CN101450384A - Metalic nano powder synthesizinf device and method by using plasma - Google Patents
Metalic nano powder synthesizinf device and method by using plasma Download PDFInfo
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- CN101450384A CN101450384A CNA2008101824268A CN200810182426A CN101450384A CN 101450384 A CN101450384 A CN 101450384A CN A2008101824268 A CNA2008101824268 A CN A2008101824268A CN 200810182426 A CN200810182426 A CN 200810182426A CN 101450384 A CN101450384 A CN 101450384A
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B22—CASTING; POWDER METALLURGY
- B22F—WORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
- B22F9/00—Making metallic powder or suspensions thereof
- B22F9/16—Making metallic powder or suspensions thereof using chemical processes
- B22F9/18—Making metallic powder or suspensions thereof using chemical processes with reduction of metal compounds
- B22F9/20—Making metallic powder or suspensions thereof using chemical processes with reduction of metal compounds starting from solid metal compounds
- B22F9/22—Making metallic powder or suspensions thereof using chemical processes with reduction of metal compounds starting from solid metal compounds using gaseous reductors
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
- B01J19/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
- B01J19/08—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor
- B01J19/087—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor employing electric or magnetic energy
- B01J19/088—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor employing electric or magnetic energy giving rise to electric discharges
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANOTECHNOLOGY
- B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
- B82Y30/00—Nanotechnology for materials or surface science, e.g. nanocomposites
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANOTECHNOLOGY
- B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
- B82Y40/00—Manufacture or treatment of nanostructures
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B22—CASTING; POWDER METALLURGY
- B22F—WORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
- B22F2201/00—Treatment under specific atmosphere
- B22F2201/01—Reducing atmosphere
- B22F2201/013—Hydrogen
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B22—CASTING; POWDER METALLURGY
- B22F—WORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
- B22F2202/00—Treatment under specific physical conditions
- B22F2202/13—Use of plasma
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B22—CASTING; POWDER METALLURGY
- B22F—WORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
- B22F2301/00—Metallic composition of the powder or its coating
- B22F2301/25—Noble metals, i.e. Ag Au, Ir, Os, Pd, Pt, Rh, Ru
- B22F2301/255—Silver or gold
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B22—CASTING; POWDER METALLURGY
- B22F—WORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
- B22F2304/00—Physical aspects of the powder
- B22F2304/05—Submicron size particles
- B22F2304/054—Particle size between 1 and 100 nm
Abstract
The present invention provides a device and method for synthesizing metal nano-powders with plasma, the device and method is capable of generating metal nano-powders with high yield with simple equipment, and is capable of generating even nano-sized metal powders. The synthesizing device comprises: a plasma generating device having an electric power supply section, an electromagnetic wave generating section, a wave guide tube and a discharge lamp for generating plasma; a gas and powders supply device for supplying preheated i) metal nano-powders or reduction gas, or ii) metal nano-powders and oxidizing gas with 25-300 DEG to the plasma section of the electric discharge tube; and a reactor tube combining with a lower end of the electric discharge tube, in the reactor tube, powders supplied from the gas and powers supply device are converted into gas phase to generating reduction-oxidation reaction, and to be cooled to form metal powders. The synthesizing method uses the synthesizing device of the invention.
Description
Technical field
The present invention relates to utilize the synthesizer and the method for the nano metal powder of plasma, particularly relate to and to generate the nano metal powder of high yield with better simply equipment, and can generate the synthesizer and the method for the nano metal powder that utilizes plasma of the metallic particles of evengranular nanometer unit-sized.In more detail, making with the inert gas is that the metal compound powders of carrier gas passes through in atmospheric plasma with reducing gas or oxidizing gas, and metallic compound changes into after the gas phase mutually, synthesizes pure nano metal powder by reaction.
Background technology
Recently, to metal dust, particularly be that the demand of the metal dust of nano-scale increases day by day to granular size, this is a reality.Particularly, the demand of silver powder is sharply increased, it is being applied to multiple fields such as panel display screen (Flat Panel Display), semiconductor, PCB material, anti-biotic material, tide of motorism ray cover, electromagnetic shielding simultaneously.
If the size of silver-colored particle is reduced to nanoscale, then begin to demonstrate the character that can not show with micron unit, this is along with the surface atom of silver-colored particle improves with respect to the ratio of all atoms and the effect that demonstrates, multiple rerum naturas such as the wherein performance of specificity of catalyst, fusing point reduction, heat transfer characteristic rising, the rising of absorption/characterization of adsorption, magnetic property rising are improved, and people's nanometer-level silver particle that waits in expectation is applied at multiple industrial field from now on.
