CN101774146A - Miniature non-spherical element grinding and polishing device - Google Patents

Miniature non-spherical element grinding and polishing device Download PDF

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Publication number
CN101774146A
CN101774146A CN201010105800A CN201010105800A CN101774146A CN 101774146 A CN101774146 A CN 101774146A CN 201010105800 A CN201010105800 A CN 201010105800A CN 201010105800 A CN201010105800 A CN 201010105800A CN 101774146 A CN101774146 A CN 101774146A
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Prior art keywords
millrind
cam
spherical element
grinding
spherical
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CN201010105800A
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CN101774146B (en
Inventor
梁一平
戴特力
范嗣强
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Chongqing Normal University
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Chongqing Normal University
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Abstract

The invention provides a miniature non-spherical element grinding and polishing device, aiming to solve the problem that the miniature non-spherical optical element produced by the prior art has high cost. The grinding and polishing device comprises a main motor and a plurality of cams driven by the main motor and also comprises a grinding disc rack, a grinding disc arranged on the grinding disc rack and a jig head used for clamping a non-spherical element. In an operating mode, the grinding disc contacts and grinds or polishes the non-spherical element clamped by the jig head; and the cams support the grinding disc rack, and the grinding disc rack swings following the rotation of the cams so that the grinding disc tangentially grinds or polishes the surface of the non-spherical element. The invention has simple structure, the technology for processing the optical element is simple and is easy to operate, the production cost is low, and the parameters, such as eccentricity and focus, of the non-spherical optical element are adjustable.

