CN201695106U - Double-groove polysilicon wet-method wool preparation equipment - Google Patents
Double-groove polysilicon wet-method wool preparation equipment Download PDFInfo
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- CN201695106U CN201695106U CN2010202022731U CN201020202273U CN201695106U CN 201695106 U CN201695106 U CN 201695106U CN 2010202022731 U CN2010202022731 U CN 2010202022731U CN 201020202273 U CN201020202273 U CN 201020202273U CN 201695106 U CN201695106 U CN 201695106U
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Abstract
The utility model discloses double-groove polysilicon wet-method wool preparation equipment, which belongs to the technical field of semiconductor crystalline silicon and solar battery manufacture. The double-groove polysilicon wet-method wool preparation equipment comprises a reaction groove, wherein a secondary liquid injection pipe is arranged at the bottom part of the reaction tank filled with medicine liquid, the top part of the secondary liquid injection pipe is provided with a plurality of small holes capable of upwards spraying medicine liquid, the secondary liquid injection pipe is communicated with the bottom part of a refrigeration groove through a primary liquid injection pipe arranged outside the reaction groove via a medicine liquid circulation pump, one side of the refrigeration tank is provided with a cooling water tank, an evaporator of a compression refrigerator provided with a controller is positioned in refrigeration liquid of the cooling water tank, and a refrigeration liquid circulation system is formed by a condensing pipe arranged in the refrigeration groove, a refrigeration liquid circulation pump in serial connection with the condensing pipe and a cooling water tank filled with cooling liquid. The utility model effectively changes the wool preparation effect, and improves the product quality, the reflection rate after the wool preparation is under 20 percent, and in addition, the utility model has the advantages of high yield, no fragment generation, low manufacture cost, high performance price ratio and improved economic benefits.
Description
Technical field
The utility model relates to a kind of slotted polysilicon wet velvet preparing device, further is meant the double flute polysilicon wet-method etching equipment in semiconductor crystal silicon and the technical field of solar cell manufacturing.
Background technology
In semiconductor silicon and solar cell manufacturing, the slot type wet-method texturing manufacturing process is that wet etching is carried out on the crystal silicon chip surface, forms little ditch, matte, reduces the reflectivity of silicon chip surface, thereby make sunlight carry out multiple reflection, to improve the utilization ratio of light at silicon chip surface.In the preparation technology of sun power crystal silicon cell, the slot type wet-method texturing manufacturing process is the integral part that is related to the silicon solar energy battery surface photoabsorption, also is one of important channel of improving solar conversion efficiency.
The polycrystalline etching device that surpasses half now on the market all is that cost arrives the flat polycrystalline making herbs into wool of import cleaning machine up to a million up to hundreds of thousands of, owing to adopt the travelling belt transmission manner in the process of making herbs into wool, fragmentation rate is very high.Simultaneously, owing to be subjected to the limitation of transmission speed, the production capacity limit of flat making herbs into wool cleaning machine is 1500 slices/hour.
Have following problem on the market polycrystalline slot type wet-method etching equipment: (1) enters texturing slot when processed simultaneously at a large amount of silicon chips, is difficult to accomplish that the liquor strength of all silicon chip surfaces and temperature reach even; (2) be difficult to realize liquid homogeneous layer fluidisation from top to bottom in the groove, the while forms sinuous flow or retention areas on the surface of bottom, middle part and the silicon chip of groove; (3) size and the homogeneity of silicon chip surface matte after the very difficult assurance making herbs into wool.
The utility model content
The technical problems to be solved in the utility model is, defective at the prior art existence, a kind of double flute polysilicon wet-method etching equipment is provided, it is low that it can effectively improve flat making herbs into wool cleaning machine production capacity, the characteristics that fragmentation rate is high can be improved the liquor strength of silicon chip surface in the slot type making herbs into wool process and the homogeneity of temperature simultaneously, with effective making herbs into wool effect of improving, improve product quality, reduce reflectivity.
