CN107756233B - Grinding device for quartz crystal oscillator wafer production and processing - Google Patents

Grinding device for quartz crystal oscillator wafer production and processing Download PDF

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Publication number
CN107756233B
CN107756233B CN201711106970.XA CN201711106970A CN107756233B CN 107756233 B CN107756233 B CN 107756233B CN 201711106970 A CN201711106970 A CN 201711106970A CN 107756233 B CN107756233 B CN 107756233B
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grinding
mechanical arm
fastening
rod
push rod
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CN107756233A (en
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王丽娟
卢春田
李剑
常丽敏
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Tangshan Wanshihe Electronic Co ltd
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Tangshan Wanshihe Electronic Co ltd
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    • BPERFORMING OPERATIONS; TRANSPORTING
    • B24GRINDING; POLISHING
    • B24BMACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B37/00Lapping machines or devices; Accessories
    • B24B37/11Lapping tools
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B24GRINDING; POLISHING
    • B24BMACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B37/00Lapping machines or devices; Accessories
    • B24B37/27Work carriers
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B24GRINDING; POLISHING
    • B24BMACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B37/00Lapping machines or devices; Accessories
    • B24B37/34Accessories

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
  • Grinding And Polishing Of Tertiary Curved Surfaces And Surfaces With Complex Shapes (AREA)
  • Grinding Of Cylindrical And Plane Surfaces (AREA)

Abstract

The invention discloses a grinding device for quartz crystal wafer production and processing, which comprises a workbench, a mechanical arm transmission mechanism, a grinding mechanism and a grinding driving motor, wherein the grinding mechanism is driven by the grinding driving motor, the mechanical arm is positioned above the grinding mechanism, one end of the mechanical arm is connected with the mechanical arm transmission mechanism, the mechanical arm transmission mechanism comprises a rotary disc, a linear guide rail pair, a transmission rod, a support column and a first motor, the first motor is fixedly connected to the bottom of the workbench, the rotary disc is positioned above the first motor, the output end of the first motor is connected with the center of the bottom of the rotary disc, a mandrel is arranged on the upper side of the rotary disc, the mandrel is movably connected with a sliding block of the linear guide rail pair, the top of a sliding rail of the linear guide rail pair is fixedly connected with one end of the transmission rod, the other end of the transmission rod is connected with the mechanical arm, the bottom end of the middle part of the transmission rod is movably connected with the top of the support column, and the bottom of the support column is fixedly connected to the workbench. The invention has the advantages of low energy consumption, simple structure, improvement of the precision of the device and adjustment of the grinding track of the workpiece.

Description

Grinding device for quartz crystal oscillator wafer production and processing
Technical Field
The invention relates to the technical field of grinding equipment, in particular to a grinding device for producing and processing a quartz crystal oscillator piece in a flat convex shape.
Background
The grinding device is a common device in the current machining, and the invention is mainly aimed at the grinding device of the flat convex quartz crystal oscillator plate. At present, a grinding device for producing and processing a flat convex quartz crystal wafer is a shaft lens grinding machine and comprises a mechanical arm driving mechanism, a mechanical arm, a grinding disc and a grinding disc driving mechanism, a workpiece to be ground is pressed on the grinding disc with a concave spherical grinding surface through the mechanical arm, the workpiece to be ground is driven to grind on the rotating grinding disc by the reciprocating swing of the mechanical arm, and the mechanical arm driving mechanism and the grinding disc driving mechanism are driven by a high-power motor through a reducing belt wheel in a variable speed manner, so that the energy consumption is extremely high.
Because one motor drives the grinding disc and the mechanical arm to move at the same time, the rotating speed of the grinding disc and the reciprocating swing speed of the mechanical arm are constant after the grinding disc and the mechanical arm are started, the grinding disc and the mechanical arm cannot be independently regulated in speed, and in the case, the wafer is subjected to primary grinding, the edge is sharper, the edge is broken and the mouth is broken easily due to the higher disc speed and the sliding speed of the mechanical arm, or the wafer is separated from the mechanical arm wafer placing disc due to overlarge friction force between the primary grinding wafer and the disc surface, so that the wafer cannot be normally operated.