Description

Miniature non-spherical element grinding and burnishing device
Technical field
The present invention relates to a kind of lapping device that is used for optical element, particularly relate to a kind of grinding and burnishing device of miniature non-spherical optical element.
Background technology
The size and the focal length of the employed aspherical optical elements in field such as the beam shaping of semiconductor laser all must be very little.At present, the manufacture method of aspherical optical element mainly relies on numerically-controlled precise machine tooling and method such as hot-forming, and existing this process technology cost is very high.
Summary of the invention
Make the high problem of miniature non-spherical optical element cost in order to solve prior art, the invention provides a kind of miniature non-spherical element grinding and burnishing device, can make non-spherical element with lower cost.
Technical scheme of the present invention is as follows:
Miniature non-spherical element grinding and burnishing device, comprise main motor and main motor-driven some cams, also comprise the mill that is provided with on millrind and the millrind, the clamp head that also comprises the clamping non-spherical element, in working order down, the non-spherical element of clamping on described mill contact and grinding or the polishing clamp head; Described cam supports millrind, and millrind makes mill form tangential the grinding or polishing to the non-spherical element surface along with the rotation of cam is swung.
Described cam supports millrind by bracing frame, and bracing frame is provided with governor motion and can adjusts distance and/or bracing frame and millrind position contacting between cam and the millrind within the specific limits.
Described cam is the cam combination, promptly by the synthetic cam that supports millrind by a bracing frame of the single cam set of some coaxial rotations.
The quantity of described compound cam is 2.
Technique effect of the present invention is:
Miniature non-spherical element grinding of the present invention and burnishing device utilize camming movement to drive the mill swing, make mill to form tangential the grinding to the non-spherical element surface, and be simple in structure, with low cost.The outline of cam can be set, so that mill can form tangential the grinding to the non-spherical element surface all the time according to the surface equation of non-spherical element.
Bracing frame is set connects cam and millrind, be that cam promotes millrind and mill swing by bracing frame, on the bracing frame governor motion is set simultaneously, this governor motion can be adjusted distance and/or bracing frame and the millrind position contacting between cam and the millrind within the specific limits, this adjustment can adapt to the non-spherical element that grinds different curve on the one hand, also can compensate structure such as cam on the other hand because the deviation that wearing and tearing cause, to keep the precision of miniature non-spherical element grinding and burnishing device.
The cam of apparatus of the present invention is arranged to the cam combination, can forms complicated compound cam profile, cost is low; Can adjust the phase angle between the single cam on the other hand, thereby change cam contour, it is similar to process profile, has the non-spherical element of different parameters (as focal length) again.
The combination of two cams forms millrind and supports, can be in 180 ° scope the attrition process non-spherical element, can satisfy the processing request of most of non-spherical elements.
Description of drawings
Fig. 1 miniature non-spherical element grinding and burnishing device structural representation,
Fig. 2 bracing frame partial structurtes schematic diagram,
The plan structure figure of Fig. 3 Fig. 2,
Fig. 4 millrind pole and millrind assembling back structure chart,
Millrind vertical view among Fig. 5 Fig. 1,
Fig. 6 cam combination structural representation,
The right view of Fig. 7 Fig. 6 cam combination.
Describe as follows to sign among above-mentioned each figure:
The 1-cantilever, the rotating shaft of 2-anchor clamps, 3-clamp motor, 4-lifting tube, the 5-adjusting gear, 6-clamp head, 7-alignment pin, 8-millrind pole, the 81-guide post, 82-lifting screw, 9-adjusting nut, 10-support frame, the 11-rotating shaft, the combination of 12-cam, 13-master's motor, 14-push rod, the 15-spring, 16-spring socket sleeve, 17-width adjusting bar, 18-millrind, the 19-chute, 20-mill motor, 21-mill.
The specific embodiment
Below in conjunction with accompanying drawing technical scheme of the present invention is elaborated.
Fig. 1 has shown the structure of miniature non-spherical element grinding of the present invention and burnishing device, comprises support frame (10) and is arranged at cantilever (1) on the support frame (10).Clamp head moving up and down (6) is set on the cantilever (1), clamp head (6) is used for clamping non-spherical element to be processed, clamp head (6) is connected with anchor clamps rotating shaft (2), in driving lower clamp rotating shaft (2) rotation of clamp motor (3), thereby drives clamp head (6) rotation.Anchor clamps rotating shaft (2) is arranged in the lifting tube (4), and the engagement of tooth bar and adjusting gear (5) is set outside the lifting tube (4), and adjusting gear (5) rotates and can make clamp head (6) move up and down in vertical direction.Regulate the rotating shaft (11) that in the support frame (10) main motor (13) is set and transmits main motor (13) power.Two cam combinations (12) (action of cam is played in cam combination in the present invention in fact, and concrete structure and effect describe in detail in the back) are set in the rotating shaft (11), have certain spacing distance between two cam combinations (12).The bracing frame that cooperates with each cam combination (12) supports millrind (18), the mill (21) that mill motor (20) is set on the millrind (18) and is driven by mill motor (20).
