CN101319364A - 掺镓元素太阳能单晶的生产方法 - Google Patents
掺镓元素太阳能单晶的生产方法 Download PDFInfo
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- CN101319364A CN101319364A CNA200810053398XA CN200810053398A CN101319364A CN 101319364 A CN101319364 A CN 101319364A CN A200810053398X A CNA200810053398X A CN A200810053398XA CN 200810053398 A CN200810053398 A CN 200810053398A CN 101319364 A CN101319364 A CN 101319364A
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- GYHNNYVSQQEPJS-UHFFFAOYSA-N Gallium Chemical compound [Ga] GYHNNYVSQQEPJS-UHFFFAOYSA-N 0.000 title claims abstract description 80
- 229910052733 gallium Inorganic materials 0.000 title claims abstract description 79
- 239000013078 crystal Substances 0.000 title claims abstract description 53
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- 238000010899 nucleation Methods 0.000 claims abstract description 8
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- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 claims description 9
- 229960000935 dehydrated alcohol Drugs 0.000 claims description 9
- 238000002955 isolation Methods 0.000 claims description 7
- 239000000155 melt Substances 0.000 claims description 7
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 claims description 6
- 239000007788 liquid Substances 0.000 claims description 5
- 238000001816 cooling Methods 0.000 claims description 4
- 239000007789 gas Substances 0.000 claims description 4
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- 238000003466 welding Methods 0.000 claims description 4
- 229910052786 argon Inorganic materials 0.000 claims description 3
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- 238000010438 heat treatment Methods 0.000 claims description 3
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- 241000220317 Rosa Species 0.000 claims description 2
- 238000007598 dipping method Methods 0.000 claims description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 abstract description 32
- 229910052710 silicon Inorganic materials 0.000 abstract description 32
- 239000010703 silicon Substances 0.000 abstract description 32
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 abstract description 4
- 229910052796 boron Inorganic materials 0.000 abstract description 4
- 238000012360 testing method Methods 0.000 abstract description 4
- 239000012768 molten material Substances 0.000 abstract 1
- 239000002210 silicon-based material Substances 0.000 description 7
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- 229910000807 Ga alloy Inorganic materials 0.000 description 4
- 238000010586 diagram Methods 0.000 description 4
- 239000002019 doping agent Substances 0.000 description 4
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- 239000000956 alloy Substances 0.000 description 3
- 238000006243 chemical reaction Methods 0.000 description 3
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 3
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- 229910000967 As alloy Inorganic materials 0.000 description 2
- 238000009835 boiling Methods 0.000 description 2
- 239000000463 material Substances 0.000 description 2
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- 240000005373 Panax quinquefolius Species 0.000 description 1
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- 230000000630 rising effect Effects 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
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CNB200810053398XA CN100494511C (zh) | 2008-06-03 | 2008-06-03 | 掺镓元素太阳能硅单晶的生产方法 |
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CNB200810053398XA CN100494511C (zh) | 2008-06-03 | 2008-06-03 | 掺镓元素太阳能硅单晶的生产方法 |
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CN101319364A true CN101319364A (zh) | 2008-12-10 |
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Cited By (15)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN101787566A (zh) * | 2010-03-25 | 2010-07-28 | 杭州海纳半导体有限公司 | 直拉硅单晶的镓元素掺杂方法及所用掺杂装置 |
CN101792933A (zh) * | 2010-03-10 | 2010-08-04 | 嘉兴明通光能科技有限公司 | 太阳能级硅单晶混合掺杂配料方法 |
CN101812728A (zh) * | 2010-04-13 | 2010-08-25 | 上海太阳能电池研究与发展中心 | 一种n型晶体硅的制备方法 |
CN101812726A (zh) * | 2010-04-13 | 2010-08-25 | 上海太阳能电池研究与发展中心 | 一种镓掺杂p型晶体硅的制备方法 |