Moreover, the traditional grinding device has single shafts or multiple shafts, most of the parts of the device are cast iron workpieces, the occupied area of the device is large, most of the transmission among heavy parts is sliding friction, so that the parts are seriously worn, the precision of the device is reduced, the qualification rate of products is reduced, the debugging is inconvenient, the maintenance amount is large, and the production efficiency is influenced.
During the grinding movement, the grinding disc is worn with the increase of the grinding quantity, and is continuously deformed in the direction which is unfavorable for the product quality requirement, the relative positions of the grinding disc and the mechanical arm of the traditional grinding machine are fixed, so that the grinding track is constant, and the wear degree of the grinding disc is increased. When the deformation is serious, the grinding disc needs to be repaired and corrected, the grinding disc needs to be detached from the device for repair during the repair and correction, the time and the labor are wasted, and the repaired grinding disc is difficult to ensure consistency.
Disclosure of Invention
In order to solve the technical problems, the invention provides the grinding device for the production and processing of the quartz crystal oscillator wafer, which has the advantages of low energy consumption and simple structure, changes the sliding friction of a transmission mechanism into rolling friction, reduces the abrasion among parts and improves the precision of the device.
The following technical scheme of the invention:
the grinding device for quartz crystal vibration sheet production and processing comprises a workbench, a mechanical arm transmission mechanism, a grinding mechanism and a grinding driving motor, wherein the grinding mechanism comprises a rotary grinding disc, and a workpiece to be ground is placed on the grinding disc for grinding; the mechanical arm transmission mechanism and the grinding driving motor are fixedly connected to the workbench, and the grinding driving motor drives the grinding mechanism to perform rotary motion; the mechanical arm is positioned above the grinding mechanism, the mechanical arm comprises a push rod, the push rod is used for pressing and holding a workpiece to be ground, and one end of the mechanical arm is connected with the mechanical arm transmission mechanism; the mechanical arm transmission mechanism comprises a rotary disc, a linear guide rail pair, a transmission rod, a support column and a first motor, wherein the first motor is fixedly connected to the bottom of the workbench, the rotary disc is driven by the first motor to rotate, a mandrel is arranged on the rotary disc, the top of the mandrel supports a sliding block of the linear guide rail pair, and the sliding block rotates on the mandrel; the slide rail rigid coupling of linear guide pair is in the below right-hand member of transfer line, and the arm is connected to the transfer line left end, and the left end rotary support of transfer line is at the top of pillar, and the bottom of pillar is fixed on the workstation.
According to the grinding device for quartz crystal vibration sheet production and processing, the amplitude modulation mechanism is arranged between the rotary disc and the mandrel, the amplitude modulation mechanism comprises the amplitude modulation screw rod, the limiting nut and the mandrel base, the mandrel base is arranged on the upper portion of the mandrel, and the mandrel base is in threaded connection with the amplitude modulation screw rod; the rotary disc is provided with a first fixing piece and a second fixing piece, and two ends of the amplitude modulation lead screw are fixed on the rotary disc through the first fixing piece and the second fixing piece; one end of the amplitude modulation screw rod is provided with an amplitude modulation screw cap, and the amplitude modulation screw rod is fastened by a limit nut after being regulated.
Above-mentioned grinder for quartz crystal wafer production and processing, grinding mechanism still includes tubular casing and grinding disc eccentric mechanism, and the top of grinding disc is concave sphere, casing open-top, and the grinding disc is located the casing top, the grinding disc bottom passes through grinding disc eccentric mechanism with the casing and is connected, and the height of grinding disc eccentric mechanism is slightly greater than the inside degree of depth of casing, grinding mechanism bottom is connected through rotation axis and grinding driving motor.
Above-mentioned grinder for quartz crystal wafer production and processing, grinding disk eccentric mechanism includes adjusting column and lower pillar, adjusting column top and grinding disk bottom fixed connection, and adjusting column passes through the bolt fastening in the upper portion of lower pillar, lower pillar passes through the bolt fastening on the casing lateral wall.
Above-mentioned grinder for quartz crystal wafer production and processing is equipped with the gasket between grinding disc and casing, the gasket be with casing top assorted annular split structure, the shape of gasket is two semi-rings, the longitudinal section of gasket is the wedge, the gasket bottom is equipped with annular limit flange.