The course of work to miniature non-spherical element grinding of the present invention shown in Figure 1 and burnishing device briefly explains.Clamp head (6) will be processed the optical element blank of polishing and be fixed, clamp head (6) moves to suitable position (guarantee mill (21) can grind or the position of polishing of optical spare blank) in vertical direction, main motor (13) thus rotate driving cam combination (12) rotates, and then make millrind (18) swing, millrind (18) promptly begins to grind or polishing process after swinging to appropriate location (guarantee mill (21) can tangentially grind or the position of polishing of optical spare blank), if grinding or polishing is the rotation non-spherical element with a symmetry axis, then start clamp motor (3), make clamp head (6) rotate; If grinding or polishing is the non-face of cylinder element with a symmetrical plane, then do not start clamp motor (3), clamp head (6) is not rotated.Change mill (21) and abrasive material, can implement operations such as corase grind, fine grinding, correct grinding and polishing.
Below in conjunction with accompanying drawing critical component in miniature non-spherical element grinding of the present invention and the burnishing device is described.
The less use of situation that cam combination (12) directly contacts with millrind (18), generally speaking, cam combination (12) all is by bracing frame millrind (18) to be supported.As can be seen from Fig. 1, bracing frame comprises push rod (14), width adjusting bar (17) and the millrind pole (8) that is linked in sequence.Push rod (14) contacts with cam combination (12), and push rod (14) is along with the rotation of cam combination (12) moves up and down.The spring (15) that also is provided with spring socket sleeve (16) on the push rod (14) and cooperates with it, the elastic force of spring (15) makes push rod (14) closely to contact with cam combination (12) all the time, to guarantee that push rod (14) is all the time along with the profile of cam combination (12) moves, avoid because factors such as inertia cause the motion of push rod (14) and the formed theory movement of profile of cam combination (12) to produce deviation, thereby cause millrind (18) motion that deviation takes place.
The effect of width adjusting bar (17) is the distance of regulating between millrind pole (8) and the push rod (14), can clearly see width adjusting bar (17) structure in conjunction with Fig. 2 and Fig. 3.Width adjusting bar (17) one ends are to have the screw rod of regulating screw thread, and this screw rod cooperates so that width adjusting bar (17) moves on the horizontal direction of Fig. 1 with the nut that push rod (14) is gone up setting.The other end of width adjusting bar (17) is provided with adjusting nut (9), and adjusting nut (9) cooperates with lifting screw (82) on the millrind pole (8), so that lifting screw (82) (being millrind pole (8)) moves in the vertical direction of Fig. 1.From angle shown in Figure 3, one end of width adjusting bar (17) (being provided with an end of adjusting nut (9)) has the shape of similar the shank of the key, except that the middle lifting screw (82) that passes, also have two guide posts that pass (81), the effect of guide post (81) is to make the motion of millrind (18) more stable.
Fig. 4 has shown the structure of millrind pole (8) from another angle, and the confined state of millrind pole (8) and millrind (18).The below of millrind pole (8) is parallel two guide posts (81) and lifting screw (82), the top of millrind pole (8) is a U type structure, both sides are provided with alignment pin (7) in the U type mouth, slide in the chute (19) of two alignment pins (7) on millrind (18).As can be seen, the distance between width adjusting bar (17) adjusting millrind pole (8) and the push rod (14) is to realize by promoting to slide in the chute (19) of millrind pole (8) on millrind (18).
Can obtain the structure of millrind (18) in conjunction with Fig. 1 and Fig. 5, the motor shaft of millrind (18) central hole is connected the mill (21) of millrind (18) top and the mill motor (20) of below, and mill motor (20) drives mill (21) rotation stably in circular groove.In the chute (19) of four " recessed " fonts of millrind (18) two sides, alignment pin (7) can slide in chute (19).
Illustrate that in conjunction with Fig. 6 and Fig. 7 cam of the present invention makes up the structure of (12), cam combination (12) is combined by the single cam of two coaxial rotations, as shown in Figure 7.A cam combination (12) is supported millrind by a bracing frame, two cam combinations (12) about promptly having among Fig. 1, and a push rod (14) is supported in each cam combination (12).The profile of cam combination (12) or described single cam is determined according to the surface configuration of the non-spherical element that will process, owing to require mill (21) that non-spherical element is tangentially ground during the processing non-spherical element, therefore under the situation of known non-spherical element finished surface equation, the movement locus of millrind (18) can be derived, thereby the curvilinear equation of the profile of cam combination (12) or described single cam can be determined.As can be seen from Fig. 6, the phase difference of two described single cams is θ, can accurately regulate on dividing head.Regulate the contour curve that two described single cam phase difference θ can adjust cam combination (12) on the whole, can obtain the aspherical optical element (as the focal length difference) that profile is similar, have different parameters by a pair of described single cam combination like this.In addition, from cam contour design and processing, the cost of cam combination is lower.
Width adjusting bar (17) can be regulated the distance between millrind pole (8) and the push rod (14) among the present invention, millrind pole (8) can be moved in vertical direction, given millrind (18) adjusting range very flexibly, this adjustment is except tackling the non-spherical element of multiple parameter, can also when appearring in device of the present invention, wear error compensate, as occurring wear behind cam combination (12) the work certain hour, can compensate by this adjustment.

