CN101320702B - 半导体器件及其制造方法 - Google Patents
半导体器件及其制造方法 Download PDFInfo
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- CN101320702B CN101320702B CN2008101100054A CN200810110005A CN101320702B CN 101320702 B CN101320702 B CN 101320702B CN 2008101100054 A CN2008101100054 A CN 2008101100054A CN 200810110005 A CN200810110005 A CN 200810110005A CN 101320702 B CN101320702 B CN 101320702B
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Abstract
Description
Claims (18)
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
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JP2007150289A JP4937842B2 (ja) | 2007-06-06 | 2007-06-06 | 半導体装置およびその製造方法 |
JP2007-150289 | 2007-06-06 | ||
JP2007150289 | 2007-06-06 |
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Publication Number | Publication Date |
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CN101320702A CN101320702A (zh) | 2008-12-10 |
CN101320702B true CN101320702B (zh) | 2010-07-21 |
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CN2008101100054A Expired - Fee Related CN101320702B (zh) | 2007-06-06 | 2008-06-02 | 半导体器件及其制造方法 |
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US (2) | US7973415B2 (zh) |
JP (1) | JP4937842B2 (zh) |
KR (1) | KR101191492B1 (zh) |
CN (1) | CN101320702B (zh) |
TW (1) | TW200908152A (zh) |
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KR101191492B1 (ko) | 2012-10-15 |
US20090014843A1 (en) | 2009-01-15 |
US7973415B2 (en) | 2011-07-05 |
JP2008305897A (ja) | 2008-12-18 |
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US20110233773A1 (en) | 2011-09-29 |
CN101320702A (zh) | 2008-12-10 |
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