According to the grinding device for quartz crystal vibration plate production and processing, the annular groove is additionally formed in the inner side of the bottom edge of the shell, and the outer edge of the annular groove is tangent to the outer edge of the bottom edge of the grinding mechanism.
The grinding device for quartz crystal oscillator wafer production and processing comprises the mechanical arm, wherein the mechanical arm comprises the upper swing rod, the lower swing rod, the clamping bolt and the ejector rod, the right end of the lower swing rod is connected with the mechanical arm transmission mechanism, the right part of the upper swing rod and the left part of the lower swing rod are respectively provided with the long grooves, the clamping bolt respectively penetrates through the long grooves to connect the upper swing rod with the lower swing rod, the left end of the upper swing rod is provided with the ejector rod fastening mechanism, the ejector rod is connected to the ejector rod fastening mechanism, the two ends of the ejector rod are needle-shaped, and the two ends of the ejector rod are fixedly connected with spherical metal bodies.
The ejector rod fastening mechanism comprises a fastening block, a connecting shaft and an adjusting bolt; the right end of the fastening block is provided with a through hole, two semi-annular long grooves are arranged around the through hole, the connecting shaft penetrates through the through hole on the fastening block and movably connects the fastening block with the left end of the upper swing rod, and the adjusting bolt penetrates through the semi-annular long grooves and is connected with the upper swing rod; the left end of the fastening block is longitudinally provided with a push rod fixing hole, the diameter of the push rod fixing hole is slightly larger than that of the push rod, the push rod is inserted into the push rod fixing hole, the left side wall of the fastening block is provided with a fastening hole, the fastening hole is perpendicular to and communicated with the push rod fixing hole, the inner wall of the fastening hole is provided with an internal thread, the internal thread is matched with the external thread of the fastening bolt, the length of the fastening bolt is larger than the depth of the fastening hole, and the fastening bolt is positioned in the fastening hole and is abutted against the push rod.
Above-mentioned grinder for quartz crystal wafer production and processing adds the adsorption block, the adsorption block is cylindrical slice, and adsorption block top center is equipped with spacing hole, and spacing hole is the blind hole, and the adsorption block bottom adsorbs the work piece that needs to grind, and the globular metal body of ejector pin bottom supports to press in the spacing hole of adsorption block, presses the adsorption block on the abrasive disc.
Above-mentioned grinder for quartz crystal wafer production and processing, first motor and grinding driving motor are Variable Frequency Speed Governing (VFSG) motor, and first motor output is connected through two sets of aligning bearings with the gyratory disk.
Compared with the prior art, the linear guide rail pair is adopted to replace the traditional cast iron mechanical arm transmission mechanism, the friction in the transmission mechanism replaces the original sliding friction by rolling friction, the abrasion between parts is reduced, the precision of the device is improved, and the qualification rate of products is improved; in addition, the invention also provides an amplitude modulation mechanism which can adjust the swing amplitude of the mechanical arm so as to be suitable for grinding conditions required by different products. The invention changes one high-power motor into two low-power motors to directly drive, thereby changing the traditional transmission mechanism and reducing the energy consumption. The invention can also achieve the purpose of adjusting the grinding track of the workpiece by adjusting the angle of the grinding disc and the angle or the length of the mechanical arm, thereby improving the consistency of finished products, prolonging the service life of the grinding disc and reducing the frequency of maintaining and correcting the grinding disc.
Drawings
FIG. 1 is a schematic diagram of the structure of the present invention;
FIG. 2 is a top view of the amplitude modulation mechanism of the present invention;
FIG. 3 is a top view of the mechanical arm drive mechanism;
FIG. 4 is a schematic view of the operating state of the mechanical arm transmission mechanism;
FIG. 5 is a schematic view showing the structure of the grinding disc of the grinding mechanism in a horizontal state;
FIGS. 6 and 7 are schematic views of the abrasive disk in the left and right extreme operating positions, respectively;
FIG. 8 (a) is a top view of a gasket; FIG. 8 (b) is a side view of a gasket;
FIG. 9 is a schematic view of a mechanical arm;
FIG. 10 is a top view of a robotic arm;
FIG. 11 (a) is a top view of an absorbent sheet; fig. 11 (b) is a schematic view of the operation state of the adsorption sheet.
