CN101209551A - Glass substrate transferring robot - Google Patents
Glass substrate transferring robot Download PDFInfo
- Publication number
- CN101209551A CN101209551A CNA2007101593146A CN200710159314A CN101209551A CN 101209551 A CN101209551 A CN 101209551A CN A2007101593146 A CNA2007101593146 A CN A2007101593146A CN 200710159314 A CN200710159314 A CN 200710159314A CN 101209551 A CN101209551 A CN 101209551A
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- Prior art keywords
- axle
- glass substrate
- links
- linear telescopic
- urceolus
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- 239000011521 glass Substances 0.000 title claims abstract description 35
- 239000000758 substrate Substances 0.000 title claims abstract description 35
- 230000033001 locomotion Effects 0.000 claims abstract description 27
- 239000003638 chemical reducing agent Substances 0.000 claims abstract description 14
- 239000012636 effector Substances 0.000 claims description 20
- 230000003028 elevating effect Effects 0.000 claims description 12
- 210000000245 forearm Anatomy 0.000 claims description 11
- 238000009434 installation Methods 0.000 claims description 5
- 230000001360 synchronised effect Effects 0.000 claims description 4
- 229910000838 Al alloy Inorganic materials 0.000 claims description 2
- 239000000956 alloy Substances 0.000 claims 1
- 230000005540 biological transmission Effects 0.000 abstract description 13
- 230000003749 cleanliness Effects 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000006073 displacement reaction Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 230000001681 protective effect Effects 0.000 description 1
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/10—Greenhouse gas [GHG] capture, material saving, heat recovery or other energy efficient measures, e.g. motor control, characterised by manufacturing processes, e.g. for rolling metal or metal working
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- Manipulator (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Abstract
The invention belongs to the industrial robot technical field, relating to a glass substrate transmission robot. The invention is characterized in that the invention comprises a lifting mechanism I, a rotary mechanism II, a linear telescopic mechanism III and an end executor IV and can implement the lifting motion along Z-direction, the rotation motion in Theta-direction and the linear telescopic direction along R-direction. The three-direction motions are mutually independently and can be separately or synchronously carried out; wherein, the rotation motion in Theta-direction and the linear telescopic motion in R-direction adopt a harmonic reducer for speed reduction and the positioning precision is improved. The end executor IV adopts the vacuum clamping technique and improves the transmission efficiency of the glass substrate. The transmission robot of the invention has the advantages of compact structure, small space occupying, large working space, easy control, stable operation, small motion inertia, and high positioning precision. The invention can be applied in the environment with high purity.
Description
Technical field
The invention belongs to the industrial robot technical field, relate to a kind of glass substrate transferring robot, mainly be meant between the different processing modules of FPD industry fast, steadily, a kind of transferring robot of transmission glass substrate cleanly.
Background technology
Glass substrate is one of key foundation material of FPD industry.Along with the continuous change of FPD industrial technology, the size of glass substrate and quality are also had higher requirement to the automation transmission equipment of glass substrate in continuous increase simultaneously.Glass substrate transferring robot is a kind of important form of automation transmission equipment, and it can quick between the different processing modules of FPD industry, steady, the clean glass substrate that transmits large scale, big quality.This transferring robot will have three degree of freedom at least to realize the transmission of glass substrate in the space, also should have characteristics such as compact conformation, motion is steady, cleanliness factor is high, positioning accuracy is high, floor space is little, working space is big simultaneously.
In existing technology,, particularly less relatively to the research of glass substrate transferring robot to glass substrate automation transmission equipment.Patent name is a glass substrate loading frame transmission mechanism, publication number is CN1840492A, it is the relevant patent of only glass substrate automation transmission equipment, it is characterized in that this patent designs at the special loading frame of glass substrate, effectively solved the problem of falling sheet and fried sheet, but because this patent needs auxiliary its work of too many auxiliary equipment, can not change with working environment and make suitable adjustment, lack flexibility.
Summary of the invention
The technical problem to be solved in the present invention provide a kind of Z of having to lifting, θ to rotation and R glass substrate transmitter people to the linear telescopic three degree of freedom.
For achieving the above object, the technical solution used in the present invention is as follows:
A kind of glass substrate transferring robot of the present invention comprises elevating mechanism, rotating mechanism, linear telescopic mechanism and end effector.Elevating mechanism driven rotary mechanism, linear telescopic mechanism and end effector are made Z to vertical displacement movement along the robot symmetry axis.Rotating mechanism drives linear telescopic mechanism and end effector is made θ to rotatablely moving around the robot symmetry axis.Linear telescopic mechanism drives end effector and makes R to the straight line motion of stretching, contract in horizontal plane.Z is separate to the three-dimensional motion to, R to, θ, can move individually or simultaneously.The acting in conjunction of three-dimensional motion can be finished quick, steady, the clean transmission of glass substrate.
