CN111624693B - Multiband all-metal multifunctional wave plate - Google Patents

Multiband all-metal multifunctional wave plate Download PDF

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CN111624693B
CN111624693B CN202010577184.3A CN202010577184A CN111624693B CN 111624693 B CN111624693 B CN 111624693B CN 202010577184 A CN202010577184 A CN 202010577184A CN 111624693 B CN111624693 B CN 111624693B
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CN111624693A (en
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钱沁宇
黄天鹞
王钦华
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Yangzhou University
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    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/18—Diffraction gratings
    • G02B5/1876—Diffractive Fresnel lenses; Zone plates; Kinoforms
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/18—Diffraction gratings
    • G02B5/1814—Diffraction gratings structurally combined with one or more further optical elements, e.g. lenses, mirrors, prisms or other diffraction gratings
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
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    • G02B5/3083—Birefringent or phase retarding elements

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Abstract

The utility model provides a multiband all-metal multifunctional wave plate and application method thereof, belong to the optics technical field, the wave plate overall structure uses nickel as the base, the transition layer uses aluminium material, the grating layer is made for indium material, utilize the phase delay in the reflection course, can realize changing the polarization angle of the 405nm laser wave band of incidenting when normal incidence light polarization angle is 45, the effect of converting the linearly polarized light of 808nm laser wave band into circular polarized light simultaneously, through parameter adjustment, can make the amplitude ratio reach 1.003 and 1.041 simultaneously, the phase difference completely accords with the requirement, can reach a better polarization effect. The wavelength-tunable filter can be used as a half-wave plate at the wavelength of 405nm of common laser, and can be used as a quarter-wave plate at the wavelength of 808 nm; through parameter adjustment, the optical fiber can be used as a quarter-wave plate at 0.382 um-2.076 um and as a half-wave plate at 0.40 um-1.206 um, and can work in multiple bands simultaneously. The method has high application value in the aspects of beam steering, polarization rotation feedback in a laser, real-time detection of polarized light and the like.

Description

Multiband all-metal multifunctional wave plate
Technical Field
The invention belongs to the technical field of optics, relates to a wave plate and a using method thereof, and particularly relates to a multiband all-metal multifunctional wave plate and a using method thereof.
Background
In the past, manipulating and controlling the polarization state of light has been an important role in optical research, and a polarizer is an important optical element in systems such as optical information processing and measurement. In the past, people controlled the retardation of orthogonal components by the difference of the refractive index of the birefringent crystal, but the mode can only adjust the polarization state of short wavelength part, and the mode is bulky and difficult to integrate.
In recent years, it has been gradually found that a grating having a subwavelength structure also has excellent polarization characteristics, and a great deal of research has been conducted thereon. Theories and experiments show that when the period size of the grating is close to or less than the wavelength of incident light, the grating shows stronger polarization characteristics, and various polarization devices such as a polarization light detector, a polarization beam splitter, a phase retarder, various wave plates and the like can be manufactured by utilizing the polarization characteristics of the sub-wavelength structure grating. The polarization state control of the incident light of the sub-wavelength structure grating gradually arouses research. For this reason, changes in the polarization state of light are often applied in the transmission light path, and most research has been around this. However, with the explosion of flexible, pliable materials, polarization conversion in the reflective mode has also begun to be studied.
In 2014, Lin et al designed three different parameters of nano-grating structures as quarter-wave plates that can convert linearly polarized light of laser bands 488 nm, 532 nm and 632.8 nm into circularly polarized light, respectively.
In 2015, Dai et al designed a quarter-wave plate with high transmittance and operating in the near-infrared band, the central wavelength of the wave plate operation was 1.71 um, the operating bandwidth was 0.14 um, and the conversion efficiency could reach 94% -98%. The designs have high imaging efficiency and higher polarization efficiency, but mainly work in unusual terahertz and near infrared bands, and have certain limitation on practicability.
In 2016, Miho Ishii et al modified a quarter wave plate embedded in silica and made of gold as an array, operating in a broadband wavelength range of 600 nm to 800 nm, with a transmittance of about 60% and a phase retardation of 165 °.
