CN102346291B - Coaxial double-telecentric imaging optics system - Google Patents
Coaxial double-telecentric imaging optics system Download PDFInfo
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- CN102346291B CN102346291B CN 201010242686 CN201010242686A CN102346291B CN 102346291 B CN102346291 B CN 102346291B CN 201010242686 CN201010242686 CN 201010242686 CN 201010242686 A CN201010242686 A CN 201010242686A CN 102346291 B CN102346291 B CN 102346291B
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Abstract
The invention discloses a coaxial double-telecentric imaging optics system, which comprises a coaxial illumination system, an imaging system and a light blocking element, wherein a front objective lens group and a beam splitting element are shared by the coaxial illumination system and the imaging system; a light source, an illumination objective lens group, the beam splitting element and the front objective lens group form the coaxial illumination system; the coaxial illumination system and the light blocking element form a Kohler illumination system to provide illumination with good evenness for an object plane; and the front objective lens group, the beam splitting element, a rear objective lens group and the light blocking element form a double-telecentric imaging system with small distortion and high multiplying power. According to the coaxial double-telecentric imaging optics system, high illumination evenness can be obtained, an imaged image has a good contrast ratio, and the measurement precision of the whole system is finally improved. Meanwhile, the coaxial double-telecentric imaging optics system has a simple structure, and system cost and realization difficulty are reduced.
Description
Technical field
The present invention relates to technical field of semiconductors, particularly relate to a kind of coaxial pair of telecentric imaging optical system in the semiconductor lithography equipment.
Background technology
In semiconductor packages lithographic equipment and flat pannel display photoetching, the position alignment device is one of very important device, the position alignment device can be divided into coaxial position alignment device and off-axis position alignment device two big classes from structure.Employing off-axis position alignment device can reduce design, processing and the dress school requirement to optical projection system, its alignment so often adopts the measuring method based on machine vision technique to realize, wherein imaging lens is one of core component of Vision Builder for Automated Inspection, and the quality of its optical property will directly determine the height of final alignment measuring accuracy.
Usually, high-precision measurement optical system need guarantee beyond its image sharpness and the bigger enlargement ratio, its illumination uniformity need distort best less than 0.1% less than 5%, if this system is again simultaneously two telecentric systems certainly, so last measuring accuracy will more can be guaranteed.
In US Patent No. 5689602, a kind of optical system structure of coaxial-illuminating has been proposed, the advantage of this structure is that illumination path is simple in structure, capacity usage ratio is high, shortcoming is that the illumination field of view size of this structure is uncontrollable, enter parasitic light in the imaging system easily, to corresponding physical construction eliminate stray light require and the matching requirements meeting than higher.
In US Patent No. 5715050, proposed the two telecentric optics measuring systems of a kind of coaxial-illuminating, the advantage of this system is that image face site error is low to the measuring accuracy influence, but the enlargement ratio of this system is low, the lighting area size can not be controlled, and therefore can not obtain high measuring accuracy; And it is in the contrast images that two telecentric imaging system back also needs extra optical system to guarantee, has increased design cost and dress school difficulty.
In US Patent No. 6639653B2, a kind of pair of telecentric objective optical texture proposed, this structure is in applying to the powerful system of small field of view the time, and it is too complicated that structure can seem, increased system cost and dress school difficulty.
Summary of the invention
The objective of the invention is to propose the two telecentric imaging optical systems of a kind of coaxial high magnification, make the structure of optical system simpler, when guaranteeing measuring accuracy, reduce the cost of system and realize difficulty.
The object of the present invention is achieved like this.A kind of coaxial pair of telecentric imaging optical system, comprise the coaxial-illuminating system, imaging system and the element that is in the light, described coaxial-illuminating system comprises light source successively from light source to the object plane direction along optical axis, the illumination objective lens group, beam splitting element and preceding group of objective lens, described imaging system comprises described preceding group objective lens successively from object plane to the image planes direction along optical axis, described beam splitting element and back group objective lens, the described element that is in the light is used for the size of the described coaxial-illuminating system of restriction and described imaging system light beam, described coaxial-illuminating system and the described element that is in the light constitute the Kohler illumination system, and described imaging system and the described element that is in the light constitute two telecentric imaging systems.
Wherein, the described element that is in the light is first aperture diaphragm, is arranged between described preceding group objective lens and the described beam splitting element.
Wherein, the described element that is in the light comprises first aperture diaphragm and second aperture diaphragm, and described first aperture diaphragm is arranged between described illumination objective lens group and the described beam splitting element, and described second aperture diaphragm is arranged between described beam splitting element and the described back group objective lens.
