CN101476976B - Micro-spectral measurement apparatus - Google Patents
Micro-spectral measurement apparatus Download PDFInfo
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- CN101476976B CN101476976B CN2009100284905A CN200910028490A CN101476976B CN 101476976 B CN101476976 B CN 101476976B CN 2009100284905 A CN2009100284905 A CN 2009100284905A CN 200910028490 A CN200910028490 A CN 200910028490A CN 101476976 B CN101476976 B CN 101476976B
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Abstract
The invention provides a micro-spectrophotometric measuring device. The device can ensure that an optical shaft of a testing system and a normal of a tested surface are superposed so as to improve measuring precision. The micro-spectrophotometric measuring device comprises a lighting system, a light projection system and an imaging optical system; the lighting system is used for transmitting light sent by a light source to the light projection optical system; the light projection system comprises a semipermeable semi-reflecting lens; the light of the lighting system passes through the semipermeable semi-reflecting lens and is projected on the tested surface; the reflected light of the tested surface passes through the semipermeable semi-reflecting lens again and is sent to the imaging optical system; the imaging optical system comprises a left ocular lens and a right ocular lens; the front of the right ocular lens is provided with a compensating lens; after the reflected light of the tested surface entering the imaging optical system is split, one beam of the light is converged on the focal plane of the right ocular lens; and the other beam of the light is imaged on the focal plane of the left ocular lens. The micro-spectrophotometric measuring device has a simple structure and novel concept, and can effectively improve utilization rate of light energy and ensure that the normal of the tested surface and the optical shaft of the testing system are superposed, thereby effectively improving measuring precision.
Description
Technical field
The present invention relates to a kind of micro-spectral measurement apparatus, in particular for the micro-spectral measurement apparatus of measure spectrum reflectivity.
Background technology
Along with improving constantly of optical articles quality control requirement, distribute for the actual spectrum reflectivity on optical element surface behind lens surface, the particularly plated film and reflectivity in research and development and the commercial production and carry out accurate Testing requirement and get more and more.Because lens surface curvature is of a great variety, material is transparent, the reflected light of sample surfaces is very faint behind the plating antireflective film, does is Suo Yi Measuring test instrument faced with the optical axis that how to make test macro in the test and overlap with the tested surface normal? how to make faint reflected light guarantee a series of difficult design such as measuring accuracy through still obtaining enough signal to noise ratio (S/N ratio)s after the beam split.The USPM-RU reflection from lens rate measuring instrument that Japanese Olympus company is arranged that at present in the world can above-mentioned surveying work, but the very expensive many domestic manufacturers of this instrument price can only feel frustrated.
Summary of the invention
The invention provides a kind of micro-spectral measurement apparatus, can guarantee that the optical axis of test macro overlaps with the tested surface normal, improve measuring accuracy.
Described micro-spectral measurement apparatus comprises illuminator, light projection system and imaging optical system, illuminator is in order to flow to the light projector optical system with the light that light source sent, light projection system comprises semi-transparent semi-reflecting lens, with the light of illuminator through projecting behind the semi-transparent semi-reflecting lens on the tested surface, the reflected light of tested surface is admitted to imaging optical system again behind semi-transparent semi-reflecting lens, imaging optical system comprises left eyepiece and right eyepiece, be provided with offset lens before the right eyepiece, the reflected light of tested surface that enters imaging optical system by beam split after, on a branch of focal plane that is focused at right eyepiece through offset lens, a branch of imaging on the left eyepiece focal plane.
Described micro-spectral measurement apparatus can also comprise analytic system, the reflected light of tested surface behind semi-transparent semi-reflecting lens by beam split, a branch of imaging optical system of sending into, a branch of analytic system of sending into, described analytic system is accepted the reflected light of tested surface by optical fiber and it is converged on the optical receiver.As improvement project, described analytic system also comprises and is subjected to optically coupled system, is subjected to optically coupled system to receive the reflected light of the tested surface that sends from optical fiber, converges on the optical receiver after the coupling.Be subjected to optically coupled system to comprise lens and bead, lens axis overlaps with light core axis, and the bead centre of sphere is on the extended line of light core axis, and the tested surface reflected light that sends from optical fiber is incorporated in the optical receiver reflection optical coupler through lens focus.Be generally the resolution of raising as the spectrometer of optical receiver, do not reduce simultaneously energy, its incident end is all made slit, the more little resolution in slit is high more, because the tested surface reflected light light beam in the micro-spectral measurement apparatus is round, if direct imaging on the entrance slit of optical receiver (spectrometer), then has very big energy loss.The benefit that is coupled with multi-core fiber is: an end of optical fiber is lined up circle, the other end is lined up " one " font, it is slit-shaped, thereby the tested surface reflected light light beam that the circle of optical fiber one termination is received, when penetrating, the other end converts slit-shaped to, after lens and bead focusing, be coupled in the optical receiver again, mate fully, reduced the loss of energy with the incident end shape of optical receiver.