In 2017, Zhu et al designed an ultra-thin sub-wavelength quarter-wave plate with a sub-wavelength broken shape array. The structure is formed by embedding a layer of silver film into two pairs of vertical slits, and is characterized in that the overlapping parts of four corners of a rectangular ring are added on the basis of the original structure, so that the thickness of the metal film is remarkably reduced. Mainly works at 1.55 um, and in the wavelength range of 1525 nm to 1565 nm, the phase difference changes by less than 2 percent, and the amplitude ratio is different from 0.93 to 1.03. These transmissive waveplate designs perform well as waveplates, but are expensive in materials and have the feature of complex overall fabrication. Ge et al finally designs a wave plate with an ultra-wide waveband and working in terahertz, realizes conversion of incident linearly polarized light into emergent circularly polarized light in the ultra-wide waveband, and can be used as a quarter wave plate with a simple structure and working in a 1.13-1.41 THz waveband. Hu et al propose and demonstrate an all-metal flexible reflective multi-band wave plate based on a nano-grating structure that acts as a quarter-wave plate at two wavelengths (λ =465 nm and λ =921 nm) and as a half-wave plate at the other wavelength (λ =656 nm). These waveplates are designed to target multiple wavebands, but there are inevitable characteristics that require multiple structural support, or that have large polarization effect errors.
In 2019, Wang et al designed a quarter-wave plate with a periodic array of sub-wavelength holes on a silver film with a thickness of 27 nm, and achieved the effect of high transmission efficiency with a wave band width of 525 nm and a transmittance of 44%, and the center wave band was 1550 nm.
The grating structure of the grating layer of the sub-wavelength grating polarization device can be divided into four structures of one-dimensional, two-dimensional, quasi-periodic and continuous structures according to the spatial variation of the grating period. At present, most of polaroids realize polarization conversion by etching metal on a two-dimensional structure, and have the problems of high manufacturing difficulty, high precision requirement and the like. Also most one-dimensional wave plates have the problems of low ellipsometry, narrow application range and no specific laser wavelength.
Disclosure of Invention
The invention aims to provide a multiband all-metal multifunctional wave plate and a using method thereof, aiming at the defects in the prior art, the wave plate structure takes a one-dimensional sub-wavelength structure grating as a reference, the structure is simple, the manufacture is convenient, the wave plate can be used as a quarter wave plate at 0.382 um-2.076 um and a half wave plate at 0.40 um-1.206 um through parameter regulation and control, and can work at a plurality of wave bands simultaneously, and the higher reflectivity can be kept.
The technical scheme of the invention is as follows: a multiband all-metal multifunctional wave plate comprises a substrate layer; the method is characterized in that: and a transition layer is arranged above the basal layer, and a grating layer is arranged on the transition layer.
The grating layer is made of indium materials and is structurally one of triangular prisms, semi-cylinders and rectangular columns which are uniformly arranged at intervals.
The substrate layer is made of nickel materials.
