CN101635322B - Method and device for chain velvet making of multi-crystalline solar cell - Google Patents

Method and device for chain velvet making of multi-crystalline solar cell Download PDF

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Publication number
CN101635322B
CN101635322B CN2009100915207A CN200910091520A CN101635322B CN 101635322 B CN101635322 B CN 101635322B CN 2009100915207 A CN2009100915207 A CN 2009100915207A CN 200910091520 A CN200910091520 A CN 200910091520A CN 101635322 B CN101635322 B CN 101635322B
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cell body
liquid
soup
groove
pipeline
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CN101635322A (en
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孙良欣
刘烨
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GIGA solar holding Co., Ltd.
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China United Cleaning Technology Co ltd Beijing
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    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02PCLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P70/00Climate change mitigation technologies in the production process for final industrial or consumer products
    • Y02P70/50Manufacturing or production processes characterised by the final manufactured product

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Abstract

The invention relates to a method and a device for the chain velvet making of a multi-crystalline solar cell. The invention adopts an overflow mode from four sides of a groove body to enable liquid to quickly overflow after reaction, and adopts a top spray mode that medical liquid is directly replenished to the periphery of silicon chips from the upper part so that the medical liquid can sufficiently contacts with the silicon chips, the temperature of the medical liquid is more beneficial to control and can be kept uniformly and velvet making effect can be improved. The invention adopts a liquid feeding mode from the groove bottom in the groove body, an liquid inlet faces downward, a liquid feeding pipeline is processed to control regulated flow, the upper part of an internal groove is provided with a weir crest, liquid entering from the liquid feeding pipeline upward overflows to the weir crest and flows into an external groove, the bottom of the external groove is provided with a liquid return opening which is connected with a medical liquid circulation supply groove through the pipeline, and the medical liquid flows back to the medical liquid circulation supply groove by gravity. The invention has the advantages of more easily controlling the temperature, effectively improving velvet making effect and product quality and reducing reflectivity, the temperature control accuracy can reach within +/-1 DEG C, and the reflectivity after velvet making can reach below 20 percent.