As improvement of the present invention, described semi-transparent semi-reflecting lens is axis of symmetry with the optical axis, reflecting part and permeation parts balanced configuration, and also the number of reflecting part and permeation parts is odd number.
Described semi-transparent semi-reflecting lens is arranged near the emergent pupil of objective system of light projection system.
Described illuminator, light projection system, imaging optical system and analytic system are designed to the infinity optical system respectively.
Adopt the present invention,, the reflected light of tested surface is focused on the focal plane of right eyepiece through offset lens, inject right eyepiece, thereby can in right eyepiece, observe the picture of semi-transparent semi-reflecting lens owing to before the right eyepiece of imaging optical system, be provided with offset lens.Whether and left eyepiece is a conventional design, can focus by left eyepiece, observe tested surface and be arranged on the focal plane of light projection system object lens.When tested surface is positioned on the focal plane of lens, has only optical axis (being the optical axis of test macro) when tested surface normal and light projection system when overlapping, the reflected light of tested surface and incident light are with respect to the symmetrical of light projection system, can all be admitted to the microexamination optical system through semi-transparent semi-reflecting lens, make that the picture of observed semi-transparent semi-reflecting lens is symmetrically distributed in the right eyepiece, thereby can determine whether the tested surface normal overlaps with the optical axis of test macro by the picture of observing the semi-transparent semi-reflecting lens in the right eyepiece.Adopt the present invention, can determine that not only tested surface is positioned on the focal plane of lens, can also the reflected light of tested surface all be gone out through the semi-transparent semi-reflecting lens transmission by making the optical axis coincidence of tested surface normal and test macro, can improve the measuring accuracy of micro-spectral measurement apparatus greatly.
When described semi-transparent semi-reflecting lens is axis of symmetry with the optical axis, reflecting part and permeation parts balanced configuration, and the number of reflecting part and permeation parts is when being odd number, from light that light source sent after the reflecting part of semi-transparent semi-reflecting lens reflection (or see through at permeation parts), incide on the tested surface, after the tested surface reflection is returned, see through the semi-transparent semi-reflecting lens mirror and incide in imaging optical system and the analytic system, and converge on the receiver.At present public half-reflecting half mirror utilizes plated film means such as evaporation to make a kind of reflectivity and transmitance near 50% semi-transparent film.In micro-spectral measurement apparatus, illumination light microscopic light (process) lens lighting that light source sent is to this semi-transparent semi-reflecting lens; Do not absorbing ideally, half of incident light be reflected or transmission after shine on the formulation zone of tested surface through object lens as measuring light.The reflected light of tested surface as flashlight once more by getting back to semi-transparent semi-reflecting lens; Under the situation that is not having to absorb, flashlight about 50% by semi-transparent semi-reflecting mirror reflection (or) transmission after imaging optical system the measuring light of tested surface reflection is imaged on the photo-detector face.Under the very low situation of the reflectivity of tested surface, flashlight original just very a little less than, lose over halfly again at the semi-transparent semi-reflecting lens place, will cause that N/S worsens, the albedo measurement precision reduces.Semi-transparent semi-reflecting lens described in the present invention can improve the ratio of the flashlight that enters the microexamination optical system, improves the N/S ratio.This half-reflecting half mirror can be widely used in shortwave or long wave.In addition, this half-reflecting half mirror is used for micro-spectral measurement apparatus, can realize that film thickness, reflectivity, the complex index of refraction of the thick sample of film measured.Use the substrate of the good quartz material of transmitance,, can in shorter wavelength coverage, realize measuring if plate the absorption that the ultraviolet light antireflective film can reduce ultraviolet light at permeation parts as half-reflecting half mirror.If on substrate, do not plate antireflective film, but with metallic object as the reflecting part, permeation parts with the sheet metal hollow out, is not be used in plated film on the glass substrate, single can produce half-reflecting half mirror with mechanical aspects processing metal plate.Can also be the half-reflecting mirror of hollow out by permeation parts without substrate, realize that cheap half-reflecting mirror makes.Be coated with using the corresponding reflecting metallic film of wavelength at metal sheet surface and promptly can be applicable to the wavelength field shorter or long than visible wavelength.Around the optical axis of half-reflecting half mirror, the reflecting part is made into ring-type, the signal light trap below the certain angle around the optical axis can be fallen, so just the reflected light on the forward and backward surface of sample can be separated, improve N/S ratio and measuring accuracy.
