CN101438061B - Vacuum pump - Google Patents

Vacuum pump Download PDF

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Publication number
CN101438061B
CN101438061B CN2007800167402A CN200780016740A CN101438061B CN 101438061 B CN101438061 B CN 101438061B CN 2007800167402 A CN2007800167402 A CN 2007800167402A CN 200780016740 A CN200780016740 A CN 200780016740A CN 101438061 B CN101438061 B CN 101438061B
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CN
China
Prior art keywords
pump
ductile iron
austempered ductile
rotor part
stator component
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
CN2007800167402A
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Chinese (zh)
Other versions
CN101438061A (en
Inventor
E·U·奥科罗亚富尔
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
BOC Group Ltd
Edwards Ltd
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BOC Group Ltd
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Filing date
Publication date
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Publication of CN101438061A publication Critical patent/CN101438061A/en
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Publication of CN101438061B publication Critical patent/CN101438061B/en
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
    • F04C18/08—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
    • F04C18/12—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
    • F04C18/02—Rotary-piston pumps specially adapted for elastic fluids of arcuate-engagement type, i.e. with circular translatory movement of co-operating members, each member having the same number of teeth or tooth-equivalents
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
    • F04C18/08—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
    • F04C18/12—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type
    • F04C18/14—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with toothed rotary pistons
    • F04C18/16—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with toothed rotary pistons with helical teeth, e.g. chevron-shaped, screw type
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C29/00—Component parts, details or accessories of pumps or pumping installations, not provided for in groups F04C18/00 - F04C28/00
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
    • F04C18/02—Rotary-piston pumps specially adapted for elastic fluids of arcuate-engagement type, i.e. with circular translatory movement of co-operating members, each member having the same number of teeth or tooth-equivalents
    • F04C18/0207—Rotary-piston pumps specially adapted for elastic fluids of arcuate-engagement type, i.e. with circular translatory movement of co-operating members, each member having the same number of teeth or tooth-equivalents both members having co-operating elements in spiral form
    • F04C18/0215—Rotary-piston pumps specially adapted for elastic fluids of arcuate-engagement type, i.e. with circular translatory movement of co-operating members, each member having the same number of teeth or tooth-equivalents both members having co-operating elements in spiral form where only one member is moving
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
    • F04C18/08—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
    • F04C18/12—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type
    • F04C18/123—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with radially or approximately radially from the rotor body extending tooth-like elements, co-operating with recesses in the other rotor, e.g. one tooth
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
    • F04C18/08—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
    • F04C18/12—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type
    • F04C18/126—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with radially from the rotor body extending elements, not necessarily co-operating with corresponding recesses in the other rotor, e.g. lobes, Roots type
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2220/00—Application
    • F04C2220/10—Vacuum
    • F04C2220/12—Dry running
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
    • F05C—INDEXING SCHEME RELATING TO MATERIALS, MATERIAL PROPERTIES OR MATERIAL CHARACTERISTICS FOR MACHINES, ENGINES OR PUMPS OTHER THAN NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES
    • F05C2201/00—Metals
    • F05C2201/04—Heavy metals
    • F05C2201/0433—Iron group; Ferrous alloys, e.g. steel
    • F05C2201/0436—Iron
    • F05C2201/0439—Cast iron
    • F05C2201/0442—Spheroidal graphite cast iron, e.g. nodular iron, ductile iron
    • F05C2201/0445—Austempered ductile iron [ADI]

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Applications Or Details Of Rotary Compressors (AREA)
  • Non-Positive Displacement Air Blowers (AREA)

Abstract

A dry vacuum pump comprises a stator component and at least one rotor component. To improve the tolerance of the pump to corrosive gases and abrasive particles passing through the pump, the stator component and/or said at least one rotor component are formed from austempered ductile iron.