In order to realize above purpose, the technical scheme that the utility model adopted is, described double flute polysilicon wet-method etching equipment, comprise that the bottom is provided with the reactive tank of leakage fluid dram, the bottom that is marked with the reactive tank of soup is furnished with the secondary liquid injection tube, this secondary liquid injection tube top has a plurality of apertures that can upwards spray soup, the one-level liquid injection tube of described secondary liquid injection tube outside reactive tank is communicated with the liquid outlet of soup recycle pump, its constructional feature is that the fluid inlet of this soup recycle pump is communicated with through the bottom of infusion pipeline with the refrigeration groove; This refrigeration groove one side is provided with a cooling water tank, and the vaporizer that is provided with the compression refrigerating apparatus of controller is arranged in the refrigerant fluid of this cooling water tank; Place the liquid outlet of the prolong of refrigeration groove to be communicated with the fluid inlet of cooling water tank, the liquid outlet of refrigerant fluid recycle pump links to each other with the fluid inlet of described prolong, and the fluid inlet of this refrigerant fluid recycle pump is communicated with the liquid outlet of cooling water tank.
The described cooling water tank composition refrigerant fluid recycle system that places the refrigeration prolong of groove and the refrigerant fluid recycle pump that be connected in series with prolong, is marked with cooling fluid.
Described reactive tank material is PVDF, i.e. polyvinylidene difluoride (PVDF), and this reactive tank cell body volume 350L, degree of depth 320cm, this reactive tank rear wall is provided with liquid level sensor and temperature sensor.
The refrigerant fluid that the described refrigerant fluid recycle system adopts is the mixture of ethylene glycol and water.
The ball-type level sensor is set in the described cooling water tank, can keeps constant level by automatic water supplement.
The prolong outside surface is provided with the corrosive of anti-strong acid protective layer, and this protective layer is one deck corrosive of anti-strong acid macromolecular material.
Described soup recycle pump is the erosion resistance pump, this soup outlet of circulating pump flow and lift satisfy per minute at least replacement(metathesis)reaction groove inner liquid medicine once, described soup recycle pump adopts the automatic diaphragm valve of acid-resistant corrosion.
The liquid even flow plate is equipped with in described secondary liquid injection tube top, and this liquid even flow plate is a porous plate.
Described reactive tank top is provided with overflow groove, and this overflow groove is communicated with refrigeration groove side by tubing.
The refrigeration working medium of described compression refrigerating apparatus is a freonll-11.
In the said system, form medicine liquid circulation by infusion pipeline, soup recycle pump, reactive tank, overflow groove, one-level liquid injection tube, secondary liquid injection tube, refrigeration control system comprises the compression refrigerating apparatus of refrigeration groove, prolong, refrigeration agent recycle pump, cooling water tank, tape-controller; Therefore, double flute polysilicon wet-method etching equipment described in the utility model comprises the medicine liquid circulation and the relatively independent recycle system of refrigeration control system two covers, and can realize the automated closed-loop controlled function of whole systems.
Compared with prior art, the utility model has effectively improved the liquor strength of silicon chip surface in the slot type making herbs into wool process and the homogeneity of temperature, has improved the making herbs into wool effect, improves product quality, reduces reflectivity, and making herbs into wool back reflection rate reaches below 20%.Simultaneously, its output can not cause fragment basically up to per hour 1800, has improved economic benefit greatly.And the utility model cost is low, and cost performance has great cost advantage considerably beyond the flat making herbs into wool cleaning equipment of import.
Description of drawings
Fig. 1 is the system architecture synoptic diagram of a kind of embodiment of the utility model.
In the drawings:
The 1-overflow groove, the 2-reactive tank, 3-one-level liquid injection tube,
4-secondary liquid injection tube, 5-prolong, the 6-groove that freezes,
The 7-cooling water tank, the 8-compression refrigerating apparatus, the 9-controller,
The 10-vaporizer, 11-refrigerant fluid recycle pump, 12-liquid even flow plate,
13-soup recycle pump.
Embodiment
Below in conjunction with drawings and Examples the utility model is described further, these explanations only are used to understand the usefulness of technical solutions of the utility model, are not used in the scope of the present utility model that limits.