Description

A kind of method of chain type texturing of multicrystalline solar cells and device
Technical field
The present invention relates to improve the method and the device of chain type texturing of a kind of multicrystalline solar cells of chemical liquid concentration, temperature homogeneity, be the chain type texturing technology of multicrystalline solar cells, belong to the processing and manufacturing field of solar battery sheet.
Background technology
In the manufacturing process of existing multicrystalline solar cells, process for etching is a crucial step, and the quality of making herbs into wool is directly connected to the performance of battery sheet, wherein to the concentration of soup, temperature homogeneity require the most key; Tradition polycrystalline chain type texturing process using soup is in the overflow of cell body both sides, soup submergence polysilicon chip mode (as shown in Figure 1, 2), in texturing slot, the soup displacement at middle part can not be carried out synchronously with the soup at other position, cause the inhomogeneous of liquor strength, temperature, the reaction speed of uncontrollable Wafer, and then influence the effect of making herbs into wool.
Summary of the invention
In order to overcome the deficiency of prior art structure, the invention provides a kind of method and device of chain type texturing of multicrystalline solar cells, well solved this problem.
The technical solution adopted for the present invention to solve the technical problems is: a kind of method of chain type texturing of multicrystalline solar cells, contain following steps:
Step 1; Adopt cell body four sides overflow mode, make reaction back liquid overflow fast;
Step 2; Spray mode in the employing; On the top of dipper, increased the shower of some, soup by top directly add to silicon chip around; It is more abundant that soup is contacted with silicon chip, also makes fluid temperature more help control simultaneously, keeps uniformity, improves the making herbs into wool effect;
Step 3; Adopt trench bottom feed liquor in the cell body, inlet is downward, and the feed liquor pipeline is handled, and makes soup enter each position that flows to cell body behind the inside groove uniformly, guarantees the homogeneity of inner each the position temperature of cell body, concentration,
Step 4; The regulating and controlling flow, according to the reading of flowmeter, the flow of adjusting liquid in the pipeline by control valve reaches requirement.
A kind of device of chain type texturing of multicrystalline solar cells contains cell body, spray equipment,
Cell body is divided into inside and outside groove, feed tube route cell body outside is passed inside groove cell body side plate and is entered inside groove cell body inner space, bore two row apertures on the feed liquor pipeline, two row apertures become 60 ° of angles to distribute on the circumference of pipeline, and angle is towards the cell body bottom between the two row apertures.
The top of inside groove has crest of weir, by the liquid that feed tube enters, upwards overflows crest of weir and flows in the water jacket, and outer slot bottom has liquid return hole, and liquid return hole is supplied with groove by pipeline with the soup circulation and linked to each other, and makes soup flow back to the soup circulation by gravity and supplies with groove.
Spray equipment comprises shower and flow control device two parts; Shower is made by plastic tube, has the hole of certain diameter and distance in the above;
Flow control device is made up of with control valve flowmeter: flowmeter links to each other by pipeline with control valve, and according to the reading of flowmeter, the flow of adjusting liquid in the pipeline by control valve reaches requirement.
Beneficial effect of the present invention:
1, temperature control is easier, accuracy of temperature control reaches ± 1 ℃ in;
2, effectively improve the making herbs into wool effect, improve product quality, reduce reflectivity, making herbs into wool back reflection rate reaches below 20%.
Cell body four sides overflow of the present invention makes reaction back liquid overflow fast; Added last spray mode, it is more abundant that soup is contacted with Wafer, also makes fluid temperature more help control simultaneously, keeps uniformity, improves the making herbs into wool effect.
On the basis of original cell body two sides overflow, in order to accelerate flowing of soup, and guarantee that each flow portion branch more evenly flows comparatively speaking, passage is left in side at cell body, the crest of weir that just needn't flow to two ends at the middle part of cell body soup is got back to the soup service tank like this, when having reduced the reacted soup in middle part and having flowed to the two ends of cell body to the influence of other silicon chip, guarantee that as far as possible the soup around each sheet silicon chip is new soup, rather than firm reacted soup, reduced the temperature rising that reaction brings, replenished the loss of reaction back soup, be more conducive to the temperature of soup, the control of concentration, guarantee the homogeneity of soup around silicon chip, and then guarantee the homogeneity of making herbs into wool.
Secondly,,, increased the shower of some on the top of dipper for the temperature that further guarantees soup (the particularly soup at cell body middle part) around the silicon chip, the homogeneity of concentration, soup by top directly add to silicon chip around.One is the new drug additional temperature increase that has reduced a large amount of heat releases in silicon chip reaction back and caused at night, helps the constant of temperature; In addition, because the consumption of medicine liquid ingredient when having new drug to replenish reaction night, help the constant of liquor strength around the silicon chip.
In a word, take said method after, further strengthened control to fluid temperature, concentration homogeneity, guarantee that fluid temperature, concentration change, and have guaranteed that the effect of making herbs into wool reaches production requirement, and have increased in the scope that requires.
Description of drawings
Fig. 1 is the prior art schematic diagram;
Fig. 2 is the prior art schematic diagram;
Fig. 3 is a structural representation of the present invention;
Fig. 4 is a structural representation of the present invention.
The present invention is further described below in conjunction with drawings and Examples.
Embodiment
Embodiment 1: as shown in Figure 3, adopt the form of four sides overflow, quicken flowing and renewal of soup, take away the heat that the silicon chip reaction is put, guarantee the homogeneity of silicon chip reaction temperature and concentration, thereby the effect that guarantees making herbs into wool is better.
A kind of method of chain type texturing of multicrystalline solar cells, contain following steps:
Step 1; Adopt cell body four sides overflow mode, make reaction back liquid overflow fast;
Step 2; Spray mode in the employing; On the top of dipper, increased the shower 2 of some, soup by top directly add to silicon chip 3 around; It is more abundant that soup is contacted with Wafer, also makes fluid temperature more help control simultaneously, keeps uniformity, improves the making herbs into wool effect;
Step 3; Adopt trench bottom feed liquor in the cell body, inlet is downward, and the feed liquor pipeline handled, make soup enter each position that flows to cell body behind the inside groove uniformly, guarantee the homogeneity of inner each the position temperature of cell body, concentration, temperature is controlled at 8 ± 1 ℃, liquor strength and is: H2O: HF: HNO 3=4: 3: 6;
Step 4; The regulating and controlling flow, according to the reading of flowmeter, the flow of adjusting liquid in the pipeline by control valve reaches requirement.By control to medicinal liquid flow, the flow direction, scope, in time replenish fresh liquor to the place that needs, better control the homogeneity of temperature, concentration.
A kind of device of chain type texturing of multicrystalline solar cells contains cell body, spray equipment,
Cell body is divided into inside groove 1, water jacket, inside groove 1 bottom feed liquor, and inlet is downward, and feed liquor pipeline 5 is handled, and makes soup enter each position that flows to cell body behind the inside groove 1 uniformly, guarantees the homogeneity of inner each the position temperature of cell body, concentration.
Feed tube route cell body outside is passed inside groove 1 cell body side plate and is entered inside groove 1 cell body inner space, bores two row apertures on feed liquor pipeline 5, and two row apertures become 60 ° of angles to distribute on the circumference of pipeline, and angle is towards the cell body bottom of inside groove 1 between the two row apertures.
The four sides on the top of inside groove 1 has crest of weir 4, realizes the four sides overflow of soup, makes soup form the good homogeneous flow regime in cell body, helps the temperature of soup, the control of concentration; By the liquid that feed liquor pipeline 5 enters, upwards to overflow crest of weir 4 and flow in the water jacket, outer slot bottom has liquid return hole, and liquid return hole is supplied with groove by pipeline with the soup circulation and is linked to each other, and makes soup flow back to the soup circulation by gravity and supplies with groove.The soup that inside groove 1 overflows is longer than the two sides overflow time in the water jacket time of staying, and the soup that reaction back temperature raises can be lowered the temperature by nature, has reduced the burden of temperature control system, helps temperature controlling.
Spray equipment comprises shower 2 and flow control device two parts; Shower 2 is made by plastic tube, has the hole of certain diameter and distance in the above; The flow direction of control soup, the distribution of scope.
Flow control device is made up of with control valve flowmeter: flowmeter links to each other by pipeline with control valve, and according to the reading of flowmeter, the flow of adjusting liquid in the pipeline by control valve reaches requirement.By control to medicinal liquid flow, the flow direction, scope, in time replenish fresh liquor to the place that needs, better control the homogeneity of temperature, concentration.