The marks in the drawings are respectively expressed as:
1. a work table; 2. a mechanical arm; 2-2, an upper swing rod; 2-3, lower swing rod; 2-4, clamping bolts; 2-5, a mandril; 2-6, a mandril fastening mechanism; 2-61, fastening blocks; 2-62, fastening bolts; 2-63, fastening holes; 2-64, ejector rod fixing holes; 2-65, connecting shaft; 2-66, adjusting bolts; 2-67, semi-annular long grooves; 2-10, adsorbing the block; 2-11, limiting holes; 2-12, long grooves; 3. a mechanical arm transmission mechanism; 3-1, a rotary disc; 3-2, a linear guide rail pair; 3-21, sliding blocks; 3-22, sliding rails; 3-5, a transmission rod; 3-6, supporting columns; 3-7, an amplitude modulation mechanism; 3-8, amplitude modulation of a screw rod; 3-9, amplitude modulation screw cap; 3-10, a mandrel base; 3-11, an operation groove; 3-12, a first fixing piece; 3-13, a second fixing piece; 3-14, a first motor; 3-15, limiting nuts; 3-16, a mandrel; 4. a grinding mechanism; 4-1, rotating shaft; 4-2, grinding disc; 4-4, an annular groove; 4-5, a shell; 4-6, an eccentric mechanism of the grinding disc; 4-7, adjusting the column; 4-8, lower support posts; 4-10, a gasket; 4-11, limiting flanges; 5. and (3) grinding the driving motor.
Detailed Description
The following describes in further detail the embodiments of the present invention with reference to the drawings and examples. These examples are only for illustrating the present invention and are not intended to limit other embodiments of the present invention.
As shown in fig. 1, 3 and 4, the invention comprises a workbench 1, a mechanical arm 2, a mechanical arm transmission mechanism 3, a grinding mechanism 4 and a grinding driving motor 5, wherein the grinding mechanism 4 comprises a rotary grinding disc 4-2, and a workpiece to be ground is placed on the grinding disc 4-2 for grinding; the mechanical arm transmission mechanism 3 and the grinding driving motor 5 are fixedly connected to the workbench 1, and the grinding driving motor 5 drives the grinding mechanism 4 to perform rotary motion; the mechanical arm 2 is positioned above the grinding mechanism 4, the mechanical arm 2 comprises a push rod 2-5, the push rod 2-5 is used for pressing and holding a ground workpiece, one end of the mechanical arm 2 is connected with the mechanical arm transmission mechanism 3, and as the bearing seat of the first motor and the grinding driving motor is connected with the workbench, the neutrality is poor, and in order to ensure the coaxiality of the connection, two sets of aligning bearings are adopted for connection.
As shown in FIG. 1, a mechanical arm transmission mechanism 3 comprises a rotary disc 3-1, a linear guide rail pair 3-2, a transmission rod 3-5, a support column 3-6 and a first motor 3-14, wherein the first motor 3-14 is fixedly connected to the bottom of a workbench 1, the rotary disc 3-1 is driven to rotate by the first motor 3-14, a mandrel 3-16 is arranged on the rotary disc 3-1, the top of the mandrel 3-16 supports a sliding block 3-21 of the linear guide rail pair 3-2, and the sliding block 3-21 rotates on the mandrel 3-16; the slide rail 3-22 of the linear guide rail pair 3-2 is fixedly connected to the right end below the transmission rod 3-5, the left end of the transmission rod 3-5 is connected with the mechanical arm 2, the left end of the transmission rod 3-5 is rotatably supported at the top of the support column 3-6, and the bottom of the support column 3-6 is fixed on the workbench 1. By means of the arrangement, sliding friction among parts in the device is reduced due to the application of the linear guide rail pair, so that abrasion of the device is reduced, the qualification rate of finished products is improved, and the service life of the device is prolonged.
