CN201695088U - Tank type polycrystalline silicon wet-process texturing equipment - Google Patents
Tank type polycrystalline silicon wet-process texturing equipment Download PDFInfo
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- CN201695088U CN201695088U CN2010201586578U CN201020158657U CN201695088U CN 201695088 U CN201695088 U CN 201695088U CN 2010201586578 U CN2010201586578 U CN 2010201586578U CN 201020158657 U CN201020158657 U CN 201020158657U CN 201695088 U CN201695088 U CN 201695088U
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Abstract
The utility model relates to tank type polycrystalline silicon wet-process texturing equipment, which comprises a reaction tank with a liquid discharge port arranged at the bottom thereof. A second-stage liquid injection pipe is arranged at the bottom of the reaction tank filled with chemical solution and is communicated with the liquid outlet of a chemical solution circulating pump through a first-stage liquid injection pipe, and the liquid inlet of the pump is communicated with the reaction tank through a liquid transfer pipeline; a liquid flow equalizing plate is arranged above the second-stage liquid injection pipe of the reaction tank, a second-stage capillary condenser pipe is arranged between the second-stage liquid injection plate and the liquid flow equalizing plate, and the second-stage capillary condenser pipe, a first-stage condenser pipe, a refrigerant circulating pump serially connected in the first-stage condenser pipe and a cooling water tank filled with refrigerant form a refrigerant circulating system; and the evaporator of a compression refrigeration device provided with a controller is positioned in the refrigerant of the cooling water tank. The tank type polycrystalline silicon wet-process texturing equipment can uniformly distribute chemical solution concentration and temperature on the surfaces of all wafers in the reaction tank, so as to effectively improve texturing effect, reduce reflection rate and improve product quality.
Description
Technical field
The utility model relates to a kind of slotted polysilicon wet velvet preparing device, further is meant the polysilicon slot type wet-method etching treatment facility in semiconductor crystal silicon and the technical field of solar cell manufacturing.
Background technology
In semiconductor silicon and solar cell manufacturing, the slot type wet-method texturing manufacturing process is that wet etching is carried out on the crystal silicon chip surface, forms little ditch, matte, reduces the reflectivity of silicon chip surface, thereby make sunlight carry out multiple reflection, to improve the utilization ratio of light at silicon chip surface.In the preparation technology of sun power crystal silicon cell, the slot type wet-method texturing manufacturing process is the integral part that is related to the silicon solar energy battery surface photoabsorption, also is one of important channel of improving solar conversion efficiency.
The polycrystalline etching device that surpasses half now on the market all is the flat polycrystalline making herbs into wool of the import of price up to a up to a million dollars cleaning machine, owing to adopt the travelling belt transmission manner in the process of making herbs into wool, fragmentation rate is very high.Simultaneously, owing to be subjected to the limitation of transmission speed, the production capacity limit of flat making herbs into wool cleaning machine is 1500 slices/hour.
Deposit and following problem for polycrystalline slot type wet-method etching equipment on the market: (1) enters texturing slot when processed simultaneously at a large amount of silicon chips, is difficult to accomplish that the liquor strength of all silicon chip surfaces and temperature reach even; (2) be difficult to realize liquid homogeneous layer fluidisation from top to bottom in the groove, the while forms sinuous flow or retention areas on the surface of bottom, middle part and the silicon chip of groove; (3) size and the homogeneity of silicon chip surface matte after the very difficult assurance making herbs into wool.
The utility model content
The technical problems to be solved in the utility model is that the defective at prior art exists provides a kind of slotted polysilicon wet velvet preparing device.It is low that it can effectively improve flat making herbs into wool cleaning machine production capacity, and the characteristics that fragmentation rate is high can be improved the liquor strength of silicon chip surface in the slot type making herbs into wool process and the homogeneity of temperature simultaneously, with effective making herbs into wool effect of improving, improves product quality, reduces reflectivity.
The utility model in order to realize the technical scheme that above purpose adopts is, described slotted polysilicon wet velvet preparing device comprises that the bottom is provided with the reactive tank of leakage fluid dram, the bottom that is marked with the reactive tank of soup is furnished with the secondary liquid injection tube, this secondary liquid injection tube top has a plurality of apertures that can upwards spray soup, the one-level liquid injection tube of described secondary liquid injection tube outside reactive tank is communicated with the liquid outlet of soup recycle pump, and the fluid inlet of soup recycle pump is communicated with reactive tank through infusion pipeline; The liquid even flow plate is equipped with in the secondary liquid injection tube top of reactive tank, secondary capillary condensation pipe is housed between secondary liquid injection tube and liquid even flow plate, this secondary capillary condensation pipe between reactive tank and cooling water tank the one-level prolong and be serially connected in refrigerant fluid recycle pump in the one-level prolong, the cooling water tank that is marked with refrigerant fluid forms the refrigerant fluid recycle system; The vaporizer that is provided with the compression refrigerating apparatus of controller is arranged in the refrigerant fluid of cooling water tank.
Described liquid even flow plate is a porous plate.
Refrigerant fluid is the mixture of ethylene glycol and water in the described cooling water tank.
