CN101596694A - A kind of mask version bevelling edge polisher and process thereof - Google Patents

A kind of mask version bevelling edge polisher and process thereof Download PDF

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Publication number
CN101596694A
CN101596694A CNA2009101580840A CN200910158084A CN101596694A CN 101596694 A CN101596694 A CN 101596694A CN A2009101580840 A CNA2009101580840 A CN A2009101580840A CN 200910158084 A CN200910158084 A CN 200910158084A CN 101596694 A CN101596694 A CN 101596694A
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China
Prior art keywords
bevelling
edging
mask version
slide
bistrique
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CNA2009101580840A
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CN101596694B (en
Inventor
林宜龙
田亮
张松岭
林建昌
周冠彬
唐召来
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Grand Technology Shenzhen Co Ltd
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Grand Technology Shenzhen Co Ltd
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Abstract

The invention discloses a kind of mask version bevelling edge polisher and process thereof, belong to the mask version is carried out bevelling and edging manufacture field, mask version bevelling edge polisher comprises to be placed the mask version and it is adjusted the mask version support platform apparatus of location; Under the drive of bevelling edging transmission device, respectively the mask version is carried out the bevelling device and the edging device of bevelling and edging processing; And, electric-control system, the bevelling bistrique electric rotating machine of the bevelling of control bevelling edging transmission device and edging power drive system, bevelling device, and the edging bistrique electric rotating machine coordination of edging device.Carry out in the process at mask version bevelling edge polisher, one side electric control system controls bevelling device and edging device to the mask version carry out bevelling processing successively and edging is processed.Mask version bevelling edge polisher of the present invention can be finished automatically the processing of mask version is handled, and working (machining) efficiency is provided, and has reduced the influence of human factor to crudy.

Description

A kind of mask version bevelling edge polisher and process thereof
Technical field
The present invention relates to a kind of process of carrying out equipment and this equipment of bevelling and edging for the mask version.
Background technology
The mask version is one of important machining tool that is widely used in electron trade, and the bevelling of mask version and edging are the important processing links in the mask version processing and manufacturing process, and its crudy quality directly has influence on the quality of mask version.At present, the bevelling of mask version and edging operation all are by finishing manually, not only labour intensity is big for this processing mode, production efficiency is low, the more important thing is the difficult quality guarantee of bevelling and edging, and machining accuracy is all lower, very difficult will being applied in the high-end product through the mask version of manual bevelling and edging, the particularly bevelling of large scale mask version and edging, its crudy just more be cannot say for sure to demonstrate,prove.
Summary of the invention
An object of the present invention is the present situation of the mask version being carried out the processing of bevelling and edging, a kind of mask version bevelling edge polisher that can finish bevelling and edging automatically is provided at existing.
For achieving the above object, the present invention adopts following technical scheme: a kind of mask version bevelling edge polisher, comprise mask version support platform apparatus, and comprise mask version gripper shoe and the mask version that is placed on the described mask version gripper shoe is advanced
Row is adjusted the positioning adjustment component of location;
The bevelling bistrique of bevelling device, certain that is included in its moving process the mask of grinding simultaneously version two seamed edges up and down on one side, described bevelling bistrique rotates under the drive of bevelling bistrique electric rotating machine;
Edging device is included in the bevelling bistrique on certain plane, limit on one side of grinding mask version in its moving process, and described edging bistrique rotates under the drive of edging bistrique electric rotating machine;
Bevelling edging transmission device comprises bevelling device slide and edging device slide, the two all with a guide rail sliding connection, described bevelling device and edging device are installed in respectively on bevelling device slide and the edging device slide; The bevelling PWTN is unified
The edging power drive system, drive described bevelling device slide and edging device slide respectively along described guide rail move left and right, make described bevelling device and edging device in moving process, carry out bevelling processing and edging processing to the mask version that is placed on the described mask version support platform apparatus respectively; And,
Electric-control system is controlled described bevelling and edging power drive system, bevelling bistrique electric rotating machine, and the coordination of edging bistrique electric rotating machine.
Preferably, the front of described mask version gripper shoe has the groove of some groups of non-penetratives, and every group of groove is benchmark with an end points of described mask version gripper shoe, it is divided into the square supporting zone that occupies different area, to adapt to the mask version of different size; The back side of described mask version gripper shoe have some groups with described some groups of grooves deep gouge one to one, the center line of each deep gouge in every group of deep gouge is all corresponding with the one group of groove that is positioned at its top, be provided with the vacuum venting hole that communicates with the one group of groove that is positioned at its top in each deep gouge, a vacuum air-channel piece all is installed in each deep gouge; Each vacuum air-channel piece is all by a vacuum gas joint and a vacuum chamber; Described mask version support platform apparatus comprises that also one covers the antistatic Rubber washer on described mask version gripper shoe, and its effect by the vacuum air-channel piece is adsorbed on the described mask version gripper shoe.
Preferably, described positioning adjustment component comprises location adjustment rib, its two ends are installed with the roller installing rack respectively, all be equipped with on the roller installing rack at two ends and make the positioning adjustment component back-up roller that slide in front and back on mask version gripper shoe, sidewindering of rolling on mask version gripper shoe also is installed on the described roller installing rack; The both sides that rib is adjusted in described location are provided with the lock-screw that is used to locate; The left end of adjusting rib in the location is equipped with left locating piece, and the location is adjusted rib and is provided with the right locating piece that can slide thereon, and described right locating piece carries out locking positioning by a set lever.
Preferably, the guide rail of described bevelling edging transmission device comprises fromer rail and rear rail; Described bevelling power drive system comprises the bevelling driving motor, it is installed in the right-hand end of described rear rail, the synchronous driving wheel of bevelling and the synchronous driven pulley of bevelling that are driven by described bevelling driving motor are installed between described fromer rail and the rear rail, and are with synchronously with a bevelling transmission and cooperate installation; Described edging power drive system comprises the edging driving motor, it is installed in the left end of described fromer rail, the synchronous driving wheel of edging and the synchronous driven pulley of edging that are driven by described edging driving motor are installed between described fromer rail and the rear rail, and are with synchronously with an edging transmission and cooperate installation; The rear section of described bevelling device slide and described bevelling transmission band synchronously are connected, the front part of bevelling device slide is kept at a distance with the synchronous band of described edging transmission by thereunder opening a groove, the front part of described edging device slide and described edging transmission band synchronously are connected, and the rear section of edging device slide is kept at a distance with the synchronous band of described bevelling transmission by thereunder opening a groove; Described bevelling driving motor and edging driving motor are by described electric control system controls.