Described elevating mechanism comprises lifting motor, synchronous toothed belt wheel reducing gear, ball screw assembly,, nut seat, doffing, urceolus, line slideway auxiliary and take-up housing.Lifting motor links to each other with ball-screw by synchronous toothed belt wheel reducing gear; Feed screw nut links to each other with doffing by nut seat.Two line slideways claim to install, and play the guiding role, and the guide rail slide block links to each other with doffing by take-up housing, and doffing and urceolus connect firmly with bolt.
Described rotating mechanism comprises that electric rotating machine, θ are to harmonic speed reducer, θ axle, θ axle urceolus, taper roll bearing and bearing cap.Electric rotating machine is installed on the θ axle urceolus, and link to each other with the θ axle to harmonic speed reducer by θ, the θ axle links to each other with θ axle urceolus by a pair of taper roll bearing, taper roll bearing bears the axial load of θ axle, and the axial stability when keeping the rotation of θ axle, bearing cap and θ axle urceolus connect firmly, and are the location, outer ring of taper roll bearing.
Described linear telescopic mechanism comprise R to motor, R to harmonic speed reducer, R axle, rotary support, fixed head, big arm and forearm.R is installed on the rotary support to motor, and links to each other with the R axle to harmonic speed reducer by R, the R axle by fixed head with link to each other at big arm, big arm links to each other with forearm by the one-level planet circular system, forearm passes through the secondary planet train again and links to each other with the execution body.Linear telescopic mechanism is provided with pneumatic line and electric wiring corridor, links to each other with control system with air-channel system respectively.
Described end effector comprises rebound, amplifier installation, execution body, gas circuit cover plate, vacuum cup, pickup wire cover plate, sensor, guide rod and anti-collision block.Amplifier installation links to each other with rebound with the execution body by bolt, carry out body and gas circuit cover plate, vacuum cup composition air-channel system, form sensing system with pickup wire cover plate, sensor, anti-collision block links to each other with the execution body by guide rod, plays protective action.
Be provided with sensor in the described glass substrate transferring robot, with the rotary distance and the adjustable height of control robot.
Beneficial effect of the present invention:
Glass substrate transferring robot of the present invention have three degree of freedom (Z to, θ to, R to), each free degree can be moved individually or simultaneously, has enlarged the working space of robot; θ has improved transmission accuracy to rotatablely moving and R all adopts harmonic speed reducer to slow down to linear telescopic motion; Robot architecture's compactness has improved space availability ratio; End effector adopts the vacuum chuck technology, has improved the efficiency of transmission of glass substrate; Big arm, forearm, end effector all adopt hard aluminium alloy as rapidoprint, arm quality and rotary inertia have been reduced, increased the pay(useful) load of robot, improved the robust motion of robot, control easily, positioning accuracy is high and can work in the higher environment of cleanliness factor.
Description of drawings
Fig. 1 is a kind of glass substrate transferring robot outside drawing of the present invention.
Fig. 2 (a) is a kind of glass substrate transferring robot elevating mechanism of the present invention front view.
Fig. 2 (b) is a kind of glass substrate transferring robot elevating mechanism of the present invention left view.
Fig. 3 is a kind of glass substrate transferring robot rotating mechanism of the present invention cutaway view.
Fig. 4 (a) is a kind of glass substrate transferring robot linear telescopic of the present invention mechanism front view.
Fig. 4 (b) is a kind of glass substrate transferring robot linear telescopic of the present invention mechanism front view.
Among Fig. 1, I elevating mechanism, II rotating mechanism, III linear telescopic mechanism, IV end effector.
Among Fig. 2,1 small pulley, 2 lifting motors, 3 doffings, 4 urceolus, 5 ball-screws, 6 line slideways, 7 guide rail slide blocks, 8 feed screw nuts, 9 nut seats, 10 take-up housings, 11 timing belts, 12 big belt wheels.
Among Fig. 3,13 electric rotating machines, 14 θ are to harmonic speed reducer, and 15 θ axles, 16 θ axle urceolus, 17 taper roll bearings, 18 bearing caps, 19R are to motor, and 20R is to harmonic speed reducer, 21R axle, 22 rotary supports, 23 fixed heads.