As shown in Figure 1, described double flute polysilicon wet-method etching equipment comprises that the bottom is provided with the reactive tank 2 of leakage fluid dram, the bottom that is marked with the reactive tank 2 of soup is furnished with secondary liquid injection tube 4, these secondary liquid injection tube 4 tops have a plurality of apertures that can upwards spray soup, the one-level liquid injection tube 3 of described secondary liquid injection tube 4 outside reactive tank is communicated with the liquid outlet of soup recycle pump 13, and the fluid inlet of soup recycle pump 13 is communicated with refrigeration groove 6 through infusion pipeline; Liquid even flow plate 12 is equipped with in secondary liquid injection tube 4 tops of reactive tank 2, place the liquid outlet of the prolong 5 of refrigeration groove 6 to be communicated with the fluid inlet of cooling water tank 7, the liquid outlet of refrigerant fluid recycle pump 11 links to each other with the fluid inlet of described prolong 5, and the fluid inlet of this refrigerant fluid recycle pump 11 is communicated with the liquid outlet of cooling water tank 7.The vaporizer 10 that is provided with the compression refrigerating apparatus 8 of controller 9 is arranged in the refrigerant fluid of cooling water tank 7.
The described prolong 5 of refrigeration groove 6 that places reaches the refrigerant fluid recycle pump 11 that is connected in series with prolong 5, the cooling water tank 7 composition refrigerant fluid recycle systems that are marked with cooling fluid.
Described reactive tank 2 usefulness PVDF (polyvinylidene difluoride (PVDF)) materials are made, cell body volume 350L, degree of depth 320cm; Trench bottom is provided with leakage fluid dram, and inlet, cell body position on the lower side are provided with liquid even flow plate 12, also can soup circulation port, prolong import and export, high, normal, basic three liquid level sensors and temperature sensor be set at the groove rear wall.
In the described cooling water tank 7 the ball-type level sensor can be set, keep constant level in order to automatic water supplement, its compression by compression refrigerating apparatus 8 freonll-11 is freezed, and temperature is regulated by controller 9; Reactive tank inner liquid medicine temperature is controlled at 4 ℃--and 6 ℃.
Described prolong 5 outside surfaces are provided with the corrosive of anti-strong acid protective layer; This protective layer can be made of the corrosive of anti-strong acid macromolecular material.
Described soup recycle pump 13 is the erosion resistance pump, and rate of discharge and lift should satisfy per minute replacement(metathesis)reaction groove inner liquid medicine at least 1 time at least; Can adopt the automatic diaphragm valve of acid-resistant corrosion for the automatic valve of soup recycle pump 13 configurations.
Before the making herbs into wool, artificial preparating liquid is poured nitric acid and hydrofluoric acid in the reactive tank into according to certain ratio, and medicine fills with that the transport pipe by overflow groove enters the refrigeration groove behind the reactive tank night, guarantees that simultaneously the height of soup covered the prolong of the groove that freezes.After opening the soup recycle pump, soup after the refrigeration enters the secondary liquid injection tube through the one-level liquid injection tube, pass even flow plate after the ejection of the aperture at its top then and evenly inject reaction zone, the soup that overflows simultaneously enters the refrigeration groove by tubing and continues refrigeration, extracted out continuously by the soup recycle pump then and be transported to the one-level liquid injection tube, realized the full and uniform of reactive tank herb liquid concentration and temperature to circulate.
Refrigeration control system comprises prolong, refrigeration agent recycle pump, cooling water tank, compression refrigerating apparatus, controller; Can control compression refrigerating apparatus by setting controller makes the refrigerant fluid in the cooling water tank obtain cooling, and then making the refrigerant fluid in the prolong reach required low temperature, refrigerant fluid is flowed through the refrigeration groove and is taken away its ambient heat to reach the purpose of control refrigeration groove inner liquid medicine temperature then.
Finish the leakage fluid dram of reaction tank bottom to be opened behind the silicon chip of certain lot number and carry out discharge opeing, join night again then.
Claims (9)
1. double flute polysilicon wet-method etching equipment, comprise that the bottom is provided with the reactive tank (2) of leakage fluid dram, the bottom that is marked with the reactive tank (2) of soup is furnished with secondary liquid injection tube (4), this secondary liquid injection tube (4) top has a plurality of apertures that can upwards spray soup, the one-level liquid injection tube (3) of described secondary liquid injection tube (4) outside reactive tank (2) is communicated with the liquid outlet of soup recycle pump (13), it is characterized in that the fluid inlet of this soup recycle pump (13) is communicated with through the bottom of infusion pipeline with refrigeration groove (6); These refrigeration groove (6) one sides are provided with a cooling water tank (7), and the vaporizer (10) that is provided with the compression refrigerating apparatus (8) of controller (9) is arranged in the refrigerant fluid of this cooling water tank (7); Place the fluid inlet of the same cooling water tank of liquid outlet (7) of the prolong (5) of refrigeration groove (6) to be communicated with, the liquid outlet of refrigerant fluid recycle pump (11) links to each other with the fluid inlet of described prolong (5), and the liquid outlet of the same cooling water tank of fluid inlet (7) of this refrigerant fluid recycle pump (11) is communicated with.