The transition layer is made of aluminum material and has a thick transition layerH 2=0.06nm。
Ridge width of the grating layerW=0.15nm, grating periodP=0.30nm, depth of optical grooveH 1=0.19nm。
A use method of a multiband all-metal multifunctional wave plate comprises the following steps:
(1) by varying the grating ridge widthWDepth of light grooveH 1To perform the change of the operating band: that is, the variation of the groove parameters has the greatest influence on the TE component and TM component of the incident light, and the grating period is usedPThe polarization effect is changed by slightly adjusting the change of the transition layer so as to achieve better ellipsometry;
(2) at a fixed parameter of grating ridge widthW=0.15um, depth of optical grooveH 1=0.19 um, grating periodP=0.30um, thickness of transition layerH 2When the amplitude ratio is 1.041 at 405nm and 1.003 at 808nm, the phase difference completely meets the requirement of polarization transformation; (3) when the parameter is changed to the grating ridge widthW=0.15nm, grating periodP=0.30nm, depth of optical grooveH 1=0.19nm, thickness of transition layerH 2=0.06nm to work at 405nm and 808nm, when the individual parameters are varied individually,H 1the variation range is 0.1865 um-0.1925 umWThe variation range is 0.148 um-0.16 um, when the parameters are in the range, the working wave bands are always laser wave bands 405um and 808 um;
(4) at a fixed parameter of grating ridge widthW=0.15um, depth of optical grooveH 1=0.19 um, grating periodP=0.30um, thickness of transition layerH 2When the grain size is not less than 0.06um, H 1the range is 0.11 um-0.40 um, the quarter wave plate can be used as a quarter wave plate at 0.382 um-2.076 um and a half wave plate at 0.40 um-1.206 um through parameter change, the quarter wave plate can work at two different wave bands, the half wave plate can only work at one wave band, and at most, the quarter wave plate can work at three wave bands simultaneously and can be used as a half wave plate and a quarter wave plate;
(5) at a fixed parameter of grating ridge widthW=0.15um, depth of optical grooveH 1=0.19 um, grating periodP=0.30um, thickness of transition layerH 2When =0.06um, change aloneWW ranges from 0.10um to 0.22um and can be independently used as a quarter-wave plate orSimultaneously, a quarter-wave plate and a half-wave plate are made;
(6) due to the transition layerH 2And grating periodPThe influence is small, so the parameters that can be used as the multiband wave plate are: grating periodP0.20 um-0.35 um, transition layer thicknessH 2Is 0.2um to 0.8um, the duty ratio W/P is 0.3 to 0.8, the depth of the optical grooveH 10.11um to 0.40 um; the whole working range is as follows: the optical fiber can be used as a quarter-wave plate at the position of 0.382 um-2.076 um and as a half-wave plate at the position of 0.40 um-1.206 um through parameter adjustment; within the parameter range, the device can work in one wave band or two wave bands or three wave bands simultaneously; the amplitude ratio floats between 0.9 and 1.1, the reflectivity is 75 to 95 percent, and the phase difference can completely meet the requirements of the wave plate according to the adjustment of parameters;
the invention has the beneficial effects that: the invention provides a multiband all-metal multifunctional wave plate and a use method thereof.A wave plate overall structure takes nickel as a substrate, a transition layer is made of aluminum material, and a grating layer is made of indium material, and the wave plate can change the polarization angle of an incident 405nm laser wave band when the polarization angle of normal incident light is 45 degrees and convert linearly polarized light of a 808nm laser wave band into circularly polarized light by utilizing phase delay in the reflection process, so that the amplitude ratio can reach 1.003 and 1.041 at most through parameter adjustment, the phase difference completely meets the requirement, and finally imaged reflected light can achieve a better polarization effect. In the whole working process, the reflectivity of the two wave bands is near 80%, and the fluctuation is small along with the parameter change. Therefore, the optical fiber can be used as a half-wave plate at the common laser wavelength of 405nm and can be used as a quarter-wave plate at the common laser wavelength of 808 nm; in addition, through the parameter adjustment of the structural wave plate, the structure can be used as a quarter wave plate at the position of 0.382 um-2.076 um and a half wave plate at the position of 0.40 um-1.206 um, and simultaneously can work in multiple bands. The sub-wavelength structure based on the dielectric grating and simple in structure can work in multiple wave bands of visible light and infrared light at the same time, and has high application value in the aspects of light beam manipulation, polarization rotation feedback in a laser, real-time detection of polarized light and the like.
Drawings
Fig. 1 is a schematic view of the overall structure of the present invention.
FIG. 2 is a schematic diagram of structural parameters of the present invention.
FIG. 3 is the amplitude ratio, phase difference and reflectivity curve diagram of the wave plate of the present invention at the wavelength of 405nm and 808 nm.
FIG. 4 shows the parameter H in the present invention1And (3) a comparison graph of the influence on the amplitude ratio and the phase difference in the wave band of 400 nm-1000 nm.
FIG. 5 is a graph showing the effect of the parameter W on the amplitude ratio and phase difference in the 400 nm-1000 nm band.