In order to obtain so nano level metal dust, developed the autofrettage of utilizing mechanical crushing method, liquid phase method, vapor phase method etc. at present.But reality is, though mechanical crushing method helps a large amount of productions, has a lot of restrictions at aspects such as the stability of end article and economy, is difficult to obtain the particle of nanometer unit, and final production goes out a micron unit grain and accounts for most powder.
And, in the situation of liquid phase method, use liquid phase method or the spray-on process utilize electrolysis, can make nano level powder under the situation of the known method of wherein utilizing electrolysis, but must add oxidation, reducing catalyst etc., so must be after existing powder to generate through the difficulty of post processing.
Must experience the shortcoming of complicated stage during for the shortcoming that remedies so uneven powder of generation and synthetic powder, developed the nanometer powder manufacture method of utilizing vapor phase method, this method is for after making vapor state with the metal of piece (bulk) state, make its condensation and carry out the method for powdered rapidly, though the production unit price of this method and processing unit price are low, the shortcoming that exists productivity ratio to reduce.
And, when utilizing such vapor phase method to make nanometer powder, make the technology of metal gasification can be described as the core technology of vapor phase method, known plasma arc electric discharge, RF (radio frequency) hot plasma method, with the hot firing method of raw material at 4000～5000 ℃ high temperature sintering, but these methods all are the technology that the metal of bulk state become gas phase, the piece metal is being generated as in the process of gas, in the situation of plasma arc electric discharge, use the conveying-type arc-plasma, the shortcoming that has sacrificial electrode, in the situation of RF hot plasma, exist to produce the device more complicated of plasma, install bigger, the shortcoming of efficient reduction.And the shortcoming that firing method exists is: consume big energy to discharge higher heat, compare the production unit price with the mode of production of plasma mode higher.
Therefore, reality is, press for develop overcome such shortcoming, can generate the nano metal powder of high yield and can generate the synthesizer and the method for the nano metal powder that utilizes plasma of the metallic particles of evengranular nanometer unit-sized with better simply equipment.
Summary of the invention
Solve such prior art problems, a kind of to utilize the synthesizer and the method for the nano metal powder of plasma be purpose to provide in the present invention, this synthesizer and method can generate the nano metal powder of high yield with better simply equipment, and can generate the metallic particles of evengranular nanometer unit-sized.
In order to achieve the above object, the invention provides a kind of synthesizer that utilizes the nano metal powder of plasma, it is characterized in that described synthesizer comprises:
Plasma generating device, the discharge tube that it possesses power suppling part, electromagnetic wave generating unit, waveguide pipe (waveguide) and produces plasma;
Gas and powder feeding device, it is used for the i after 25～300 ℃ of preheatings) metal oxide powder and reducing gas or ii) metallic reducing thing powder and oxidizing gas supply to the plasma position of above-mentioned discharge tube; With
Reaction tube, it combines with the lower end of above-mentioned discharge tube, and in this reaction tube, the powder of being supplied with by above-mentioned gas and powder feeding device becomes gas phase, and reduction or oxidation reaction take place, and is cooled then, forms metal dust.
And, the invention provides a kind of synthetic method of utilizing the nano metal powder of plasma, it is characterized in that, in the synthesizer of the nano metal powder that utilizes plasma of the invention described above, utilize above-mentioned plasma generating device to produce plasma, will be by above-mentioned gas and powder feeding device at the i after 25～300 ℃ of preheatings) metal oxide powder and reducing gas or ii) metallic reducing thing powder and oxidizing gas supply to the plasma generation position of above-mentioned discharge tube, in above-mentioned reaction tube, make the powder of supplying with by above-mentioned gas and powder feeding device become gas phase, reduce or oxidation reaction, cool off then, form metal dust.
The synthesizer and the method for the nano metal powder of plasma utilized of the present invention has following advantage: can generate the nano metal powder of high yield with better simply equipment, and can generate the metallic particles of evengranular nanometer unit-sized.
Description of drawings
Fig. 1 is the system schematic that schematically shows an embodiment relevant with the synthesizer of the nano metal powder that utilizes plasma of the present invention.
Fig. 2 is for to amplify illustrated partial cross section figure with discharge tube and reaction tube among the embodiment shown in Figure 1.
Fig. 3 is the schematic diagram that is illustrated schematically in applied powder bin and powder feeding device in the synthesizer of the nano metal powder that utilizes plasma of the present invention.