As shown in fig. 2, 3 and 4, in order to realize the adjustment of the swing amplitude of the mechanical part according to actual needs, an amplitude modulation mechanism is arranged between the rotary disc 3-1 and the mandrel 3-16, the amplitude modulation mechanism 3-7 comprises an amplitude modulation lead screw 3-8, a limit nut 3-15 and a mandrel base 3-10, the upper part of which is provided with the mandrel 3-16, the mandrel base 3-10 is in threaded connection with the amplitude modulation lead screw 3-8, a first fixing piece 3-12 and a second fixing piece 3-13 are arranged on the rotary disc, and two ends of the amplitude modulation lead screw 3-8 are fixed on the rotary disc through the first fixing piece 3-12 and the second fixing piece 3-13; one end of the amplitude modulation screw rod 3-8 is provided with an amplitude modulation screw cap 3-9, and the amplitude modulation screw rod 3-8 is fastened by a limit nut after being regulated. The amplitude modulation screw cap is rotated, so that the amplitude modulation screw cap is rotated, the mandrel base can move back and forth on the amplitude modulation screw cap, the position of the sliding block is changed, the swing amplitude of the transmission rod is changed when the rotary disc rotates, and finally the swing amplitude of the mechanical arm connected with the transmission rod is changed.
As shown in fig. 5 to 7, the grinding mechanism 4 comprises a grinding disc 4-2 with a concave spherical surface at the top, a cylindrical shell 4-5 and a grinding disc eccentric mechanism 4-6, wherein the top of the shell 4-5 is provided with an opening, the grinding disc 4-2 is positioned at the top of the shell 4-5, the bottom of the grinding disc 4-2 is connected with the shell 4-5 through the grinding disc eccentric mechanism 4-6, the height of the grinding disc eccentric mechanism 4-6 is slightly larger than the depth inside the shell 4-5, and the bottom of the grinding mechanism 4 is connected with the grinding driving motor 5 through a rotating shaft 4-1.
The grinding disc eccentric mechanism 4-6 comprises an adjusting column 4-7 and a lower support column 4-8, wherein the top of the adjusting column 4-7 is fixedly connected with the bottom of the grinding disc 4-2, the adjusting column 4-7 is fixed on the upper part of the lower support column 4-8 through bolts, and the lower support column 4-8 is fixed on the side wall of the shell 4-5 through bolts. In one use period of the grinding disc, the grinding disc is firstly set to be in a horizontal state, after grinding for a period of time, the lower support post is detached from the side wall of the shell, the bolt at the joint of the adjusting post and the lower support post is rotated, the angle of the adjusting post and the lower support post is adjusted to enable the grinding disc to incline to one side, then the grinding mechanism is assembled for grinding, so that the rotating circle center in the grinding process is offset, finally, the track formed by a grinding workpiece on the grinding disc is staggered with the grinding track when the grinding disc is in the horizontal state, after grinding for a period of time, the grinding disc is inclined to the other side through adjusting the angle of the adjusting post and the lower support post, and new grinding track is generated, so that superposition of the grinding track is reduced, influence of local abrasion on product parameters is reduced, and the use period of the single grinding disc is prolonged.
In order to prevent the adjusted grinding disc 4-2 from generating slight dislocation in the working process, reduce errors and ensure the precision of the device, a gasket 4-10 is additionally arranged between the adjusted grinding disc 4-2 and the top of the shell 4-5, as shown in fig. 8, an annular limiting flange 4-11 is arranged at the bottom of the gasket 4-10, parameters of the limiting flange 4-11 are matched with parameters of the top edge of the shell 4-5, the limiting flange 4-11 is covered on the top of the shell 4-5, the gasket 4-10 is of an annular structure matched with the top of the shell 4-5, the gasket 4-10 consists of two semi-annular gaskets 4-10, and the longitudinal cross section of the gasket 4-10 is wedge-shaped.
As shown in fig. 9 and 10, when the center of rotation of the grinding disc 4-2 is offset, the length of a proper mechanical arm 2 is adjusted, the mechanical arm 2 is provided with an upper swing rod 2-2, a lower swing rod 2-3, a plurality of clamping bolts 2-4 and a push rod 2-5, the right end of the lower swing rod 2-3 is connected with a mechanical arm transmission mechanism, the right part of the upper swing rod 2-2 and the left part of the lower swing rod 2-3 are respectively provided with a long groove 2-12, the clamping bolts 2-4 respectively penetrate through two ends of the long groove 2-12 to connect the upper swing rod 2-2 with the lower swing rod 2-3, the left end of the upper swing rod is provided with a push rod fastening mechanism 2-6, the push rod 2-5 is detachably connected to the push rod fastening mechanism 2-6, two ends of the push rod 2-5 are needle-shaped, the two ends of the push rod are fixedly provided with spherical metal bodies, the left and right positions of the upper swing rod are adjusted by loosening the clamping bolts, and then the clamping bolts are screwed up, and the length of the mechanical arm can be adjusted.