Claims (1)

1. the method for the chain type texturing of a multicrystalline solar cells is characterized in that containing following steps:
Step 1: adopt cell body four sides overflow mode, make reaction back liquid overflow fast;
Step 2: spray mode in the employing; Top at dipper is provided with shower, soup by top directly add to silicon chip around; It is more abundant that soup is contacted with silicon chip, also makes fluid temperature more help control simultaneously, keeps uniformity, improves the making herbs into wool effect;
Step 3: adopt trench bottom feed liquor in the cell body, inlet is downward, and the feed liquor pipeline is handled, and makes soup enter each position that flows to cell body behind the inside groove uniformly, guarantees the homogeneity of inner each the position temperature of cell body, concentration,
Step 4: the regulating and controlling flow, according to the reading of flowmeter, the flow of adjusting liquid in the pipeline by control valve reaches requirement;
Feed tube route cell body outside is passed inside groove cell body side plate and is entered inside groove cell body inner space, bores two row apertures on the feed liquor pipeline, and two row apertures become 60 ° of angles to distribute on the circumference of pipeline, and angle is towards the cell body bottom of inside groove between the two row apertures.
CN2009100915207A 2009-08-26 2009-08-26 Method and device for chain velvet making of multi-crystalline solar cell Expired - Fee Related CN101635322B (en)

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CN2009100915207A CN101635322B (en) 2009-08-26 2009-08-26 Method and device for chain velvet making of multi-crystalline solar cell

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102479868B (en) * 2010-11-25 2014-04-02 浙江贝盛光伏股份有限公司 Method for quickly adjusting thickness reduction amount during polycrystal texturing
CN102709380B (en) * 2012-04-28 2014-06-25 中国电子科技集团公司第二研究所 Texturing component of thin-film solar glass substrate texturing unit
CN105470170B (en) * 2015-11-23 2018-05-25 百力达太阳能股份有限公司 Make the uniform system of texturing slot chemistry tank liquor temperature

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1841670A (en) * 2005-03-31 2006-10-04 弘塑科技股份有限公司 Wafer cleaning and drying apparatus
TW200913045A (en) * 2007-05-25 2009-03-16 Schmid Gmbh & Amp Co Geb Method for the treatment of silicon wafers, treatment liquid and silicon wafer

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1841670A (en) * 2005-03-31 2006-10-04 弘塑科技股份有限公司 Wafer cleaning and drying apparatus
TW200913045A (en) * 2007-05-25 2009-03-16 Schmid Gmbh & Amp Co Geb Method for the treatment of silicon wafers, treatment liquid and silicon wafer

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Owner name: BEIJING GIGASOLAR TECHNOLOGY CO., LTD.

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Address after: 100012, building 40, 2 Beiyuan Road, Beijing, Chaoyang District

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