CN101688771B - 用于物体的三维测量的测量组件和方法 - Google Patents
用于物体的三维测量的测量组件和方法 Download PDFInfo
- Publication number
- CN101688771B CN101688771B CN2008800130775A CN200880013077A CN101688771B CN 101688771 B CN101688771 B CN 101688771B CN 2008800130775 A CN2008800130775 A CN 2008800130775A CN 200880013077 A CN200880013077 A CN 200880013077A CN 101688771 B CN101688771 B CN 101688771B
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- China
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- focus
- measurement assembly
- spectrum
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- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
-
- A—HUMAN NECESSITIES
- A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
- A61C—DENTISTRY; APPARATUS OR METHODS FOR ORAL OR DENTAL HYGIENE
- A61C9/00—Impression cups, i.e. impression trays; Impression methods
- A61C9/004—Means or methods for taking digitized impressions
- A61C9/0046—Data acquisition means or methods
- A61C9/0053—Optical means or methods, e.g. scanning the teeth by a laser or light beam
- A61C9/006—Optical means or methods, e.g. scanning the teeth by a laser or light beam projecting one or more stripes or patterns on the teeth
-
- A—HUMAN NECESSITIES
- A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
- A61C—DENTISTRY; APPARATUS OR METHODS FOR ORAL OR DENTAL HYGIENE
- A61C9/00—Impression cups, i.e. impression trays; Impression methods
- A61C9/004—Means or methods for taking digitized impressions
- A61C9/0046—Data acquisition means or methods
- A61C9/0053—Optical means or methods, e.g. scanning the teeth by a laser or light beam
- A61C9/0066—Depth determination through adaptive focusing
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B21/00—Microscopes
- G02B21/0004—Microscopes specially adapted for specific applications
- G02B21/002—Scanning microscopes
- G02B21/0024—Confocal scanning microscopes (CSOMs) or confocal "macroscopes"; Accessories which are not restricted to use with CSOMs, e.g. sample holders
- G02B21/0032—Optical details of illumination, e.g. light-sources, pinholes, beam splitters, slits, fibers
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B21/00—Microscopes
- G02B21/0004—Microscopes specially adapted for specific applications
- G02B21/002—Scanning microscopes
- G02B21/0024—Confocal scanning microscopes (CSOMs) or confocal "macroscopes"; Accessories which are not restricted to use with CSOMs, e.g. sample holders
- G02B21/0036—Scanning details, e.g. scanning stages
- G02B21/0044—Scanning details, e.g. scanning stages moving apertures, e.g. Nipkow disks, rotating lens arrays
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B21/00—Microscopes
- G02B21/0004—Microscopes specially adapted for specific applications
- G02B21/002—Scanning microscopes
- G02B21/0024—Confocal scanning microscopes (CSOMs) or confocal "macroscopes"; Accessories which are not restricted to use with CSOMs, e.g. sample holders
- G02B21/0052—Optical details of the image generation
- G02B21/0064—Optical details of the image generation multi-spectral or wavelength-selective arrangements, e.g. wavelength fan-out, chromatic profiling