WO2011100879A1 (zh) * | 2010-02-20 | 2011-08-25 | 西安隆基硅材料股份有限公司 | 太阳能电池用掺镓铟或掺镓锗铟单晶硅材料及其制备方法 |
CN102220629A (zh) * | 2011-07-25 | 2011-10-19 | 天津市环欧半导体材料技术有限公司 | 一种采用直径法控制区熔晶体自动生长方法及*** |
CN102268726A (zh) * | 2011-08-09 | 2011-12-07 | 马鞍山明鑫光能科技有限公司 | 一种cz直拉法太阳能单晶生长工艺 |
CN103361731A (zh) * | 2013-06-21 | 2013-10-23 | 东海晶澳太阳能科技有限公司 | 一种掺镓晶体硅中金属镓的使用方法 |
CN104499048A (zh) * | 2014-12-07 | 2015-04-08 | 海安县石油科研仪器有限公司 | 一种连续加料的单晶硅生长工艺 |
CN104775150A (zh) * | 2015-04-01 | 2015-07-15 | 宁晋赛美港龙电子材料有限公司 | 一种直拉法单晶硅生长中的掺嫁工艺 |
CN105177703A (zh) * | 2015-10-13 | 2015-12-23 | 邢台晶龙电子材料有限公司 | 提拉法制备单晶硅棒过程中引细颈的方法 |
CN107059121A (zh) * | 2017-06-26 | 2017-08-18 | 张兆民 | 一种太阳能电池用单晶硅制备方法 |
CN106319620B (zh) * | 2015-07-01 | 2019-01-08 | 宁夏隆基硅材料有限公司 | 一种直拉单晶的拉晶方法 |
CN114059152A (zh) * | 2021-11-19 | 2022-02-18 | 包头美科硅能源有限公司 | 一种直拉法单晶硅棒生产的镓元素掺杂方法 |
CN114592236A (zh) * | 2022-03-15 | 2022-06-07 | 昆明理工大学 | 一种p型掺镓硅单晶的生长方法 |
-
2008
- 2008-06-03 CN CNB200810053398XA patent/CN100494511C/zh active Active
Cited By (19)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2011100879A1 (zh) * | 2010-02-20 | 2011-08-25 | 西安隆基硅材料股份有限公司 | 太阳能电池用掺镓铟或掺镓锗铟单晶硅材料及其制备方法 |
CN101792933B (zh) * | 2010-03-10 | 2012-06-06 | 嘉兴明通光能科技有限公司 | 太阳能级硅单晶混合掺杂配料方法 |
CN101792933A (zh) * | 2010-03-10 | 2010-08-04 | 嘉兴明通光能科技有限公司 | 太阳能级硅单晶混合掺杂配料方法 |
CN101787566A (zh) * | 2010-03-25 | 2010-07-28 | 杭州海纳半导体有限公司 | 直拉硅单晶的镓元素掺杂方法及所用掺杂装置 |
CN101812728A (zh) * | 2010-04-13 | 2010-08-25 | 上海太阳能电池研究与发展中心 | 一种n型晶体硅的制备方法 |
CN101812726A (zh) * | 2010-04-13 | 2010-08-25 | 上海太阳能电池研究与发展中心 | 一种镓掺杂p型晶体硅的制备方法 |
CN102220629A (zh) * | 2011-07-25 | 2011-10-19 | 天津市环欧半导体材料技术有限公司 | 一种采用直径法控制区熔晶体自动生长方法及*** |
CN102268726B (zh) * | 2011-08-09 | 2013-06-19 | 马鞍山明鑫光能科技有限公司 | 一种cz直拉法太阳能单晶生长工艺 |
CN102268726A (zh) * | 2011-08-09 | 2011-12-07 | 马鞍山明鑫光能科技有限公司 | 一种cz直拉法太阳能单晶生长工艺 |
CN103361731A (zh) * | 2013-06-21 | 2013-10-23 | 东海晶澳太阳能科技有限公司 | 一种掺镓晶体硅中金属镓的使用方法 |
CN103361731B (zh) * | 2013-06-21 | 2016-01-27 | 东海晶澳太阳能科技有限公司 | 一种掺镓晶体硅中金属镓的使用方法 |
CN104499048A (zh) * | 2014-12-07 | 2015-04-08 | 海安县石油科研仪器有限公司 | 一种连续加料的单晶硅生长工艺 |
CN104775150A (zh) * | 2015-04-01 | 2015-07-15 | 宁晋赛美港龙电子材料有限公司 | 一种直拉法单晶硅生长中的掺嫁工艺 |
CN106319620B (zh) * | 2015-07-01 | 2019-01-08 | 宁夏隆基硅材料有限公司 | 一种直拉单晶的拉晶方法 |
CN105177703A (zh) * | 2015-10-13 | 2015-12-23 | 邢台晶龙电子材料有限公司 | 提拉法制备单晶硅棒过程中引细颈的方法 |
CN107059121A (zh) * | 2017-06-26 | 2017-08-18 | 张兆民 | 一种太阳能电池用单晶硅制备方法 |
CN114059152A (zh) * | 2021-11-19 | 2022-02-18 | 包头美科硅能源有限公司 | 一种直拉法单晶硅棒生产的镓元素掺杂方法 |
CN114592236A (zh) * | 2022-03-15 | 2022-06-07 | 昆明理工大学 | 一种p型掺镓硅单晶的生长方法 |
CN114592236B (zh) * | 2022-03-15 | 2024-01-05 | 昆明理工大学 | 一种p型掺镓硅单晶的生长方法 |
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Effective date of registration: 20181102 Address after: 300384 Tianjin Binhai New Area high tech Zone Huayuan Industrial Area (outside the ring) Hai Tai Road 12 Patentee after: TIANJIN ZHONGHUAN ADVANCED MATERIAL TECHNOLOGY Co.,Ltd. Address before: 300384 Tianjin Huayuan Industrial Park (outside the ring) 12 East Hai Tai Road Patentee before: TIANJIN HUANOU SEMICONDUCTOR MATERIAL TECHNOLOGY Co.,Ltd. |
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Effective date of registration: 20191216 Address after: 214200 Dongfen Avenue, Yixing Economic and Technological Development Zone, Wuxi City, Jiangsu Province Co-patentee after: TIANJIN ZHONGHUAN ADVANCED MATERIAL TECHNOLOGY Co.,Ltd. Patentee after: Zhonghuan leading semiconductor materials Co.,Ltd. Address before: 300384 in Tianjin Binhai high tech Zone Huayuan Industrial Zone (outer ring) Haitai Road No. 12 Patentee before: TIANJIN ZHONGHUAN ADVANCED MATERIAL TECHNOLOGY Co.,Ltd. |
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Address after: 214200 Dongjia Avenue, Yixing Economic and Technological Development Zone, Wuxi City, Jiangsu Province Patentee after: Zhonghuan Leading Semiconductor Technology Co.,Ltd. Country or region after: China Patentee after: TIANJIN ZHONGHUAN ADVANCED MATERIAL TECHNOLOGY Co.,Ltd. Address before: 214200 Dongjia Avenue, Yixing Economic and Technological Development Zone, Wuxi City, Jiangsu Province Patentee before: Zhonghuan leading semiconductor materials Co.,Ltd. Country or region before: China Patentee before: TIANJIN ZHONGHUAN ADVANCED MATERIAL TECHNOLOGY Co.,Ltd. |
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