The refrigeration working medium of described compression refrigerating apparatus is a freonll-11.
In the said system, form medicine liquid circulation by infusion pipeline, soup recycle pump, reactive tank, one-level liquid injection tube, secondary liquid injection tube, refrigeration control system comprises the compression refrigerating apparatus of one-level prolong, secondary capillary condensation pipe, cooling water tank, tape-controller; Therefore, polysilicon slot type wet-method etching equipment of the present utility model comprises the medicine liquid circulation and the relatively independent recycle system of refrigeration control system two covers, and can realize the automated closed-loop controlled function of whole systems.
Before the making herbs into wool, artificial preparating liquid, nitric acid and hydrofluoric acid are poured in the reactive tank according to certain ratio, after opening the soup recycle pump, soup enters the secondary liquid injection tube through the one-level liquid injection tube, evenly inject reaction zone from the aperture ejection at its top after pass even flow plate after the refrigeration system cooling then, the soup recycle pump is extracted soup continuously out by infusion pipeline and is transported to the one-level liquid injection tube to circulate simultaneously, has realized the full and uniform of reactive tank herb liquid concentration.
Refrigeration control system comprises one-level prolong, secondary capillary condensation pipe, cooling water tank, compression refrigerating apparatus, controller; Can control compression refrigerating apparatus by setting controller makes the refrigerant fluid in the cooling water tank obtain cooling, and then make the refrigerant fluid in the one-level prolong reach required low temperature, refrigerant fluid is taken away its ambient heat reaching the purpose of control reactive tank inner liquid medicine temperature by the secondary capillary condensation pipe of reaction tank bottom then, and makes reactive tank inner liquid medicine uniformity of temperature profile.
Finish the leakage fluid dram of reaction tank bottom to be opened behind the silicon chip of certain lot number and carry out discharge opeing, join night again then.
As known from the above, the utility model is a kind of slotted polysilicon wet velvet preparing device, and it can effectively improve the liquor strength of silicon chip surface in the slot type making herbs into wool process and the homogeneity of temperature, with effective making herbs into wool effect of improving, improve product quality, reduce reflectivity, making herbs into wool back reflection rate reaches below 20%.Simultaneously, its output can not cause fragment basically up to per hour 1800, has improved yield rate and economic benefit greatly.In addition, slotted polysilicon wet velvet preparing device cost of the present invention is about 1,000,000 yuan, and cost performance has great cost advantage considerably beyond the flat making herbs into wool cleaning equipment of import.
Description of drawings
Fig. 1 is the system architecture synoptic diagram of a kind of embodiment of the utility model.
In the drawings:
The 1-infusion pipeline, the 2-reactive tank, 3-one-level liquid injection tube,
4-secondary liquid injection tube, 5-one-level prolong, 6-secondary capillary condensation pipe,
The 7-cooling water tank, the 8-compression refrigerating apparatus, the 9-controller,
The 10-vaporizer, 11-refrigerant fluid recycle pump, 12-liquid even flow plate,
13-soup recycle pump.
Embodiment
Below in conjunction with drawings and Examples the utility model is described further, these explanations only are used to understand the usefulness of technical solution of the present invention, are not used in the scope of the present utility model that limits.
As shown in Figure 1, described slotted polysilicon wet velvet preparing device comprises that the bottom is provided with the reactive tank 2 of leakage fluid dram, the bottom that is marked with the reactive tank 2 of soup is furnished with secondary liquid injection tube 4, these secondary liquid injection tube 4 tops have a plurality of apertures that can upwards spray soup, the one-level liquid injection tube 3 of described secondary liquid injection tube 4 outside reactive tank is communicated with the liquid outlet of soup recycle pump 13, and the fluid inlet of soup recycle pump 13 is communicated with reactive tank 2 through infusion pipeline 1; Liquid even flow plate 12 is equipped with in secondary liquid injection tube 4 tops of reactive tank 2, secondary capillary condensation pipe 6 is housed between secondary liquid injection tube 4 and liquid even flow plate 12, this secondary capillary condensation pipe 6 between reactive tank 2 and cooling water tank 7 one-level prolong 5 and be serially connected in refrigerant fluid recycle pump 11 in the one-level prolong 5, the cooling water tank 7 that is marked with refrigerant fluid forms the refrigerant fluid recycle systems; The vaporizer 10 that is provided with the compression refrigerating apparatus 8 of controller 9 is arranged in the refrigerant fluid of cooling water tank 7.
Described reactive tank 2 usefulness PVDF (polyvinylidene difluoride (PVDF)) materials are made, cell body volume 350L, degree of depth 320cm; Trench bottom is provided with leakage fluid dram, and inlet, cell body position on the lower side are provided with liquid even flow plate 12, also can soup circulation port, prolong import and export, high, normal, basic three liquid level sensors and temperature sensor be set at the groove rear wall.
Described one-level liquid injection tube 3 is divided into 4 branch roads in reaction tank bottom, and promptly the secondary liquid injection tube 4, and its top is drilled with aperture, injects in the reactive tank for soup.
