CN101279178B - 一种回收三氯氢硅生产尾气中h2的方法和装置 - Google Patents
一种回收三氯氢硅生产尾气中h2的方法和装置 Download PDFInfo
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- CN101279178B CN101279178B CN2008100256421A CN200810025642A CN101279178B CN 101279178 B CN101279178 B CN 101279178B CN 2008100256421 A CN2008100256421 A CN 2008100256421A CN 200810025642 A CN200810025642 A CN 200810025642A CN 101279178 B CN101279178 B CN 101279178B
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- adsorption tower
- adsorbent
- tail gas
- adsorption
- trichlorosilane
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- ZDHXKXAHOVTTAH-UHFFFAOYSA-N trichlorosilane Chemical compound Cl[SiH](Cl)Cl ZDHXKXAHOVTTAH-UHFFFAOYSA-N 0.000 title claims abstract description 53
- 239000005052 trichlorosilane Substances 0.000 title claims abstract description 53
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 40
- 238000000034 method Methods 0.000 title claims abstract description 27
- 238000001179 sorption measurement Methods 0.000 claims abstract description 117
- 239000007789 gas Substances 0.000 claims abstract description 74
- 239000003463 adsorbent Substances 0.000 claims abstract description 64
- 229910052739 hydrogen Inorganic materials 0.000 claims abstract description 17
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 claims abstract description 16
- 239000001257 hydrogen Substances 0.000 claims abstract description 16
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims abstract description 14
- 229910000323 aluminium silicate Inorganic materials 0.000 claims abstract description 13
- HNPSIPDUKPIQMN-UHFFFAOYSA-N dioxosilane;oxo(oxoalumanyloxy)alumane Chemical compound O=[Si]=O.O=[Al]O[Al]=O HNPSIPDUKPIQMN-UHFFFAOYSA-N 0.000 claims abstract description 13
- 229910052799 carbon Inorganic materials 0.000 claims abstract description 12
- 230000000694 effects Effects 0.000 claims abstract description 3
- 238000010521 absorption reaction Methods 0.000 claims description 23
- 230000008929 regeneration Effects 0.000 claims description 14
- 238000011069 regeneration method Methods 0.000 claims description 14
- 238000011084 recovery Methods 0.000 claims description 13
- 230000000274 adsorptive effect Effects 0.000 claims description 12
- 239000012535 impurity Substances 0.000 claims description 9
- 230000015572 biosynthetic process Effects 0.000 claims description 6
- 238000001816 cooling Methods 0.000 claims description 6
- 238000003786 synthesis reaction Methods 0.000 claims description 6
- 241000282326 Felis catus Species 0.000 claims description 5
- 238000011068 loading method Methods 0.000 claims description 5
- 230000009471 action Effects 0.000 claims description 2
- 230000007420 reactivation Effects 0.000 claims description 2
- 229910003902 SiCl 4 Inorganic materials 0.000 claims 4
- SLLGVCUQYRMELA-UHFFFAOYSA-N chlorosilicon Chemical compound Cl[Si] SLLGVCUQYRMELA-UHFFFAOYSA-N 0.000 claims 4
- 238000004064 recycling Methods 0.000 abstract description 4
- 229910000041 hydrogen chloride Inorganic materials 0.000 abstract description 3
- 238000005265 energy consumption Methods 0.000 abstract description 2
- 238000003912 environmental pollution Methods 0.000 abstract description 2
- 229910003910 SiCl4 Inorganic materials 0.000 abstract 1
- 229910003818 SiH2Cl2 Inorganic materials 0.000 abstract 1
- 229910003822 SiHCl3 Inorganic materials 0.000 abstract 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 abstract 1
- 229910052814 silicon oxide Inorganic materials 0.000 abstract 1
- FDNAPBUWERUEDA-UHFFFAOYSA-N silicon tetrachloride Chemical compound Cl[Si](Cl)(Cl)Cl FDNAPBUWERUEDA-UHFFFAOYSA-N 0.000 abstract 1
- 238000012163 sequencing technique Methods 0.000 description 27
- 238000006243 chemical reaction Methods 0.000 description 3
- 238000005516 engineering process Methods 0.000 description 3