The specific embodiment
Below, describe the present invention in detail.
The present invention relates to utilize the synthesizer of the nano metal powder of plasma, in more detail, comprise plasma generating device in the formation of described synthesizer, gas and powder feeding device and reaction tube, described plasma generating device possesses power suppling part, the electromagnetic wave generating unit, the discharge tube of waveguide pipe and generation plasma, described gas and powder feeding device are used for the i after 25～300 ℃ of preheatings) metal oxide powder and reducing gas or ii) metallic reducing thing powder and oxidizing gas supply to the plasma position of above-mentioned discharge tube, described reaction tube combines with the lower end of above-mentioned discharge tube, and in this reaction tube, the powder of being supplied with by above-mentioned gas and powder feeding device becomes gas phase, reduction or oxidation reaction take place, be cooled then, form metal dust.
Owing to problem as described above can occur in the situation of direct-current plasma generation device, produce plasma by the ac plasma generation device so be applicable to plasma generating device of the present invention.Plasma generating device of the present invention comprises all known RF and microwave plasma generation device, considers the simplicity of equipment, preferably uses the microwave plasma generation device.Under this situation, electromagnetic frequency range is advisable with 433MHz～5.80GHz, 900MHz～2.45GHz more preferably, because the magnetron of 2.45GHz is by commercialization and extensively universal, so can make the making of equipment easy when directly using the magnetron of 2.45GHz, thereby further preferred magnetron that uses 2.45GHz.As relevant therewith concrete example, the known plasma generating device (plasmatorch specifically) with magnetron, waveguide pipe and plasma generating device is applicable to this.Consider the convenience of equipment operation, further the torch that preferably can under atmospheric pressure use.Cold plasma or hot plasma all can be used in the above-mentioned plasma of Xing Chenging thus, preferably use hot plasma.Promptly, in situation of the present invention, be not that metal with existing bulk state gasifies and makes nanometer powder, but the powder of metallic compound (oxide or reduzate) is gasified, even therefore the thermal capacity of plasma itself is less, also can successfully gasify, and then, when supplying with again after the powder preheating that will be supplied with, heating needed heat relatively further reduces, therefore be not only hot plasma, cold plasma also can make powder fully gasify, and can cause the chemical reaction that changes to metal.
Above-mentioned electromagnetic frequency range is preferably 433MHz～5.80GHz to carry out the gasification and the chemical reaction of powder effectively reliably, 900MHz～2.45GHz more preferably, and above-mentioned plasma is advisable with hot plasma.
Xiang Guan concrete example as shown in Figure 1 therewith.That is, Fig. 1 is for showing the exemplary system block diagram of an embodiment relevant with the synthesizer of the nano metal powder that utilizes plasma of the present invention.According to this block diagram, in formation, described synthesizer has the magnetron that generates electromagnetic waves, be delivered in electromagnetic waveguide pipe and discharge tube and reaction tube that described magnetron produces, in discharge tube and reaction tube, by the electromagnetic wave that transmits by described waveguide pipe with form plasma (being preferably formed hot plasma) by gas and powder feeding device gas supplied, to carry out weight feed with gas by the metal compound feedstock powder that metal oxide or metallic reducing thing form by gas and powder feeding device, and make described metal compound feedstock powder and gas pass through the central part of formed plasma, if make metallic compound be transformed into the reducing gas or the oxidizing gas of metal to wherein supplying with simultaneously, then metal compound powders is at the chemical reaction that can be transformed into metal when gas phase changes mutually.
In detail, the illustrated plasma generating device that possesses magnetron is known plasma generating device, in more detail, as shown in Figure 1, plasma generating device is made of the magnetron that generates electromagnetic waves, the electromagnetic waveguide pipe of transmission and discharge tube, if by the gas supply device supply gas, can produce plasma, preferably produce hot plasma.Illustrated plasma generating device is representational heat plasma system, is also referred to as thermal plasma torch (torch).On this basis, in above-mentioned plasma generating device, can further have three stub tuners (3 heavy excellent チ ユ-Na-).It can be adjusted microwave, makes thermal output to greatest extent concentrate on plasma generation portion.That is, bring into play following effect: by the electromagnetic wavelength that magnetron produced, the diffuse reflection of guided wave pipe is advanced is regulated, can be in plasma generating device be λ/4 with electromagnetic wavelength regulation.