Preferably, the group objective lens comprises first lens of positive light coke, second lens of negative power, the 3rd lens of positive light coke, the 4th lens of positive light coke, the 5th lens of negative power successively from object plane before described to the image planes direction along optical axis, satisfies following condition:
0.5≤|f
2/f
4|≤1.5，0.5≤|f
3/f
4|≤1.5，0.5≤|f
5/f
4|≤1.5，0.5≤|f
6/f
4|≤1.5.
n
3-n
2＞0.1，n
3-n
4＞0.1，n
3-n
5＞0.1；
n
6-n
2＞0.1，n
6-n
4＞0.1，n
6-n
5＞0.1；
F wherein
2, f
3, f
4, f
5, f
6The focal length of respectively corresponding first to the 5th lens, n
2, n
3, n
4, n
5, n
6The refractive index of corresponding first to the 5th material that lens use respectively.
Wherein, described first lens are plano-convex lens, and described second lens are meniscus, and described the 3rd lens are biconvex lens, and described the 4th lens are plano-convex lens, and described the 5th lens are biconcave lens.
Wherein, described beam splitting element is made up of two right-angle prism gummeds.
Wherein, be coated with for the light beam to 50% on the inclined-plane of one of above-mentioned two right-angle prisms and reflect, the light beam to 50% carries out the film of transmission.
Preferably, described back group objective lens comprises the 6th lens of negative power and the 7th lens of positive light coke successively from object plane to the image planes direction along optical axis.
Wherein, described the 6th lens are biconcave lens, and the 7th lens are concave-convex lens.
Preferably, described illumination objective lens group comprises the 8th lens, the 9th lens, the 3rd aperture diaphragm, the tenth lens, the 11 lens and the 12 lens successively from light source to the object plane direction along optical axis.
Wherein, described light source and the described first aperture diaphragm conjugation, described the 3rd aperture diaphragm and described object plane conjugation.
Wherein, described the 3rd aperture diaphragm is an iris, the size of control lighting area.
Wherein, described the 8th lens are positive light coke, and the 9th lens are negative power, and the tenth lens are negative power, and the 11 lens are positive light coke, and the 12 lens are positive light coke.
Wherein, described the 8th lens are plano-convex lens, and the 9th lens are biconcave lens, and the tenth lens are plano-concave lens, and the 11 lens are plano-convex lens, and the 12 lens are plano-convex lens.
Wherein, described the 8th lens are positive light coke, and the 9th lens are negative power, and the tenth lens are positive light coke, and the 11 lens are positive light coke, and the 12 lens are negative power.
Wherein, described the 8th lens are biconvex lens, and the 9th lens are plano-concave lens, and the tenth lens are concave-convex lens, and the 11 lens are plano-convex lens, and the 12 lens are meniscus.
Wherein, described light source is the optical fiber of Halogen lamp LED or LED or guiding Halogen lamp LED or LED luminous energy.
Wherein, described illumination objective lens group also comprises for the prism or the catoptron that change the light direction of propagation.
Wherein, between object plane and preceding group of objective lens, also be provided with prism or the catoptron that changes direction of beam propagation.
Wherein, described object plane is near infrared scattering surface or silicon chip front surface.
Wherein, the image planes receiver is charge coupled device ccd or complementary metal oxide semiconductor (CMOS) cmos camera.
What the lighting system of optical system of the present invention adopted is coaxial Kohler illumination, is the two telecentric imaging systems of high magnification and the imaging system adopts, and advantage is as follows:
1) adopts coaxial Kohler illumination mode, can obtain very high illumination uniformity, make image that good contrast be arranged, finally improve the measuring accuracy of total system.
2) adopt coaxial Kohler illumination mode, the field stop in the Kohler illumination system is placed iris, can control the lighting area size of photographed object face, to reach the parasitic light of control total system, guarantees the effect of measuring accuracy; Like this, can be lower to the eliminate stray light requirement of physical construction, can reduce the dress school difficulty of optical system.
3) imaging system adopts the two telecentric optical systems of high magnification, and high measuring accuracy can be provided.
4) distortion of imaging system can provide high measuring accuracy less than 0.1%.
5) simple in structure, reduce the cost of system and realized difficulty.
6) imaging system has adopted a kind of brand-new asymmetric two telecentric optics structures that are applicable to the high magnification small field of view, can reduce eyeglass quantity, saves cost.
