CN201439178U - Phase mask supporting platform device of phase mask edge chamfering and smoothing machine - Google Patents

Phase mask supporting platform device of phase mask edge chamfering and smoothing machine Download PDF

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Publication number
CN201439178U
CN201439178U CN2009201668359U CN200920166835U CN201439178U CN 201439178 U CN201439178 U CN 201439178U CN 2009201668359 U CN2009201668359 U CN 2009201668359U CN 200920166835 U CN200920166835 U CN 200920166835U CN 201439178 U CN201439178 U CN 201439178U
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CN
China
Prior art keywords
mask version
gripper shoe
phase mask
deep gouge
location
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Expired - Fee Related
Application number
CN2009201668359U
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Chinese (zh)
Inventor
林宜龙
田亮
张松岭
林建昌
周冠彬
唐召来
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Grand Technology Shenzhen Co Ltd
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Grand Technology Shenzhen Co Ltd
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Priority to CN2009201668359U priority Critical patent/CN201439178U/en
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Publication of CN201439178U publication Critical patent/CN201439178U/en
Anticipated expiration legal-status Critical
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Abstract

The utility model discloses a phase mask supporting platform device of a phase mask edge chamfering and smoothing machine, belonging to the processing field of chamfering and smoothing edges of the phase mask. The device comprises a phase mask supporting plate, and a location adjusting component which is used to adjust and locate the phase mask laid on the phase mask supporting plate. The location adjusting component comprises a location adjusting baffle edge, a left locating block is installed at the left side of the location adjusting baffle edge, a right locating block which can be slid at the location adjusting baffle edge is arranged thereon, the right locating block is locked and located through a locking handle. In the phase mask supporting platform device of the utility model, the phase mask can be supported during the process in which the edge chamfering device and the edge smoothing device chamfer and smooth the edges of the phase mask, in addition, the phase mask can be adjusted and located before being processed.