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B2210/00—Aspects not specifically covered by any group under G01B, e.g. of wheel alignment, caliper-like sensors
- G01B2210/50—Using chromatic effects to achieve wavelength-dependent depth resolution
Landscapes
- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Optics & Photonics (AREA)
- General Physics & Mathematics (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Oral & Maxillofacial Surgery (AREA)
- Life Sciences & Earth Sciences (AREA)
- Animal Behavior & Ethology (AREA)
- General Health & Medical Sciences (AREA)
- Public Health (AREA)
- Veterinary Medicine (AREA)
- Epidemiology (AREA)
- Dentistry (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Length Measuring Devices By Optical Means (AREA)
- Dental Tools And Instruments Or Auxiliary Dental Instruments (AREA)
- Mechanical Optical Scanning Systems (AREA)
- Microscoopes, Condenser (AREA)
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE102007019267A DE102007019267A1 (de) | 2007-04-24 | 2007-04-24 | Messanordnung sowie Verfahren zum dreidimensionalen Messen eines Objekts |
DE102007019267.5 | 2007-04-24 | ||
PCT/EP2008/054982 WO2008129073A2 (de) | 2007-04-24 | 2008-04-24 | Messanordnung sowie verfahren zum dreidimensionalen messen eines objekts |
Publications (2)
Publication Number | Publication Date |
---|---|
CN101688771A CN101688771A (zh) | 2010-03-31 |
CN101688771B true CN101688771B (zh) | 2012-06-06 |
Family
ID=39777396
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN2008800130775A Active CN101688771B (zh) | 2007-04-24 | 2008-04-24 | 用于物体的三维测量的测量组件和方法 |
Country Status (9)
Country | Link |
---|---|
US (1) | US8515528B2 (de) |
EP (1) | EP2087312B1 (de) |
JP (1) | JP5102349B2 (de) |
CN (1) | CN101688771B (de) |
AU (1) | AU2008240597B2 (de) |
BR (1) | BRPI0811031B1 (de) |
CA (1) | CA2682297C (de) |
DE (1) | DE102007019267A1 (de) |
WO (1) | WO2008129073A2 (de) |
Families Citing this family (64)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE202007014435U1 (de) * | 2007-10-16 | 2009-03-05 | Gurny, Eric | Optischer Sensor für eine Messvorrichtung |
DE102009025815A1 (de) * | 2009-05-15 | 2010-11-25 | Degudent Gmbh | Messanordnung sowie Verfahren zum dreidimensionalen Messen eines Objektes |
US8767216B2 (en) * | 2009-10-13 | 2014-07-01 | California Institute Of Technology | Holographically illuminated imaging devices |
WO2011080670A1 (en) * | 2009-12-30 | 2011-07-07 | Koninklijke Philips Electronics N.V. | Sensor for microscopy. |
WO2011106327A2 (en) * | 2010-02-23 | 2011-09-01 | California Institute Of Technology | High resolution imaging devices with wide field and extended focus |
KR101640456B1 (ko) * | 2010-03-15 | 2016-07-19 | 삼성전자주식회사 | 디스플레이 패널의 각 픽셀들의 개구부를 통해 촬영하는 촬영 장치 및 방법 |
US8134719B2 (en) * | 2010-03-19 | 2012-03-13 | Carestream Health, Inc. | 3-D imaging using telecentric defocus |
DE102010036447A1 (de) * | 2010-03-26 | 2011-09-29 | Degudent Gmbh | Verfahren zur Ermittlung von Materialcharakteristika |
DE102010036496A1 (de) | 2010-04-23 | 2011-10-27 | Degudent Gmbh | Verfahren und Anordnung zum Einkoppeln von von LEDs emittierter Strahlung |
CN101881607A (zh) * | 2010-06-10 | 2010-11-10 | 上海理工大学 | 一种检测平面误差*** |
CN102008282B (zh) * | 2010-10-29 | 2012-08-08 | 深圳大学 | 数字印模口内扫描仪及口腔内表面形貌图像实时重建*** |