When the rotating circle center of the grinding disc 4-2 is deviated, the optimal ejector rod inclination angle is required to be adjusted to match the deviated grinding disc, and the ejector rod fastening mechanism 2-6 is provided with a fastening block 2-61, a connecting shaft 2-65 and an adjusting bolt 2-66; the right end of the fastening block 2-61 is provided with a through hole, two semi-annular long grooves 2-67 are arranged around the through hole, the connecting shaft 2-65 penetrates through the through hole on the fastening block, the fastening block 2-61 is movably connected with the left end of the upper swing rod 2-2, and the adjusting bolt 2-66 penetrates through the semi-annular long grooves 2-67 to be connected with the upper swing rod 2-2; the left end of the fastening block 2-61 is longitudinally provided with a mandril fixing hole 2-64, the diameter of the mandril fixing hole 2-64 is slightly larger than that of the mandril 2-5, the mandril 2-5 is inserted into the mandril fixing hole 2-64, the left side wall of the fastening block 2-61 is provided with a fastening hole 2-63, the fastening hole 2-63 is vertical to and communicated with the mandril fixing hole 2-64, the inner wall of the fastening hole 2-63 is provided with an internal thread which is matched with the external thread of the fastening bolt 2-62, the length of the fastening bolt 2-62 is larger than the depth of the fastening hole 2-63, the fastening bolt 2-62 is positioned in the fastening hole 2-63, and the fastening bolt 2-62 abuts against the mandril 2-5. When the inclination angle of the ejector rod needs to be adjusted, the fastening block is rotated along the connecting shaft by loosening the adjusting bolt on the semi-annular long groove, the optimal inclination angle is adjusted, and then the adjusting bolt is fastened.
As shown in FIG. 11, the grinding machine further comprises an adsorption block 2-10, wherein the adsorption block 2-10 is a cylinder, a limiting hole 2-11 is formed in the center of the top of the adsorption block 2-10, the limiting hole 2-11 is a blind hole, when the grinding machine is used, a workpiece to be ground is adsorbed at the bottom of the adsorption block 2-10, and a metal ball at the bottom end of a needle-shaped ejector rod of the mechanical arm 2 abuts against the limiting hole 2-11 of the adsorption block 2-10 to press the adsorption block 2-10 on the grinding disc 4-2. The first motors 3-14 and the grinding driving motor adopt variable frequency speed regulating motors so as to regulate the rotating speed of the grinding disc, and the first motor and the grinding driving motor use low rotating speed during starting and then use high rotating speed, thereby avoiding edge breakage and opening breakage caused by over-high starting speed or avoiding the separation of the grinding workpiece and the adsorption block due to over-high friction force between the initial grinding workpiece and the disc surface.
After the rotation circle center of the grinding disc 4-2 is regulated, the angle of the ejector rod 2-5 is regulated, so that the acting surface of the workpiece under the adsorption block 2-10 pressed by the ejector rod 2-5 and the optimal grinding angle of the grinding disc 4-2 can be regulated.
In order to prevent the grinding fluid overflowed in the grinding process from overflowing along the bottom surface of the grinding mechanism 4 to the center to cause abrasion to the rotating shaft 4-1, an annular groove 4-4 is additionally arranged on the inner side of the edge of the bottom surface of the grinding mechanism 4, as shown in fig. 5-7, the longitudinal section of the annular groove 4-4 is trapezoid, and the outer edge of the annular groove 4-4 is tangential to the outer edge of the bottom surface of the grinding mechanism 4. When the overflowed grinding fluid climbs over towards the center along the bottom surface of the grinding mechanism 4, as the intersecting line between the outer edge of the annular groove 4-4 and the outer edge of the bottom surface of the grinding mechanism 4 is very narrow, the grinding fluid can not climb over upwards under the action of gravity, the tension of the grinding fluid drops is far less than the downward gravity, the overflowed grinding fluid drops naturally fall down, and the overflowed grinding fluid is promoted to fall into the waste liquid basin below the shell. Therefore, the overflow grinding liquid drops naturally drop against the tension of the overflow grinding liquid drops by utilizing the universal gravitation and the gravity, the grinding liquid is prevented from continuously diffusing to the center of the ground of the grinding mechanism 4, and the phenomenon that the rotating shaft 4-1 and the bearing are damaged is avoided.
