CN101503820B - 用于制造半导体晶圆的方法和设备 - Google Patents
用于制造半导体晶圆的方法和设备 Download PDFInfo
- Publication number
- CN101503820B CN101503820B CN200910004065.2A CN200910004065A CN101503820B CN 101503820 B CN101503820 B CN 101503820B CN 200910004065 A CN200910004065 A CN 200910004065A CN 101503820 B CN101503820 B CN 101503820B
- Authority
- CN
- China
- Prior art keywords
- molten mass
- heat release
- pattern
- semiconductor material
- locating device
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Classifications
-
- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04L—TRANSMISSION OF DIGITAL INFORMATION, e.g. TELEGRAPHIC COMMUNICATION
- H04L49/00—Packet switching elements
- H04L49/90—Buffering arrangements
Landscapes
- Engineering & Computer Science (AREA)
- Computer Networks & Wireless Communication (AREA)
- Signal Processing (AREA)
- Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
- Data Exchanges In Wide-Area Networks (AREA)
Abstract
Description
100 | 设备 | 138 | 卸载区域 |
102 | 定位装置 | 140 | 热分布 |
104 | 辊子 | 142 | 局部冷点或预定位置 |
108 | 给料斗 | 144 | 半导体晶圆 |
110 | 刮刀 | 200 | 方法 |
112 | 半导体材料 | 201 | 提供定位装置 |
114 | 热源或热处理设备 | 202 | 向定位装置施加脱模涂层 |
116 | 加热/冷却区域 | 203 | 沉积半导体材料 |
118 | 定位装置上表面 | 204 | 移动定位装置穿过温度梯度 |
122 | 排热装置 | 205 | 向熔融体应用热图案 |
124 | 脱模涂层 | 302 | 冷却层 |
126 | 熔融体 | 304 | 隔热层 |
128 | 熔融体上表面 | 306 | 图案 |
130 | 预热区域 | 308 | 第一表面 |
132 | 熔融区域 | 310 | 第二表面 |
134 | 结晶区域 | 400 | 图案 |
136 | 冷却区域 | 402,502 | 暗的点和/或线(凸起或伸长部分) |
500 | 图案 | 404,504 | 平坦的和/或凹陷的部分 |
Claims (20)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US2658608P | 2008-02-06 | 2008-02-06 | |
US12/026586 | 2008-02-06 |
Publications (2)
Publication Number | Publication Date |
---|---|
CN101503820A CN101503820A (zh) | 2009-08-12 |
CN101503820B true CN101503820B (zh) | 2014-08-06 |
Family
ID=40931637
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN200910004065.2A Expired - Fee Related CN101503820B (zh) | 2008-02-06 | 2009-02-05 | 用于制造半导体晶圆的方法和设备 |
Country Status (3)
Country | Link |
---|---|
US (1) | US8432908B2 (zh) |
CN (1) | CN101503820B (zh) |
AU (1) | AU2009200196A1 (zh) |
Families Citing this family (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2009134772A2 (en) * | 2008-04-29 | 2009-11-05 | Maxiscale, Inc | Peer-to-peer redundant file server system and methods |
CN102477527B (zh) * | 2010-11-23 | 2014-07-30 | 鸿富锦精密工业(深圳)有限公司 | 壳体的制作方法及由该方法制得的壳体 |
CN102143583A (zh) | 2010-12-29 | 2011-08-03 | 华为技术有限公司 | 寻呼的处理方法及移动交换中心 |
US20150030021A1 (en) | 2012-11-21 | 2015-01-29 | Unify Gmbh & Co. Kg | Local port managing method and device, packet-oriented data network, digital storage media, and computer program product |
US9438539B1 (en) * | 2013-09-03 | 2016-09-06 | Xpliant, Inc. | Apparatus and method for optimizing the number of accesses to page-reference count storage in page link list based switches |
US9825884B2 (en) | 2013-12-30 | 2017-11-21 | Cavium, Inc. | Protocol independent programmable switch (PIPS) software defined data center networks |
US9722810B2 (en) | 2014-02-03 | 2017-08-01 | International Business Machines Corporation | Computer-based flow synchronization for efficient multicast forwarding for products and services |
US9729338B2 (en) * | 2014-09-23 | 2017-08-08 | Cavium, Inc. | Fast hardware switchover in a control path in a network ASIC |
US9813327B2 (en) | 2014-09-23 | 2017-11-07 | Cavium, Inc. | Hierarchical hardware linked list approach for multicast replication engine in a network ASIC |
US10419571B2 (en) | 2015-03-24 | 2019-09-17 | Cavium, Llc | Packet processor forwarding database cache |
US11010409B1 (en) * | 2016-03-29 | 2021-05-18 | EMC IP Holding Company LLC | Multi-streaming with synthetic replication |
Family Cites Families (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6219772B1 (en) * | 1998-08-11 | 2001-04-17 | Autodesk, Inc. | Method for efficient memory allocation of small data blocks |
US6937606B2 (en) * | 2001-04-20 | 2005-08-30 | International Business Machines Corporation | Data structures for efficient processing of IP fragmentation and reassembly |
US7206310B1 (en) * | 2001-12-28 | 2007-04-17 | Redback Networks Inc. | Method and apparatus for replicating packet data with a network element |
US7649882B2 (en) * | 2002-07-15 | 2010-01-19 | Alcatel-Lucent Usa Inc. | Multicast scheduling and replication in switches |
US7325059B2 (en) * | 2003-05-15 | 2008-01-29 | Cisco Technology, Inc. | Bounded index extensible hash-based IPv6 address lookup method |
US20060253682A1 (en) * | 2005-05-05 | 2006-11-09 | International Business Machines Corporation | Managing computer memory in a computing environment with dynamic logical partitioning |
US20060268913A1 (en) * | 2005-05-27 | 2006-11-30 | Utstarcom, Inc. | Streaming buffer system for variable sized data packets |
US7809009B2 (en) * | 2006-02-21 | 2010-10-05 | Cisco Technology, Inc. | Pipelined packet switching and queuing architecture |
-
2008
- 2008-03-28 US US12/058,103 patent/US8432908B2/en active Active
-
2009
- 2009-01-20 AU AU2009200196A patent/AU2009200196A1/en not_active Abandoned
- 2009-02-05 CN CN200910004065.2A patent/CN101503820B/zh not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
CN101503820A (zh) | 2009-08-12 |
AU2009200196A1 (en) | 2009-08-20 |
US20090196288A1 (en) | 2009-08-06 |
US8432908B2 (en) | 2013-04-30 |
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Legal Events
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PB01 | Publication | ||
ASS | Succession or assignment of patent right |
Owner name: MOTECH AMERICAN CO., LTD. Free format text: FORMER OWNER: GENERAL ELECTRIC COMPANY Effective date: 20100612 |
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C41 | Transfer of patent application or patent right or utility model | ||
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Free format text: CORRECT: ADDRESS; FROM: NEW YORK, USA TO: DELAWARE, USA |
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TA01 | Transfer of patent application right |
Effective date of registration: 20100612 Address after: Delaware Applicant after: Mao Di America limited liability company Address before: American New York Applicant before: General Electric Company |
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C14 | Grant of patent or utility model | ||
GR01 | Patent grant | ||
CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20140806 Termination date: 20160205 |
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CF01 | Termination of patent right due to non-payment of annual fee |