Claims (4)

1. miniature non-spherical element grinding and burnishing device, it is characterized in that comprising main motor and main motor-driven some cams, also comprise the mill that is provided with on millrind and the millrind, the clamp head that also comprises the clamping non-spherical element, in working order down, the non-spherical element of clamping on described mill contact and grinding or the polishing clamp head; Described cam supports millrind, and millrind makes mill form tangential the grinding or polishing to the non-spherical element surface along with the rotation of cam is swung.
2. according to described miniature non-spherical element grinding of claim 1 and burnishing device, it is characterized in that described cam supports millrind by bracing frame, and bracing frame is provided with governor motion and can adjusts distance and/or bracing frame and millrind position contacting between cam and the millrind within the specific limits.
3. according to described miniature non-spherical element grinding of claim 2 and burnishing device, it is characterized in that described cam is the cam combination, promptly by the synthetic cam that supports millrind by a bracing frame of the single cam set of some coaxial rotations.
4. according to described miniature non-spherical element grinding of claim 3 and burnishing device, the quantity that it is characterized in that described compound cam is 2.
CN2010101058001A 2010-02-04 2010-02-04 Miniature non-spherical element grinding and polishing device Expired - Fee Related CN101774146B (en)

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Cited By (15)

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CN102371519A (en) * 2011-09-19 2012-03-14 重庆师范大学 Micro aspheric element grinding or polishing tracking machining method
CN103317433A (en) * 2013-05-27 2013-09-25 宁波大学 Aspheric surface polishing tool capable of self-adaptively balancing polishing stress
CN103454134A (en) * 2013-09-18 2013-12-18 核工业理化工程研究院 Sample polishing subsidiary harness adopting gear and rack
WO2017008753A1 (en) * 2015-07-15 2017-01-19 睿励科学仪器(上海)有限公司 Grinding machine
CN107756233A (en) * 2017-11-10 2018-03-06 唐山万士和电子有限公司 Lapping device for quartz crystal production and processing
CN108032210A (en) * 2017-12-22 2018-05-15 朱江帆 A kind of new automatic semi-conducting material milling apparatus
CN108032209A (en) * 2017-12-22 2018-05-15 朱江帆 A kind of full-automatic semi-conducting material milling apparatus
CN108296931A (en) * 2018-02-02 2018-07-20 成都精密光学工程研究中心 A kind of nutation type plane polishing device of belt wear compensation
CN108406571A (en) * 2017-12-22 2018-08-17 朱玉林 A kind of follow-on semi-conducting material milling apparatus
CN109048555A (en) * 2018-10-08 2018-12-21 莆田市晟熠光电科技有限公司 A kind of spherical surface milling apparatus and its grinding method for self-focusing lens processing
CN109940478A (en) * 2019-03-05 2019-06-28 重庆两江联创电子有限公司 A kind of polishing jig and polishing method
CN110385639A (en) * 2019-08-19 2019-10-29 银川英奥特自控股份有限公司 Full-automatic valve grinding machine
CN113732891A (en) * 2021-08-09 2021-12-03 王迪雅 Arc convex surface processing control adjustment mechanism
CN114986363A (en) * 2022-08-05 2022-09-02 徐州汉裕铝业股份有限公司 Aluminum product bulb burnishing device
CN117260514A (en) * 2023-11-22 2023-12-22 北京特思迪半导体设备有限公司 Accurate control method of eccentric driving mechanism