Herein, as Fig. 1～shown in Figure 2, above-mentioned discharge tube also comprises the swirl gas inlet that is used for to inwall jet-stream whirl (swirl) gas of discharge tube, and above-mentioned gas and powder feeding device have formation from swirl gas to above-mentioned swirl gas inlet that also supply with.This～tens thousand of degree (heat) plasma thousands of in order to prevent causes the inwall damage of reaction tube, perhaps Fan Ying metal is attracted on the reaction tube, and make from the gas that inflow pipe flows into and form eddy current,, use halogen gas or nitrogen as inert gas as swirl gas.
The present invention utilizes described device synthesis of nano powder, powder is in the central part of the hot plasma of the thousands of～tens thousand of degree by above-mentioned formation, the moment gasification, with reacting gas reaction and change, so gasify and the metal that is transformed into will pass through the crystallization that is condensed in reaction tube process.
More particularly, for supply gas and powder etc. in above-mentioned plasma generating device, as shown in the figure, above-mentioned gas and powder feeding device can be equipped with the gas supply device that contains inert gas or nitrogen, oxidizing gas, reducing gas etc.That is, powder feeding (in order evenly to supply with powder, can import carrier gas, and carrier gas can be participated in the generation of plasma to the carrier gas of the central part of plasma as being used for.), can use inert gas or nitrogen, when metallic compound is oxide, can supply with reducing gas, when metallic compound is reduzate, can supply with oxidizing gas, in addition for above-mentioned swirl gas and refrigerating gas described later, inert gas or nitrogen can be used, therefore aforesaid gas supply device can be equipped.And, in the synthesizer of the present invention because (can be only with the powder preheating with supplying with after the powder preheating, also can be with powder and carrier gas preheating, can also be with all preheatings of powder, carrier gas and reacting gas (oxidizing gas or reducing gas)), though therefore not shown, above-mentioned powder bin can possess powder is heated to 25 ℃～300 ℃ and the function that stirs.As mentioned above,, can heat with 25～300 ℃, preferably heat with 25～200 ℃ about described preheat temperature.And, for can adjustments of gas and powder to the weight feed of discharge tube, above-mentioned gas and powder feeding device can be made of weigh feeder.Therefore, the whole bag of tricks of supply powder that can application of known in above-mentioned gas and the powder feeding device, and relevant therewith concrete example is as shown in Figure 3.Promptly, with the little fine helical gear of motor driving gear distance, rotation by helical gear makes the mode that falls to supplying with at the powder that exists between its tooth pitch, it can come quantity delivered is carried out fine adjusting in constituting by the governor motor rotating speed, and can carry out preheating on inflow pipe.As shown in the figure, before being about to flow into discharge tube, supply with carrier gas, perhaps supply with carrier gas, and can control flow by MFC (mass flow controller (Mass Flow controller)) from the powder bin.
Above-mentioned reaction tube as shown in Figure 2, powder with flow into by inflow pipe as the halogen gas or the nitrogen (carrier gas) of inert gas, flow into hydrogen (it is reducing gas) as reacting gas or oxygen (it is oxidizing gas) etc. from other inflow pipes that are connected with this inflow pipe simultaneously, and the gas that makes inflow passes through the central part of (heat) plasma, metallic compound that passes through the center of (heat) plasma and gasify and reacting gas react and are reduced or are oxidized to pure metal, thereby form nano metal powder.
And as Fig. 1～shown in Figure 2, above-mentioned reaction tube can also comprise the refrigerating gas inlet that cools off powder, and can comprise refrigerating gas feedway from refrigerating gas to above-mentioned refrigerating gas inlet that supply with.By this reaction tube, utilize the refrigerating gas that flows into from the refrigerating gas inlet that the metal gas phase is cooled off rapidly, form nano metal powder, on this basis, when reaction tube also has heat exchanger, when being condensed, can form finer nanometer powder through over-heat-exchanger.
And, on this basis, as its concrete example that provides among Fig. 1, described synthesizer can also comprise classification portion or trap portion (collector), and described classification portion is combined in after the described reaction tube, and according to a certain size powder is classified, described trap portion is with used gas and powder separation, capture, as shown in Figure 1, also classification portion and trap portion can be connected in series and constitute.Promptly, if passed through metal compound powders process reduction reaction or oxidation reaction and heat exchange generation nano metal powder when becoming gas phase of discharge tube, then nano metal powder is in the state of the size distribution with broad sometimes, therefore by be provided for these nanometer powders are categorized as the classification portion of desired powder size in the rear end, can be with powder classification, by the trap portion that captures after used gas and nanometer powder be separated from each other is set in the rear end, the metal dust that synthesizes can be captured.
