CN101770048A - Polarization-independent high-efficiency quartz transmission triangular grating - Google Patents
Polarization-independent high-efficiency quartz transmission triangular grating Download PDFInfo
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- CN101770048A CN101770048A CN 201010122366 CN201010122366A CN101770048A CN 101770048 A CN101770048 A CN 101770048A CN 201010122366 CN201010122366 CN 201010122366 CN 201010122366 A CN201010122366 A CN 201010122366A CN 101770048 A CN101770048 A CN 101770048A
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Abstract
A high-efficiency quartz transmission triangular grating with a central wavelength of 1550 nm and irrelevant to polarization is characterized in that the grating period is 1080 nm and the etching depth is 10300 nm. When TE and TM polarized light is incident at a littrow angle of 1550 nanometers of a central wavelength, the transmission diffraction efficiency of the fused quartz triangular grating to the-1 order can be more than 90% in the wavelength range of 1500-1610 nanometers, and the-1 order diffraction efficiency of the fused quartz triangular grating to the 1540-1560 nanometers is more than 99%. The polarization-independent high-efficiency quartz transmission triangular grating is processed by combining an optical holographic recording technology or an electron beam direct writing device with a microelectronic deep etching process, is convenient to obtain materials, low in manufacturing cost, capable of being produced in large batch and has important practical prospects in the field of optical fiber communication.
Description
Technical field
The present invention relates to triangular grating, particularly a kind of polarization independent high-efficiency quartz transmission triangular grating that is used for 1550 nano wavebands.
Background technology
In the laser communication field, the application of close wavelength-division multiplex technology has been dwindled communication channel at interval widely, thereby has greatly improved the capacity of laser communication.And the realization of close wavelength-division multiplex technology mainly relies on devices such as film filter, array waveguide grating, Fiber Bragg Grating FBG and free space diffraction grating.The film filter better working stability, but there is higher energy loss, and along with the increase Filter Design of communication channel is made the complexity that also becomes; The energy loss of array waveguide grating and polarization loss are big, spectral bandwidth is narrower, and relatively more responsive to environment temperature, make its job stability variation; The Fiber Bragg Grating FBG performance is outstanding, but main problem to be channel capacity less and need be used with circulator or Mach-Zehnder coupling mechanism, this has increased energy loss and use cost.Comparatively speaking, the free space diffraction grating has relatively more outstanding advantage, such as, loss is lower, interchannel interference is weak, work is more stable and cost of manufacture is lower etc.People such as Yangyan Zhang have designed the reflective fused quartz grating of a kind of high-level efficiency based on total reflection phenomenon, its diffraction efficiency of-1 grade can be higher than 90%[in theory referring to technology 1:Y.Zhang et al. formerly, J.Opt.Soc.Am.A 22 331-334 (2005) in 101 nanometer wavelength range].People such as Shunquan Wang design has also been made a kind of quartzy grating of transmission-type that centre wavelength is 1550 nano wave lengths that is used for, its diffraction efficiency measured value of-1 grade is 87.1%[referring to technology 2:S.Wang et al. formerly, Appl.Opt.45,2567-2571 (2006)].
Fused quartz is a kind of desirable grating material, and it has high optical quality: stable performance, high damage threshold and from deep ultraviolet to far wide transmission spectrum.Therefore, the high-density deeply etched fused quartz grating of etching is with a wide range of applications as novel ultra broadband device.
Triangular grating can be regarded as and is made of many rectangular rasters stacks with different duty.Therefore, the diffraction theory of triangular grating can adopt the Maxwell equation of vector form and in conjunction with boundary condition, accurately calculate the result by calculation of coding machine program.People such as Moharam have provided the algorithm [referring to technology 3:M.G.Moharam et al. formerly, J.Opt.Soc.Am.A 12,1077-1086 (1995)] of rigorous coupled wave theory, can solve the diffraction problem of this class high dencity grating.So far, also having no talent is given in the design parameter of making broadband transmission-type triangular grating on the fused quartz substrate at communication with 1550 nano wave lengths but as far as we know.