In micro-spectral measurement apparatus, illuminator, light projection system, imaging optical system and analytic system are designed to the infinity optical system respectively, by semi-transparent semi-reflecting lens being placed near the emergent pupil of objective system, can realize that the reflected light of sample can be transferred in the imaging optical system by half reflection rarely in loss.
In a word, the present invention is simple in structure, novel, can effectively improve the efficiency of light energy utilization, guarantee the optical axis coincidence of tested surface normal and test macro, thereby effectively improve measuring accuracy.
Description of drawings
Fig. 1 is a light path synoptic diagram of the present invention;
Fig. 2 is an analytic system synoptic diagram among Fig. 1.
Embodiment
As shown in Figure 1, micro-spectral measurement apparatus comprises illuminator, light projection system, imaging optical system and analytic system, illuminator comprises light source 1, electronic shutter 2, single fiber 18 and infinity illuminating lens system 3, light projection system comprises semi-transparent semi-reflecting lens 5 and infinity objective system 4, semi-transparent semi-reflecting lens 5 is an axis of symmetry with the optical axis, reflecting part and permeation parts balanced configuration, and the number of reflecting part and permeation parts is odd number.Imaging optical system comprises prism system 12, offset lens 7, right eyepiece 8 and left eyepiece 9, and analytic system comprises optical fiber 10 and is subjected to optically coupled system 11.Structure as shown in Figure 2, optical fiber 10 is multi-core fiber, contains 7 fibre cores, the receiving end cross section is circular, the fibre core in center, the six roots of sensation fibre core that evenly distributes on every side, ejecting end are " one " font.Be subjected to optically coupled system to comprise lens 15 and ball 16, be system well known in the art.The light of illuminator as measuring light, projects on the tested surface 6 through infinity objective system 4 after semi-transparent semi-reflecting lens 5 reflections.The reflected light of tested surface 6 is after semi-transparent semi-reflecting lens 5 transmissions, be divided into two-beam earlier through prism system 12, a branch of light is admitted to analytic system, by optical fiber 10, penetrate from the end face of optical fiber 10, focus on, be coupled with ball again through being subjected to the lens 15 in the optically coupled system, converge on the slit 14 of spectrometer, enter data processing equipment 13; Another Shu Guang is admitted to imaging optical system, is divided into two-way again after the beam split once more through prism system 12, on a branch of focal plane that is focused at right eyepiece 8 through offset lens 7, on a branch of focal plane that images in left eyepiece 9.
As seen from Figure 1, imaging optical system and analytic system are the infinity optical system.The light beam of semi-transparent semi-reflecting lens 5 positions is infinity illuminating lens system 3, infinity objective system 4 formed directional lights.
During detection, first coarse regulation sample roughly is on the optical axis of imaging system tested surface (for lens, generally surveying the reflectivity at its place, summit); By left eyepiece focusing, confirm that the tested surface of sample is on the focal plane of objective system the image hot spot of clear display in right eyepiece; Whether the normal of confirming the tested surface of sample by right eyepiece is on the optical axis of light projection system; Regulate X, the Y-axis of microscope stage repeatedly, make light pass through semi-transparent semi-reflecting lens fully through the tested surface reflection, be that the observed imaging of observed semi-transparent semi-reflecting lens is symmetrically distributed in the right eyepiece, and when being imaged as a clear hot spot by left eyepiece is observed, tested surface is on the focal plane of objective system, simultaneously the optical axis coincidence of tested surface normal and light projection system.And then carry out the measuring reflectance of software.