FIG. 6 is a graph showing the effect of the parameter P on the amplitude ratio and phase difference in the 400 nm-1000 nm band.
FIG. 7 shows the parameter H in the present invention2And (3) a comparison graph of the influence on the amplitude ratio and the phase difference in the wave band of 400 nm-1000 nm.
FIG. 8 shows a single variation H in the present invention1And when the allowable error is reached, corresponding to the situation map.
FIG. 9 is a diagram of the situation when the tolerance is achieved by changing W alone according to the present invention.
FIG. 10 shows a single variation H in the present invention1The amplitude ratio, phase difference and reflectivity are shown in the wave band of 350 nm-3000 nm.
FIG. 11 is a graph showing the amplitude ratio, phase difference and reflectance in the wavelength range of 350 nm to 3000 nm when W is changed alone according to the present invention.
Detailed Description
The invention will be further described with reference to the accompanying drawings in which:
the structure takes the one-dimensional sub-wavelength structure grating as a reference, and keeps higher reflectivity while selecting the grating with simple shape and easy manufacture.
Because the period of the sub-wavelength grating is generally smaller than the period of the incident light, when the sub-wavelength grating is analyzed, an equivalent uniform medium theory is selected for analysis.
The polarization process of the sub-wavelength grating is analyzed by using Maxwell equation in the effective medium theory, so that the equivalent refractive indexes of TE and TM components can be obtained
Figure DEST_PATH_IMAGE001
Figure 299816DEST_PATH_IMAGE002
(wherein the parameter n is1Is the refractive index of air, n2Is the refractive index of the sub-wavelength periodic medium grating,fas duty ratio, while the refractive index of the metal is n2=n+ik)
In this formula, the sub-wavelength grating structure is approximated as a dielectric film with a weak degree of light absorption, so that the TE component is absorbed or reflected and the TM component is transmitted through the grating. In this process, a phase change occurs, and at the same time, the orthogonal electric field ratio is changed. When the phase difference is K x pi (K is an odd number) and the orthogonal electric field ratio =1, the half wave plate is used. When the phase difference is K multiplied by pi + pi/2 (K is an odd number) and the orthogonal electric field ratio =1, the quarter wave plate is used.
The structure proposed herein corresponds to a geometrical parameter for the laser band: width of grating ridgeW=0.15nm, grating periodP=0.30nm, depth of optical grooveH 1=0.19nm, thickness of transition layerH 2=0.06nm, and the overall grating structure is shown in fig. 1 and 2. FIG. 1 is a schematic diagram of a self-supporting multiband wave plate based on In metal nano-grating on a thin metal (Ni) substrate with Al as a transition layer. FIG. 2 is a front view of the structure, with the labeled parameters: grating period P(ii) a Ridge width of gratingW(ii) a Depth of gratingH 1And thickness of the grating transition layerH 2。
In accordance with the parameters, the polarization angle change can be carried out on the common laser wavelength of 405nm, the polarization state conversion is carried out at 808nm, and the reflectivity is kept near 80%. As shown in FIGS. 3(a) and (b), FIG. 3(a) shows the amplitude ratio and phase difference for the 405nm and 808nm wavelength operation. (b) The figure shows the corresponding reflectivities for wavelengths operating at 405nm and 808 nm.
In FIG. 3(a), the amplitude ratio at 405nm is 1.003 and the amplitude ratio at 808nm is 1.04, corresponding to phase differences of 1.583 and 3.146, respectively. Whereas the amplitude ratio of typical wave plate errors is 0.1 and the phase difference is Δ φ (about 0.043) satisfying-95 ° < Δ φ < -85 °, the design of the present subwavelength polarizer is satisfactory for wave plates and a very high polarization effect can be achieved at both operating wavelengths. Whereas in fig. 3(b), the reflectance is kept substantially around 80%, which ensures the imaging effect of the finally reflected light, resulting in excellent working efficiency.
In order to further disclose the working principle of the structural wave plate, the allowable range of parameter errors inevitable in actual manufacturing production is searched, and the ranges of the variation trend of the amplitude ratio, the phase difference and the reflectivity are observed through the influence of the change of each geometrical parameter on the polarization effect.