Preferably, described bevelling edging transmission device also comprises the move to left position-limiting unit and the position-limiting unit that moves to right of bevelling device, and the move to left position-limiting unit and the position-limiting unit that moves to right of edging device;
The position-limiting unit that moves to left of described bevelling device comprises the bevelling light control plate that is packed in described bevelling device slide rear side and is set in place in the left end bevelling photoelectricity breach that cooperates with described bevelling light control plate in the rear rail left end outside that described left end bevelling photoelectricity breach is connected with described electric-control system communication; The bevelling stop that moves to left is arranged on the left end of described rear rail, and is excessive in order to prevent that the bevelling device is moved to the left;
The position-limiting unit that moves to right of described bevelling device comprises described bevelling light control plate and is set in place in the right-hand member bevelling photoelectricity breach that cooperates with described bevelling light control plate in the rear rail right-hand member outside that described right-hand member bevelling photoelectricity breach is connected with described electric-control system communication; The bevelling stop that moves to right is arranged on rear rail and bevelling transmission synchronously between the band, and is excessive in order to prevent that the bevelling device from moving right;
The position-limiting unit that moves to right of described edging device comprises the edging light control plate that is packed in described edging device slide rear side and is set in place in the right-hand member edging photoelectricity breach that cooperates with described edging light control plate in the rear rail right-hand member outside that described right-hand member edging photoelectricity breach is connected with described electric-control system communication; The edging stop that moves to right is arranged on the right-hand member of described fromer rail, and is excessive in order to prevent that edging device from moving right;
The position-limiting unit that moves to left of described edging device comprises described edging light control plate and is set in place in the left end edging photoelectricity breach that cooperates with described edging light control plate in the rear rail left end outside that described left end edging photoelectricity breach is connected with described electric-control system communication; The edging stop that moves to left is arranged on fromer rail and edging transmission synchronously between the band, and is excessive in order to prevent that the bevelling device is moved to the left.
Preferably, described bevelling edging transmission device can also comprise and prevent that bevelling device and edging device from moving excessive and anti-raming that bump against each other, and described anti-raming comprises that bevelling device on the same side that is separately positioned on bevelling device slide and edging device slide is anti-and ram and edging device is anti-rams.
Preferably, described bevelling bistrique is provided with the open slot of an annular in the middle, and the vertical range between the upper and lower surfaces of open slot increases from inside to outside successively, and described open slot is about a datum plane symmetry; Described bevelling device also comprises and drives the reciprocating mechanism that described bevelling bistrique moves up and down and move forward and backward respectively and move forward and backward mechanism; The camera of bevelling device is electrically connected with a left side display screen; The water hose of bevelling device and sparge pipe interface are installed on the sparge pipe gripper shoe; The front end of bevelling device is provided with water receiving tank between described mask version support platform apparatus and bevelling edging transmission device; In the place ahead of described bevelling bistrique one air curtain is installed, the bottom of described air curtain, on the side on mask version surface, is had several apertures; Described air curtain is communicated with a gases at high pressure feedway.
Preferably, described edging device also comprises and drives the reciprocating mechanism that described edging bistrique moves up and down and move forward and backward respectively and move forward and backward mechanism; The camera of edging device is electrically connected with a right side display screen.
Preferably, described bevelling device is provided with crashproof light control plate, and the relevant position of described edging device is provided with the crashproof photoelectricity breach that cooperates with described prevention and control light control plate; Described crashproof photoelectricity breach is connected with described electric-control system communication.
Another object of the present invention is at above-mentioned mask version bevelling edge polisher, illustrates that it finishes the process of bevelling and edging processing automatically.
For achieving the above object, the present invention adopts following technical scheme: a kind of process of mask version bevelling edge polisher, comprise the steps,
Start mask version bevelling edge polisher,, the mask version is adjusted the location by positioning adjustment component by manually mask version to be processed being placed on the Rubber washer of mask version support platform apparatus;
Start bevelling edging program, bevelling device and edging device are at first got back to initial stop place separately, and promptly the bevelling device is positioned at the leftmost side of bevelling edging transmission device, and edging device is positioned at the rightmost side of bevelling edging transmission device; After two devices are all got back to initial position, according to pre-set programs, the bevelling device that the bevelling power drive system drives with bevelling device slide is connected mutually moves right, and when the edge joint to be processed of bevelling bistrique and mask version touches, has promptly begun the seamed edge up and down on this limit is carried out the chamfered edge grinding; When the bevelling device moves right when putting in place, the bevelling device stops to move; Afterwards, the bevelling power drive system drives the bevelling device and is moved to the left, and when the bevelling device is moved to the left when putting in place, the bevelling device is moved to the left and puts in place and stop;
Electric-control system obtains the bevelling device and puts in place behind the Stop message, start the edging power drive system, band is moved to the left with the edging device that the edging device slide is connected mutually, when the plane contact of the limit of the outer face of the edging bistrique on it and mask version, promptly begun grinding is carried out on the plane, limit on this limit; Edging device stops to move when putting in place when edging device is moved to the left; Afterwards, the edging power drive system drives edging device and moves right, when move right for the time, edging device moves right and puts in place and stop;
After the bevelling edging is finished,, carry out bevelling and edging processing Yi Bian change again by manually unclamping the mask version.Carry out so repeatedly, just can finish the bevelling and the edging processing work of a piece mask version;
Usefulness of the present invention is: the placement location of mask version can reliably be located after adjusting accurately by positioning adjustment component, and it is cheap to make it can not the position occur in process, the image crudy; Can drive and accurately stop bevelling device and edging device in order by electric-control system;
By edging bistrique reciprocating mechanism being set and moving forward and backward mechanism, bevelling bistrique reciprocating mechanism and move forward and backward mechanism can carry out bevelling and edging processing to the mask version of different size;
By air curtain is set, can make the residual water of mask version edge be blown into water receiving tank, to keep the cleaning of mask version by air curtain.
