CN106895963B - Device and method for detecting large numerical aperture immersion oil lens - Google Patents
Device and method for detecting large numerical aperture immersion oil lens Download PDFInfo
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- CN106895963B CN106895963B CN201710226421.XA CN201710226421A CN106895963B CN 106895963 B CN106895963 B CN 106895963B CN 201710226421 A CN201710226421 A CN 201710226421A CN 106895963 B CN106895963 B CN 106895963B
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- 238000007654 immersion Methods 0.000 title claims abstract description 27
- 238000000034 method Methods 0.000 title claims abstract description 9
- 230000004075 alteration Effects 0.000 claims abstract description 21
- 238000001514 detection method Methods 0.000 claims abstract description 20
- 239000013078 crystal Substances 0.000 claims abstract description 11
- 239000011521 glass Substances 0.000 claims abstract description 8
- 210000001747 pupil Anatomy 0.000 claims abstract description 7
- 230000003287 optical effect Effects 0.000 claims description 8
- 230000001105 regulatory effect Effects 0.000 claims description 2
- 238000005516 engineering process Methods 0.000 abstract description 8
- 239000006059 cover glass Substances 0.000 description 24
- 239000008710 crystal-8 Substances 0.000 description 9
- 238000010586 diagram Methods 0.000 description 4
- 238000005259 measurement Methods 0.000 description 4
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000007689 inspection Methods 0.000 description 1
- 238000005305 interferometry Methods 0.000 description 1
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
- G01M11/00—Testing of optical apparatus; Testing structures by optical methods not otherwise provided for
- G01M11/02—Testing optical properties
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- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Testing Of Optical Devices Or Fibers (AREA)
- Investigating Or Analysing Materials By Optical Means (AREA)
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Abstract
The technology provides a wave aberration detection method of a large numerical aperture immersion oil lens, wherein an emergent light beam emitted by a light source is converged on a diaphragm at the focal position of a collimating lens, and the emergent light beam is emergent in a parallel light beam mode along the collimating lens after passing through a beam splitting prism and is projected on a standard flat crystal; the method comprises the steps that an incident surface of a standard flat crystal is taken as a reference plane, one part of light rays are reflected along an original path of the reference plane, the other part of light rays are emitted through the reference plane and are focused on a focus through a tested lens and medium oil, the light rays are emitted into a hyper-hemispherical reflector along the incident direction of a focus point and return, finally, two light rays are reflected through a beam splitting prism, two bright small holes are formed at an exit pupil position, the images of the two small holes are overlapped by adjusting an air wedge between the standard flat crystal and a detection lens, and finally, the images at the small holes are converted into electric signals through a CCD; the super-hemispherical reflector is made of glass, the sagittal height of the super-hemispherical reflector is larger than the radius R of the super-hemispherical reflector, and the outer circular surface of the super-hemispherical reflector is plated with a total reflection film.
Description
Technical Field
The present technology relates to a device and a method for detecting wave aberration by a wave aberration detector, and more particularly to a device and a method for detecting wave aberration by an immersion lens with a large numerical aperture.
Background
At present, when a known wave aberration detector is used for measuring a biological microscope objective lens, since a cover glass with a certain thickness is arranged on the observation surface of the biological microscope, when wave aberration is measured, the cover glass and a fixing mode have great influence on errors of measurement results, and when small numerical aperture lens measurement is usually performed, the cover glass can be directly placed on the forefront piece of the objective lens, but when a large numerical aperture lens, particularly an oil immersion objective lens with a numerical aperture of more than 1 is measured, since a reference reflection spherical surface used for auto-collimation is exposed in an air medium, light of the oil immersion objective lens with the numerical aperture of more than 1 can be incident at an incident angle of more than 90 degrees and can not be incident on a reflection spherical surface due to incidence of the light from an optically dense medium to an optically sparse medium, and measurement can not be performed.