Description of drawings
Fig. 1 is the structural representation of the coaxial pair of telecentric imaging optical system of optical system embodiment 1 of the present invention;
Fig. 2 is the illumination uniformity of coaxial-illuminating system among the optical system embodiment 1 of the present invention;
Fig. 3 is the distortion figure of imaging system among the optical system embodiment 1 of the present invention;
Fig. 4 is the structural representation of the coaxial pair of telecentric imaging optical system of optical system embodiment 2 of the present invention;
Fig. 5 is the structural representation of the coaxial pair of telecentric imaging optical system of optical system embodiment 3 of the present invention;
Fig. 6 is the structural representation of the coaxial pair of telecentric imaging optical system of optical system embodiment 4 of the present invention.
Embodiment
Describe specific embodiments of the invention in detail below in conjunction with accompanying drawing.
A kind of coaxial pair of telecentric imaging optical system of the present invention, illuminator has adopted the Kohler illumination system of the good and easier control parasitic light of illumination uniformity, and the imaging system has adopted the two telecentric systems of asymmetric little distortion high magnification.Based on this, coaxial pair of telecentric imaging optical system provided by the invention can obtain than the high measuring accuracy of background technology and lower Machine Design assembly difficulty, and can reduce the cost of imaging system.
As shown in Figure 1, imaging optical system of the present invention comprises coaxial-illuminating system, imaging system and the element that is in the light, group objective lens G1, aperture diaphragm AS and beam splitting element L7 are shared by coaxial-illuminating system and imaging system wherein, light source, illumination objective lens group G2, beam splitting element L7, aperture diaphragm AS and preceding group of objective lens G1 form the Kohler illumination system and well throw light on for object plane provides homogeneity, and aperture diaphragm ID can control the illuminated area of object plane; And preceding group of objective lens G1, aperture diaphragm AS, beam splitting element L7 and back group objective lens G3 form the two telecentric imaging systems of little distortion high magnification.
Embodiment 1
As shown in Figure 1, a kind of coaxial pair of telecentric imaging optical system of present embodiment comprises coaxial-illuminating system, imaging system and the element that is in the light, described coaxial-illuminating system comprises light source, illumination objective lens group G2 successively from light source to the object plane direction along optical axis, beam splitting element L7 and preceding group of objective lens G1 evenly throw light on to object plane.The described element that is in the light is in this embodiment for aperture diaphragm AS, between described beam splitting element L7 and preceding group of objective lens G1, by described coaxial-illuminating system and described imaging system are shared.Described light source can be the optical fiber of Halogen lamp LED, LED, conduction Halogen lamp LED or LED luminous energy.The lighting source that adopts in the present embodiment is near-infrared light source, and effective wavelength is that 1000nm is to 1300nm.Described illumination objective lens group G2 comprises successively to the object plane direction along optical axis that from light source plano-convex lens L15, biconcave lens L14, aperture diaphragm ID and plano-concave lens L13, plano-convex lens L11, plano-convex lens L10 form, and plano-convex lens L15 is that positive light coke, biconcave lens L14 are that negative power, plano-concave lens L13 are that negative power, plano-convex lens L11 are that positive light coke, plano-convex lens L10 are positive light coke.This coaxial-illuminating system and aperture diaphragm AS constitute Kohler illumination system, light source and aperture diaphragm AS conjugation, aperture diaphragm ID and object plane (illuminated face) conjugation.And aperture diaphragm ID can be iris, can control Kohler illumination system illumination area size with iris as required, thereby reaches the purpose of control system parasitic light.Described beam splitting element L7 is made up of two right-angle prism gummeds, be coated with for the light beam to 50% on right-angle prism inclined-plane therein and reflect, 50% light beam carries out the film of transmission, the light beam ratio that reflects and throw can be selected other numerical value, such as 40% and 60% etc., this can realize by selecting suitable film.Described aperture diaphragm AS for the size of restriction light path light beam, specifically be the dispersion angle that restriction receives the light source emergent ray, and restriction is for the beam divergence angle of imaging.Group objective lens G1 comprises plano-convex lens L2, meniscus L3, biconvex lens L4, plano-convex lens L5 and biconcave lens L6 successively from object plane to light source direction along optical axis before described, the focal power that adopts is followed successively by positive light coke, negative power, positive light coke, positive light coke, negative power, spherical aberration before being somebody's turn to do in the main corrective system of group objective lens G1 and axle be aberration upward, is used for illumination beam and assembles and imaging beam is assembled.Group object lens G1 satisfies following condition before described:
0.5≤|f
2/f
4|≤1.5，0.5≤|f
3/f
4|≤1.5，0.5≤|f
5/f
4|≤1.5，0.5≤|f
6/f
4|≤1.5.
n
3-n
2＞0.1，n
3-n
4＞0.1，n
3-n
5＞0.1；
n
6-n
2＞0.1，n
6-n
4＞0.1，n
6-n
5＞0.1；
F wherein
2, f
3, f
4, f
5, f
6Corresponding lens L2 respectively, L3, L4, L5, the focal length of L6; n
2, n
3, n
4, n
5, n
6Corresponding lens L2 respectively, L3, L4, L5, the refractive index (Nd) of material that L6 uses.