Description

A kind of mask version support platform apparatus of mask version bevelling edge polisher
Technical field
The utility model relates to a kind of for the mask version is being carried out support mask in bevelling and the edging process, and it is adjusted the mask version support platform apparatus of location before processing.
Background technology
The mask version is one of important machining tool that is widely used in electron trade, and the bevelling of mask version and edging are the important processing links in the mask version processing and manufacturing process, and its crudy quality directly has influence on the quality of mask version.At present, the bevelling of mask version and edging operation all are by finishing manually, not only labour intensity is big for this processing mode, production efficiency is low, the more important thing is the difficult quality guarantee of bevelling and edging, and machining accuracy is all lower, very difficult will being applied in the high-end product through the mask version of manual bevelling and edging, the particularly bevelling of large scale mask version and edging, its crudy just more be cannot say for sure to demonstrate,prove.
The utility model content
A purpose of the present utility model is the present situation of the mask version being carried out bevelling and edging processing at existing, provide a kind of and the mask version is being carried out support mask in bevelling and the edging process, and before processing, it is adjusted the mask version support platform apparatus of location.
For achieving the above object, the utility model adopts following technical scheme: a kind of mask version support platform apparatus of mask version bevelling edge polisher, comprise mask version gripper shoe and adjust the positioning adjustment component of location being placed on mask version on the described mask version gripper shoe; Described positioning adjustment component comprises a location adjustment rib, and the left end that rib is adjusted in described location is equipped with left locating piece, and the location is adjusted rib and is provided with the right locating piece that can slide thereon, and described right locating piece carries out locking positioning by a set lever.
Preferably, comprise that also one covers the antistatic Rubber washer on described mask version gripper shoe; The front of described mask version gripper shoe has the groove of some groups of non-penetratives, and every group of groove is benchmark with an end points of described mask version gripper shoe, it is divided into the square supporting zone that occupies different area, to adapt to the mask version of different size; The back side of described mask version gripper shoe have some groups with described some groups of grooves deep gouge one to one, the center line of each deep gouge in every group of deep gouge is all corresponding with the one group of groove that is positioned at its top, be provided with the vacuum venting hole that communicates with the one group of groove that is positioned at its top in each deep gouge, a vacuum air-channel piece all is installed in each deep gouge; Each vacuum air-channel piece is all by a vacuum gas joint and a vacuum chamber; Described antistatic Rubber washer is adsorbed on the described mask version gripper shoe by the effect of vacuum air-channel piece.
Preferably, the two ends that rib is adjusted in described location are installed with the roller installing rack respectively, all be equipped with on the roller installing rack at two ends and make the positioning adjustment component back-up roller that slide in front and back on mask version gripper shoe, sidewindering of rolling on mask version gripper shoe also is installed on the described roller installing rack; The both sides that rib is adjusted in described location are provided with the lock-screw that is used to locate.
Preferably, also comprise the marble bracing frame, be installed with marble on it, described mask version gripper shoe is installed on the marble; Be provided with the trough with straight angle of ccontaining described back-up roller in the both sides of described mask version gripper shoe, back-up roller is supported on the described marble, the outward flange of described trough with straight angle for support described sidewinder sidewinder supporting surface.
Preferably, described marmorean thickness is more than or equal to 10cm.
Preferably, the front of described mask version gripper shoe has the groove of four groups of non-penetratives; The back side of described mask version gripper shoe have four groups with described four groups of grooves deep gouge one to one, every group of deep gouge comprises two deep gouges that are perpendicular to one another and are provided with.
Usefulness of the present utility model is: by positioning adjustment component is set, can adjust the position of mask version, and after the position is adjusted, the mask version is positioned, the mask version is being carried out in bevelling and the edging process guaranteeing, the mask version can not be offset, and promptly can guarantee crudy.By on mask version gripper shoe, having some groups of non-penetrative grooves, the back side at mask version support plate has some groups of deep gouges, one antistatic Rubber washer is adsorbed on the mask version gripper shoe, can avoid in the process of adjusting the mask version, damaging the mask version, in addition, can also open corresponding vacuum air-channel piece at the mask version of different size, the energy avoids waste.Marble selects 10cm thick, accounts for 2/3rds of whole support platform thickness, can guarantee that side's placed on it mask version does not have any distortion.
Description of drawings
Fig. 1 is the perspective view of mask version support platform apparatus described in the utility model;
Fig. 2 is the explosive view of mask version support platform apparatus shown in Figure 1;
Fig. 3 is the Facad structure schematic diagram of mask version gripper shoe shown in Figure 1;
Fig. 4 is the structure schematic diagram of mask version gripper shoe shown in Figure 1;
Fig. 5 is the structural representation of positioning adjustment component shown in Figure 1.
The specific embodiment
A kind of mask version bevelling edge polisher comprises and supports the mask version, and it is adjusted the mask support platform apparatus of location.
Shown in Fig. 1 to 5, described mask version support platform apparatus 1 comprises marble bracing frame 11, is installed with marble 12 on it.Described mask version gripper shoe 16, be preferably aluminum alloy material, its front has the groove 161 of some groups of non-penetratives, every group of groove 161 is benchmark with an end points of mask version gripper shoe 16, it is divided into the square supporting zone that occupies different area, to adapt to the mask version of different size, be provided with four groups of grooves 161 in the present embodiment.
The back side of described mask version gripper shoe 16 have some groups with described some groups of grooves 161 deep gouge one to one, every group of deep gouge can comprise two deep gouges 18 that are perpendicular to one another and are provided with, wherein, the center line of each deep gouge 18 is corresponding with the one group of groove 161 that is positioned at its top, be provided with the vacuum venting hole (not shown) that communicates with the one group of groove 161 that is positioned at its top in each deep gouge 18, wherein, the vacuum venting hole is preferably the center line setting along deep gouge 18.Described deep gouge 18, its dual-side is provided with and connects screw 19, a vacuum air-channel piece 14 all is installed in each deep gouge 18, and described vacuum air-channel piece 14 preferably is fixed on each vacuum air-channel piece 14 by bolt and the described cooperation that is connected screw 19 after the diaphragm seal on the pad around it and separately in the corresponding deep gouge 18.Can screw in from the side of mask version gripper shoe 16 and corresponding vacuum air-channel piece 14 separately with each vacuum gas joint 17 of vacuum chamber, it is communicated with vacuum air-channel piece 14.Have only after each deep gouge 18 all installs vacuum air-channel piece 14, mask version gripper shoe 16 just can be fixedly mounted on the marble 12.
Can be stamped an antistatic Rubber washer 13 on the described mask version gripper shoe 16, damage mask version when preventing that the mask version adjusted centering.The thickness of described marble 12 is preferably more than and equals 10cm, account for whole mask version support platform apparatus 1 thickness 2/3, do not have any distortion with the mask version that guarantees side placed on it.When described mask version support platform apparatus 1 was worked, the electric control system controls vacuum air-channel was connected, because each vacuum air-channel piece 14 passes through the vacuum venting hole and each group groove 161 is communicated with, so Rubber washer 13 can be adsorbed on the mask version gripper shoe 16 tightly.
Mask version to be processed is by manually being placed on the described Rubber washer 13, adjust the position of mask version on mask version gripper shoe 16 by positioning adjustment component 15, and after adjusting, position, described positioning adjustment component 15 comprises location adjustment rib 155, its two ends are installed with the roller installing rack respectively, all be equipped with on the roller installing rack at two ends and make positioning adjustment component 15 back-up roller 156 that slide in front and back on mask version gripper shoe 16, back-up roller 156 is rolled on the back-up roller supporting surface 121 of marble 12, also be equipped with on the described roller installing rack what sidewindering of mask version gripper shoe 16 rolled on the supporting surface 162 and sidewinder 153, described mask version gripper shoe 16, be provided with the trough with straight angle of ccontaining back-up roller 156 in both sides, the outward flange of trough with straight angle is the described supporting surface 162 that sidewinders; The both sides that rib 155 is adjusted in described location are provided with the lock-screw 154 that is used to locate; The left end of adjusting rib 155 in the location is equipped with left locating piece 151, and the location is adjusted rib 155 and is provided with the right locating piece 152 that can slide thereon, and right locating piece 152 can carry out locking positioning by the usual set lever 158 that uses in mechanical field.Therefore, can adjust rib 155, left locating piece 151 and right locating piece 152 by the location of positioning adjustment component 15, promote mask version centering location, and position, it is carried out bevelling and edging processing at next step by means of lock- screw 154 and 158 pairs of mask versions of set lever.
Being the utility model preferred embodiment only in sum, is not to be used for limiting practical range of the present utility model.Be that all equivalences of doing according to the content of the utility model claim change and modification, all should belong to technology category of the present utility model.