As the synthetic example of such metal dust, if enumerate the synthetic of silver-colored nanometer powder, the silver compound that then is used for raw material is Ag
2O, AgO, Ag
2O
2, AgNO
3Deng, for Ag wherein
2O utilizes at the equipment shown in Fig. 1 and Fig. 2, makes silver-colored nanometer powder.At this moment, with per minute 10L (10LPM) nitrogen injection as swirl gas, simultaneously with per minute 5L (5LPM) with the argon gas and the Ag of the state of preheating
2O injects central part together, meanwhile will inject central part as the hydrogen of reacting gas with per minute 0.5L (0.5LPM).That is, each material all is preheated between 25～300 ℃ in the powder bin, mixes simultaneously, by gas and powder feeding device, by inflow pipe, puts into the plasma central part with this state.Such silver compound under pulverulence for having the Ag of inherent colour (that is crineous)
2O, but demonstrate the intrinsic color of silver, i.e. silver color or Transparent color along with under aforesaid condition, being reduced by hot plasma.Become nanometer powder, then silver color can become Transparent color more.
In addition, the invention provides and utilize such synthesizer, utilize the synthetic method of the nano metal powder of plasma, this synthetic method is following method: in the synthesizer of the above-mentioned nano metal powder that utilizes plasma, utilize above-mentioned plasma generating device to produce plasma, will be by above-mentioned gas and powder feeding device at the i after 25～300 ℃ of preheatings) metal oxide powder and reducing gas or ii) metallic reducing thing powder and oxidizing gas supply to the plasma generation position of above-mentioned discharge tube, in above-mentioned reaction tube, make the powder of supplying with by above-mentioned gas and powder feeding device become gas phase, reduce or oxidation reaction, cool off then, form metal dust, wherein, the detailed description relevant with described method as mentioned above, synthetic method also as mentioned above, above-mentioned electromagnetic frequency is preferably 433MHz～5.80GHz, 900MHz～2.45GHz more preferably, above-mentioned plasma is advisable with hot plasma, preferred above-mentioned discharge tube also comprises the swirl gas inlet to the inwall jet-stream whirl gas of discharge tube, above-mentioned gas and powder feeding device are also supplied with swirl gas to above-mentioned swirl gas inlet, this is because when synthesizing with this state, can obtain the nanometer powder of pure Cui and can guarantee the durability of discharge tube and reaction tube.Xiang Guan detailed description as mentioned above therewith.
And, as mentioned above, above-mentioned reaction tube also comprises the refrigerating gas inlet that cools off powder, and comprise when above-mentioned refrigerating gas inlet is supplied with the refrigerating gas feedway of refrigerating gas, can obtain fine nano metal powder, so be preferred, as relevant therewith concrete example, above-mentioned metal oxide can be enumerated AgO, Ag
2O, Ag
2O
2, AgNO
3, reducing gas can be enumerated hydrogen, and metal dust can be enumerated Ag.
In above-mentioned gas and powder feeding device, as mentioned above, preferably utilize inert gas carrier gas or nitrogen carrier gas to supply with powder herein.
More than Shuo Ming the present invention is not limited to the foregoing description and additional accompanying drawing, in the scope that does not break away from thought of the present invention that claims put down in writing and category, various modifications that those skilled in the art make and distortion are certainly also all within the scope of the present invention.
Claims (13)
1. a synthesizer that utilizes the nano metal powder of plasma is characterized in that, described synthesizer comprises:
Plasma generating device, it possesses the discharge tube of power suppling part, electromagnetic wave generating unit, waveguide pipe and generation plasma;
Gas and powder feeding device, it is used for the i after 25 ℃～300 ℃ preheatings) metal oxide powder and reducing gas or ii) metallic reducing thing powder and oxidizing gas supply to the plasma position of described discharge tube; With
Reaction tube, it combines with the lower end of described discharge tube, and in this reaction tube, the powder of being supplied with by described gas and powder feeding device becomes gas phase, and reduction or oxidation reaction take place, and is cooled then, forms metal dust.
2. the synthesizer that utilizes the nano metal powder of plasma as claimed in claim 1 is characterized in that, described electromagnetic frequency is 433MHz～5.80GHz, and described plasma is a hot plasma.
3. the synthesizer that utilizes the nano metal powder of plasma as claimed in claim 1 is characterized in that, described discharge tube also comprises the swirl gas inlet that is used for to the inwall jet-stream whirl gas of discharge tube,
Described gas and powder feeding device are also supplied with swirl gas to described swirl gas inlet.