US9769455B2 (en) | 2010-12-21 | 2017-09-19 | 3Shape A/S | 3D focus scanner with two cameras |
WO2012122398A2 (en) | 2011-03-09 | 2012-09-13 | California Institute Of Technology | Talbot imaging devices and systems |
KR101801355B1 (ko) * | 2011-03-25 | 2017-11-24 | 엘지전자 주식회사 | 회절 소자와 광원을 이용한 대상물의 거리 인식 장치 |
WO2012145566A2 (en) | 2011-04-20 | 2012-10-26 | California Institute Of Technology | Talbot-illuminated imaging devices, systems, and methods for focal plane tuning |
DE102011101476B4 (de) * | 2011-05-11 | 2023-05-25 | Cognex Ireland Ltd. | Verfahren zur 3D-Messung von Objekten |
DE102011083718A1 (de) * | 2011-09-29 | 2013-04-04 | Siemens Aktiengesellschaft | Konfokales Spektrometer und Verfahren zur Bildgebung in einem konfokalen Spektrometer |
DE102011083726A1 (de) * | 2011-09-29 | 2013-04-04 | Siemens Aktiengesellschaft | Konfokales Spektrometer und Verfahren zur Bildgebung in einem konfokalen Spektrometer |
CN104884894B (zh) * | 2012-02-07 | 2018-05-15 | 株式会社尼康 | 成像光学***、测定装置、形状测定装置、构造物制造***、及构造物制造方法 |
DE102012102580A1 (de) * | 2012-03-26 | 2013-09-26 | Degudent Gmbh | Verfahren zum Messen eines Objektes sowie Intraoral-Scanner |
GB201205491D0 (en) * | 2012-03-28 | 2012-05-09 | Ucl Business Plc | Measuring surface curvature |
DE102012009836A1 (de) * | 2012-05-16 | 2013-11-21 | Carl Zeiss Microscopy Gmbh | Lichtmikroskop und Verfahren zur Bildaufnahme mit einem Lichtmikroskop |
JP6091100B2 (ja) * | 2012-07-10 | 2017-03-08 | 日本分光株式会社 | 共焦点顕微装置 |
DE102013008582B4 (de) | 2013-05-08 | 2015-04-30 | Technische Universität Ilmenau | Verfahren und Vorrichtung zur chromatisch-konfokalen Mehrpunktmessung sowie deren Verwendung |
FR3006758B1 (fr) * | 2013-06-05 | 2016-05-06 | Asentys Sas | Dispositif optique integre de mesure sans contact d'altitudes et d'epaisseurs |
US9019576B2 (en) | 2013-06-21 | 2015-04-28 | 3Shape A/S | Scanning apparatus with patterned probe light |
DE102013223894B3 (de) * | 2013-11-22 | 2015-02-19 | Sirona Dental Systems Gmbh | Optisches Messsystem und Verfahren zur dreidimensionalen optischen Vermessung eines Objekts |
EP3146291A2 (de) * | 2014-05-18 | 2017-03-29 | ADOM Advanced Optical Technologies Ltd. | System für tomografie- und/oder topografiemessungen eines überlagerten objekts |
US9439568B2 (en) | 2014-07-03 | 2016-09-13 | Align Technology, Inc. | Apparatus and method for measuring surface topography optically |
US9261358B2 (en) | 2014-07-03 | 2016-02-16 | Align Technology, Inc. | Chromatic confocal system |
US10772506B2 (en) | 2014-07-07 | 2020-09-15 | Align Technology, Inc. | Apparatus for dental confocal imaging |
WO2016092348A1 (fr) * | 2014-12-09 | 2016-06-16 | Asentys Sas | Dispositif optique integre de mesure sans contact d'altitudes et d'epaisseurs. |
CN105807580B (zh) * | 2014-12-31 | 2019-12-24 | 上海微电子装备(集团)股份有限公司 | 一种工件六自由度位置和姿态测量传感器装置 |
DE102015201317A1 (de) * | 2015-01-27 | 2016-07-28 | Bayerische Motoren Werke Aktiengesellschaft | Vermessen einer Abmessung auf einer Oberfläche |
DE202015100878U1 (de) | 2015-02-24 | 2015-03-04 | Göpel electronic GmbH | Automatisches optisches Inspektionssystem zur dreidimensionalen Vermessung von bestückten elektronischen Flachbaugruppen |