Among Fig. 4,24 big arms, 25 one-level planet circular systems, 26 forearms, 27 secondary planet trains, 28 amplifier installations, 29 rebounds, 30 gas circuit cover plates, 31 vacuum cups, 32 carry out body, 33 pickup wire cover plates, 34 sensors, 35 guide rods, 36 anti-collision blocks.
The specific embodiment
Be described in detail specific embodiments of the invention below in conjunction with technical scheme and accompanying drawing.
As shown in Figure 1, a kind of glass substrate transferring robot of the present invention comprises lifting mechanism I, rotating mechanism II, the III of linear telescopic mechanism and end effector IV.The lifting mechanism I driven rotary II of mechanism, the III of linear telescopic mechanism and end effector IV make Z to elevating movement along the robot symmetry axis.Rotating mechanism II drives the linear telescopic III of mechanism and end effector IV makes θ to rotatablely moving around the robot symmetry axis.The III of linear telescopic mechanism drives end effector IV and makes R to the straight line motion of stretching, contract in horizontal plane.Introduce the operation principle of each motion below in detail:
Elevating movement: lifting motor 2 drives small pulley 1 rotation on it, small pulley 1 drives big belt wheel 12 rotations through timing belt 11, big belt wheel 12 drives ball-screw 5 rotations by flat key, ball-screw 5 rotatablely moves by the ball-screw adjutant and is converted into rectilinear motion, drives nut seat 9, doffing 3, urceolus 4, rotating mechanism II, the III of linear telescopic mechanism and end effector IV by feed screw nut 8 and makes Z to elevating movement.Line slideway 6 play the guiding role, and deflection takes place when preventing the lifting mechanism I motion.
Rotatablely move: electric rotating machine 13 directly drives 15 rotations of θ axle through θ after harmonic speed reducer 14 slows down, because of θ axle 15 and rotary support 22 connect firmly, so θ axle 15 directly drives the whole rotation of linear telescopic III of mechanism and end effector IV, finishes θ to rotatablely moving.θ axle urceolus 16 links to each other with θ axle 15 by the taper roll bearing 17 of a pair of formal dress, has both born the axial load of θ axle 15, the radial stability when guaranteeing 15 motions of θ axle again.
Linear telescopic motion: R directly drives 21 rotations of R axle to motor 19 through R after harmonic speed reducer 20 slows down, R axle 21 links to each other with big arm 24 by fixed head 23, so 21 rotations of R axle drive big arm 24 rotations, big arm 24 drives forearm 26 rotations through one-level planet circular system 25, and forearm 26 drives end effector IV motion through secondary planet train 27.The linear telescopic motion of end effector IV has been finished in the acting in conjunction of big arm 24, forearm 26.
Claims (4)
1. glass substrate transferring robot, comprise and realize that Z is to the elevating mechanism (I) of elevating movement, linear telescopic mechanism (III) and the end effector (IV) that realization θ moves to linear telescopic to the rotating mechanism that rotatablely moves (II), realization R, the three-dimensional motion is separate, realize motion individually or simultaneously, it is characterized in that:
Elevating mechanism (I) comprises lifting motor (2), synchronous toothed belt wheel reducing gear (1,11,12), ball screw assembly,, doffing (3), urceolus (4), line slideway auxiliary, nut seat (9) and take-up housing (10); Described lifting motor (2) links to each other with ball-screw (5) by synchronous toothed belt wheel reducing gear (1,11,12); Feed screw nut (8) links to each other with doffing (3) by nut seat (9); Two line slideways (6) symmetry is installed, and guide rail slide block (7) links to each other with doffing (3) by take-up housing (10), and doffing (3) connects firmly by bolt with urceolus (4);
Rotating mechanism (II) comprises that electric rotating machine (13), θ are to harmonic speed reducer (14), θ axle (15), θ axle urceolus (16), taper roll bearing (17) and bearing cap (18); Described electric rotating machine (13) is installed on the θ axle urceolus (16), and link to each other with θ axle (15) to harmonic speed reducer (14) by θ, θ axle (15) links to each other with θ axle urceolus (16) by the taper roll bearing (17) of a pair of formal dress, and bearing cap (18) connects firmly with θ axle urceolus (16);
Linear telescopic mechanism (III) comprise R to motor (19), R to harmonic speed reducer (20), R axle (21), rotary support (22), fixed head (23), big arm (24) and forearm (26); Described R is installed on the rotary support (22) to motor (19), and link to each other with R axle (21) to harmonic speed reducer (20) by R, R axle (21) links to each other with big arm (24) by fixed head (23), big arm (24) links to each other with forearm (26) by one-level planet circular system (25), and forearm (26) links to each other with execution body (32) by secondary planet train (27) again;
End effector (IV) comprises amplifier installation (28), rebound (29), gas circuit cover plate (30), vacuum cup (31), carries out body (32), pickup wire cover plate (33), sensor (34), guide rod (35) and anti-collision block (36); Described amplifier installation (28) links to each other with rebound (29) with execution body (32) by bolt, carry out body (32) and form air-channel system with gas circuit cover plate (30), vacuum cup (31), form sensing system with pickup wire cover plate (33), sensor (34), anti-collision block (36) links to each other with execution body (32) by guide rod (35).