The foregoing is merely a preferred embodiment of the present invention, and it should be noted that it will be apparent to those skilled in the art that modifications and variations can be made without departing from the technical core principle of the present invention, and these equivalent modifications and variations should also be regarded as the scope of the invention.

Claims (8)

1. The grinding device for quartz crystal vibration wafer production and processing is characterized by comprising a workbench (1), a mechanical arm (2), a mechanical arm transmission mechanism (3), a grinding mechanism (4) and a grinding driving motor (5), wherein the grinding mechanism (4) comprises a rotary grinding disc (4-2), and a workpiece to be ground is placed on the grinding disc (4-2) for grinding; the mechanical arm transmission mechanism (3) and the grinding driving motor (5) are fixedly connected to the workbench (1), and the grinding driving motor (5) drives the grinding mechanism (4) to rotate; the mechanical arm (2) is positioned above the grinding mechanism (4), the mechanical arm (2) comprises a push rod (2-5), the push rod (2-5) is used for pressing and holding a workpiece to be ground, and one end of the mechanical arm (2) is connected with the mechanical arm transmission mechanism (3); the mechanical arm transmission mechanism (3) comprises a rotary disc (3-1), a linear guide rail pair (3-2), a transmission rod (3-5), a support (3-6) and a first motor (3-14), wherein the first motor (3-14) is fixedly connected to the bottom of the workbench (1), the rotary disc (3-1) is driven to rotate by the first motor (3-14), a mandrel (3-16) is arranged on the rotary disc (3-1), the top of the mandrel (3-16) supports a sliding block (3-21) of the linear guide rail pair (3-2), and the sliding block (3-21) rotates on the mandrel (3-16); the sliding rail (3-22) of the linear guide rail pair (3-2) is fixedly connected to the right end below the transmission rod (3-5), the left end of the transmission rod (3-5) is connected with the mechanical arm (2), the left end of the transmission rod (3-5) is rotatably supported at the top of the supporting column (3-6), and the bottom of the supporting column (3-6) is fixed on the workbench (1);
the grinding mechanism (4) further comprises a cylindrical shell (4-5) and a grinding disc eccentric mechanism (4-6), the top of the grinding disc (4-2) is a concave spherical surface, the top of the shell (4-5) is open, the grinding disc (4-2) is positioned at the top of the shell (4-5), the bottom of the grinding disc (4-2) is connected with the shell (4-5) through the grinding disc eccentric mechanism (4-6), the height of the grinding disc eccentric mechanism (4-6) is slightly larger than the depth inside the shell (4-5), and the bottom of the grinding mechanism (4) is connected with the grinding driving motor (5) through a rotating shaft (4-1);
the grinding disc eccentric mechanism (4-6) comprises an adjusting column (4-7) and a lower support column (4-8), wherein the top of the adjusting column (4-7) is fixedly connected with the bottom of the grinding disc (4-2), the adjusting column (4-7) is fixed on the upper portion of the lower support column (4-8) through bolts, and the lower support column (4-8) is fixed on the side wall of the shell (4-5) through bolts.
2. The grinding device for quartz crystal wafer production and processing according to claim 1, wherein an amplitude modulation mechanism (3-7) is arranged between the rotary disc (3-1) and the mandrel (3-16), the amplitude modulation mechanism (3-7) comprises an amplitude modulation lead screw (3-8), a limit nut (3-15) and a mandrel base (3-10) with the mandrel (3-16) arranged at the upper part, and the mandrel base (3-10) is in threaded connection with the amplitude modulation lead screw (3-8); the rotary disc (3-1) is provided with a first fixing piece (3-12) and a second fixing piece (3-13), and two ends of the amplitude modulation lead screw (3-8) are fixed on the rotary disc (3-1) through the first fixing piece (3-12) and the second fixing piece (3-13); one end of the amplitude modulation screw rod (3-8) is provided with an amplitude modulation screw cap (3-9), and the amplitude modulation screw rod (3-8) is fastened by a limit nut (3-15) after being regulated.