CN106154760B (zh) * | 2015-04-15 | 2019-01-29 | 上海微电子装备(集团)股份有限公司 | 一种曝光装置及曝光方法 |
KR101628730B1 (ko) * | 2015-04-30 | 2016-06-21 | 주식회사 투아이스펙트라 | 치과용 3차원 이미징 방법 및 그 시스템 |
DE102015108912A1 (de) | 2015-06-05 | 2016-12-08 | Carl Zeiss Microscopy Gmbh | Vorrichtung und Verfahren zur Erfassung von Oberflächentopographien |
JPWO2017002535A1 (ja) * | 2015-06-29 | 2018-05-31 | 国立大学法人徳島大学 | 計測装置 |
CN105266815B (zh) * | 2015-09-17 | 2017-12-29 | 苏州佳世达光电有限公司 | 电子装置 |
CN113532286A (zh) * | 2015-12-25 | 2021-10-22 | 株式会社基恩士 | 共焦位移计 |
DE102016000415A1 (de) * | 2016-01-19 | 2017-07-20 | DüRR DENTAL AG | Vorrichtung zum dreidimensionalen Erfassen einer Oberflächenstruktur |
JP6704831B2 (ja) * | 2016-10-20 | 2020-06-03 | 株式会社ミツトヨ | クロマティック共焦点センサ |
DE102016221630A1 (de) | 2016-11-04 | 2018-05-09 | Carl Zeiss Industrielle Messtechnik Gmbh | Konfokal chromatischer Sensor zur Bestimmung von Koordinaten eines Messobjekts |
US10197781B2 (en) * | 2016-12-29 | 2019-02-05 | Asm Technology Singapore Pte Ltd | Vertical chromatic confocal scanning method and system |
DE102017000296B4 (de) | 2017-01-15 | 2021-02-11 | Baden-Württemberg Stiftung Ggmbh | Messsystem und Verfahren zur kombinierten Erfassung der Oberflächentopographie und hyperspektralen Bildgebung |
CN106907998B (zh) * | 2017-03-20 | 2018-07-06 | 深圳立仪科技有限公司 | 线性优化的光谱共焦测量装置及方法 |
CN107007250B (zh) * | 2017-05-31 | 2018-11-30 | 广东工业大学 | 一种眼底成像光学*** |
AU2018301719A1 (en) * | 2017-07-14 | 2020-02-13 | Can Technologies, Inc. | Method and device for evaluating muscle development in an animal |
DE102017214189A1 (de) * | 2017-08-15 | 2019-02-21 | Carl Zeiss Microscopy Gmbh | Verfahren zum Betrieb einer Mikroskopieranordnung und Mikroskopieranordnung mit einem ersten Mikroskop und mindestens einem weiteren Mikroskop |
DE102018107710B4 (de) * | 2018-03-29 | 2021-01-14 | Dürr Dental SE | Intraoraler parallelkonfokaler Oberflächenscanner mit Störlichtsubtraktion |
JP6908556B2 (ja) * | 2018-05-08 | 2021-07-28 | 京セラ株式会社 | 電磁波検出装置及び情報取得システム |
DE102018115673A1 (de) * | 2018-06-28 | 2020-02-13 | Carl Zeiss Ag | Verfahren und Vorrichtungen zur Musterprojektion |
WO2020042190A1 (zh) * | 2018-08-31 | 2020-03-05 | 苏州大学张家港工业技术研究院 | 一种基于色散光谱编码的微结构形貌测量方法及其装置 |
CN112930468B (zh) | 2018-11-08 | 2022-11-18 | 成都频泰鼎丰企业管理中心(有限合伙) | 三维测量设备 |
CN109350010B (zh) * | 2018-11-19 | 2023-12-26 | 郑州轻工业学院 | 一种全息内窥光学相干层析成像装置和成像方法 |
CN111351448B (zh) * | 2018-12-24 | 2021-07-06 | 深圳中科飞测科技股份有限公司 | 检测设备和检测方法 |
US11287626B2 (en) | 2019-05-17 | 2022-03-29 | Hong Kong Applied Science and Technology Research Institute Comoanv Limited | Chromatic confocal system and a method for inspecting an object |
DE102019208114B4 (de) | 2019-06-04 | 2022-03-17 | Carl Zeiss Industrielle Messtechnik Gmbh | Vorrichtung und Verfahren zur 3D Vermessung von Objektkoordinaten |
DE102019122866A1 (de) * | 2019-08-26 | 2019-10-24 | Precitec Optronik Gmbh | Optische Messvorrichtung |
DE102020200214A1 (de) | 2020-01-09 | 2021-07-15 | Hochschule für angewandte Wissenschaften Kempten Körperschaft des öffentlichen Rechts | Konfokale Messvorrichtung zur 3D-Vermessung einer Objektoberfläche |
CN111457836A (zh) * | 2020-04-09 | 2020-07-28 | 中山易美杰智能科技有限公司 | 一种即时表面三维相机的构造 |