Referring to a fizeau interferometry schematic diagram shown in fig. 1, an outgoing beam emitted by a light source 1 is converged on a diaphragm 4 at the focal position of a collimating lens through a reflecting mirror 2 and a condensing lens 3, and the beam is emitted in a parallel beam mode along a collimating lens 7 after passing through a beam splitting prism 6 through a reflecting mirror 5 and is projected on a standard flat crystal 8. The incident surface of the standard flat crystal 8 is taken as a reference plane, one part of light rays are reflected along the original path of the reference plane, the other part of light rays are emitted through the reference plane, are focused on a focus through the tested lens 9, the medium oil 15 and the cover glass 19, the light rays are emitted into a standard reflection spherical surface 10 with a radius of R along the incident direction of the focus point and return, the last two light rays are reflected by the beam splitting prism, two bright small holes are formed at the exit pupil position 12 after passing through the reflecting mirror 11, the images of the two small holes are overlapped by adjusting the air wedge between the standard flat crystal and the tested lens, and finally interference fringes generated at the small holes are observed by the CCD 13.
When the numerical aperture of the measured lens 9 is greater than 1, as shown in fig. 2, after the light exits from the measured lens 9 and enters the cover glass 19 through the medium oil 15, the light exiting from the upper surface 17 of the cover glass 19 finally meets on the plane of the lower surface of the cover glass 19 (the focal position of the measured lens 9), because the numerical aperture of the measured lens 9 is greater than 1, the angle α between the incident light 18 from the upper surface 17 to the lower surface of the cover glass and the normal line is greater than 45 °, and the medium between the cover glass 19 and the reflective spherical surface 10 is air, the refractive index of the glass is far greater than the refractive index 1 of the air, so that the cover glass 19 and the air form a structure with an incident angle greater than 45 ° from dense light to sparse, and according to the law of total reflection, the incident light 18 cannot exit through the lower surface of the cover glass 19, so that no light is incident on the reflective spherical surface 10, and thus measurement cannot be performed.
Disclosure of Invention
In order to solve the problems that the prior testing device and method cannot measure the immersion oil objective lens with the numerical aperture larger than 1 and the cover glass for testing is difficult to fix, the technology provides a large numerical aperture immersion oil lens wave aberration detection method capable of detecting wave aberration of the immersion oil lens with the numerical aperture larger than 1.
According to the wave aberration detection method of the large numerical aperture immersion oil lens, an emergent light beam emitted by a light source 1 is converged on a diaphragm 4 at the focal position of a collimating lens, and the emergent light beam is emitted in a parallel light beam mode along a collimating lens 7 after passing through a beam splitting prism 6 and is projected on a standard flat crystal 8; taking an incident surface of a standard flat crystal 8 as a reference plane, wherein one part of light rays are reflected along an original path of the reference plane, the other part of light rays are emitted through the reference plane, are focused on a focus through a tested lens 9 and medium oil 15, the light rays are emitted into a hyper-hemispherical reflector 14 along the incident direction of the focus point and return, finally, two light rays are reflected by a beam splitting prism, two bright small holes are formed at an exit pupil position 12, the images of the two small holes are overlapped by adjusting an air wedge between the standard flat crystal and a detection lens, and finally, the images at the small holes are converted into electric signals by a CCD; the hyper-hemispherical reflector 14 is made of glass, the sagittal height H of the hyper-hemispherical reflector is larger than the radius R of the hyper-hemispherical reflector, and the outer circular surface of the hyper-hemispherical reflector is plated with a total reflection film.
As a further improvement of the above detection method, the large numerical aperture immersion lens wave aberration detection method is described, and the light source 1 is a laser.
As a further improvement of the above detection method, the large numerical aperture immersion lens wave aberration detection method is described, the numerical aperture of the large numerical aperture immersion lens is larger than 1.
The technology also provides a large numerical aperture immersion lens wave aberration detection device capable of performing wave aberration detection on the immersion lens with the numerical aperture larger than 1.