Description of drawings
Fig. 1 is the perspective view of mask version bevelling edge polisher of the present invention;
Fig. 2 is the perspective view of mask version support platform apparatus shown in Figure 1;
Fig. 3 is the explosive view of mask version support platform apparatus shown in Figure 2;
Fig. 4 is the Facad structure schematic diagram of mask version gripper shoe shown in Figure 2;
Fig. 5 is the structure schematic diagram of mask version gripper shoe shown in Figure 2;
Fig. 6 is the structural representation of positioning adjustment component shown in Figure 2;
Fig. 7 is the perspective view of bevelling edging transmission device shown in Figure 1;
Fig. 8 is the main perspective view that shows bevelling edging transmission device shown in Figure 7 rear portion;
Fig. 9 is bevelling edging transmission device shown in Figure 7 and edging device and bevelling device annexation schematic diagram;
Figure 10 is the perspective view (installation camera) of bevelling device shown in Figure 1;
Figure 11 is the perspective view (camera is not installed) of bevelling device shown in Figure 1;
Figure 12 is the structural representation at the rear portion of bevelling device shown in Figure 11;
Figure 13 is the front portion structure schematic diagram of bevelling device shown in Figure 11;
Figure 14 is the perspective view of edging device shown in Figure 1.
The specific embodiment
A kind of mask version bevelling edge polisher comprises frame 10a as shown in Figure 1, and described frame 10a has a horizontal support face.Mask version support platform apparatus 1 is installed on the horizontal support face of frame 10a, is the important device in support, centering, location, bevelling and the edging process.One side along mask version support platform apparatus 1 is provided with bevelling edging transmission device 5, bevelling device 3 and edging device 7 move under the drive of bevelling edging transmission device 5 respectively, to realize that the mask version that is placed on the mask version support platform apparatus 1 is carried out bevelling and edging processing.The front portion of bevelling device 3 and edging device 7, the part of promptly carrying out bevelling processing and edging processing, the below can be provided with water receiving tank 10b.The electric-control system 8 of each component units coordination of control mask version bevelling edge polisher can be arranged on the below of mask version support platform apparatus 1, in addition, for easy to operate, can be electric-control system 8 configuration control panel 2 and touch-screens 9.
Shown in Fig. 2 to 6, described mask version support platform apparatus 1 comprises marble bracing frame 11, is installed with marble 12 on it.Described mask version gripper shoe 16, be preferably aluminum alloy material, its front has the groove 161 of some groups of non-penetratives, every group of groove 161 is benchmark with an end points of mask version gripper shoe 16, it is divided into the square supporting zone that occupies different area, to adapt to the mask version of different size, be provided with four groups of grooves 161 in the present embodiment.The back side of described mask version gripper shoe 16 have some groups with described some groups of grooves 161 deep gouge one to one, every group of deep gouge can comprise two deep gouges 18 that are perpendicular to one another and are provided with, wherein, the center line of each deep gouge 18 is corresponding with the one group of groove 161 that is positioned at its top, be provided with the vacuum venting hole (not shown) that communicates with the one group of groove 161 that is positioned at its top in each deep gouge 18, wherein, the vacuum venting hole is preferably the center line setting along deep gouge 18.Described deep gouge 18, its dual-side is provided with and connects screw 19, a vacuum air-channel piece 14 all is installed in each deep gouge 18, and described vacuum air-channel piece 14 preferably is fixed on each vacuum air-channel piece 14 by bolt and the described cooperation that is connected screw 19 after the diaphragm seal on the pad around it and separately in the corresponding deep gouge 18.Can screw in from the side of mask version gripper shoe 16 and corresponding vacuum air-channel piece 14 separately with each vacuum gas joint 17 of vacuum chamber, it is communicated with vacuum air-channel piece 14.Have only after each deep gouge 18 all installs vacuum air-channel piece 14, mask version gripper shoe 16 just can be fixedly mounted on the marble 12.Can be stamped an antistatic Rubber washer 13 on the described mask version gripper shoe 16, damage mask version when preventing that the mask version adjusted centering.The thickness of described marble 12 is preferably more than and equals 10cm, account for whole mask version support platform apparatus 1 thickness 2/3, do not have any distortion with the mask version that guarantees side placed on it.When described mask version support platform apparatus 1 was worked, electric-control system 8 control vacuum air-channels were connected, and are communicated with because each vacuum air-channel piece 14 is organized groove 161 by vacuum venting hole and each, therefore Rubber washer 13 can be adsorbed on the mask version gripper shoe 16 tightly.Mask version to be processed is by manually being placed on the described Rubber washer 13, adjust the position of mask version on mask version gripper shoe 16 by positioning adjustment component 15, and after adjusting, position, described positioning adjustment component 15 comprises location adjustment rib 155, its two ends are installed with the roller installing rack respectively, all be equipped with on the roller installing rack at two ends and make positioning adjustment component 15 back-up roller 156 that slide in front and back on mask version gripper shoe 16, back-up roller 156 is rolled on the back-up roller supporting surface 121 of marble 12, also be equipped with on the described roller installing rack what sidewindering of mask version gripper shoe 16 rolled on the supporting surface 162 and sidewinder 153, described mask version gripper shoe 16, be provided with the trough with straight angle of ccontaining back-up roller 156 in both sides, the outward flange of trough with straight angle is the described supporting surface 162 that sidewinders; The both sides that rib 155 is adjusted in described location are provided with the lock-screw 154 that is used to locate; The left end of adjusting rib 155 in the location is equipped with left locating piece 151, the location is adjusted rib 155 and is provided with the right locating piece 152 that can slide thereon, right locating piece 152 can be by usual use in mechanical field set lever 158 (mechanism that this kind can the locking and unlocking is very common in mechanical field, as clamping mechanism by one handle control, because this set lever 158 is not design main points of the present invention, do not elaborate at this) carry out locking positioning.Therefore, can adjust rib 155, left locating piece 151 and right locating piece 152 by the location of positioning adjustment component 15, promote mask version centering location, and position, it is carried out bevelling and edging processing at next step by means of lock-screw 154 and 158 pairs of mask versions of set lever.