DE102020110298A1 (de) | 2020-04-15 | 2021-09-30 | Carl Zeiss Industrielle Messtechnik Gmbh | Vorrichtung und Verfahren zur optischen Messung einer Oberflächentopographie |
CN113418469B (zh) * | 2021-07-08 | 2023-01-31 | 西安工业大学 | 光谱共焦扫描共光路数字全息测量***及测量方法 |
Family Cites Families (14)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE1963594A1 (de) | 1969-12-18 | 1971-06-24 | Hans Zimmermann | Hoehenverstellbare Heizkoerperkonsole |
CH671828A5 (de) | 1987-06-26 | 1989-09-29 | Battelle Memorial Institute | |
JPH03223709A (ja) | 1989-12-04 | 1991-10-02 | Fuji Photo Film Co Ltd | 共焦点走査型顕微鏡 |
DE4023292A1 (de) | 1990-07-21 | 1992-01-23 | Leica Lasertechnik | Anordnung zur simultanen konfokalen bilderzeugung |
JPH08233544A (ja) | 1995-02-28 | 1996-09-13 | Komatsu Ltd | 共焦点光学装置 |
DE19632594A1 (de) * | 1996-08-13 | 1998-02-19 | Johannes Prof Dr Schwider | Konfokales Mikroskop unter Anwendung von refraktiven Mikrolinsen-Feldern |
JP3816632B2 (ja) * | 1997-05-14 | 2006-08-30 | オリンパス株式会社 | 走査型顕微鏡 |
JPH11211439A (ja) * | 1998-01-22 | 1999-08-06 | Takaoka Electric Mfg Co Ltd | 表面形状計測装置 |
US6867406B1 (en) * | 1999-03-23 | 2005-03-15 | Kla-Tencor Corporation | Confocal wafer inspection method and apparatus using fly lens arrangement |
DE19918689C2 (de) * | 1999-04-23 | 2003-05-28 | Rudolf Groskopf | Vorrichtung zur dreidimensionalen konfocalen optischen Untersuchung eines Objektes mit Beleuchtung durch eine Lochplatte |
DE10242374A1 (de) * | 2002-09-12 | 2004-04-01 | Siemens Ag | Konfokaler Abstandssensor |
DE10321885B4 (de) * | 2003-05-07 | 2016-09-08 | Universität Stuttgart | Anordnung und Verfahren zur hochdynamischen, konfokalen Technik |
JP4231754B2 (ja) | 2003-08-22 | 2009-03-04 | オリンパス株式会社 | レーザ走査型蛍光顕微鏡 |
DE102006007170B4 (de) * | 2006-02-08 | 2009-06-10 | Sirona Dental Systems Gmbh | Verfahren und Anordnung zur schnellen und robusten chromatisch konfokalen 3D-Messtechnik |
-
2007
- 2007-04-24 DE DE102007019267A patent/DE102007019267A1/de not_active Withdrawn
-
2008
- 2008-04-24 JP JP2010504684A patent/JP5102349B2/ja active Active
- 2008-04-24 CN CN2008800130775A patent/CN101688771B/zh active Active
- 2008-04-24 AU AU2008240597A patent/AU2008240597B2/en not_active Ceased
- 2008-04-24 WO PCT/EP2008/054982 patent/WO2008129073A2/de active Application Filing
- 2008-04-24 EP EP08749696.4A patent/EP2087312B1/de active Active
- 2008-04-24 CA CA2682297A patent/CA2682297C/en active Active
- 2008-04-24 US US12/532,262 patent/US8515528B2/en active Active
- 2008-04-24 BR BRPI0811031-0A patent/BRPI0811031B1/pt not_active IP Right Cessation
Also Published As
Publication number | Publication date |
---|---|
CN101688771A (zh) | 2010-03-31 |
BRPI0811031B1 (pt) | 2018-06-05 |
US20100099984A1 (en) | 2010-04-22 |
CA2682297A1 (en) | 2008-10-30 |
DE102007019267A1 (de) | 2008-10-30 |
EP2087312B1 (de) | 2015-02-11 |
JP5102349B2 (ja) | 2012-12-19 |
WO2008129073A3 (de) | 2008-12-11 |
CA2682297C (en) | 2014-03-04 |
WO2008129073A2 (de) | 2008-10-30 |
JP2010525404A (ja) | 2010-07-22 |
BRPI0811031A2 (pt) | 2014-12-09 |
AU2008240597B2 (en) | 2013-08-29 |
AU2008240597A1 (en) | 2008-10-30 |
US8515528B2 (en) | 2013-08-20 |
EP2087312A2 (de) | 2009-08-12 |
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