Summary of the invention
The technical problem to be solved in the present invention is to provide the high transmission diffraction efficient of a kind of polarization irrelevant quartzy triangular grating at the laser instrument of communicating by letter with 1550 nano wave lengths.This grating can make TE and-1 order diffraction efficient of TM polarized light when 1550 nano wave lengths are the incident of angle, Littrow be higher than 90% in 110 nanometers (1500-1610 nanometer) wavelength bandwidth, and-1 order diffraction efficient in 20 nanometers (1540-1560 nanometer) wavelength bandwidth is greater than 99%.Therefore, this triangular grating has important practical value in laser fiber communication.
Technical solution of the present invention is as follows:
A kind of polarization independent high-efficiency quartz transmission triangular grating that is used for 1550 nano wavebands, its characteristics are that the cycle of this grating is 1080 nanometers, etching depth 10300 nanometers.
The cycle of described grating is 1080 nanometers, the best when etching depth of grating is 10300 nanometers.
Foundation of the present invention is as follows:
Fig. 1 has shown the geometry of polarization independent high-efficiency quartz transmission triangular grating.Zone 1,2 all is uniformly, is respectively air (refractive index n
1=1) and fused quartz (refractive index n
2=1.44462).The TE polarized incident light corresponding to the direction of vibration of electric field intensity perpendicular to the plane of incidence, the TM polarized incident light corresponding to the direction of vibration of magnetic vector perpendicular to the plane of incidence.The light wave of linear polarization is θ at a certain angle
i=sin
-1(λ/(2* Λ * n
1)) incident (being defined as Littrow condition), λ represents incident wavelength, and Λ represents the grating cycle.
Under optical grating construction as shown in Figure 1, the present invention adopts rigorous coupled wave theory [formerly technology 3] to calculate triangle fused quartz grating in 1550 nano waveband diffraction efficiencies.We utilize the quartzy grating of this ultra broadband high-level efficiency transmission of pattern theory [formerly technology 4:J.Zheng et al., J.Opt.Soc.Am.A.25,1075 (2008)] design, and adopt rigorous coupled wave theory [formerly technology 3] to optimize the gained optical grating construction.Fig. 2 and Fig. 3 have provided respectively according to Theoretical Calculation and have obtained the numerical optimization result of high-diffraction efficiency broadband triangular grating when the incident of angle, Littrow.As can be seen from the figure, when the cycle of grating be 1080 nanometers, when etching depth is the 10200-10400 nanometer ,-1 order diffraction efficient of TE and TM polarized light is greater than 99%.
Particularly the cycle when grating is 1080 nanometers, the degree of depth is 10300 nanometers, when if near consider TE and TM polarization mode 1550 nanometers incident light incides grating with the Littrow angle of correspondence,-1 order diffraction efficient of this grating all wavelengths in 110 nanometers (i.e. 1500～1610 nanometers) bandwidth range all can reach more than 90, has contained the C+L wave band of using always in the optical fiber communication (1512-1601 nanometer).
Description of drawings
Fig. 1 is the geometry of the wideband high-efficiency quartz transmission triangular grating of the present invention's 1550 nano wave lengths.
Fig. 2 is ultra broadband quartz transmission triangular grating of the present invention minimum diffraction efficiency densimetric curve of TE/TM polarized light under different wave length and the etching depth when 1550 nano wave lengths are the incident of angle, Littrow.
Fig. 3 be ultra broadband quartz transmission triangular grating of the present invention when 1550 nano wave lengths are the incident of angle, Littrow the TE/TM light diffraction efficiency with the wavelength change curve.
Embodiment
Table 1 has provided a series of embodiment of the present invention.Listed in the table the present invention be used for centre wavelength be the TE/TM polarized light of the polarization independent high-efficiency quartz transmission triangular grating of 1550 nano wavebands different wave length when 1550 nano wave lengths are the incident of angle, Littrow in-1 order diffraction efficiency eta, h is the grating degree of depth.Fig. 2 and Fig. 3 have provided respectively according to Theoretical Calculation and have obtained the numerical optimization result of high-diffraction efficiency broadband triangular grating when the incident of angle, Littrow.As can be seen from the figure, when the cycle of grating be 1080 nanometers, when etching depth is the 10200-10400 nanometer ,-1 order diffraction efficient of TE and TM polarized light is greater than 99%.