Group objective lens G1, beam splitting element L7 and back group objective lens G3 before described imaging system comprises to the image planes direction along optical axis successively from object plane.Preceding group objective lens G1, aperture diaphragm AS, beam splitting element L7 and back group objective lens G3 form the two telecentric imaging systems of little distortion high magnification.Wherein, described imaging system and the described coaxial-illuminating shared described preceding group objective lens G1 of system, described aperture diaphragm AS, described beam splitter prism L7.Described back group objective lens G3 comprises biconcave lens L8 and concave-convex lens L9 successively from object plane to the image planes direction along optical axis, focal power is followed successively by negative power, positive light coke, this back group objective lens G3 is used for the light that preceding group of objective lens G1 assembles is enlarged, the distribution of its focal power is determined by the enlargement ratio of system, and proofreaies and correct the distortion that produces in the amplification process.The image planes receiver is generally charge coupled device ccd or complementary metal oxide semiconductor (CMOS) cmos camera.
In the present embodiment 1, the radius-of-curvature of above-mentioned each lens surface, the material that the center thickness of lens, lens adopt and lens effective aperture all are listed in the table 1.Concrete data in the table 1 are to be 4mm according to a lighting fiber end face diameter, and enlargement ratio is that-1 times and object plane illumination uniformity are less than the resulting result of 5% design.The illumination uniformity of the illuminator that final design obtains as shown in Figure 2, the illumination uniformity that calculates this system is 1.2%, satisfies illumination uniformity less than 5% designing requirement.In table 1, towards light source one side be the optical element front surface, towards illuminated (object plane) be the rear surface of optical element, from light source along optical axis to object plane, the radius-of-curvature center towards the radius-of-curvature of object plane one side for just, the radius-of-curvature center towards the radius-of-curvature of light source one side for negative.
| Radius-of-curvature | Thickness | Glass material | Diameter | |
| The optical fiber exit end | Infinity | 0 | 4 | |
| Infinity | 14.15816 | 5.6 | ||
| L15 | 7.8 | 2.23 | H-ZF7LA | 9 |
| Infinity | 3.82 | 9 | ||
| L14 | -5.58377 | 1.44 | H-K9L | 7 |
| -9.354 | 5.64 | 9 | ||
| Iris ID | Infinity | 5.47 | 1.2 | |
| L13 | -5.345 | 1.71 | H-ZF7LA | 5 |
| Infinity | 0.57 | 9 | ||
| L11 | -61.244 | 1.94 | H-ZK10 | 6.4 |
| -7.8 | 0.5 | 9 | ||
| L10 | Infnity | 1.49 | H-ZK11 | 9 |
| -12.2162 | 8 | 9 | ||
| Beam splitter prism | Infinity | 20 | H-K9L | 20 |
| Infinity | 30 | 20 | ||
| Aperture diaphragm AS | Infinity | 20.48 | 11.22 | |
| L6 | -61.244 | 4.75 | H-ZF7LA | 24 |
| 72.78 | 2.15 | 18 | ||
| L5 | Infinity | 5 | H-ZK10 | 24 |
| -25.48 | 0.79 | 24 | ||
| L4 | 83.11 | 3.84 | H-ZK10 | 24 |
| -47.32 | 1 | 24 | ||
| L3 | -40.46 | 2.8 | H-ZF7LA | 20 |
| Infinity | 0.5 | 24 | ||
| L2 | 29.118 | 3.88 | H-ZK10 | 24 |
| Infinity | 50.54 | 24 | ||
| Object plane (illuminated face) | Infinity | 0 | 1.198712 |
Table 1
In embodiment 1, the radius-of-curvature of above-mentioned each lens surface, the material that the center thickness of lens, lens adopt and the external diameter of lens all are listed in the table 2.Concrete data in the table 2 are to be 19.2mm according to full visual field image height, and total length is 285mm, and the object space numerical aperture is 0.2, and enlargement ratio is that 16 times and distortion are less than the resulting result of 0.1% design.The distortion of this imaging system as shown in Figure 3, the distortion of this system is to satisfy distortion less than 0.1% designing requirement in full field range as seen from the figure.