2. a kind of glass substrate transferring robot as claimed in claim 1 is characterized in that: be equipped with pneumatic line and electric wiring corridor in lifting mechanism I, rotating mechanism II and the III of linear telescopic mechanism.
3. a kind of glass substrate transferring robot as claimed in claim 1 is characterized in that: end effector IV adopts vacuum chuck technology clamping glass substrate.
4. a kind of glass substrate transferring robot as claimed in claim 1 is characterized in that: III of linear telescopic mechanism and end effector IV all adopt the hard aluminium alloy material.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNB2007101593146A CN100532026C (en) | 2007-12-25 | 2007-12-25 | Glass substrate transferring robot |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNB2007101593146A CN100532026C (en) | 2007-12-25 | 2007-12-25 | Glass substrate transferring robot |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN101209551A true CN101209551A (en) | 2008-07-02 |
| CN100532026C CN100532026C (en) | 2009-08-26 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNB2007101593146A Expired - Fee Related CN100532026C (en) | 2007-12-25 | 2007-12-25 | Glass substrate transferring robot |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN100532026C (en) |
Cited By (19)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102059187A (en) * | 2009-11-17 | 2011-05-18 | 赵德志 | Small-size spraying robot |
| CN102152316A (en) * | 2011-03-16 | 2011-08-17 | 哈尔滨工业大学 | R shaft structure of silicon chip transmission robot |
| CN102357898A (en) * | 2011-10-13 | 2012-02-22 | 苏州日和科技有限公司 | Fetching arm |
| CN102441888A (en) * | 2011-09-24 | 2012-05-09 | 侯帅 | Glass carrying manipulator |
| CN102815541A (en) * | 2011-06-10 | 2012-12-12 | 泰惟机械有限公司 | Metal product stacking machine |
| CN102823365A (en) * | 2012-06-05 | 2012-12-19 | 江苏大学 | Column cultivation matching transplanting robot |
| CN103170986A (en) * | 2011-12-21 | 2013-06-26 | 株式会社安川电机 | Robot arm structure and robot |
| WO2014067178A1 (en) * | 2012-11-02 | 2014-05-08 | 深圳市华星光电技术有限公司 | Transmission system for conveying flat plates, mechanical apparatus and conveyance method therefor |
| CN103817706A (en) * | 2012-11-16 | 2014-05-28 | 株式会社安川电机 | Robot arm, robot and robot operating method |
| CN104950797A (en) * | 2015-04-30 | 2015-09-30 | 中国矿业大学 | 3-PRRS six-DOF (degrees of freedom) parallel positioning platform |
| CN106737618A (en) * | 2016-12-13 | 2017-05-31 | 苏州超群智能科技有限公司 | Work-piece picking device is pushed down for die casting equipment |
| CN106981136A (en) * | 2017-05-16 | 2017-07-25 | 珠海市利保机器人有限公司 | A kind of rotation picking mechanism of vending machine |
| CN107161691A (en) * | 2017-07-07 | 2017-09-15 | 上海观谷科技有限公司 | Vertical clamping administration device |
| CN108698222A (en) * | 2016-02-26 | 2018-10-23 | 川崎重工业株式会社 | Substrate conveyance robot and substrate conveyance device |
| CN108990951A (en) * | 2018-08-21 | 2018-12-14 | 榕江县富榕生态农业有限责任公司 | Chemical spraying device is used in a kind of plantation of granulated sugar tangerine |
| CN110039530A (en) * | 2019-05-28 | 2019-07-23 | 北京半导体专用设备研究所（中国电子科技集团公司第四十五研究所） | Manipulator |
| US20190329740A1 (en) * | 2014-07-31 | 2019-10-31 | SZ DJI Technology Co., Ltd. | Unmanned aerial vehicle base station system and method |
| CN112536793A (en) * | 2020-12-16 | 2021-03-23 | 黑龙江职业学院(黑龙江省经济管理干部学院) | Multi-degree-of-freedom modular industrial robot |