Description

Vacuum pump
Technical field
The present invention relates to a kind of dry vacuum pump.
Background technique
Dry vacuum pump is widely used in multiple industrial technology thereby cleaning and/or environment under low pressure is provided for manufacturing a product.These application comprise pharmacy, semiconductor and dull and stereotyped process industry.That such pump comprises substantially is dry (or do not have oil) pumping mechanism, but also comprise some parts usually, for example bearing and driving gear, to drive pumping mechanism, described parts need be lubricated so that it is effective.The example of dry pump comprises Roots pump, Northey pump (or " pawl type " pump), screw pump and vortex pump.The dry pump that comprises Roots pump and/or Northey pump rotor parts is generally the multistage positive-displacement pump that comprises stator component, and described stator component defines a plurality of pumping chambers, and each described pumping chamber covers corresponding a pair of intermeshing rotor part.Rotor part is positioned on the countershaft, and the profile or the profile that may have same type in each chamber may change between chamber and chamber.
Ironcasting has been used to make the stator component and the rotor part of dry vacuum pump for a long time.Yet, in semi-conductor industry, use corrosive relatively gas of high flow rate more and more, for example chlorine, boron trichloride, hydrogen bromide, fluorine and chlorine trifluoride, can cause producing serious corrosion, and therefore cause the working life of cast iron stator component and rotor part relative shorter.Except shutting down the relevant cost with the parts of changing pump or corrosion and the technology that therefore causes, this corrosion can cause the leakage of equipment failure, process gas and possible technology to be polluted.
With regard to this respect, it is known protecting these parts passively by the polymer coating that forms resin or fluoropolymer or polyimide material on the parts surface in being exposed to corrosive gas.These coatings have the trend that produces deterioration in time, and its result causes coating stripping or comes off, thereby the ironcasting below making is exposed in the corrosive gas.Another kind of optional mode is by rich nickel cast iron, ductility Ni (nickel)-resist for example, or have good corrosion proof stainless steel, form these parts.Yet Ni (nickel)-resist is relative with the stainless steel cost higher and be difficult to carry out machining, so and can not provide the effective possibility of cost to be used to make rotor part and stator component.
Summary of the invention
The invention provides a kind of dry vacuum pump that comprises stator component and at least one rotor part, wherein said stator component and/or described at least one rotor part are made by austempered ductile iron.
Described stator component can cover the first and second intermeshing rotor parts that are adapted at subtend rotation in the stator component.Although described rotor part can have Northey profile or screw rod profile as required, in the preferred embodiment, described rotor part has Roots's profile.
Described pump can multistage pump form exist, a plurality of interconnective pumping chamber and each described pumping chamber that wherein said stator component defines tandem arrangement cover the rotor part that is formed by austempered ductile iron accordingly.Described intermeshing rotor part can be positioned on the corresponding axle, and this pump comprises and be used for torque is sent to another gear assembly from an axle, and at least one gear in the gear assembly is preferably formed by austempered ductile iron (ADI).
Another kind of optional mode is, described pump can vortex pump form exist, wherein said stator component comprises the fixed scroll member with end plate, described end plate has the first helical twisting member that extends out from end plate, and described at least one rotor part comprises the track scroll element with end plate, described end plate have extend out from described end plate with the intermeshing second helical twisting member of the described first helical twisting member.Each scroll element in the described scroll element is preferably formed by austempered ductile iron.
Described austempered ductile iron preferably has at least 90% spheroidization of graphite rate (graphitenodularity).
Described austempered ductile iron preferably has acicular ferrite and the austenitic matrix of carbon stabilization.