In the described cooling water tank 7 the ball-type level sensor can be set, keep constant level in order to automatic water supplement, its compression by compression refrigerating apparatus 8 freonll-11 is freezed, and temperature is regulated by controller 9; Reactive tank inner liquid medicine temperature is controlled at about 5 ℃.
Described secondary capillary condensation pipe 6 is between liquid even flow plate 12 and secondary liquid injection tube 4, and secondary capillary condensation pipe 6 outside surfaces are provided with the corrosive of anti-strong acid protective layer; This protective layer can be made of the corrosive of anti-strong acid macromolecular material.
Described soup recycle pump 13 is the erosion resistance pump, and rate of discharge and lift should satisfy per minute replacement(metathesis)reaction groove inner liquid medicine at least 1 time at least; The automatic valve of configuration can adopt the automatic diaphragm valve of acid-resistant corrosion.
Claims (5)
1. slotted polysilicon wet velvet preparing device, comprise that the bottom is provided with the reactive tank (2) of leakage fluid dram, it is characterized in that, the bottom that is marked with the reactive tank (2) of soup is furnished with secondary liquid injection tube (4), this secondary liquid injection tube (4) top has a plurality of apertures that can upwards spray soup, the one-level liquid injection tube (3) of described secondary liquid injection tube (4) outside reactive tank is communicated with the liquid outlet of soup recycle pump (13), and the fluid inlet of soup recycle pump (13) is communicated with through the same reactive tank of infusion pipeline (1) (2); Liquid even flow plate (12) is equipped with in secondary liquid injection tube (4) top of reactive tank (2), between secondary liquid injection tube (4) and liquid even flow plate (12), secondary capillary condensation pipe (6) is housed, this secondary capillary condensation pipe (6) between reactive tank (2) and cooling water tank (7) one-level prolong (5) and be serially connected in refrigerant fluid recycle pump (11) in the one-level prolong (5), the cooling water tank (7) that is marked with refrigerant fluid forms the refrigerant fluid recycle system; The vaporizer (10) that is provided with the compression refrigerating apparatus (8) of controller (9) is arranged in the refrigerant fluid of cooling water tank (7).
2. according to the described slotted polysilicon wet velvet preparing device of claim 1, it is characterized in that described reactive tank (2) rear wall is provided with liquid level sensor and temperature sensor.
3. according to the described slotted polysilicon wet velvet preparing device of claim 1, it is characterized in that described refrigerant fluid is the mixture of ethylene glycol and water.
4. according to the described slotted polysilicon wet velvet preparing device of claim 1, it is characterized in that, the ball-type level sensor is set in the described cooling water tank.
5. according to the described slotted polysilicon wet velvet preparing device of claim 1, it is characterized in that secondary capillary condensation pipe (6) outside surface is provided with the corrosive of anti-strong acid protective layer.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2010201586578U CN201695088U (en) | 2010-04-14 | 2010-04-14 | Tank type polycrystalline silicon wet-process texturing equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2010201586578U CN201695088U (en) | 2010-04-14 | 2010-04-14 | Tank type polycrystalline silicon wet-process texturing equipment |
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| Publication Number | Publication Date |
|---|---|
| CN201695088U true CN201695088U (en) | 2011-01-05 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2010201586578U Expired - Lifetime CN201695088U (en) | 2010-04-14 | 2010-04-14 | Tank type polycrystalline silicon wet-process texturing equipment |
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| Country | Link |
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| CN (1) | CN201695088U (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101812687A (en) * | 2010-04-14 | 2010-08-25 | 湖南红太阳新能源科技有限公司 | Slotted polysilicon wet velvet preparing device |
| CN102842526A (en) * | 2012-07-31 | 2012-12-26 | 耿彪 | High temperature etching process tank |
| CN107681021A (en) * | 2017-09-26 | 2018-02-09 | 无锡琨圣科技有限公司 | A kind of reaming groove and its expanding method for the black silicon board of wet method |
| CN111876778A (en) * | 2020-07-23 | 2020-11-03 | 翁娇琴 | Acid etching processing device for steel plate production |
-
2010
- 2010-04-14 CN CN2010201586578U patent/CN201695088U/en not_active Expired - Lifetime
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101812687A (en) * | 2010-04-14 | 2010-08-25 | 湖南红太阳新能源科技有限公司 | Slotted polysilicon wet velvet preparing device |
| CN102842526A (en) * | 2012-07-31 | 2012-12-26 | 耿彪 | High temperature etching process tank |
| CN102842526B (en) * | 2012-07-31 | 2015-03-04 | 耿彪 | High temperature etching process tank |
| CN107681021A (en) * | 2017-09-26 | 2018-02-09 | 无锡琨圣科技有限公司 | A kind of reaming groove and its expanding method for the black silicon board of wet method |
| CN111876778A (en) * | 2020-07-23 | 2020-11-03 | 翁娇琴 | Acid etching processing device for steel plate production |
| CN111876778B (en) * | 2020-07-23 | 2021-06-29 | 山东万方板业有限公司 | Acid etching processing device for steel plate production |
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| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| AV01 | Patent right actively abandoned |
Granted publication date: 20110105 Effective date of abandoning: 20120523 |