In the table 2, towards object plane one side be the optical element front surface, towards image planes is the optical element rear surface.From object plane along optical axis to image planes, the radius-of-curvature center towards the radius-of-curvature of image planes one side for just, the radius-of-curvature center towards the radius-of-curvature of object plane one side for negative.Because coaxial-illuminating system and imaging system share beam splitter prism L7, aperture diaphragm AS, preceding group of objective lens G1, therefore above-mentioned optical element design parameter omits in table 2 with table 1.
| Radius-of-curvature | Thickness | Glass material | Diameter |
| L7 | Infinity | 20 | H-K9L | 20 |
| Infinity | 25 | 20 | ||
| L8 | -17.258 | 5 | H- |
8 |
| 13.21 | 50.03 | 12 | ||
| L9 | -355.882 | 6 | H-ZF7LA | 26 |
| -43.5 | 53.58244 | 26 | ||
| Image planes | Infinity | 19.23244 |
Embodiment 2
Figure 4 shows that the structural representation of the coaxial pair of telecentric imaging optical system of optical system embodiment 2 of the present invention.As shown in Figure 4, the imaging optical system that present embodiment provides, comprise coaxial-illuminating system, imaging system and the element that is in the light, described coaxial-illuminating system comprises from light source and comprises illumination objective lens group G2 to the object plane direction along optical axis successively, beam splitting element L7, preceding group objective lens G1 and right angle internal reflection prism L1 evenly throw light on to object plane.The element that is in the light comprises aperture diaphragm AS2 and aperture diaphragm AS1, and aperture diaphragm AS2 is arranged between illumination objective lens group G2 and the beam splitting element L7, and aperture diaphragm AS1 is arranged between beam splitting element L7 and the back group objective lens G3.Described light source can be the optical fiber of Halogen lamp LED, LED, conduction Halogen lamp LED or LED luminous energy, and lighting source is near-infrared light source in the present embodiment, and effective wavelength is that 1000nm is to 1300nm.Described illumination objective lens group G2 comprises biconvex lens L20, plano-concave lens L19, aperture diaphragm ID, concave-convex lens L18, illumination right angle internal reflection prism L12, plano-convex lens L17 and meniscus L16 successively from light source to the object plane direction along optical axis.Biconvex lens L20 is positive light coke, and plano-concave lens L19 is negative power, and concave-convex lens L18 is positive light coke, and plano-convex lens L17 is positive light coke, and meniscus L16 is negative power.The concrete structure of described beam splitting element L7 and preceding group of objective lens G1 is identical with embodiment 1.Described coaxial-illuminating system and the element that is in the light constitute the Kohler illumination system, are characterized as light source and aperture diaphragm AS2 conjugation, aperture diaphragm ID and object plane (illuminated face) conjugation; And aperture diaphragm ID can be iris, can control the lighting area of this Kohler illumination system, to reach the purpose of control system parasitic light.Described right angle internal reflection prism L1 is made of a right-angle prism, plates reflectance coating on the inclined-plane, plays the deviation light path.Group objective lens G1, beam splitting element L7 and back group objective lens G3 before described imaging system comprises to the image planes direction along optical axis successively from object plane.Described back group objective lens G3 comprises biconcave lens L8 and concave-convex lens L9 successively from object plane to the image planes direction along optical axis, focal power is followed successively by negative power, positive light coke, this back group objective lens G3 is used for the light that preceding group of lens are assembled is enlarged, the distribution of its focal power is determined by the enlargement ratio of system, and proofreaies and correct the distortion that produces in the amplification process.The image planes receiver is generally charge coupled device ccd or complementary metal oxide semiconductor (CMOS) cmos camera.
In the present embodiment 2, the radius-of-curvature of above-mentioned each lens surface, the material that the center thickness of lens, lens adopt and lens effective aperture all are listed in the table 3.Concrete data in the table 3 are to be 4.75mm according to a lighting fiber end face diameter, and enlargement ratio is that-1 times and object plane illumination uniformity are less than the resulting result of 5% design.In table 3, towards light source one side be the optical element front surface, towards illuminated (object plane) be the rear surface of optical element, from light source along optical axis to object plane, the radius-of-curvature center towards the radius-of-curvature of object plane one side for just, the radius-of-curvature center towards the radius-of-curvature of light source one side for negative.