Described austempered ductile iron preferably includes one or more materials in the following material: carbon, quality percentage composition silicon, quality percentage composition manganese, quality percentage composition molybdenum, quality percentage composition nickel and quality percentage composition the copper 0.75% to 0.95% scope in 1.2% to 1.4% scope in 0.075% to 0.15% scope in 0.2% to 0.22% scope in 2% to 2.3% scope in of quality percentage composition in 3.4% to 3.5% scope.
Description of drawings
To only also preferred feature of the present invention be described in conjunction with the following drawings below by example, wherein:
Fig. 1 is the sectional drawing by multi-stage dry vacuum pump; With
Fig. 2 is the view along the intercepting of the line A-A among Fig. 1.
Embodiment
Referring to Fig. 1 and Fig. 2, multi-stage dry vacuum pump 10 comprises the stator component of preferably being made by austempered ductile iron (ADI) 12, and described stator component has a series of wall portion that limits a plurality of pumping chambers 14,16,18,20,22.Be used for conveying gas to be pumped to the entry conductor 24 of inlet pumping chamber 14 and be used for also forming at stator 12 from discharging the discharge conduit 26 of discharging the gas that is pumped in pumping chamber 22.The circumferential passages 28,30,32 and 34 that is formed in the stator 12 is connected in series pumping chamber 14,16,18,20,22.
Stator 12 covers first 36 and is spaced from and parallel to first second 38 with first between centers.The bearing 40 that is used for supporting axle 36,38 is set at the end plate 42,44 of stator 12.The axle of axle in 36 is connected to drive motor 46, thereby described axle is connected in by means of timing gear 47 and makes in use axle 36,38 with identical speed but be rotated along opposite direction together, shown in the arrow among Fig. 2 48 and 50.The gear-box 52 that is attached on the sidepiece of pump 10 comprises the oil 54 that is used for lubricated timing gear 47.Timing gear 47 can be made by austempered ductile iron.
In each pumping chamber, the corresponding rotor part 56,58 of axle 36,38 supportings, described rotor part also can be made by austempered ductile iron.Although the mixture of Roots and Northey type profile can be set in the pump 10, in the present embodiment, the rotor 56,58 in each pumping chamber has the Roots type profile.Rotor 56,58 internal surfaces with respect to stator 12 are positioned at each pumping chamber, so that the intermeshing mode that rotor 56,58 can be known per se operates.
In the use, gas is pushed in the pump 10 by entry conductor 24 and enters in the inlet pumping chamber 14.Gas is positioned at rotors 56,58 compressions in the inlet pumping chamber 14, and is supplied to by passage 28 and enters in the next pumping chamber 16.Be supplied to the gas that enters in the pumping chamber 16 similarly by wherein rotor 56,58 compressions, and be supplied to next pumping chamber 18 by passage 30.Similar gas compression occurs in pumping chamber 18,20 and 22, and the gas that is pumped finally is discharged from from pump 10 by discharging conduit 26.
The stator component 12 and/or the rotor part 56,58 that use austempered ductile iron (ADI) to make pump 10 make pump 10 be particularly suitable for the pumping corrosive gas, for example chlorine, boron trichloride, hydrogen bromide, fluorine and chlorine trifluoride.Than expensive more about 4 to 5 times than austempered ductile iron usually at present anti-corrosion high-nickel material, austempered ductile iron has good hardness, higher specific strength compares and suitable F 2Corrosion susceptibility.This can be so that stator can have relative higher wear resistance and corrosion resistance with rotor part and timing gear, and in performance quite or reduced the weight and the cost of parts under the improved situation.
As an example, the austempered ductile iron (ADI) that is used to make stator component 12 and/or rotor part 56,58 and/or timing gear 47 can comprise following composition (mass percent):
Element ％
Carbon 3.4-3.5
Silicon 2.0-2.3
Manganese 0.2-0.22
Molybdenum 0.075-0.15
Nickel 1.2-1.4
Copper 0.75-0.95
Austempered ductile iron preferably has at least 90% spheroidization of graphite rate, and preferably has 150 to 300/mm 2Globular inclusion number in the scope.Austempered ductile iron preferably has acicular ferrite and the austenitic main matrix of carbon stabilization, and is substantially free of carbide, slag inclusion or hole.These characteristics of austempered ductile iron make this material meet the performance requirement of semiconductor processing equipment, at high temperature especially to the requirement of enough tribological properties and mechanical property and to corrosion proof requirement.