Bevelling edging transmission device 5 drags bevelling device 3 according to processing request and edging device 7 moves in order, in moving process the mask version is carried out bevelling and edging processing.Shown in Fig. 7,8 and 9, the guide rail of described bevelling edging transmission device 5 comprises fromer rail 511 and rear rail 55, the two is packed on the workbench 518 in parallel with each other, bevelling device slide 53 and edging device slide 56 all with described fromer rail 511 and rear rail 55 sliding connections, described bevelling device slide 53 can be arranged on the left side of edging device slide 56.The bevelling PWTN of the bevelling edging transmission device 5 edging power drive system of unifying is installed on the workbench 518 equally; Wherein, the bevelling driving motor 57 of described bevelling power drive system is installed in the right-hand end of rear rail 55, synchronous driving wheel 58 of bevelling and the synchronous driven pulley 514 of bevelling are installed between fromer rail 511 and the rear rail 55, bevelling driving motor 57 drives the synchronous driving wheel 58 of bevelling, the bevelling transmission is moved back and forth with the fixedly connected with it bevelling device slide 53 of 54 pullings synchronously, and then the bevelling device 3 that is installed on the bevelling device slide 53 is moved back and forth; The edging driving motor 51 of described edging power drive system is installed in the left end of fromer rail 511, synchronous driving wheel 513 of edging and the synchronous driven pulley 59 of edging are installed between fromer rail 511 and the rear rail 55, edging driving motor 51 drives the synchronous driving wheel 513 of edging, the edging transmission is moved back and forth with the fixedly connected with it edging device slide 56 of 510 pullings synchronously, and then the edging device 7 that is installed on the edging device slide 56 is moved back and forth; Wherein, the rear section of bevelling device slide 53 and bevelling transmission are with 54 to be connected synchronously, the front part of bevelling device slide 53 can be with 510 to keep certain distance by the mode and the edging transmission of recessing thereunder synchronously, in contrast, the front part of edging device slide 56 and edging transmission are with 510 to be connected synchronously, and the rear section of edging device slide 56 can be with 54 to keep certain distance by the mode and the bevelling transmission of recessing thereunder synchronously.
Bevelling edging transmission device 5 also comprises the move to left position-limiting unit and the position-limiting unit that moves to right of bevelling device 3, and the move to left position-limiting unit and the position-limiting unit that moves to right of edging device 7.
The position-limiting unit that moves to left of described bevelling device 3 comprises the spacing and mechanical position limitation of photoelectricity, photoelectricity is spacing to be comprised the bevelling light control plate 520 that is packed in bevelling device slide 53 rear sides and is packed on the workbench 518, be positioned at the left end bevelling photoelectricity breach 521 in the rear rail 55 left ends outside, at bevelling device slide 53 in the process that the bevelling transmission is moved to the left under synchronously with 54 drive, when the bevelling light control plate on it 520 is inserted left end bevelling photoelectricity breach 521, this optically-controlled signal will input to electric-control system 8, electric-control system 8 will stop operating bevelling driving motor 57 according to this signal, even bevelling device 3 stops at the high order end of front and back guide rail; Described mechanical position limitation comprises the bevelling stop 519 that moves to left, and is arranged on the left end of rear rail 55, and is excessive in order to prevent that bevelling device 3 is moved to the left.The position-limiting unit that moves to right of bevelling device 3 also comprises the spacing and mechanical position limitation of photoelectricity, wherein, photoelectricity is spacing to be comprised described bevelling light control plate 520 and is packed on the workbench 518, be positioned at the right-hand member bevelling photoelectricity breach 523 in the rear rail 55 right-hand members outside, at bevelling device slide 53 in the process that the bevelling transmission moves right under synchronously with 54 drive, when the bevelling light control plate on it 520 is inserted right-hand member bevelling photoelectricity breach 523, this optically-controlled signal will input to electric-control system 8, electric-control system 8 will stop operating bevelling driving motor 57 according to this signal, even bevelling device 3 stops at the low order end of front and back guide rail; Described mechanical position limitation comprises the bevelling stop 515 that moves to right, it can be arranged on rear rail 55 and the bevelling transmission is with between 54 synchronously, excessive in order to prevent that bevelling device 3 from moving right, and edging device 7 can be crossed move to right stop 515 and moving to the left of bevelling by the described groove of its below.
The position-limiting unit that moves to right of described edging device 7 comprises the spacing and mechanical position limitation of photoelectricity, photoelectricity is spacing to be comprised the edging light control plate 255 that is packed in edging device slide 56 rear sides and is packed on the workbench 518, be positioned at the right-hand member edging photoelectricity breach 524 in the rear rail 55 right-hand members outside, at edging device slide 56 in the process that the edging transmission moves right under synchronously with 5 10 drive, when the edging light control plate on it 525 is inserted right-hand member edging photoelectricity breach 524, this optically-controlled signal will input to electric-control system 8, electric-control system 8 will stop operating edging driving motor 51 according to this signal, even edging device 7 stops at the low order end of front and back guide rail; Described mechanical position limitation comprises the edging stop 517 that moves to right, and is arranged on the right-hand member of fromer rail 511, and is excessive in order to prevent that edging device 7 from moving right.The position-limiting unit that moves to left of edging device also comprises the spacing and mechanical position limitation of photoelectricity, wherein, photoelectricity is spacing to be comprised described edging light control plate 255 and is packed on the workbench 518, be positioned at the left end edging photoelectricity breach 522 in the rear rail 55 left ends outside, at edging device slide 56 in the process that the edging transmission is moved to the left under synchronously with 510 drive, when the edging light control plate on it 525 is inserted left end edging photoelectricity breach 522, this optically-controlled signal will input to electric-control system 8, electric-control system 8 will stop operating edging driving motor 51 according to this signal, even edging device 7 stops at the high order end of front and back guide rail; Described mechanical position limitation comprises the edging stop 512 that moves to left, it can be arranged on fromer rail 511 and the edging transmission is with between 510 synchronously, excessive in order to prevent that bevelling device 7 is moved to the left, and bevelling device 3 can be crossed move to left stop 512 and moving to the right of edging by the described groove of its below.
As shown in Figure 8, insert right-hand member edging photoelectricity breach 524 and left end edging photoelectricity breach 522 in the moving process for fear of bevelling light control plate 520 to the right at bevelling device 3, make electric-control system 8 produce maloperation, it is inconsistent to make bevelling light control plate 520 and edging light control plate 525 depart from the distance of rear rail 55, deviation distance as bevelling light control plate 520 is smaller, then can make bevelling light control plate 520 in moving process, can not insert right-hand member edging photoelectricity breach 524 and left end edging photoelectricity breach 522, can guarantee also that simultaneously edging light control plate 525 can not insert left end bevelling photoelectricity breach 521 and right-hand member bevelling photoelectricity breach 523 in moving process.