Particularly the cycle when grating is 1080 nanometers, the degree of depth is 10300 nanometers, when if near consider TE and TM polarization mode 1550 nanometers incident light incides grating with the Littrow angle of correspondence,-1 order diffraction efficient of this grating all wavelengths in 110 nanometers (1500-1610 nanometer) wavelength coverage all can reach more than 90, has contained the C+L wave band of using always in the optical fiber communication (1512-1601 nanometer).
Experiment shows: in the process of making grating, suitably select the grating etching depth just can prepare in different bandwidth with the use incident angle and be used for the polarization independent high-efficiency quartz transmission triangular grating that centre wavelength is 1550 nano wavebands.
The polarization independent high-efficiency quartz transmission triangular grating that is used for 1550 nano wavebands of the present invention, have flexible and convenient to use, broader bandwidth, diffraction efficiency than advantages such as height, it is a kind of very desirable diffraction optical element, utilize holographic grating recording technique or direct electronic beam write device in conjunction with the deep etching technique of microelectronics, can be in enormous quantities, produce at low cost, grating stable performance after the etching, reliable can be applicable in the optical fiber communication, has important practical prospect.
Table 1
Claims (2)
1. one kind is used for the polarization independent high-efficiency quartz transmission triangular grating that centre wavelength is 1550 nano wavebands, and the cycle that it is characterized in that this grating is that the degree of depth of 1080 nanometers, grating is in the 10200-10400 nanometer.
2. polarization independent high-efficiency quartz transmission triangular grating according to claim 1, the cycle that it is characterized in that described grating is 1080 nanometers, the etching depth of grating is 10300 nanometers.
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| CN 201010122366 CN101770048A (en) | 2010-03-11 | 2010-03-11 | Polarization-independent high-efficiency quartz transmission triangular grating |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111257982A (en) * | 2020-01-20 | 2020-06-09 | 江苏师范大学 | Monocrystalline silicon grating guided-mode resonance filter |
| CN111624693A (en) * | 2020-06-23 | 2020-09-04 | 扬州大学 | Multiband all-metal multifunctional wave plate and use method thereof |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS59100404A (en) * | 1982-11-30 | 1984-06-09 | Ricoh Co Ltd | Reflection type triangular-shaped relief diffraction grating |
| JP2002296411A (en) * | 2001-03-30 | 2002-10-09 | Mitsumi Electric Co Ltd | Transmission grating and optical pickup |
| US6885486B2 (en) * | 2002-09-17 | 2005-04-26 | Canon Kabushiki Kaisha | Scanning optical system and image forming apparatus using the same |
| JP2006171151A (en) * | 2004-12-14 | 2006-06-29 | Dainippon Printing Co Ltd | Polarized light separating element |
-
2010
- 2010-03-11 CN CN 201010122366 patent/CN101770048A/en active Pending
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS59100404A (en) * | 1982-11-30 | 1984-06-09 | Ricoh Co Ltd | Reflection type triangular-shaped relief diffraction grating |
| JP2002296411A (en) * | 2001-03-30 | 2002-10-09 | Mitsumi Electric Co Ltd | Transmission grating and optical pickup |
| US6885486B2 (en) * | 2002-09-17 | 2005-04-26 | Canon Kabushiki Kaisha | Scanning optical system and image forming apparatus using the same |
| JP2006171151A (en) * | 2004-12-14 | 2006-06-29 | Dainippon Printing Co Ltd | Polarized light separating element |
Non-Patent Citations (1)
| Title |
|---|
| 《APPLIED OPTICS》 20000701 Pasi Laakkonen等 Electron-beam-fabricated asymmetric transmission gratings for microspectroscopy 3187-3190 1-2 第39卷, 第19期 * |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111257982A (en) * | 2020-01-20 | 2020-06-09 | 江苏师范大学 | Monocrystalline silicon grating guided-mode resonance filter |
| CN111624693A (en) * | 2020-06-23 | 2020-09-04 | 扬州大学 | Multiband all-metal multifunctional wave plate and use method thereof |
| CN111624693B (en) * | 2020-06-23 | 2022-03-08 | 扬州大学 | Multiband all-metal multifunctional wave plate |
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