Claims (10)
1. micro-spectral measurement apparatus, comprise illuminator, light projection system and imaging optical system, illuminator is in order to flow to light projection system with the light that light source sent, light projection system comprises semi-transparent semi-reflecting lens, with the light of illuminator through projecting behind the semi-transparent semi-reflecting lens on the tested surface, the reflected light of tested surface is admitted to imaging optical system again behind semi-transparent semi-reflecting lens, imaging optical system comprises left eyepiece and right eyepiece, it is characterized in that, be provided with offset lens before the right eyepiece, the reflected light of tested surface that enters imaging optical system by beam split after, on a branch of focal plane that is focused at right eyepiece through offset lens, a branch of imaging on the left eyepiece focal plane.
2. micro-spectral measurement apparatus as claimed in claim 1, it is characterized in that described micro-spectral measurement apparatus also comprises analytic system, the reflected light of tested surface behind semi-transparent semi-reflecting lens by beam split, a branch of imaging optical system of sending into, a branch of analytic system of sending into, described analytic system is accepted the reflected light of tested surface by optical fiber and it is converged on the optical receiver.
3. micro-spectral measurement apparatus as claimed in claim 2 is characterized in that described optical fiber is multi-core fiber.
4. micro-spectral measurement apparatus as claimed in claim 3 is characterized in that described optical fiber receiving end cross section for circular, and the ejecting end cross section is " one " font.
5. micro-spectral measurement apparatus as claimed in claim 4 is characterized in that described optical fiber contains 7 fibre cores, the fibre core in receiving terminal center, and six roots of sensation fibre core on every side evenly distributes.
6. micro-spectral measurement apparatus as claimed in claim 2 is characterized in that described analytic system also comprises to be subjected to optically coupled system, is subjected to optically coupled system to receive the reflected light of the tested surface that sends from optical fiber, converges on the optical receiver after the coupling.
7. micro-spectral measurement apparatus as claimed in claim 6, it is characterized in that being subjected to optically coupled system to comprise lens and bead, lens axis overlaps with the optical fiber axis, the bead centre of sphere is on the extended line of optical fiber axis, the tested surface reflected light that sends from optical fiber is through lens focus, with the bead coupling, converge on the optical receiver again.
8. as each described micro-spectral measurement apparatus of claim 1-7, it is characterized in that described semi-transparent semi-reflecting lens is axis of symmetry with the optical axis, reflecting part and permeation parts balanced configuration, and also the number of reflecting part and permeation parts is odd number.
9. micro-spectral measurement apparatus as claimed in claim 8 is characterized in that light projection system comprises objective system, and described semi-transparent semi-reflecting lens is positioned near the emergent pupil of objective system.
10. as each described micro-spectral measurement apparatus of claim 1-7, it is characterized in that illuminator, light projection system, imaging optical system constitute the infinity optical system.
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| CN2009100284905A CN101476976B (en) | 2009-01-24 | 2009-01-24 | Micro-spectral measurement apparatus |
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| CN2009100284905A CN101476976B (en) | 2009-01-24 | 2009-01-24 | Micro-spectral measurement apparatus |
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| CN101476976A CN101476976A (en) | 2009-07-08 |
| CN101476976B true CN101476976B (en) | 2011-09-07 |
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| CN107314891B (en) * | 2017-08-29 | 2019-08-20 | 天津津航技术物理研究所 | The Systems for optical inspection and optical detecting method of surgical operation microscope |
| CN113092296A (en) * | 2021-04-08 | 2021-07-09 | 重庆里博仪器有限公司 | Vickers microhardness meter infinite imaging system and binocular microhardness meter |
| CN113390854B (en) * | 2021-08-16 | 2022-01-25 | 港湾之星健康生物(深圳)有限公司 | High-density optical fiber bundle scattered light guide assembly |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN201378097Y (en) * | 2009-02-24 | 2010-01-06 | 南京东利来光电实业有限责任公司 | Microscopic light measurement device |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN201378097Y (en) * | 2009-02-24 | 2010-01-06 | 南京东利来光电实业有限责任公司 | Microscopic light measurement device |
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Denomination of invention: Micro-spectral measurement apparatus Effective date of registration: 20180815 Granted publication date: 20110907 Pledgee: Bank of Nanjing, Limited by Share Ltd, Nanjing branch Pledgor: Nanjing Donglilai Photoelectric Industrial Co., Ltd. Registration number: 2018320000135 |
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Date of cancellation: 20200805 Granted publication date: 20110907 Pledgee: Bank of Nanjing Limited by Share Ltd. Nanjing branch Pledgor: DOMILIGHT OPTICS & ELECTRONICS ENTERPRISE Co.,Ltd. Registration number: 2018320000135 |
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