Described bevelling edging transmission device 5 can also comprise and prevent that bevelling device 3 and edging device 7 from moving excessive and anti-raming that bump against each other, and described anti-raming comprises that bevelling device on the same side that is separately positioned on bevelling device slide 53 and edging device slide 56 is anti-and ram 52 and edging device is anti-rams 516.
Bevelling device 3 is meant the device that certain corner angle up and down on one side of square shaped mask version carry out the chamfered edge grinding simultaneously, and therefore, the bevelling device is to be adjusted into according to designing with the grinding motion of bevelling bistrique and position.Shown in Figure 10 to 13, for two seamed edges up and down on certain one side that makes bevelling bistrique 32 grinding simultaneously mask version, bevelling bistrique 32 need be provided with the open slot of an annular in the middle, vertical range between the upper and lower surfaces of open slot increases from inside to outside successively, be preferably linear the increase, and open slot is about a datum water level symmetry, described open slot preferably be the open slots of 90 degree, two ribs up and down that block on mask version one side a certain position (thickness according to mask version determine) of bevelling bistrique 32 by open slot carry out grinding.For the datum water level that makes bevelling bistrique 32 with overlapped by the neutral aspect of the mask version of bevelling, bevelling device 3 need be provided with reciprocating mechanism for bevelling bistrique 32, for the bevelling processing of the mask version that adapts to the different-thickness specification, also need to be provided with the mechanism that moves forward and backward of bevelling bistrique 32.
The bevelling bistrique electric rotating machine 318 that drives 32 rotations of bevelling bistrique is installed on the bevelling grinding head motor installing plate 33, the output shaft of bevelling bistrique electric rotating machine 318 stretches out downwards from the hole on the described bevelling grinding head motor installing plate 33, the axle of bevelling bistrique 32 protrudes upward from the hole on the bistrique axle gripper shoe 323 that is connected with bevelling grinding head motor installing plate 33, links to each other with the axle of bevelling bistrique 32 by the output shaft of shaft coupling with bevelling bistrique electric rotating machine 318 again.
The reciprocating mechanism of described bevelling device 3 comprises lifter slide 315, and described bevelling grinding head motor installing plate 33 is packed on the lifter slide 315.Lifting motor 35 is installed in and installs on the lifting motor installing plate 36 that connecting plate 37 is connected, the hole that the output shaft of lifting motor 35 passes on the lifting motor installing plate 36 protrudes upward, and link to each other with ball-screw on being supported on elevating screw nut support plate 324, elevating screw nut support plate 324 is connected with described lifter slide 315 again, therefore, when lifting motor 35 gets electric startup, ball-screw will make lifter slide 315 move up and down along the lifting guide plate 314 that is slidingly matched with it, and described lifting guide plate 314 is connected with described installation connecting plate 37.
Install between connecting plate 37 and the middle connecting plate 321 buffer cell can be set, buffer cell comprises buffer spring 38 and the guide post 322 of being with axle.The effect one of described buffer cell is for bevelling bistrique 32 provides pre-pressing force, the 2nd, and when the bevelling grinding force overflowed, buffer spring 38 had been compressed buffering and has dodged effect.
Described middle connecting plate 321 is connected with horizontal connecting plate 313, horizontal connecting plate 313 again with the rear portion of bevelling device 3, promptly move forward and backward mechanism and link to each other.
The mechanism that moves forward and backward of described bevelling device 3 comprises and moves forward and backward motor 312, moves forward and backward slide plate 39, and moves forward and backward slide rail 320.Move forward and backward slide plate 39 and move forward and backward slide rail 320 and can be one group of ball screw system, its leading screw provides shaft coupling and moves forward and backward motor 312 and link to each other; The described slide plate 39 that moves forward and backward is connected with described horizontal connecting plate 313.Move forward and backward motor 312 after the electric startup, can drive and move forward and backward slide plate 39 and before and after moving forward and backward on the slide rail 320, move, and then the front portion (being the part of middle connecting plate 321 fronts) that drives bevelling device 3 moves forward and backward.
The camera 325 of bevelling device 3 is installed on the camera support 326, and camera 325 is electrically connected with as shown in Figure 1 left side display screen 4.Described camera support 326 can be fixedly connected on to install and move forward and backward on the installing plate of slide rail 320.Described camera 325 can be with bevelling device 3 move left and right under the drive of bevelling edging transmission device 5, to assist centering location mask version.
The water hose 34 of bevelling device 3 and sparge pipe interface 316 are installed on the sparge pipe gripper shoe 317; Water retaining cover 319 can be fixedly connected on the both sides of bevelling grinding head motor installing plate 33, and the water by water hose 34 ejections in the time of can preventing grinding splashes laterally.
In the end of bevelling grinding head motor installing plate 33 air curtain 31 can be installed, air curtain 31 is preferably the U type pipe of the square-section with hollow, in the bottom of U type pipe, on the side on mask version surface, have several apertures, high pressure gas sprays from the aperture of air curtain 31, form air curtain, the residual water of grinding on the mask version is blowed to water receiving tank 10b, to keep the cleaning quality of mask version.
Bevelling device 3 is connected by the bevelling device slide 53 of bevelling device installation base plate 310 with bevelling edging transmission device 5.Described bevelling device installation base plate 310 can be fixedlyed connected with the installing plate that installation moves forward and backward slide rail 320.
Described edging device 7 is meant that being used for certain plane on one side of square shaped mask version polishes the device of grinding.As shown in figure 14, the edging bistrique 72 of edging device 7 rotates under the drive of edging bistrique electric rotating machine 71, carries out grinding with the plane to a limit of mask version in moving process, the outer face of edging bistrique 72.Edging device 7 comprises reciprocating mechanism and moves forward and backward mechanism.The reciprocating mechanism of described edging device 7 comprises lifting motor 77, it is installed on the lifting motor installing plate 716, moving up and down the hole that the output shaft of motor 77 passes on the lifting motor installing plate 716 stretches out downwards, and be connected by the leading screw of shaft coupling with the ball-screw transmission mechanism, the ball-screw transmission mechanism will drive lifter slide (not shown among Figure 14, can be similar with the lifter slide 315 of bevelling device 3) and move up and down along connecting plate 74 is installed.Lifting motor installing plate 716 is connected with installation connecting plate 74, when lifting motor 77 starts, will drive lifter slide by the ball-screw transmission mechanism moves up and down, be packed in edging bistrique electric rotating machine 71 on this lifter slide and will carry edging bistrique 72 and also move up and down thereupon, make the neutral line of the central point of edging bistrique 72 over against the mask version.
