CN101432627B - 电容式传感器 - Google Patents

电容式传感器 Download PDF

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Publication number
CN101432627B
CN101432627B CN2007800154915A CN200780015491A CN101432627B CN 101432627 B CN101432627 B CN 101432627B CN 2007800154915 A CN2007800154915 A CN 2007800154915A CN 200780015491 A CN200780015491 A CN 200780015491A CN 101432627 B CN101432627 B CN 101432627B
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China
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movable electrode
semiconductor layer
gap
capacitance type
fixed electorde
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CN2007800154915A
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English (en)
Chinese (zh)
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CN101432627A (zh
Inventor
古久保英一
若林大介
宫岛久和
大渕正夫
青木亮
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Panasonic Holdings Corp
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松下电器产业株式会社
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Priority claimed from JP2006126437A external-priority patent/JP4600344B2/ja
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Priority claimed from PCT/JP2007/058960 external-priority patent/WO2007125961A1/ja
Publication of CN101432627A publication Critical patent/CN101432627A/zh
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CN2007800154915A 2006-04-28 2007-04-25 电容式传感器 Active CN101432627B (zh)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
JP126437/2006 2006-04-28
JP126873/2006 2006-04-28
JP2006126437A JP4600344B2 (ja) 2006-04-28 2006-04-28 静電容量式センサ
JP2006126873A JP4605087B2 (ja) 2006-04-28 2006-04-28 静電容量式センサ
PCT/JP2007/058960 WO2007125961A1 (ja) 2006-04-28 2007-04-25 静電容量式センサ

Related Child Applications (1)

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CN2012101627849A Division CN102654409A (zh) 2006-04-28 2007-04-25 电容式传感器

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CN101432627A CN101432627A (zh) 2009-05-13
CN101432627B true CN101432627B (zh) 2012-08-22

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CN2007800154915A Active CN101432627B (zh) 2006-04-28 2007-04-25 电容式传感器

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CN (1) CN101432627B (ja)

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102008001442A1 (de) * 2008-04-29 2009-11-05 Robert Bosch Gmbh Mikromechanisches Bauelement und Verfahren zum Betrieb eines mikromechanischen Bauelements
US8020443B2 (en) * 2008-10-30 2011-09-20 Freescale Semiconductor, Inc. Transducer with decoupled sensing in mutually orthogonal directions
JP2010286471A (ja) * 2009-05-15 2010-12-24 Seiko Epson Corp Ｍｅｍｓセンサー、電子機器
US9261530B2 (en) 2009-11-24 2016-02-16 Panasonic Intellectual Property Management Co., Ltd. Acceleration sensor
JP5880877B2 (ja) * 2012-05-15 2016-03-09 株式会社デンソー センサ装置
JP6002481B2 (ja) * 2012-07-06 2016-10-05 日立オートモティブシステムズ株式会社 慣性センサ
JP6155832B2 (ja) 2013-05-16 2017-07-05 セイコーエプソン株式会社 センサー素子、電子機器、および移動体
CN104458828A (zh) * 2014-12-22 2015-03-25 中国科学院重庆绿色智能技术研究院 丙酮气敏半导体传感器
JP6611467B2 (ja) 2015-05-19 2019-11-27 キヤノン株式会社 変位検出装置、レンズ鏡筒、および、撮像装置
JP2018077201A (ja) 2016-11-11 2018-05-17 ソニーセミコンダクタソリューションズ株式会社 センサ素子、慣性センサ及び電子機器
CN111825053B (zh) * 2020-07-03 2023-11-10 瑞声科技（南京）有限公司 电容***及其制备方法

Citations (1)

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US5220835A (en) * 1991-09-12 1993-06-22 Ford Motor Company Torsion beam accelerometer

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CH642461A5 (fr) * 1981-07-02 1984-04-13 Centre Electron Horloger Accelerometre.
JPH08178952A (ja) * 1994-12-20 1996-07-12 Zexel Corp 加速度センサ
US5587518A (en) * 1994-12-23 1996-12-24 Ford Motor Company Accelerometer with a combined self-test and ground electrode
US6073484A (en) * 1995-07-20 2000-06-13 Cornell Research Foundation, Inc. Microfabricated torsional cantilevers for sensitive force detection
DE19541388A1 (de) * 1995-11-07 1997-05-15 Telefunken Microelectron Mikromechanischer Beschleunigungssensor
US5900550A (en) * 1997-06-16 1999-05-04 Ford Motor Company Capacitive acceleration sensor
DE19750350C1 (de) * 1997-11-13 1999-08-05 Univ Dresden Tech Dreidimensionaler Chip-Beschleunigungssensor und Verfahren zu seiner Herstellung mittels UV-unterstützter Mikrogalvanik
US6000287A (en) * 1998-08-28 1999-12-14 Ford Motor Company Capacitor center of area sensitivity in angular motion micro-electromechanical systems
JP2003014778A (ja) * 2001-04-26 2003-01-15 Samsung Electronics Co Ltd 垂直変位測定及び駆動構造体とその製造方法
US6845670B1 (en) * 2003-07-08 2005-01-25 Freescale Semiconductor, Inc. Single proof mass, 3 axis MEMS transducer
US7146856B2 (en) * 2004-06-07 2006-12-12 Honeywell International, Inc. Dynamically balanced capacitive pick-off accelerometer

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5220835A (en) * 1991-09-12 1993-06-22 Ford Motor Company Torsion beam accelerometer

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
JP昭58-10661A 1983.01.21

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Publication number Publication date
CN101432627A (zh) 2009-05-13
JP4605087B2 (ja) 2011-01-05
JP2007298410A (ja) 2007-11-15

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