3. Grinding device for quartz crystal wafer production and processing according to claim 2, characterized in that a spacer (4-10) is arranged between the grinding disc (4-2) and the housing (4-5), the spacer (4-10) is of an annular split structure matched with the top of the housing (4-5), the shape of the spacer (4-10) is two semi-rings, the longitudinal section of the spacer (4-10) is wedge-shaped, and the bottom of the spacer (4-10) is provided with an annular limit flange (4-11).
4. A grinding device for quartz crystal wafer production and processing according to claim 3, characterized in that the inner side of the bottom edge of the shell (4-5) is additionally provided with an annular groove (4-4), and the outer edge of the annular groove (4-4) is tangential to the outer edge of the bottom edge of the grinding mechanism (4).
5. The grinding device for quartz crystal wafer production and processing as claimed in claim 4, wherein the mechanical arm (2) comprises an upper swing rod (2-2), a lower swing rod (2-3), a clamping bolt (2-4) and a push rod (2-5), the right end of the lower swing rod (2-3) is connected with the mechanical arm transmission mechanism (3), the right part of the upper swing rod (2-2) and the left part of the lower swing rod (2-3) are respectively provided with a long groove (2-12), the clamping bolt (2-4) respectively passes through the long grooves (2-12) and then connects the upper swing rod (2-2) with the lower swing rod (2-3), the left end of the upper swing rod (2-2) is provided with the push rod fastening mechanism (2-6), the push rod (2-5) is connected to the push rod fastening mechanism (2-6), two ends of the push rod (2-5) are needle-shaped, and two ends of the push rod (2-5) are fixedly provided with spherical metal bodies.
6. The grinding device for quartz crystal wafer production and processing according to claim 5, wherein the ejector rod fastening mechanism (2-6) comprises a fastening block (2-61), a connecting shaft (2-65) and an adjusting bolt (2-66); the right end of the fastening block (2-61) is provided with a through hole, two semi-annular long grooves (2-67) are arranged around the through hole, the connecting shaft (2-65) penetrates through the through hole on the fastening block (2-61) and movably connects the fastening block (2-61) with the left end of the upper swing rod (2-2), and the adjusting bolt (2-66) penetrates through the semi-annular long grooves (2-67) and is connected with the upper swing rod (2-2); the left end of the fastening block (2-61) is longitudinally provided with a push rod fixing hole (2-64), the diameter of the push rod fixing hole (2-64) is slightly larger than that of the push rod (2-5), the push rod (2-5) is inserted into the push rod fixing hole (2-64), the left side wall of the fastening block (2-61) is provided with a fastening hole (2-63), the fastening hole (2-63) is perpendicular to and communicated with the push rod fixing hole (2-64), the inner wall of the fastening hole (2-63) is provided with an internal thread, the internal thread is matched with the external thread of the fastening bolt (2-62), the length of the fastening bolt (2-62) is larger than the depth of the fastening hole (2-63), and the fastening bolt (2-62) is positioned in the fastening hole (2-63) and is abutted against the push rod (2-5).
7. The grinding device for quartz crystal wafer production and processing according to claim 6, wherein an adsorption block (2-10) is additionally arranged, the adsorption block (2-10) is in a cylindrical sheet shape, a limiting hole (2-11) is formed in the center of the top of the adsorption block (2-10), the limiting hole (2-11) is a blind hole, a workpiece to be ground is adsorbed at the bottom of the adsorption block (2-10), a spherical metal body at the bottom end of the ejector rod (2-5) is abutted against the inside of the limiting hole (2-11) of the adsorption block (2-10), and the adsorption block (2-10) is pressed on the grinding disc (4-2).
8. The grinding device for quartz crystal wafer production and processing according to claim 7, wherein the first motor (3-14) and the grinding driving motor (5) are both variable frequency speed regulating motors, and the output end of the first motor (3-14) is connected with the rotary disk (3-1) through two sets of aligning bearings.
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CN113400186B (en) * 2021-07-20 2022-02-15 深圳市科源信科技有限公司 Quartz crystal wafer grinding frame

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