| Radius-of-curvature | Thickness | Glass material | Diameter | |
| The optical fiber exit end | Infinity | 0 | 4.754 | |
| Infinity | 15.9 | 6.754 | ||
| L20 | 9.354 | 2.91 | H-ZF7LA | 10 |
| -21.48 | 1.84 | 10 | ||
| L19 | -8.0186 | 1.8 | H-K10 | 6 |
| Infinity | 7.99 | 10 | ||
| Iris ID | Infinity | 10.22 | 1.4 | |
| L18 | -27.24 | 2.5 | H-ZK10 | 8 |
| -13.552 | 8.11 | 10 | ||
| L12 | Infinity | 20 | H-K9L | 20 |
| Infinity | 7.5 | 20 | ||
| L17 | 25.94 | 2.26 | H-ZK10 | 16 |
| Infinity | 0.5 | 16 | ||
| L16 | 27.99 | 1.78 | H-ZF7LA | 16 |
| 18.094 | 8.5 | 12 | ||
| AS2 | Infinity | 7.99 | 11.72 | |
| Beam splitting element L7 | Infinity | 20 | H-K9L | 20 |
| Infinity | 3.49 | 20 | ||
| L6 | -61.244 | 3 | H-ZF7LA | 22 |
| 95.51 | 1.05 | 17.2 | ||
| L5 | Infinity | 4 | H-ZK10 | 22 |
| -23.6 | 0.5 | 22 | ||
| L4 | 48.693 | 3.09 | H-ZK10 | 22 |
| -115 | 1.79 | 22 | ||
| L3 | -40.24 | 2.8 | H-ZF7LA | 18 |
| Infinity | 0.5 | 22 | ||
| L20 | 27.557 | 7.7 | H-ZK10 | 22 |
| Infinity | 5.76 | 22 | ||
| L1 | Infinity | 20 | H-K9L | 20 |
| Infinity | 22.843 | 20 | ||
| Object plane (illuminated face) | Infinity | 1.413366 |
Table 3
In the present embodiment 2, the radius-of-curvature of above-mentioned each lens surface, the material that the center thickness of lens, lens adopt and the external diameter of lens all are listed in the table 4.Concrete data in the table 4 are to be 19.2mm according to full visual field image height, and total length is 295mm, and the object space numerical aperture is 0.2, and enlargement ratio is that 16 times and distortion are less than the resulting result of 0.1% design.Because coaxial-illuminating system and imaging system share beam splitting element L7, preceding group of objective lens G1 and right angle internal reflection prism L1, therefore above-mentioned optical element design parameter omits in table 4 with table 3.In the table 4, towards object plane one side be the optical element front surface, towards image planes is the optical element rear surface.From object plane along optical axis to image planes, the radius-of-curvature center towards the radius-of-curvature of image planes one side for just, the radius-of-curvature center towards the radius-of-curvature of object plane one side for negative.
| Radius-of-curvature | Thickness | Glass material | Diameter | |
| Beam splitting element L7 | Infinity | 20 | H-K9L | 20 |
| Infinity | 7.99 | 20 | ||
| AS1 | Infinity | 79.26 | 11.72818 | |
| L8 | -24.2 | 4 | H-ZF7LA | 12 |
| 13.746 | 49.82 | 12 | ||
| L9 | -274.4356 | 6 | H-ZF7LA | 28 |
| -42.6629 | 51.20402 | 28 | ||
| Image planes | Infinity | 19.25 |
Table 4
Embodiment 3
Figure 5 shows that the structural representation of the coaxial pair of telecentric imaging optical system of optical system embodiment 3 of the present invention.As shown in Figure 5, present embodiment 3 does not have right angle internal reflection prism L1 as different from Example 2, and other structures in the present embodiment 3 and structural parameters are all identical with embodiment 2, and can reach described purpose and effect.
Embodiment 4
Fig. 6 is the structural representation of the coaxial pair of telecentric imaging optical system of optical system embodiment 4 of the present invention.As shown in Figure 6, present embodiment 4 object plane as different from Example 3 is the silicon chip front surface, if employed only near infrared light, group objective lens G1 before silicon chip front surface information can enter behind silicon chip and silicon chip rear surface, beam splitting element L7, back group objective lens G3 blur-free imaging on image planes.This embodiment can be used for need such as silicon chip back side aligning penetrate the object information extraction with near infrared ray technical scheme.Other structures in the present embodiment 4 and structural parameters are all identical with embodiment 3, and can reach described purpose and effect.