Install and can be provided with one and the buffer cell function and all identical buffer cell of structure of bevelling device 3 between connecting plate 74 and the middle connecting plate 76, this buffer cell comprises buffer spring 75 and the guide post of being with axle equally.
Described middle connecting plate 76 is connected with horizontal connecting plate 78, horizontal connecting plate 787 again with the rear portion of edging device 7, promptly move forward and backward mechanism and link to each other.
The structure that moves forward and backward mechanism that moves forward and backward mechanism and bevelling device 3 of described edging device 7 can be identical, also comprise and move forward and backward motor 710, move forward and backward motor 710 after the electric startup, can drive and move forward and backward slide plate and before and after moving forward and backward on the slide rail, move, and then the front portion (being the part of middle connecting plate 76 fronts) that drives edging device 7 moves forward and backward.
The camera 713 of edging device 7 is installed on the edging device 7 by camera support 712, and camera 712 is electrically connected with as shown in Figure 1 right side display screen 6.Described camera support 712 can be fixedly connected on to install and move forward and backward on the installing plate of slide rail.Described camera 713 can be with edging device 7 move left and right under the drive of bevelling edging transmission device 5, to assist centering location mask version.
The water hose 73 and the sparge pipe interface 714 of edging device 7 are installed on the sparge pipe gripper shoe 715.
Edging device 7 is connected by the edging device slide 56 of edging device installation base plate 79 with bevelling edging transmission device 5.Described edging device installation base plate 79 can be fixedlyed connected with the installing plate that installation moves forward and backward slide rail.
For preventing that bevelling device 3 and edging device 7 from bumping against, shown in Figure 10 and 11, can on the bevelling device installation base plate 310 of bevelling device 3, crashproof light control plate 311 be set, and the phase relevant position of the edging device installation base plate 79 of edging device 7 is provided with crashproof photoelectricity breach 711.When bevelling device 3 and edging device 7 near to extreme position the time, edging light control plate 311 is just in time inserted in the crashproof photoelectricity breach 711, this actuating signal will be sent to electric-control system 8, electric-control system 8 will stop operating bevelling driving motor 57 and edging driving motor 51 according to this actuating signal simultaneously, make bevelling device 3 and edging device 7 stop motions simultaneously.
The process of mask version bevelling edge polisher of the present invention is as follows:
Start mask version bevelling edge polisher by control panel 2 or touch-screen 9, then electric-control system 8 is opened vacuum system, and according to the dimensions of mask version, according to default program automatically to one group or organize groove 161 more vacuum is provided, Rubber washer 13 on it is firmly held (in the present embodiment, mask version gripper shoe 16 is provided with four groups of grooves 161, one group of groove 161 of the mask version of a minimum dimension specification scope of application minimum, the mask version of size maximum will be opened four groups of grooves 161).Meanwhile, the camera on bevelling device 3 and the edging device 7 is also according to the requirement of pre-set programs, moves to the position that the mask version needs centering observation with separately device.Afterwards, by manually mask version to be processed being placed on the Rubber washer 13 of mask version support platform apparatus 1, by positioning adjustment component 15, making the location adjust rib 155, left locating piece 151 and right locating piece 152 draws close to three limits of mask version respectively, and promote the location and adjust rib 155 that the mask version is adjusted forward is mobile, on seeing left side display screen 4 and right side display screen 6, demonstrate the mask version treat the edging correct position time, by artificial locking lock-screw 154 and set lever 158, the mask version is positioned.
Start bevelling edging program, bevelling device 3 and edging device 7 are at first got back to initial stop place separately, and promptly bevelling device 3 is positioned at the leftmost side of bevelling edging transmission device 5, and edging device 7 is positioned at the rightmost side of bevelling edging transmission device 5; After two devices are all got back to initial position, according to pre-set programs, bevelling driving motor 57 starts, move right with the bevelling device 3 that bevelling device slide 53 is connected mutually with 54 drives synchronously by the bevelling transmission, meanwhile, bevelling bistrique electric rotating machine 318 rotates, water hose 34 begins water spray, air curtain 31 begins blowing, when the edge joint to be processed of the open slot of bevelling bistrique 32 and mask version touches, has promptly begun the seamed edge up and down on this limit is carried out the chamfered edge grinding; Put in place when bevelling device 3 moves right, and the bevelling light control plate on it 520 is when inserting right-hand member bevelling photoelectricity breach 523, bevelling device 3 stops to move.Afterwards, bevelling driving motor 57 backward rotation drive bevelling device 3 and are moved to the left, and when moving to left end, and the bevelling light control plate on it 520 is when inserting left end bevelling photoelectricity breach 521, and bevelling device 3 is moved to the left and puts in place and stop; When bevelling device 3 is being moved to the left in the process, also can move forward and backward motor 312 by pre-set programs control as required and advance a depth of cut automatically, make bevelling bistrique 32 in the backhaul process, still can carry out the bevelling grinding.
Electric-control system 8 obtains bevelling device 3 and puts in place behind the Stop message, start edging driving motor 51, be moved to the left with the edging device 7 that edging device slide 56 is connected mutually with 510 drives synchronously by the edging transmission, when the plane contact of the limit of the outer face of the edging bistrique 72 on it and mask version, promptly begun grinding is carried out on the plane, limit on this limit; Put in place when edging device 7 is moved to the left, and the edging light control plate on it 525 is when inserting left end edging photoelectricity breach 522, edging device 7 stops to move.Afterwards, edging driving motor 51 backward rotation drive edging device 7 and move right, and when moving to right-hand member, and the edging light control plate on it 525 is when inserting right-hand member edging photoelectricity breach 524, and edging device 7 moves right and puts in place and stop; In edging device 7 is moving right process, also can move forward and backward motor 710 by pre-set programs control as required and advance a depth of cut automatically, make edging bistrique 72 in the backhaul process, still can carry out the edging grinding.
After the bevelling edging is finished,, carry out bevelling and edging processing Yi Bian change again by manually unclamping the mask version.Carry out so repeatedly, just can finish the bevelling and the edging processing work of a piece mask version.