Is unchanged (fixed) in other simulation parametersP=0.3 um，W=0.15 um，H 2=0.06 um), withH 1The change of the amplitude ratio and the phase difference ratio is shown in fig. 4(a) (b). FIG. 4(a) shows the grating depthH 1 The effect on the amplitude ratio. FIG. 4(b) is a graph showing the grating depthH 1 The effect on the phase difference. As the parameter changes in steps of 0.02 um, the amplitude changes with a trend of about 0.03, which is within an acceptable range, and also maintains a certain error in actual manufacturing. In thatH 1During the change, the overall amplitude ratio is reduced at 400 nm-500 nm, then increased at 500 nm-800 nm, and finally reduced at 800 nm-1000 nm, and the whole is near 1. And the phase difference isWFixed to 0.16 atH 1At 0.20, 3.5 can be reached, and at 0.18, 3.0, the overall phase difference shows a decreasing trend over the wavelength range, taking a minimum at 1000 nm, around 1.0.
Is unchanged (fixed) in other simulation parametersP=0.3 um, H 1=0.19 um，H 2=0.06 um), withWThe process of changing the amplitude ratio and the phase difference ratio is shown in fig. 5(a) and (b). FIG. 5(a) shows grating ridge width W vs. vibrationThe effect of the amplitude ratio. Fig. 5(b) shows the influence of the grating ridge width W on the phase difference. The intervals of the phase difference are almost the same, and the amplitude ratio interval becomes smaller, but the overall variation trend shows a monotonous trend, and sudden change does not occur. The amplitude ratio showed an upward trend in the range of 400 nm to 800 nm and a downward trend in the range of 800 nm to 1000 nm as a whole, and it was found that the amplitude ratio showed an upward trend at 800 nmWThe parameter has minimal effect on amplitude ratio, around 450 nmWThe parameter has the greatest effect on the amplitude ratio. The overall phase difference decreases with increasing wavelength, the parameter change has a greater effect on the phase difference at 400 nm, the effect gradually decreases with increasing wavelength, and finally there is almost no effect at 750 nm to 1000 nm.
Is unchanged (fixed) in other simulation parametersW=0.15 um,H 1=0.19 um，H 2=0.06 um), withPThe process of the change, amplitude ratio and phase difference ratio, is shown in fig. 6(a) (b). Fig. 6(a) shows the effect of the grating period P on the amplitude ratio. Fig. 6(b) shows the influence of the grating period P on the phase difference. With grating periodPThe amplitude ratio varies from band to band but is equal toH 1AndWthe variation is significantly smaller. The variation trend of phase difference and the width of grating ridgeWHas similar change trend but smaller change amplitude.
Is unchanged (fixed) in other simulation parametersP=0.3 um，W=0.16 um,H 1=0.18 um), asH 2The process of the change of the amplitude ratio and the phase difference ratio is shown in fig. 7(a) and (b). FIG. 7(a) shows the thickness of the transition layerH 2 Influence on amplitude ratio. FIG. 7(b) shows the transition layer thicknessH 2 The effect on the phase difference. The amplitude ratio changes in each wave band along with the change of the thickness of the transition layer, and the change amplitude is equal toH 1Similarly, but in contrast, the phase difference is small, and the phase difference variation trend is also similar to that of the phase differenceH 1Similarly, and the variation amplitude is extremely small.
Analyzing the above geometric parameters to obtain the grating ridge widthWDepth of light grooveH 1The amplitude ratio and phase delay of the grating can be controlled in a large rangeGate periodPAnd transition layerH 2The thickness effect is small, as also verified in many documents. Thus, we can pass the grating ridge widthWDepth of light grooveH 1To make a large amplitude change of the operating band: i.e. the variation of the slot profile parameter has the greatest influence on the TE and TM components of the incident light. By using the grating periodPAnd the change of the transition layer is used for carrying out small adjustment so as to change the polarization effect, thereby achieving better ellipsometry. Through the parameter variation trend, the grating period can be foundPDepth of light grooveH 1The ellipsometry effect for the operating band is large, which is also the focus of the measured error range.