Described in this instructions is several preferred embodiment of the present invention, and above embodiment is only in order to illustrate technical scheme of the present invention but not limitation of the present invention.All those skilled in the art all should be within the scope of the present invention under this invention's idea by the available technical scheme of logical analysis, reasoning, or a limited experiment.
Claims (20)
1. coaxial pair of telecentric imaging optical system, comprise the coaxial-illuminating system, imaging system and the element that is in the light, it is characterized in that described coaxial-illuminating system comprises light source successively from light source to the object plane direction along optical axis, the illumination objective lens group, beam splitting element and preceding group of objective lens, described imaging system comprises described preceding group objective lens successively from object plane to the image planes direction along optical axis, described beam splitting element and back group objective lens, the described element that is in the light is used for the size of the described coaxial-illuminating system of restriction and described imaging system light beam, described coaxial-illuminating system and the described element that is in the light constitute the Kohler illumination system, described imaging system and the described element that is in the light constitute two telecentric imaging systems, wherein, the group objective lens comprises first lens of positive light coke successively before described to the image planes direction along optical axis from object plane, second lens of negative power, the 3rd lens of positive light coke, the 4th lens of positive light coke, the 5th lens of negative power, satisfy following condition:
0.5≤|f
2/f
4|≤1.5，0.5≤|f
3/f
4|≤1.5，0.5≤|f
5/f
4|≤1.5，0.5≤|f
6/f
4|≤1.5.
n
3-n
2＞0.1，n
3-n
4＞0.1，n
3-n
5＞0.1；
n
6-n
2＞0.1，n
6-n
4＞0.1，n
6-n
5＞0.1；
F wherein
2, f
3, f
4, f
5, f
6The focal length of respectively corresponding first to the 5th lens, n
2, n
3, n
4, n
5, n
6The refractive index of corresponding first to the 5th material that lens use respectively.
2. imaging optical system as claimed in claim 1 is characterized in that, the described element that is in the light is first aperture diaphragm, is arranged between described preceding group objective lens and the described beam splitting element.
3. imaging optical system as claimed in claim 1, it is characterized in that, the described element that is in the light comprises first aperture diaphragm and second aperture diaphragm, described first aperture diaphragm is arranged between described illumination objective lens group and the described beam splitting element, and described second aperture diaphragm is arranged between described beam splitting element and the described back group objective lens.
4. imaging optical system as claimed in claim 1 is characterized in that described first lens are plano-convex lens, and described second lens are meniscus, and described the 3rd lens are biconvex lens, and described the 4th lens are plano-convex lens, and described the 5th lens are biconcave lens.
5. imaging optical system as claimed in claim 1 is characterized in that described beam splitting element is made up of two right-angle prisms gummeds.
6. imaging optical system as claimed in claim 5 is characterized in that, is coated with for the light beam to 50% on the inclined-plane of one of above-mentioned two right-angle prisms and reflects, and the light beam to 50% carries out the film of transmission.
7. as the described imaging optical system of one of claim 1, it is characterized in that described back group objective lens comprises the 6th lens of negative power and the 7th lens of positive light coke successively from object plane to the image planes direction along optical axis.
8. imaging optical system as claimed in claim 7 is characterized in that, described the 6th lens are biconcave lens, and the 7th lens are concave-convex lens.
9. as claim 2 or 3 described imaging optical systems, it is characterized in that described illumination objective lens group comprises the 8th lens, the 9th lens, the 3rd aperture diaphragm, the tenth lens, the 11 lens and the 12 lens successively from light source to the object plane direction along optical axis.
10. imaging optical system as claimed in claim 9 is characterized in that described light source and the described first aperture diaphragm conjugation, described the 3rd aperture diaphragm and described object plane conjugation.
11. imaging optical system as claimed in claim 9 is characterized in that described the 3rd aperture diaphragm is an iris, the size of control lighting area.
12. imaging optical system as claimed in claim 11 is characterized in that described the 8th lens are positive light coke, the 9th lens are negative power, and the tenth lens are negative power, and the 11 lens are positive light coke, and the 12 lens are positive light coke.
13. imaging optical system as claimed in claim 12 is characterized in that described the 8th lens are plano-convex lens, the 9th lens are biconcave lens, and the tenth lens are plano-concave lens, and the 11 lens are plano-convex lens, and the 12 lens are plano-convex lens.
14. imaging optical system as claimed in claim 11 is characterized in that described the 8th lens are positive light coke, the 9th lens are negative power, and the tenth lens are positive light coke, and the 11 lens are positive light coke, and the 12 lens are negative power.