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JPH0659613B2 (en) * 1988-10-20 1994-08-10 オリンパス光学工業株式会社 Grinding and polishing device and grinding and polishing method
DE19846260A1 (en) * 1998-10-07 2000-04-13 Schneider Gmbh & Co Kg Device for grinding and polishing optical lenses connects to a cast metal machine frame with feeder channels for heating and cooling agents while operating slides for grinding tools
JP2007253280A (en) * 2006-03-23 2007-10-04 Haruchika Seimitsu:Kk Grinding method for optical spherical lens
CN100519072C (en) * 2007-12-20 2009-07-29 中国科学院长春光学精密机械与物理研究所 Off-axis aspheric surface optical cold machining tool

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CN102371519A (en) * 2011-09-19 2012-03-14 重庆师范大学 Micro aspheric element grinding or polishing tracking machining method
CN102371519B (en) * 2011-09-19 2014-06-04 重庆师范大学 Micro aspheric element grinding or polishing tracking machining method
CN103317433A (en) * 2013-05-27 2013-09-25 宁波大学 Aspheric surface polishing tool capable of self-adaptively balancing polishing stress
CN103317433B (en) * 2013-05-27 2015-07-08 宁波大学 Aspheric surface polishing tool capable of self-adaptively balancing polishing stress
CN103454134A (en) * 2013-09-18 2013-12-18 核工业理化工程研究院 Sample polishing subsidiary harness adopting gear and rack
CN103454134B (en) * 2013-09-18 2016-04-20 核工业理化工程研究院 The sample polishing of rack-and-pinion is adopted to assist harness
WO2017008753A1 (en) * 2015-07-15 2017-01-19 睿励科学仪器(上海)有限公司 Grinding machine
CN107756233A (en) * 2017-11-10 2018-03-06 唐山万士和电子有限公司 Lapping device for quartz crystal production and processing
CN107756233B (en) * 2017-11-10 2023-10-13 唐山万士和电子有限公司 Grinding device for quartz crystal oscillator wafer production and processing
CN108032210A (en) * 2017-12-22 2018-05-15 朱江帆 A kind of new automatic semi-conducting material milling apparatus
CN108032209A (en) * 2017-12-22 2018-05-15 朱江帆 A kind of full-automatic semi-conducting material milling apparatus
CN108406571B (en) * 2017-12-22 2019-01-18 扬州京柏自动化科技有限公司 A kind of follow-on semiconductor material milling apparatus
CN108406571A (en) * 2017-12-22 2018-08-17 朱玉林 A kind of follow-on semi-conducting material milling apparatus
CN108032210B (en) * 2017-12-22 2018-12-04 遵化市大明矿山机械有限公司 A kind of full-automatic semiconductor material milling apparatus
CN108296931A (en) * 2018-02-02 2018-07-20 成都精密光学工程研究中心 A kind of nutation type plane polishing device of belt wear compensation
CN109048555A (en) * 2018-10-08 2018-12-21 莆田市晟熠光电科技有限公司 A kind of spherical surface milling apparatus and its grinding method for self-focusing lens processing
CN109940478A (en) * 2019-03-05 2019-06-28 重庆两江联创电子有限公司 A kind of polishing jig and polishing method
CN110385639A (en) * 2019-08-19 2019-10-29 银川英奥特自控股份有限公司 Full-automatic valve grinding machine
CN113732891A (en) * 2021-08-09 2021-12-03 王迪雅 Arc convex surface processing control adjustment mechanism
CN113732891B (en) * 2021-08-09 2022-08-16 成都润驰精密电子有限公司 Arc convex surface processing control adjustment mechanism
CN114986363A (en) * 2022-08-05 2022-09-02 徐州汉裕铝业股份有限公司 Aluminum product bulb burnishing device
CN117260514A (en) * 2023-11-22 2023-12-22 北京特思迪半导体设备有限公司 Accurate control method of eccentric driving mechanism
CN117260514B (en) * 2023-11-22 2024-02-09 北京特思迪半导体设备有限公司 Accurate control method of eccentric driving mechanism

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