In the manufacture of wave plates for use in real life, measurement and correction of errors, and an expected estimate of the final polarization effect, are essential. In the wave plate of the invention, when the wave plate works at 405nm and 808nm, the grating ridge width can be clearly seen through upper section parameter analysisWDepth of light grooveH 1The influence on the final imaging effect is particularly strong, and the grating periodPAnd thickness of transition layerH 2The influence of (a) is very little compared with the former. Therefore, given the appropriate parameters, the error range for measuring these parameters is particularly important.
For theH 1The error of (2) is shown in FIGS. 8(a), (b), (c) and (d). In FIG. 8(a), when the above parameters are fixed, only the change is madeH 1When the wavelength is changed from 0.19 um to 0.1925 um, the phase difference of the reflected light in the working band of 405nm reaches 3.2, which is obviously beyond the allowable error range. The corresponding reflectance is shown in fig. 8(b), and very little enhancement occurs in the operating band. In FIG. 8(c), only the changeH 1When the phase difference of the reflected light in the 405nm operating band was changed from 0.19 um to 0.1865 um, the phase difference was 3.09, which is also out of the tolerance, and the reflectance was extremely slightly increased in the operating band as shown in fig. 8 (d).
For theWThe error of (2) is shown in FIGS. 9(a), (b), (c) and (d). In FIG. 9(a), when the above parameters are fixed, only the change is madeWChange it from 0.15um to0.148 um, the phase difference of the reflected light at the 405nm working band reaches 3.09, which is obviously beyond the allowable error range. The corresponding reflectance is shown in fig. 9(b), and very slight enhancement occurs in the operating band. In FIG. 9(c), only the changeWWhen the phase difference of the reflected light in the 405nm operating band is 3.21, which is also out of the allowable error range, the reflectivity is reduced to a lower degree as shown in fig. 9 (d).
At a fixed parameter of grating ridge widthW=0.15um, depth of optical grooveH 1=0.19 um, grating periodP=0.30um, thickness of transition layerH 2When the amplitude ratio is 1.041 at 405nm and 1.003 at 808nm, the phase difference completely meets the requirement of polarization conversion. The above-described change of parameters is a simulation based on the tuning of individual parameters with other parameters fixed. When a plurality of parameters are simultaneously deviated, the ellipsometry and polarization efficiency may be greatly changed.
In actual production, when the parameter is changed to grating ridge widthW=0.15nm, grating periodP=0.30nm, depth of optical grooveH 1=0.19nm, thickness of transition layerH 2=0.06nm to work at 405nm and 808nm, when the individual parameters are varied individually,H 1the variation range is 0.1865 um-0.1925 umWThe variation range is 0.148 um to 0.16 um. When the parameters are within these ranges, the operating bands are always laser bands 405um and 808 um.
The theoretical error range is shown above when the structure wave plate works in two laser bands, but the structure wave plate has higher phase delay property and amplitude ratio close to 1, and can work in other bands by changing parameters and can be used as a quarter wave plate and a half wave plate in a larger wavelength range. At a fixed parameter of grating ridge widthW=0.15um, depth of optical grooveH 1=0.19 um, grating periodP=0.30um, thickness of transition layerH 2When =0.06um, change aloneH 1Corresponding to amplitude ratio and phase differenceThe images are shown in FIGS. 10(a) and (c), and the structural reflectivities are shown in FIGS. 10(b) and (d). It can be seen that FIG. 10(a)H 1The quarter wave plate can be used at 0.382um when the thickness is 0.11um, and is within the tolerance range of the general wave plate. While in FIG. 10(c) followsH 1Changing from 0.11um to 0.40um, the phase difference increases sharply at the overall wavelength 0.35 um to 3.0 um, atH 1When the wave plate is used for the wavelength of 0.840um, the wave plate is used for the wavelength of 1.206 um and the wave plate is used for the wavelength of 2.076um when the wavelength is 0.40um, the amplitude ratio is 1.01, 0.98 and 0.97 respectively, and the wave plate meets the wave plate standard. Thus, it is possible to provideH 1The range is 0.11 um-0.40 um, and the quarter wave plate can be used as a quarter wave plate at 0.382 um-2.076 um and as a half wave plate at 0.40 um-1.206 um through parameter change. When the above-mentioned material is used as quarter-wave plate, it can work in two different wave bands, and when it is used as half-wave plate, it can only work in one wave band. Can work at the same time at three wave bands at most, and can be used as a half wave plate and a quarter wave plate.