According to mask version dimensions, the stroke length of bevelling device 3 and edging device 7 is different, and is main by adjustment bevelling light control plate 520 and edging light control plate 525, and realize bevelling the move to left position of stop 512 of stop 515 and edging that moves to right.
Only being preferred embodiment of the present invention in sum, is not to be used for limiting practical range of the present invention.Be that all equivalences of doing according to the content of the present patent application claim change and modification, all should belong to technology category of the present invention.

Claims (10)

1. a mask version bevelling edge polisher is characterized in that: comprise
Mask version support platform apparatus comprises mask version gripper shoe and adjusts the positioning adjustment component of location to being placed on mask version on the described mask version gripper shoe;
The bevelling bistrique of bevelling device, certain that is included in its moving process the mask of grinding simultaneously version two seamed edges up and down on one side, described bevelling bistrique rotates under the drive of bevelling bistrique electric rotating machine;
Edging device is included in the bevelling bistrique on certain plane, limit on one side of grinding mask version in its moving process, and described edging bistrique rotates under the drive of edging bistrique electric rotating machine;
Bevelling edging transmission device comprises bevelling device slide and edging device slide, the two all with a guide rail sliding connection, described bevelling device and edging device are installed in respectively on bevelling device slide and the edging device slide; The bevelling PWTN edging power drive system of unifying, drive described bevelling device slide and edging device slide respectively along described guide rail move left and right, make described bevelling device and edging device in moving process, carry out bevelling processing and edging processing to the mask version that is placed on the described mask version support platform apparatus respectively; And,
Electric-control system is controlled described bevelling and edging power drive system, bevelling bistrique electric rotating machine, and the coordination of edging bistrique electric rotating machine.
2. a kind of mask version bevelling edge polisher according to claim 1, it is characterized in that: the front of described mask version gripper shoe has the groove of some groups of non-penetratives, every group of groove is benchmark with an end points of described mask version gripper shoe, it is divided into the square supporting zone that occupies different area, to adapt to the mask version of different size; The back side of described mask version gripper shoe have some groups with described some groups of grooves deep gouge one to one, the center line of each deep gouge in every group of deep gouge is all corresponding with the one group of groove that is positioned at its top, be provided with the vacuum venting hole that communicates with the one group of groove that is positioned at its top in each deep gouge, a vacuum air-channel piece all is installed in each deep gouge; Each vacuum air-channel piece is all by a vacuum gas joint and a vacuum chamber; Described mask version support platform apparatus comprises that also one covers the antistatic Rubber washer on described mask version gripper shoe, and its effect by the vacuum air-channel piece is adsorbed on the described mask version gripper shoe.
3. a kind of mask version bevelling edge polisher according to claim 1 and 2, it is characterized in that: described positioning adjustment component comprises location adjustment rib, its two ends are installed with the roller installing rack respectively, all be equipped with on the roller installing rack at two ends and make the positioning adjustment component back-up roller that slide in front and back on mask version gripper shoe, sidewindering of rolling on mask version gripper shoe also is installed on the described roller installing rack; The both sides that rib is adjusted in described location are provided with the lock-screw that is used to locate; The left end of adjusting rib in the location is equipped with left locating piece, and the location is adjusted rib and is provided with the right locating piece that can slide thereon, and described right locating piece carries out locking positioning by a set lever.
4. a kind of mask version bevelling edge polisher according to claim 1, it is characterized in that: the guide rail of described bevelling edging transmission device comprises fromer rail and rear rail; Described bevelling power drive system comprises the bevelling driving motor, it is installed in the right-hand end of described rear rail, the synchronous driving wheel of bevelling and the synchronous driven pulley of bevelling that are driven by described bevelling driving motor are installed between described fromer rail and the rear rail, and are with synchronously with a bevelling transmission and cooperate installation; Described edging power drive system comprises the edging driving motor, it is installed in the left end of described fromer rail, the synchronous driving wheel of edging and the synchronous driven pulley of edging that are driven by described edging driving motor are installed between described fromer rail and the rear rail, and are with synchronously with an edging transmission and cooperate installation; The rear section of described bevelling device slide and described bevelling transmission band synchronously are connected, the front part of bevelling device slide is kept at a distance with the synchronous band of described edging transmission by thereunder opening a groove, the front part of described edging device slide and described edging transmission band synchronously are connected, and the rear section of edging device slide is kept at a distance with the synchronous band of described bevelling transmission by thereunder opening a groove; Described bevelling driving motor and edging driving motor are by described electric control system controls.
5. a kind of mask version bevelling edge polisher according to claim 4 is characterized in that: described bevelling edging transmission device also comprises the move to left position-limiting unit and the position-limiting unit that moves to right of bevelling device, and the move to left position-limiting unit and the position-limiting unit that moves to right of edging device;
The position-limiting unit that moves to left of described bevelling device comprises the bevelling light control plate that is packed in described bevelling device slide rear side and is set in place in the left end bevelling photoelectricity breach that cooperates with described bevelling light control plate in the rear rail left end outside that described left end bevelling photoelectricity breach is connected with described electric-control system communication; The bevelling stop that moves to left is arranged on the left end of described rear rail, and is excessive in order to prevent that the bevelling device is moved to the left;
The position-limiting unit that moves to right of described bevelling device comprises described bevelling light control plate and is set in place in the right-hand member bevelling photoelectricity breach that cooperates with described bevelling light control plate in the rear rail right-hand member outside that described right-hand member bevelling photoelectricity breach is connected with described electric-control system communication; The bevelling stop that moves to right is arranged on rear rail and bevelling transmission synchronously between the band, and is excessive in order to prevent that the bevelling device from moving right;
The position-limiting unit that moves to right of described edging device comprises the edging light control plate that is packed in described edging device slide rear side and is set in place in the right-hand member edging photoelectricity breach that cooperates with described edging light control plate in the rear rail right-hand member outside that described right-hand member edging photoelectricity breach is connected with described electric-control system communication; The edging stop that moves to right is arranged on the right-hand member of described fromer rail, and is excessive in order to prevent that edging device from moving right;
The position-limiting unit that moves to left of described edging device comprises described edging light control plate and is set in place in the left end edging photoelectricity breach that cooperates with described edging light control plate in the rear rail left end outside that described left end edging photoelectricity breach is connected with described electric-control system communication; The edging stop that moves to left is arranged on fromer rail and edging transmission synchronously between the band, and is excessive in order to prevent that the bevelling device is moved to the left.
