FR3006758B1 - Dispositif optique integre de mesure sans contact d'altitudes et d'epaisseurs - Google Patents

Dispositif optique integre de mesure sans contact d'altitudes et d'epaisseurs

Info

Publication number
FR3006758B1
FR3006758B1 FR1301271A FR1301271A FR3006758B1 FR 3006758 B1 FR3006758 B1 FR 3006758B1 FR 1301271 A FR1301271 A FR 1301271A FR 1301271 A FR1301271 A FR 1301271A FR 3006758 B1 FR3006758 B1 FR 3006758B1
Authority
FR
France
Prior art keywords
altitudes
thicknesses
optical device
integrated optical
contact measurement
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
FR1301271A
Other languages
English (en)
Other versions
FR3006758A1 (fr
Inventor
David Reolon
David Marsaut
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
ASENTYS Sas
Original Assignee
ASENTYS Sas
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Family has litigation
First worldwide family litigation filed litigation Critical https://patents.darts-ip.com/?family=49949703&utm_source=***_patent&utm_medium=platform_link&utm_campaign=public_patent_search&patent=FR3006758(B1) "Global patent litigation dataset” by Darts-ip is licensed under a Creative Commons Attribution 4.0 International License.
Application filed by ASENTYS Sas filed Critical ASENTYS Sas
Priority to FR1301271A priority Critical patent/FR3006758B1/fr
Publication of FR3006758A1 publication Critical patent/FR3006758A1/fr
Application granted granted Critical
Publication of FR3006758B1 publication Critical patent/FR3006758B1/fr
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
    • G01B11/06—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material
    • G01B11/0616—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material of coating
    • G01B11/0625—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material of coating with measurement of absorption or reflection
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
    • G01B11/06—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material
    • G01B11/0608—Height gauges
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B21/00—Microscopes
    • G02B21/0004—Microscopes specially adapted for specific applications
    • G02B21/002—Scanning microscopes
    • G02B21/0024—Confocal scanning microscopes (CSOMs) or confocal "macroscopes"; Accessories which are not restricted to use with CSOMs, e.g. sample holders
    • G02B21/0032—Optical details of illumination, e.g. light-sources, pinholes, beam splitters, slits, fibers
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B21/00—Microscopes
    • G02B21/0004—Microscopes specially adapted for specific applications
    • G02B21/002—Scanning microscopes
    • G02B21/0024—Confocal scanning microscopes (CSOMs) or confocal "macroscopes"; Accessories which are not restricted to use with CSOMs, e.g. sample holders
    • G02B21/0052—Optical details of the image generation
    • G02B21/0064—Optical details of the image generation multi-spectral or wavelength-selective arrangements, e.g. wavelength fan-out, chromatic profiling
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B2210/00—Aspects not specifically covered by any group under G01B, e.g. of wheel alignment, caliper-like sensors
    • G01B2210/50—Using chromatic effects to achieve wavelength-dependent depth resolution

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Optics & Photonics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Length Measuring Devices By Optical Means (AREA)
FR1301271A 2013-06-05 2013-06-05 Dispositif optique integre de mesure sans contact d'altitudes et d'epaisseurs Expired - Fee Related FR3006758B1 (fr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
FR1301271A FR3006758B1 (fr) 2013-06-05 2013-06-05 Dispositif optique integre de mesure sans contact d'altitudes et d'epaisseurs

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR1301271A FR3006758B1 (fr) 2013-06-05 2013-06-05 Dispositif optique integre de mesure sans contact d'altitudes et d'epaisseurs

Publications (2)

Publication Number Publication Date
FR3006758A1 FR3006758A1 (fr) 2014-12-12
FR3006758B1 true FR3006758B1 (fr) 2016-05-06

Family

ID=49949703

Family Applications (1)

Application Number Title Priority Date Filing Date
FR1301271A Expired - Fee Related FR3006758B1 (fr) 2013-06-05 2013-06-05 Dispositif optique integre de mesure sans contact d'altitudes et d'epaisseurs

Country Status (1)

Country Link
FR (1) FR3006758B1 (fr)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109073369A (zh) * 2016-03-25 2018-12-21 Fogale 纳米技术公司 用于以可变空间分辨率对晶片等对象进行2d/3d检测的共焦色差装置和方法
DE102021106766A1 (de) 2021-03-19 2022-09-22 Precitec Optronik Gmbh Chromatisch-konfokales Messsystem für Hochgeschwindigkeits-Abstandsmessung

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP3222964B1 (fr) * 2016-03-25 2020-01-15 Fogale Nanotech Dispositif et procédé confocal chromatique pour l'inspection 2d/3d d'un objet tel qu'une plaquette
EP3431918B1 (fr) * 2017-07-20 2021-03-31 Fogale Nanotech Capteur confocal multicanal et procédé associé permettant d'inspecter un échantillon

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8319978B2 (en) * 2006-07-11 2012-11-27 Camtek Ltd. System and method for probe mark analysis
DE102007019267A1 (de) * 2007-04-24 2008-10-30 Degudent Gmbh Messanordnung sowie Verfahren zum dreidimensionalen Messen eines Objekts
TWI414817B (zh) * 2010-07-23 2013-11-11 Univ Nat Taipei Technology 線型彩色共焦顯微系統

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109073369A (zh) * 2016-03-25 2018-12-21 Fogale 纳米技术公司 用于以可变空间分辨率对晶片等对象进行2d/3d检测的共焦色差装置和方法
DE102021106766A1 (de) 2021-03-19 2022-09-22 Precitec Optronik Gmbh Chromatisch-konfokales Messsystem für Hochgeschwindigkeits-Abstandsmessung
WO2022194670A1 (fr) 2021-03-19 2022-09-22 Precitec Optronik Gmbh Système de mesure confocale chromatique pour la mesure de distance à grande vitesse
KR20230157493A (ko) 2021-03-19 2023-11-16 프레시텍 옵트로닉 게엠베하 고속 거리 측정을 위한 색채 공초점 측정 시스템

Also Published As

Publication number Publication date
FR3006758A1 (fr) 2014-12-12

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