2. double flute polysilicon wet-method etching equipment according to claim 1 is characterized in that, described reactive tank (2) material is PVDF, it is polyvinylidene difluoride (PVDF), this reactive tank (2) cell body volume 350L, degree of depth 320cm, this reactive tank (2) rear wall is provided with liquid level sensor and temperature sensor.
3. double flute polysilicon wet-method etching equipment according to claim 1 is characterized in that, the refrigerant fluid that the described refrigerant fluid recycle system adopts is the mixture of ethylene glycol and water.
4. double flute polysilicon wet-method etching equipment according to claim 1 is characterized in that described cooling water tank is provided with the ball-type level sensor in (7).
5. double flute polysilicon wet-method etching equipment according to claim 1 is characterized in that, prolong (5) outside surface is provided with the corrosive of anti-strong acid protective layer.
6. double flute polysilicon wet-method etching equipment according to claim 1 is characterized in that described soup recycle pump (13) is the erosion resistance pump, and described soup recycle pump (13) adopts the automatic diaphragm valve of acid-resistant corrosion.
7. double flute polysilicon wet-method etching equipment according to claim 1 is characterized in that, liquid even flow plate (12) is equipped with in described secondary liquid injection tube (4) top.
8. double flute polysilicon wet-method etching equipment according to claim 1 is characterized in that, described reactive tank (2) top is provided with overflow groove (1), and this overflow groove (1) is communicated with refrigeration groove (6) side by tubing.
9. double flute polysilicon wet-method etching equipment according to claim 1 is characterized in that the refrigeration working medium of described compression refrigerating apparatus (8) is a freonll-11.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2010202022731U CN201695106U (en) | 2010-05-25 | 2010-05-25 | Double-groove polysilicon wet-method wool preparation equipment |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2010202022731U CN201695106U (en) | 2010-05-25 | 2010-05-25 | Double-groove polysilicon wet-method wool preparation equipment |
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| Publication Number | Publication Date |
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| CN201695106U true CN201695106U (en) | 2011-01-05 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN2010202022731U Expired - Lifetime CN201695106U (en) | 2010-05-25 | 2010-05-25 | Double-groove polysilicon wet-method wool preparation equipment |
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Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105200527A (en) * | 2015-09-16 | 2015-12-30 | 国网天津市电力公司 | Texturing equipment and cleaning method thereof |
| CN105977186A (en) * | 2016-05-10 | 2016-09-28 | 深圳市华星光电技术有限公司 | Wet etching device and explosion-proof method thereof |
| CN107083567A (en) * | 2017-06-29 | 2017-08-22 | 昊诚光电（太仓）有限公司 | A kind of texturing slot spent acid conveying device |
| CN107681021A (en) * | 2017-09-26 | 2018-02-09 | 无锡琨圣科技有限公司 | A kind of reaming groove and its expanding method for the black silicon board of wet method |
-
2010
- 2010-05-25 CN CN2010202022731U patent/CN201695106U/en not_active Expired - Lifetime
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105200527A (en) * | 2015-09-16 | 2015-12-30 | 国网天津市电力公司 | Texturing equipment and cleaning method thereof |
| CN105977186A (en) * | 2016-05-10 | 2016-09-28 | 深圳市华星光电技术有限公司 | Wet etching device and explosion-proof method thereof |
| CN105977186B (en) * | 2016-05-10 | 2019-11-05 | 深圳市华星光电技术有限公司 | Wet-method etching device and its explosion-proof method |
| CN107083567A (en) * | 2017-06-29 | 2017-08-22 | 昊诚光电（太仓）有限公司 | A kind of texturing slot spent acid conveying device |
| CN107681021A (en) * | 2017-09-26 | 2018-02-09 | 无锡琨圣科技有限公司 | A kind of reaming groove and its expanding method for the black silicon board of wet method |
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| CX01 | Expiry of patent term |
Granted publication date: 20110105 |
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