- VEXZGXHMUGYJMC-UHFFFAOYSA-N Hydrochloric acid Chemical compound Cl VEXZGXHMUGYJMC-UHFFFAOYSA-N 0.000 description 2
- 238000011010 flushing procedure Methods 0.000 description 2
- IXCSERBJSXMMFS-UHFFFAOYSA-N hydrogen chloride Substances Cl.Cl IXCSERBJSXMMFS-UHFFFAOYSA-N 0.000 description 2
- 230000008569 process Effects 0.000 description 2
- 229920006395 saturated elastomer Polymers 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- 239000006227 byproduct Substances 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 230000006835 compression Effects 0.000 description 1
- 238000007906 compression Methods 0.000 description 1
- 238000009833 condensation Methods 0.000 description 1
- 230000005494 condensation Effects 0.000 description 1
- 238000007599 discharging Methods 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 239000011148 porous material Substances 0.000 description 1
- 239000000047 product Substances 0.000 description 1
- 238000000746 purification Methods 0.000 description 1
- 239000002994 raw material Substances 0.000 description 1
- 239000003507 refrigerant Substances 0.000 description 1
- 230000001105 regulatory effect Effects 0.000 description 1
- 231100000331 toxic Toxicity 0.000 description 1
- 230000002588 toxic effect Effects 0.000 description 1
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Abstract
Description
吸附塔A | 吸附 | D | H | C | R | |||
吸附塔B | D | H | C | R | 吸附 | |||
时间(h) | 0.5 | 3.5 | 3.5 | 0.5 | 0.5 | 3.5 | 3.5 | 0.5 |
A塔 | 吸附 | D | H | C | R | |||
B塔 | D | H | C | R | 吸附 | |||
时间(h) | 0.5 | 4.5 | 4.5 | 0.5 | 0.5 | 4.5 | 4.5 | 0.5 |
Claims (9)
Priority Applications (1)
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CN2008100256421A CN101279178B (zh) | 2008-01-04 | 2008-01-04 | 一种回收三氯氢硅生产尾气中h2的方法和装置 |
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CN2008100256421A CN101279178B (zh) | 2008-01-04 | 2008-01-04 | 一种回收三氯氢硅生产尾气中h2的方法和装置 |
Publications (2)
Publication Number | Publication Date |
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CN101279178A CN101279178A (zh) | 2008-10-08 |
CN101279178B true CN101279178B (zh) | 2010-11-24 |
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CN2008100256421A Active CN101279178B (zh) | 2008-01-04 | 2008-01-04 | 一种回收三氯氢硅生产尾气中h2的方法和装置 |
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Families Citing this family (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN101757831B (zh) * | 2010-02-10 | 2011-12-07 | 山东新龙硅业科技有限公司 | 一种三氯氢硅尾气变压吸附设备及其工艺 |
CN102030312B (zh) * | 2010-12-23 | 2011-09-14 | 江西嘉柏新材料有限公司 | 一种从三氯氢硅尾气中回收氢气的方法 |
DE102011078676A1 (de) | 2011-07-05 | 2013-01-10 | Wacker Chemie Ag | Verfahren zur Produktion von Polysilicium |
CN102585918B (zh) * | 2012-02-17 | 2013-12-25 | 南京工业大学 | 生物质燃气耦合吸附深度脱除焦油的工艺及*** |
CN103523752A (zh) * | 2012-07-03 | 2014-01-22 | 陕西天宏硅材料有限责任公司 | 多晶硅生产中还原转化尾气回收所得氢气的纯化工艺 |
CN105935537B (zh) * | 2016-04-19 | 2018-10-02 | 杨皓 | 一种氢气混合气净化氯硅烷与氯化氢的工艺 |
CN107648979A (zh) * | 2016-07-26 | 2018-02-02 | 新特能源股份有限公司 | 一种处理多晶硅生产中尾气的方法及*** |
CN112704994A (zh) * | 2020-12-11 | 2021-04-27 | 天津大学 | 一种惰性尾气中高效选择性捕集产品的方法及装置 |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN1082509A (zh) * | 1992-08-21 | 1994-02-23 | 无锡新苑集团公司 | 变压吸附-低温分离回收氢的方法 |
CN1403372A (zh) * | 2002-10-23 | 2003-03-19 | 同济大学 | 用三氯氢硅和四氯化硅混合源生产多晶硅的方法 |
CN2604223Y (zh) * | 2002-05-15 | 2004-02-25 | 楚建堂 | 活性炭纤维废气吸附回收装置 |
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2008
- 2008-01-04 CN CN2008100256421A patent/CN101279178B/zh active Active
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN1082509A (zh) * | 1992-08-21 | 1994-02-23 | 无锡新苑集团公司 | 变压吸附-低温分离回收氢的方法 |
CN2604223Y (zh) * | 2002-05-15 | 2004-02-25 | 楚建堂 | 活性炭纤维废气吸附回收装置 |
CN1403372A (zh) * | 2002-10-23 | 2003-03-19 | 同济大学 | 用三氯氢硅和四氯化硅混合源生产多晶硅的方法 |
Non-Patent Citations (2)
Title |
---|
王小辉等.三氯氢硅合成炉尾气的治理.中国氯碱 6.2007,(6),39-40. |
王小辉等.三氯氢硅合成炉尾气的治理.中国氯碱 6.2007,(6),39-40. * |
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