The wave aberration detection device of the large numerical aperture immersion oil lens comprises a light source 1, a diaphragm 4, a beam splitting prism 6, a standard flat crystal 8, a detected lens 9, a hyper-hemispherical reflector 14 and a CCD13, wherein the hyper-hemispherical reflector 14 is made of glass, the sagittal height of the hyper-hemispherical reflector 14 is larger than the radius R of the hyper-hemispherical reflector, and the outer circle surface of the hyper-hemispherical reflector is plated with a total reflection film; the outgoing light beam emitted by the light source 1 is converged on a diaphragm 4 at the focal position of the collimating lens, and the light beam is emitted in a parallel light beam mode along a collimating lens 7 after passing through a beam splitting prism 6 and is projected on a standard flat crystal 8; taking the incident surface of the standard flat crystal 8 as a reference plane, wherein one part of light rays are reflected along the original path of the reference plane, the other part of light rays are emitted through the reference plane, are focused on a focus through the tested lens 9 and the medium oil 15, the light beams are emitted into a hyper-hemispherical reflector 14 along the incident direction of the focus point and return, and finally, the two light rays are reflected by a beam splitting prism to form two bright small holes at the exit pupil position; the CCD13 is used to convert the image at the aperture into an electrical signal.
As a further improvement of the above detection device, the large numerical aperture immersion lens wave aberration detection device, the light source 1 is a laser.
As a further improvement of the detection device, the wave aberration detection device of the large numerical aperture immersion lens has the numerical aperture larger than 1.
The beneficial effects of the technology are that: the technology is to replace the bare air medium between the standard reflecting sphere used in auto-collimation and the cover glass with glass medium, and combine the glass medium with the cover glass to form a hyper-hemispherical reflector, the outer sphere of which is plated with a total reflection film and the rise of which is just equal to the radius R of the hemisphere plus the thickness d of the cover glass, thereby solving the problems that the total reflection cannot be measured and the cover glass is difficult to fix
When the wave aberration detector is used for detection, the plane direction of the hypersphere reflector with the same refractive index as the cover glass is kept parallel to the forefront piece 16 of the tested lens 9, the optical axis of the hypersphere is coaxial with the optical axis of the lens, the focus of the collimated light beam passing through the tested immersion oil lens is regulated until the collimated light beam falls at the spherical center position of the hypersphere (the focus of the tested lens coincides with the spherical center position of the hypersphere), and the light path is ensured to return along the original path because the outer circle surface of the hypersphere is plated with a total reflection film.
The super-hemispherical reflector is higher than the radius of the hemisphere, and combines the cover glass and the standard reflection sphere which are originally used as a whole, so that the problem that the cover glass is fixed is solved, and meanwhile, the problem that the total reflection of the light of the oil immersion lens with the numerical aperture larger than 1 cannot be measured due to the fact that the reflection sphere is exposed in the air is solved, and the structure is simple.
Drawings
Fig. 1 is a block diagram of a conventional inspection apparatus for measuring a large numerical aperture immersion oil objective.
Fig. 2 is an enlarged view of the optical path such as the cover glass in fig. 1.
Fig. 3 is a block diagram of a detection device of the present technology for measuring a large numerical aperture immersion objective.
Fig. 4 is a diagram of a super hemispherical reflector optical path.
Detailed Description
The present technology is further described below with reference to the drawings and examples.
Referring to fig. 3, a light source 1 is a laser with a wavelength of 532nm, an outgoing beam is converged on a diaphragm 4 at the focal position of a collimating lens through a reflecting mirror 2 and a condensing mirror 3, and the beam is transmitted through a beam splitting prism 6 through a reflecting mirror 5, then is emitted in a parallel beam mode along a collimating lens 7, and is projected on a standard flat crystal 8. The incident surface of the standard flat crystal 8 is taken as a reference plane, one part of light rays are reflected along the original path of the reference plane, the other part of light rays are emitted through the reference plane and are focused on a focus through the tested lens 9, the light rays are emitted into a hyper-hemispherical reflector 14 along the incident direction of the focus point and return, the last two light rays are reflected by a beam splitting prism, two bright small holes are formed at the exit pupil position 12 after passing through the reflecting mirror 11, the images of the two small holes are overlapped by adjusting an air wedge between the standard flat crystal and the tested lens, and finally interference fringes generated at the small holes are observed by the CCD 13.
See fig. 4. Since the light transmitted through the lens 9 to be measured is focused at the spherical center of the hyper-hemisphere, the incident light 18 is incident to the hyper-hemispherical reflector 14 along the straight line direction, and returns along the original direction after being reflected by the spherical surface.