15. imaging optical system as claimed in claim 14 is characterized in that described the 8th lens are biconvex lens, the 9th lens are plano-concave lens, and the tenth lens are concave-convex lens, and the 11 lens are plano-convex lens, and the 12 lens are meniscus.
16. imaging optical system as claimed in claim 1 is characterized in that described light source is the optical fiber of Halogen lamp LED or LED or guiding Halogen lamp LED or LED luminous energy.
17. imaging optical system as claimed in claim 1 is characterized in that described illumination objective lens group also comprises for the prism or the catoptron that change the light direction of propagation.
18. imaging optical system as claimed in claim 1 is characterized in that also being provided with prism or the catoptron that changes direction of beam propagation between object plane and preceding group of objective lens.
19. imaging optical system as claimed in claim 1 is characterized in that described object plane is near infrared scattering surface or silicon chip front surface.
20. imaging optical system as claimed in claim 1 is characterized in that the image planes receiver is charge coupled device ccd or complementary metal oxide semiconductor (CMOS) cmos camera.
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| CN 201010242686 CN102346291B (en) | 2010-08-02 | 2010-08-02 | Coaxial double-telecentric imaging optics system |
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| CN 201010242686 CN102346291B (en) | 2010-08-02 | 2010-08-02 | Coaxial double-telecentric imaging optics system |
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| CN104330870B (en) * | 2014-11-04 | 2016-11-30 | 中国科学院光电技术研究所 | A kind of high-NA image-forming objective lens for photoetching three-dimensional printer |
| CN104360463B (en) * | 2014-12-05 | 2016-08-24 | 桂林电子科技大学 | Three telecentricity coaxial-illuminating imaging optical systems |
| CN105068224A (en) * | 2015-07-27 | 2015-11-18 | 山东大学（威海） | Laser telecentric optical lens |
| CN107561007B (en) * | 2016-06-30 | 2020-07-14 | 上海微电子装备（集团）股份有限公司 | Thin film measuring device and method |
| CN106872362B (en) * | 2017-01-18 | 2023-12-12 | 浙江大学 | LED light source device for visible and near infrared spectrum detection and application thereof |
| CN106707474B (en) * | 2017-02-17 | 2022-03-18 | 苏州协尔智能光电有限公司 | Object image bilateral telecentric optical system |
| CN107329240B (en) * | 2017-08-30 | 2023-05-23 | 南京波长光电科技股份有限公司 | High-power micro objective optical path system for realizing integration of laser scanning and coaxial monitoring |
| CN109307927B (en) * | 2018-11-16 | 2024-02-20 | 珠海博明软件有限公司 | Built-in coaxial illumination's two telecentric lens of two visual fields |
| CN110208294A (en) * | 2019-06-18 | 2019-09-06 | 华东交通大学 | Single pixel micro imaging method and system based on Kohler illumination |
| CN110262019A (en) * | 2019-07-17 | 2019-09-20 | 深圳市沃特隆科技有限公司 | A kind of coaxial lens construction of telecentricity |
| CN111399199A (en) * | 2020-05-04 | 2020-07-10 | 西安远心光学***有限公司 | Telecentric lens with built-in light source |
| CN112730239A (en) * | 2020-12-14 | 2021-04-30 | 深圳市瑞沃德生命科技有限公司 | Multicolor telecentric imaging device and cell analysis system thereof |
| CN115561884B (en) * | 2022-10-28 | 2024-01-26 | 中国科学院长春光学精密机械与物理研究所 | Stray light eliminating coaxial illumination telecentric optical imaging system |
| CN116027528B (en) * | 2023-03-29 | 2023-06-09 | 深圳市东正光学技术股份有限公司 | Coaxial telecentric optical imaging system, illumination system and imaging device |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5689602A (en) * | 1994-10-20 | 1997-11-18 | Moritex Corporation | CCD video scope with illumination to the object |
| CN101303533A (en) * | 2008-06-24 | 2008-11-12 | 上海微电子装备有限公司 | Aligning system, aligning method for photolithography equipment and enhancement type aligning mark |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20010049589A1 (en) * | 1993-01-21 | 2001-12-06 | Nikon Corporation | Alignment method and apparatus therefor |
-
2010
- 2010-08-02 CN CN 201010242686 patent/CN102346291B/en active Active
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5689602A (en) * | 1994-10-20 | 1997-11-18 | Moritex Corporation | CCD video scope with illumination to the object |
| CN101303533A (en) * | 2008-06-24 | 2008-11-12 | 上海微电子装备有限公司 | Aligning system, aligning method for photolithography equipment and enhancement type aligning mark |
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