At a fixed parameter of grating ridge widthW=0.15um, depth of optical grooveH 1=0.19 um, grating periodP=0.30um, thickness of transition layerH 2When =0.06um, change aloneWThe amplitude ratio and the phase difference image are shown in fig. 11(a) and (c), and the structural reflectance is shown in fig. 11(b) and (d). FIG. 11(a)WWhen the value is =0.10 um, the quarter wave plate can be used at 0.763 um, and the error tolerance of the quarter wave plate is within the allowable range. While in FIG. 11(c) followsWWhen the wavelength is changed from 0.10um to 0.22um, the phase difference is increased at the whole wavelength and can be increased atWAnd when the wavelength is 0.22um, the optical fiber is used as a quarter-wave plate at the wavelength of 0.832um and is used as a half-wave plate at the wavelength of 0.507 um. The amplitude ratio was 1.09 and 1.1, respectively, just meeting the wave plate standard. Therefore, W can be considered to vary from 0.10um to 0.22um, and can be used as a quarter-wave plate and a half-wave plate.
Due to the transition layerH 2And grating periodPThe influence is small, so the parameters that can be used as the multiband wave plate are: grating periodP0.20 um-0.35 um, transition layer thicknessH 2Is 0.2um to 0.8um, the duty ratio W/P is 0.3 to 0.8, the depth of the optical grooveH 1Is 0.11um to 0.40 um. Working in unisonThe range is as follows: the optical fiber can be used as a quarter-wave plate at 0.382 um-2.076 um and a half-wave plate at 0.40 um-1.206 um by parameter adjustment. Within these parameters, one band or two bands or three bands can be operated simultaneously. The amplitude ratio floats between 0.9 and 1.1, and the reflectivity is 75 to 95 percent. Therein, in particular, whenP=0.30um，H 1=0.19，H 2=0.6um，WAnd when the wavelength is not less than 0.15um, the laser can be used as a half-wave plate and a quarter-wave plate at two laser wavelengths of 405um and 808um respectively.

Claims (1)

1. A multiband all-metal multifunctional wave plate comprises a substrate layer (1); the method is characterized in that: a transition layer (2) is arranged above the substrate layer (1), and a grating layer (3) is arranged on the transition layer (2);
the grating layer (3) is made of indium materials and has a structure of one of triangular prisms, semi-cylinders and rectangular columns which are uniformly arranged at intervals; the substrate layer (1) is made of nickel material; the transition layer (2) is made of aluminum material, and the thickness of the transition layer (2)H 2=0.06 um; the ridge width of the grating layer (3)W=0.15um, grating periodP=0.30um, depth of optical grooveH 1=0.19um。
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CN101770048A (en) * 2010-03-11 2010-07-07 中国科学院上海光学精密机械研究所 Polarization-independent high-efficiency quartz transmission triangular grating
CN101915958A (en) * 2010-07-26 2010-12-15 苏州大学 Polarizing and filtering composite function device with micro/nano structure

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Publication number Priority date Publication date Assignee Title
CN101344604A (en) * 2008-08-18 2009-01-14 中国科学院上海光学精密机械研究所 Reflection type quartz polarization beam splitting grating based on metal layer reflection
CN101770048A (en) * 2010-03-11 2010-07-07 中国科学院上海光学精密机械研究所 Polarization-independent high-efficiency quartz transmission triangular grating
CN101915958A (en) * 2010-07-26 2010-12-15 苏州大学 Polarizing and filtering composite function device with micro/nano structure

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