By integrating the cover glass 19 with the reflecting sphere 10, the hyper-hemispherical reflector with the sagittal height equal to the radius R of the reflecting sphere plus the thickness D of the cover glass is used to replace the original cover glass, reflecting sphere and air medium in front of the cover glass.
By using this method, it is possible to detect wave aberration of a lens having a logarithmic aperture larger than 1 quickly and accurately.
Claims (3)
1. The wave aberration detection method of the large numerical aperture immersion oil lens comprises the steps that the numerical aperture of the large numerical aperture immersion oil lens is larger than 1, emergent light beams emitted by a light source (1) are converged on a diaphragm (4) at the focus position of a collimating lens, and the light beams are emergent in a parallel light beam mode along a collimating lens (7) and are projected on a standard flat crystal (8) after passing through a beam splitting prism (6); the method is characterized in that: the plane direction of the hyper-hemispherical reflector (14) is kept parallel to the forefront piece of the tested lens (9), the optical axis of the hyper-hemispherical reflector (14) is coaxial with the optical axis of the tested lens (9), and the focus of the collimated light beam passing through the tested lens (9) is regulated until the focus of the tested lens (9) coincides with the spherical center position of the hyper-hemispherical reflector (14); the incident surface of the standard flat crystal (8) is taken as a reference plane, one part of light rays are reflected along the original path of the reference plane, the other part of light rays are emitted through the reference plane, are focused on the focus of the tested lens (9) through the tested lens (9) and medium oil (15), the light rays are emitted into a hyper-hemispherical reflector (14) along the incident direction of the focus point and return, finally, two light rays are reflected by a beam splitting prism, two bright small holes are formed at the exit pupil position (12), the images of the two small holes are overlapped by adjusting an air wedge between the standard flat crystal (8) and the tested lens (9), and finally, the images at the small holes are converted into electric signals by a CCD (charge coupled device); the super-hemispherical reflector (14) is made of glass, the sagittal height of the super-hemispherical reflector is larger than the radius R of the super-hemispherical reflector, and the outer circular surface of the super-hemispherical reflector is plated with a total reflection film.
2. The method for detecting wave aberration of the large numerical aperture immersion lens as claimed in claim 1, wherein: the light source (1) is a laser.
3. The utility model provides a big numerical aperture immersion oil camera lens wave aberration detection device, the numerical aperture of big numerical aperture immersion oil camera lens is greater than 1, including light source (1), diaphragm (4), beam split prism (6), standard plano-crystalline (8), by survey camera lens (9), super hemisphere reflector (14), CCD (13), light source (1) are the laser instrument, characterized by: the super-hemispherical reflector (14) is made of glass, the sagittal height of the super-hemispherical reflector is larger than the radius R of the super-hemispherical reflector, and the outer circular surface of the super-hemispherical reflector is plated with a total reflection film; the plane direction of the hyper-hemispherical reflector (14) is parallel to the forefront piece of the tested lens (9), the optical axis of the hyper-hemispherical reflector (14) is coaxial with the optical axis of the tested lens (9), and the focus of the tested lens (9) is coincident with the spherical center position of the hyper-hemispherical reflector (14); the emergent light beam emitted by the light source (1) is converged on a diaphragm (4) at the focal position of the collimating lens, and the emergent light beam is emitted in a parallel light beam mode along the collimating lens (7) after passing through the beam splitting prism (6) and is projected on the standard flat crystal (8); taking an incident surface of a standard flat crystal (8) as a reference plane, wherein one part of light rays are reflected along an original path of the reference plane, the other part of light rays are emitted through the reference plane, are focused on a focus of the tested lens (9) through the tested lens (9) and medium oil (15), the light rays are emitted into a hyper-hemispherical reflector (14) along the incident direction of a focus point and return, and finally, the two light rays are reflected through a beam splitting prism to form two bright small holes at an exit pupil position; the CCD (13) is used for converting the image at the small hole into an electric signal.
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| CN201710226421.XA CN106895963B (en) | 2017-04-09 | 2017-04-09 | Device and method for detecting large numerical aperture immersion oil lens |
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| CN201710226421.XA CN106895963B (en) | 2017-04-09 | 2017-04-09 | Device and method for detecting large numerical aperture immersion oil lens |
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| CN106895963B true CN106895963B (en) | 2024-01-26 |
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