Claims (15)

1. dry vacuum pump that is used for pumping chlorine, boron trichloride, hydrogen bromide, fluorine and chlorine trifluoride that comprises stator component and at least one rotor part, it is characterized in that, described stator component and/or described at least one rotor part are made by austempered ductile iron, and wherein said austempered ductile iron has at least 90% spheroidization of graphite rate.
2. pump according to claim 1, wherein said at least one rotor part have a kind of in screw rod profile, Roots's profile or the pawl type profile.
3. pump according to claim 2 comprises the first and second intermeshing rotor parts that are adapted at subtend rotation in the described stator component.
4. pump according to claim 3, described pump exists with the form of multi-stage dry vacuum pump, a plurality of interconnective pumping chamber and each described pumping chamber that wherein said stator component defines tandem arrangement cover corresponding a pair of rotor part, and each described rotor part is made by austempered ductile iron.
5. pump according to claim 3, wherein said intermeshing rotor part is positioned on the corresponding axle, described pump comprises and is used for torque is sent to another gear assembly from an axle that at least one gear in the described gear assembly is formed by austempered ductile iron.
6. pump according to claim 4, wherein said intermeshing rotor part is positioned on the corresponding axle, described pump comprises and is used for torque is sent to another gear assembly from an axle that at least one gear in the described gear assembly is formed by austempered ductile iron.
7. pump according to claim 1, described pump exists with the form of vortex pump, wherein said stator component comprises the fixed scroll member with end plate, described end plate has the first helical twisting member that extends out from end plate, and described at least one rotor part comprises the track scroll element with end plate, described end plate have extend out from described end plate with the intermeshing second helical twisting member of the described first helical twisting member.
8. according to each described pump among the claim 1-7, wherein said austempered ductile iron has acicular ferrite and the austenitic matrix of carbon stabilization.
9. according to each described pump among the claim 1-7, wherein said austempered ductile iron comprises the carbon of quality percentage composition in 3.4% to 3.5% scope.
10. according to each described pump among the claim 1-7, wherein said austempered ductile iron comprises the silicon of quality percentage composition in 2% to 2.3% scope.
11. according to each described pump among the claim 1-7, wherein said austempered ductile iron comprises the manganese of quality percentage composition in 0.2% to 0.22% scope.
12. according to each described pump among the claim 1-7, wherein said austempered ductile iron comprises the molybdenum of quality percentage composition in 0.075% to 0.15% scope.
13. according to each described pump among the claim 1-7, wherein said austempered ductile iron comprises the nickel of quality percentage composition in 1.2% to 1.4% scope.
14. according to each described pump among the claim 1-7, wherein said austempered ductile iron comprises the copper of quality percentage composition in 0.75% to 0.95% scope.
A 15. rotor part or stator component that is suitable for the vacuum pump that uses at the dry vacuum pump that is used for pumping chlorine, boron trichloride, hydrogen bromide, fluorine and chlorine trifluoride, it is characterized in that, described rotor part or stator component are made by austempered ductile iron, and wherein said austempered ductile iron has at least 90% spheroidization of graphite rate.
CN2007800167402A 2006-05-11 2007-04-16 Vacuum pump Expired - Fee Related CN101438061B (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
GBGB0609306.6A GB0609306D0 (en) 2006-05-11 2006-05-11 Vacuum pump
GB0609306.6 2006-05-11
PCT/GB2007/050198 WO2007132259A1 (en) 2006-05-11 2007-04-16 Vacuum pump

Publications (2)

Publication Number Publication Date
CN101438061A CN101438061A (en) 2009-05-20
CN101438061B true CN101438061B (en) 2013-07-24

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CN2007800167402A Expired - Fee Related CN101438061B (en) 2006-05-11 2007-04-16 Vacuum pump

Country Status (8)

Country Link
EP (1) EP2016288A1 (en)
JP (1) JP2009536707A (en)
KR (1) KR20090010977A (en)
CN (1) CN101438061B (en)
GB (1) GB0609306D0 (en)
SG (1) SG174048A1 (en)
TW (1) TWI504811B (en)
WO (1) WO2007132259A1 (en)

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GB0907298D0 (en) * 2009-04-29 2009-06-10 Edwards Ltd Vacuum pump
CN102146919A (en) * 2010-12-21 2011-08-10 周建强 Double-rotor closed compressor
GB2498807A (en) * 2012-01-30 2013-07-31 Edwards Ltd Multi-stage vacuum pump with solid stator
KR101498862B1 (en) * 2014-09-24 2015-03-05 서중 Rotor of dry vacuum pump and method manufacturing thereof
KR20210053351A (en) 2018-09-28 2021-05-11 램 리써치 코포레이션 Vacuum pump protection from deposition by-product buildup
CN110374872A (en) * 2019-08-28 2019-10-25 南通晨光石墨设备有限公司 Blower
FR3101921B1 (en) * 2019-10-14 2022-11-18 Pfeiffer Vacuum Dry vacuum pump and method of manufacture
GB2590663B (en) * 2019-12-23 2022-06-29 Edwards S R O Vacuum pump

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GB0609306D0 (en) 2006-06-21
KR20090010977A (en) 2009-01-30
SG174048A1 (en) 2011-09-29
EP2016288A1 (en) 2009-01-21
JP2009536707A (en) 2009-10-15
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TW200817592A (en) 2008-04-16
CN101438061A (en) 2009-05-20

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