| CN116902112A (en) * | 2023-09-08 | 2023-10-20 | 中电建(西安)港航船舶科技有限公司 | Transfer robot and transfer system |
Families Citing this family (1)
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| CN102795442A (en) * | 2012-09-06 | 2012-11-28 | 深圳市华星光电技术有限公司 | Automatic material transporting system |
-
2007
- 2007-12-25 CN CNB2007101593146A patent/CN100532026C/en not_active Expired - Fee Related
Cited By (24)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102059187A (en) * | 2009-11-17 | 2011-05-18 | 赵德志 | Small-size spraying robot |
| CN102152316A (en) * | 2011-03-16 | 2011-08-17 | 哈尔滨工业大学 | R shaft structure of silicon chip transmission robot |
| CN102815541A (en) * | 2011-06-10 | 2012-12-12 | 泰惟机械有限公司 | Metal product stacking machine |
| CN102441888A (en) * | 2011-09-24 | 2012-05-09 | 侯帅 | Glass carrying manipulator |
| CN102357898A (en) * | 2011-10-13 | 2012-02-22 | 苏州日和科技有限公司 | Fetching arm |
| CN102357898B (en) * | 2011-10-13 | 2013-12-25 | 苏州日和科技有限公司 | Fetching arm |
| CN103170986A (en) * | 2011-12-21 | 2013-06-26 | 株式会社安川电机 | Robot arm structure and robot |
| CN102823365A (en) * | 2012-06-05 | 2012-12-19 | 江苏大学 | Column cultivation matching transplanting robot |
| CN102823365B (en) * | 2012-06-05 | 2014-08-20 | 江苏大学 | Column cultivation matching transplanting robot |
| WO2014067178A1 (en) * | 2012-11-02 | 2014-05-08 | 深圳市华星光电技术有限公司 | Transmission system for conveying flat plates, mechanical apparatus and conveyance method therefor |
| CN103817706A (en) * | 2012-11-16 | 2014-05-28 | 株式会社安川电机 | Robot arm, robot and robot operating method |
| US20190329740A1 (en) * | 2014-07-31 | 2019-10-31 | SZ DJI Technology Co., Ltd. | Unmanned aerial vehicle base station system and method |
| US11708003B2 (en) * | 2014-07-31 | 2023-07-25 | SZ DJI Technology Co., Ltd. | Unmanned aerial vehicle base station system and method |
| CN104950797A (en) * | 2015-04-30 | 2015-09-30 | 中国矿业大学 | 3-PRRS six-DOF (degrees of freedom) parallel positioning platform |
| CN108698222A (en) * | 2016-02-26 | 2018-10-23 | 川崎重工业株式会社 | Substrate conveyance robot and substrate conveyance device |
| CN108698222B (en) * | 2016-02-26 | 2021-11-09 | 川崎重工业株式会社 | Substrate transfer robot and substrate transfer device |
| CN106737618A (en) * | 2016-12-13 | 2017-05-31 | 苏州超群智能科技有限公司 | Work-piece picking device is pushed down for die casting equipment |
| CN106981136A (en) * | 2017-05-16 | 2017-07-25 | 珠海市利保机器人有限公司 | A kind of rotation picking mechanism of vending machine |
| CN107161691A (en) * | 2017-07-07 | 2017-09-15 | 上海观谷科技有限公司 | Vertical clamping administration device |
| CN108990951A (en) * | 2018-08-21 | 2018-12-14 | 榕江县富榕生态农业有限责任公司 | Chemical spraying device is used in a kind of plantation of granulated sugar tangerine |
| CN110039530A (en) * | 2019-05-28 | 2019-07-23 | 北京半导体专用设备研究所（中国电子科技集团公司第四十五研究所） | Manipulator |
| CN112536793A (en) * | 2020-12-16 | 2021-03-23 | 黑龙江职业学院(黑龙江省经济管理干部学院) | Multi-degree-of-freedom modular industrial robot |
| CN112536793B (en) * | 2020-12-16 | 2021-10-22 | 黑龙江职业学院(黑龙江省经济管理干部学院) | Multi-degree-of-freedom modular industrial robot |
| CN116902112A (en) * | 2023-09-08 | 2023-10-20 | 中电建(西安)港航船舶科技有限公司 | Transfer robot and transfer system |
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| Publication number | Publication date |
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| CN100532026C (en) | 2009-08-26 |
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