4. the synthesizer that utilizes the nano metal powder of plasma as claimed in claim 1, it is characterized in that, described reaction tube also comprises the refrigerating gas inlet that is used to cool off powder, and described reaction tube also comprises refrigerating gas feedway from refrigerating gas to described refrigerating gas inlet that supply with.
5. the synthesizer that utilizes the nano metal powder of plasma as claimed in claim 1 is characterized in that, described metal oxide is AgO, Ag
2O, Ag
2O
2, AgNO
3, described reducing gas is a hydrogen, described metal dust is Ag.
6. the synthesizer that utilizes the nano metal powder of plasma as claimed in claim 1, it is characterized in that, described synthesizer also comprises classification portion or trap portion, described classification portion is combined in after the described reaction tube and according to a certain size classifies powder, described trap portion captures used gas and powder separation.
7. the synthesizer that utilizes the nano metal powder of plasma as claimed in claim 1 is characterized in that, in described gas and powder feeding device, utilizes inert gas carrier gas or nitrogen carrier gas to supply with powder.
8. a synthetic method of utilizing the nano metal powder of plasma is characterized in that, in the synthesizer of the described nano metal powder that utilizes plasma of claim 1,
Utilize described plasma generating device to produce plasma, will be by described gas and powder feeding device at the i after 25 ℃～300 ℃ preheatings) metal oxide powder and reducing gas or ii) metallic reducing thing powder and oxidizing gas supply to the plasma generation position of described discharge tube, in described reaction tube, make the powder of supplying with by described gas and powder feeding device become gas phase, reduce or oxidation reaction, cool off then, form metal dust.
9. the synthetic method of utilizing the nano metal powder of plasma as claimed in claim 8 is characterized in that, described electromagnetic frequency is 433MHz～5.80GHz, and described plasma is a hot plasma.
10. the synthetic method of utilizing the nano metal powder of plasma as claimed in claim 8 is characterized in that, described discharge tube also comprises the swirl gas inlet that is used for to the inwall jet-stream whirl gas of discharge tube,
Described gas and powder feeding device are also supplied with swirl gas to described swirl gas inlet.
11. the synthetic method of utilizing the nano metal powder of plasma as claimed in claim 8, it is characterized in that, described reaction tube also comprises the refrigerating gas inlet that is used to cool off powder, and described reaction tube also comprises the refrigerating gas feedway that is used for supplying with to described refrigerating gas inlet refrigerating gas, thereby supplies with refrigerating gas to described refrigerating gas inlet.
12. the synthetic method of utilizing the nano metal powder of plasma as claimed in claim 8 is characterized in that, described metal oxide is AgO, Ag
2O, Ag
2O
2, AgNO
3, described reducing gas is a hydrogen, described metal dust is Ag.
13. the synthetic method of utilizing the nano metal powder of plasma as claimed in claim 8 is characterized in that, utilizes inert gas carrier gas or nitrogen carrier gas to supply with powder in described gas and powder feeding device.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| KR1020070126778 | 2007-12-07 | ||
| KR1020070126778A KR20090059749A (en) | 2007-12-07 | 2007-12-07 | Device and method for preparing metal nano-powder using the plasma |
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| CN101450384A true CN101450384A (en) | 2009-06-10 |
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| CNA2008101824268A Pending CN101450384A (en) | 2007-12-07 | 2008-12-05 | Metalic nano powder synthesizinf device and method by using plasma |
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| JP (1) | JP2009138271A (en) |
| KR (1) | KR20090059749A (en) |
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| TW (1) | TW200936775A (en) |
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-
2007
- 2007-12-07 KR KR1020070126778A patent/KR20090059749A/en not_active Application Discontinuation
-
2008
- 2008-12-05 JP JP2008310798A patent/JP2009138271A/en not_active Withdrawn
- 2008-12-05 CN CNA2008101824268A patent/CN101450384A/en active Pending
- 2008-12-05 TW TW097147473A patent/TW200936775A/en unknown
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| CN110014161A (en) * | 2019-04-18 | 2019-07-16 | 北京科技大学 | A method of preparing spherical tungsten based powders |
| CN110014162A (en) * | 2019-04-18 | 2019-07-16 | 北京科技大学 | A method of preparing spherical molybdenum base powder |
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Also Published As
| Publication number | Publication date |
|---|---|
| KR20090059749A (en) | 2009-06-11 |
| JP2009138271A (en) | 2009-06-25 |
| TW200936775A (en) | 2009-09-01 |
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