6. a kind of mask version bevelling edge polisher according to claim 5, it is characterized in that: described bevelling edging transmission device can also comprise and prevent that bevelling device and edging device from moving excessive and anti-raming that bump against each other, and described anti-raming comprises that bevelling device on the same side that is separately positioned on bevelling device slide and edging device slide is anti-and ram and edging device is anti-rams.
7. a kind of mask version bevelling edge polisher according to claim 1, it is characterized in that: described bevelling bistrique is provided with the open slot of an annular in the middle, vertical range between the upper and lower surfaces of open slot increases from inside to outside successively, and described open slot is about a datum water level symmetry; Described bevelling device also comprises and drives the reciprocating mechanism that described bevelling bistrique moves up and down and move forward and backward respectively and move forward and backward mechanism; The camera of bevelling device is electrically connected with a left side display screen; The water hose of bevelling device and sparge pipe interface are installed on the sparge pipe gripper shoe; The front end of bevelling device is provided with water receiving tank between described mask version support platform apparatus and bevelling edging transmission device; In the place ahead of described bevelling bistrique one air curtain is installed, the bottom of described air curtain, on the side on mask version surface, is had several apertures; Described air curtain is communicated with a gases at high pressure feedway.
8. a kind of mask version bevelling edge polisher according to claim 1 is characterized in that: described edging device also comprises and drives the reciprocating mechanism that described edging bistrique moves up and down and move forward and backward respectively and move forward and backward mechanism; The camera of edging device is electrically connected with a right side display screen.
9. a kind of mask version bevelling edge polisher according to claim 1, it is characterized in that: described bevelling device is provided with crashproof light control plate, and the relevant position of described edging device is provided with the crashproof photoelectricity breach that cooperates with described prevention and control light control plate; Described crashproof photoelectricity breach is connected with described electric-control system communication.
10. the process of a mask version bevelling edge polisher is characterized in that: comprises the steps,
Start mask version bevelling edge polisher,, the mask version is adjusted the location by positioning adjustment component by manually mask version to be processed being placed on the Rubber washer of mask version support platform apparatus;
Start bevelling edging program, bevelling device and edging device are at first got back to initial stop place separately, and promptly the bevelling device is positioned at the leftmost side of bevelling edging transmission device, and edging device is positioned at the rightmost side of bevelling edging transmission device; After two devices are all got back to initial position, according to pre-set programs, the bevelling device that the bevelling power drive system drives with bevelling device slide is connected mutually moves right, and when the edge joint to be processed of bevelling bistrique and mask version touches, has promptly begun the seamed edge up and down on this limit is carried out the chamfered edge grinding; When the bevelling device moves right when putting in place, the bevelling device stops to move; Afterwards, the bevelling power drive system drives the bevelling device and is moved to the left, and when the bevelling device is moved to the left when putting in place, the bevelling device is moved to the left and puts in place and stop;
Electric-control system obtains the bevelling device and puts in place behind the Stop message, start the edging power drive system, band is moved to the left with the edging device that the edging device slide is connected mutually, when the plane contact of the limit of the outer face of the edging bistrique on it and mask version, promptly begun grinding is carried out on the plane, limit on this limit; Edging device stops to move when putting in place when edging device is moved to the left; Afterwards, the edging power drive system drives edging device and moves right, when move right for the time, edging device moves right and puts in place and stop;
After the bevelling edging is finished,, carry out bevelling and edging processing Yi Bian change again by manually unclamping the mask version.Carry out so repeatedly, just can finish the bevelling and the edging processing work of a piece mask version.
CN2009101580840A 2009-07-20 2009-07-20 Masking film chamfering edge edger and machining process thereof Expired - Fee Related CN101596694B (en)

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102303271A (en) * 2011-08-19 2012-01-04 昆山迎翔光电科技有限公司 Assembly for chamfering ceramic inserting core
CN102658512A (en) * 2012-05-17 2012-09-12 株洲南车时代电气股份有限公司 Half-automatic edge brushing machine for board edge of thin board of PCB (Printed Circuit Board)
CN103009205A (en) * 2011-09-28 2013-04-03 上海双明光学科技有限公司 Photo-mask plate side polishing device
CN108838792A (en) * 2018-06-14 2018-11-20 芜湖恒安钢结构有限公司 Shipbuilding square plate side grinding equipment
CN114274034A (en) * 2021-11-24 2022-04-05 宁波华辰机械有限公司 Automatic polishing machine
CN117583522A (en) * 2023-12-07 2024-02-23 台州市承跃机械有限公司 Aluminum forging device for motorcycle production

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KR950012890B1 (en) * 1992-01-21 1995-10-23 박경 Plate glass grinding device
CN2344128Y (en) * 1997-12-11 1999-10-20 时华声 Multi-layer glass edging and bevelling machine
JP2007210043A (en) * 2006-02-07 2007-08-23 Nakamura Tome Precision Ind Co Ltd Side machining apparatus for work
CN100542744C (en) * 2007-02-03 2009-09-23 太原风华信息装备股份有限公司 Large scale liquid crystal glass edge grinding machine

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102303271A (en) * 2011-08-19 2012-01-04 昆山迎翔光电科技有限公司 Assembly for chamfering ceramic inserting core
CN103009205A (en) * 2011-09-28 2013-04-03 上海双明光学科技有限公司 Photo-mask plate side polishing device
CN102658512A (en) * 2012-05-17 2012-09-12 株洲南车时代电气股份有限公司 Half-automatic edge brushing machine for board edge of thin board of PCB (Printed Circuit Board)
CN108838792A (en) * 2018-06-14 2018-11-20 芜湖恒安钢结构有限公司 Shipbuilding square plate side grinding equipment
CN114274034A (en) * 2021-11-24 2022-04-05 宁波华辰机械有限公司 Automatic polishing machine
CN114274034B (en) * 2021-11-24 2022-12-30 宁波华辰机械有限公司 Automatic polishing machine
CN117583522A (en) * 2023-12-07 2024-02-23 台州市承跃机械有限公司 Aluminum forging device for motorcycle production
CN117583522B (en) * 2023-12-07 2024-05-10 台州市承跃机械有限公司 Aluminum forging device for motorcycle production

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