-angle prism and a second right-angle prism which are arranged on two sides of the first prism;
the first prism is not coated with a film, and the large surfaces of the first right-angle prism and the second right-angle prism are coated with a polarization beam splitting film;
the first right-angle prism acts as a first beam splitter: splitting an incident beam emitted by a light source into a measuring beam and a reference beam;
the second right-angle prism acts as a second beam splitter: outputting the measuring beam and combining the returned measuring beam with the reference beam.
4. A polarized mach-zehnder interferometer system with an output according to claim 1, characterized in that the mirrors are right-angle double reflectors, the right-angle double reflectors being right-angle prisms for reflecting the reference beam split by the first right-angle prism to the second right-angle prism, the reflecting surfaces of the right-angle double reflectors being at 45 ° to the incident beam.
5. A polarized mach-zehnder interferometer system with an output according to claim 1, characterized in that a first wave plate for changing the linear polarization direction of the light beam emitted by the light source is arranged between the incident light beam and the beam splitter.
6. A polarized mach-zehnder interferometer system with an output according to claim 1, characterized in that a second wave plate for rotating the polarization direction of the reference beam from S-polarized light to P-polarized light is arranged between the first mirror and the second mirror.
7. A polarized Mach-Zehnder interference system with an output according to claim 4 further comprising a second wave plate disposed between the beam splitter and the right angle double reflector for rotating the polarization direction of the output reference beam from S-polarized light to P-polarized light.
8. A polarized mach-zehnder interferometer system with an output in accordance with claim 1, characterized in that a third wave plate is arranged at the side of the beam splitter reference beam output.
9. A polarization Mach-Zehnder interference system with output is characterized by comprising a combined double beam splitter, a first reflecting mirror, a second reflecting mirror, a first wave plate, a second wave plate and a third wave plate;
the combined double beam splitter is of a square cylindrical structure and comprises a first prism with a parallelogram cross section, and a first right-angle prism and a second right-angle prism which are arranged on two sides of the first prism, wherein the first prism is not coated with a film, and the large surfaces of the first right-angle prism and the second right-angle prism are coated with a polarization beam splitting film;
the first right-angle prism: splitting an incident beam emitted from a light source into a measuring beam of P-polarized light and a reference beam of S-polarized light by transmission/reflection;
the second right-angle prism: the first-stage measuring beam emitted by the first right-angle prism and the reference beam emitted by the reflecting mechanism are transmitted in a cross mode, and the second-stage measuring beam which is returned by the outer light path and carries the information of the measured piece is reflected;
the first and second mirrors: reflecting the reference beam split by the first beam splitter to the second beam splitter;
the first wave plate: the linear polarization direction is used for changing the linear polarization direction of the light beam emitted by the light source;
the second wave plate: rotating the polarization direction of the reference beam from S-polarized light to P-polarized light;
the third wave plate: and the combined double-beam splitter is arranged on the reference light output side and used for converting the measuring beam in the first stage into circularly polarized light to be emitted out and then converting the returned measuring beam into linearly polarized light again.
10. A polarized Mach-Zehnder interference system with an output in accordance with claim 9,
the first reflector is a plane mirror, a right-angle prism or a trapezoidal prism;
the second reflecting mirror is a plane mirror, a right-angle prism or a trapezoidal prism;
or the first reflector and the second reflector are replaced by right-angle double reflectors which are right-angle prisms.
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| CN202010868406.7A CN111928879B (en) | 2020-08-26 | 2020-08-26 | Polarized Mach-Zehnder interference system with output |
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