Claims (6)

1. the mask version support platform apparatus of a mask version bevelling edge polisher is characterized in that: comprise mask version gripper shoe and adjust the positioning adjustment component of location to being placed on mask version on the described mask version gripper shoe; Described positioning adjustment component comprises a location adjustment rib, and the left end that rib is adjusted in described location is equipped with left locating piece, and the location is adjusted rib and is provided with the right locating piece that can slide thereon, and described right locating piece carries out locking positioning by a set lever.
2. the mask version support platform apparatus of a kind of mask version bevelling edge polisher according to claim 1 is characterized in that: comprise that also one covers the antistatic Rubber washer on described mask version gripper shoe; The front of described mask version gripper shoe has the groove of some groups of non-penetratives, and every group of groove is benchmark with an end points of described mask version gripper shoe, it is divided into the square supporting zone that occupies different area, to adapt to the mask version of different size; The back side of described mask version gripper shoe have some groups with described some groups of grooves deep gouge one to one, the center line of each deep gouge in every group of deep gouge is all corresponding with the one group of groove that is positioned at its top, be provided with the vacuum venting hole that communicates with the one group of groove that is positioned at its top in each deep gouge, a vacuum air-channel piece all is installed in each deep gouge; Each vacuum air-channel piece is all by a vacuum gas joint and a vacuum chamber; Described antistatic Rubber washer is adsorbed on the described mask version gripper shoe by the effect of vacuum air-channel piece.
3. the mask version support platform apparatus of a kind of mask version bevelling edge polisher according to claim 1 and 2, it is characterized in that: the two ends that rib is adjusted in described location are installed with the roller installing rack respectively, all be equipped with on the roller installing rack at two ends and make the positioning adjustment component back-up roller that slide in front and back on mask version gripper shoe, sidewindering of rolling on mask version gripper shoe also is installed on the described roller installing rack; The both sides that rib is adjusted in described location are provided with the lock-screw that is used to locate.
4. the mask version support platform apparatus of a kind of mask version bevelling edge polisher according to claim 3 is characterized in that: also comprise the marble bracing frame, be installed with marble on it, described mask version gripper shoe is installed on the marble; Be provided with the trough with straight angle of ccontaining described back-up roller in the both sides of described mask version gripper shoe, back-up roller is supported on the described marble, the outward flange of described trough with straight angle for support described sidewinder sidewinder supporting surface.
5. the mask version support platform apparatus of a kind of mask version bevelling edge polisher according to claim 4 is characterized in that: described marmorean thickness is more than or equal to 10cm.
6. the mask version support platform apparatus of a kind of mask version bevelling edge polisher according to claim 2 is characterized in that: the front of described mask version gripper shoe has the groove of four groups of non-penetratives; The back side of described mask version gripper shoe have four groups with described four groups of grooves deep gouge one to one, every group of deep gouge comprises two deep gouges that are perpendicular to one another and are provided with.
CN2009201668359U 2009-07-20 2009-07-20 Phase mask supporting platform device of phase mask edge chamfering and smoothing machine Expired - Fee Related CN201439178U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN2009201668359U CN201439178U (en) 2009-07-20 2009-07-20 Phase mask supporting platform device of phase mask edge chamfering and smoothing machine

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN2009201668359U CN201439178U (en) 2009-07-20 2009-07-20 Phase mask supporting platform device of phase mask edge chamfering and smoothing machine

Publications (1)

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Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102658512A (en) * 2012-05-17 2012-09-12 株洲南车时代电气股份有限公司 Half-automatic edge brushing machine for board edge of thin board of PCB (Printed Circuit Board)
CN102720924A (en) * 2012-05-11 2012-10-10 哈尔滨工业大学 Magnetic force prefastening plane rolling supporting device
CN106920767A (en) * 2017-03-29 2017-07-04 华东师范大学 A kind of mask plate is fitted and separator with sample

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102720924A (en) * 2012-05-11 2012-10-10 哈尔滨工业大学 Magnetic force prefastening plane rolling supporting device
CN102658512A (en) * 2012-05-17 2012-09-12 株洲南车时代电气股份有限公司 Half-automatic edge brushing machine for board edge of thin board of PCB (Printed Circuit Board)
CN106920767A (en) * 2017-03-29 2017-07-04 华东师范大学 A kind of mask plate is fitted and separator with sample
CN106920767B (en) * 2017-03-29 2023-06-09 华东师范大学 Attaching and separating device for mask and sample

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C14 Grant of patent or utility model
GR01 Patent grant
C17 Cessation of patent right
CF01 Termination of patent right due to non-payment of annual fee

Granted publication date: 20100421

Termination date: 20110720