CN101184577A - 用于安装到激光加工设备的激光器中的光学模块 - Google Patents

用于安装到激光加工设备的激光器中的光学模块 Download PDF

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Publication number
CN101184577A
CN101184577A CNA2006800182982A CN200680018298A CN101184577A CN 101184577 A CN101184577 A CN 101184577A CN A2006800182982 A CNA2006800182982 A CN A2006800182982A CN 200680018298 A CN200680018298 A CN 200680018298A CN 101184577 A CN101184577 A CN 101184577A
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CN
China
Prior art keywords
laser
optical module
installing
mirror
machining machine
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Pending
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CNA2006800182982A
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English (en)
Inventor
J-M·魏克
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Trumpf Werkzeugmaschinen SE and Co KG
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Trumpf Werkzeugmaschinen SE and Co KG
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Application filed by Trumpf Werkzeugmaschinen SE and Co KG filed Critical Trumpf Werkzeugmaschinen SE and Co KG
Publication of CN101184577A publication Critical patent/CN101184577A/zh
Pending legal-status Critical Current

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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/005—Optical devices external to the laser cavity, specially adapted for lasers, e.g. for homogenisation of the beam or for manipulating laser pulses, e.g. pulse shaping
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
    • B23K26/064—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
    • B23K26/064—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms
    • B23K26/0648—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms comprising lenses

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  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Electromagnetism (AREA)
  • Mechanical Engineering (AREA)
  • Laser Beam Processing (AREA)
  • Mounting And Adjusting Of Optical Elements (AREA)
  • Optical Elements Other Than Lenses (AREA)
  • Lasers (AREA)
  • Transition And Organic Metals Composition Catalysts For Addition Polymerization (AREA)
  • Emulsifying, Dispersing, Foam-Producing Or Wetting Agents (AREA)
  • Peptides Or Proteins (AREA)

Abstract

一种用于安装到激光加工设备的激光器内的光学模块(1)包括自适应镜(2)和球面镜(3)，其中，两个镜片(2，3)均具有相移涂层。其促进了射束扩大和圆偏振的结构性设计。

Description

用于安装到激光加工设备的激光器中的光学模块
技术领域
本发明涉及激光加工设备的激光束的展宽。
背景技术
到目前为止，一直通过激光器的曲面输出镜展宽激光加工设备的激光器发射的激光束。其制造成本高昂。激光束的展宽是固定的，并且在激光加工设备的操作过程中无法对其进行调整。
尚未连续(in series)实现对激光器内镜片的自适应调整。
在激光加工设备中通常生成激光加工，尤其是激光切割所需的圆偏振。
发明内容
本申请人承担了促进可调射束展宽和圆偏振的结构性设计。
这一目的是通过安装在激光加工设备的激光器内的光学模块实现的，所述光学模块具有自适应(adaptive)镜和球面镜，其中，两种镜均具有相移涂层。这样的构造的优点在于模块性。难以获取的具有可变半径的输出镜可以总是保持平面，这降低了各个部分的变化。可以设计出具有几种标准尺寸的固定球形曲面镜，因为自适应镜能够在宽范围内实现对光束直径的精细调整。
附图说明
附图示意性地示出了本发明的一个实施例，在下文中将参考附图对其进行更详细地说明。该图示出了安装在激光加工设备中的光学模块。
具体实施方式
将模块1设计为集成在激光加工设备的激光器外壳下，但是也可以将其安装在另一激光加工设备的光路中。其沿y和z方向建立了激光束的水平偏移。其在模块1的最后镜片3和聚焦光学***之间提供了大于3米的间隔。
模块1的第一镜片2是具有-10m到+10m的调整范围的自适应镜。通过这一自适应镜2，当前采用的切割激光器的未处理射束直径能够毫无问题地反射(image)具有15°的偏转角的高质量激光束。镜片2包括具有直到45°的相移的涂层。镜片2可以在激光器的输出镜之后850mm。
采用固定球面镜(根据设备条件设计)作为第二镜片3，其反射处于距聚焦光学***的距离上的射束。这一镜片还包括具有45°相移的涂层，其条件在于，可以将该涂层从45°的常规入射角调整为这里采用的角度(15°)，并且使两个镜片的回旋(convolution)平面相对于偏振方向的转动可达45°。将15°的入射角确定为45°相移层的下限，这一点可以在技术上实现。更小的角度可能产生过量的吸收。
Z回旋的输入射束和输出射束是平行的。
可以通过可以固定调整的减压器或者通过比例阀以灵活的方式调整自适应镜2。

Claims (1)

1.一种用于安装到激光加工设备的激光器内的光学模块(1)，其包括自适应镜(2)和球面镜(3)，其中，两个镜(2，3)均具有相移涂层。
CNA2006800182982A 2005-04-29 2006-04-28 用于安装到激光加工设备的激光器中的光学模块 Pending CN101184577A (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE202005006838U DE202005006838U1 (de) 2005-04-29 2005-04-29 Optisches Modul zum Einbau in den Laser einer Laserbearbeitungsmaschine
DE202005006838.1 2005-04-29

Publications (1)

Publication Number Publication Date
CN101184577A true CN101184577A (zh) 2008-05-21

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CNA2006800182982A Pending CN101184577A (zh) 2005-04-29 2006-04-28 用于安装到激光加工设备的激光器中的光学模块

Country Status (6)

Country Link
US (1) US7859752B2 (zh)
EP (1) EP1896218B1 (zh)
CN (1) CN101184577A (zh)
AT (1) ATE500021T1 (zh)
DE (2) DE202005006838U1 (zh)
WO (1) WO2006117153A1 (zh)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102013008647B4 (de) * 2013-05-21 2019-02-21 Lt-Ultra Precision Technology Gmbh Laserbearbeitungsvorrichtung mit zwei adaptiven Spiegeln
DE102014108259A1 (de) * 2014-06-12 2015-12-17 Scanlab Ag Vorrichtung zur Lasermaterialbearbeitung
US11307335B2 (en) 2017-08-09 2022-04-19 Maradin Ltd. Optical apparatus and methods and computer program products useful for manufacturing same

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2070490B (en) 1980-02-26 1984-07-04 Ferranti Ltd Laser cutting apparatus
US4746202A (en) 1985-07-11 1988-05-24 Coherent, Inc. Polarization preserving reflector and method
JP2514680B2 (ja) * 1988-01-08 1996-07-10 ファナック株式会社 レ―ザ発振装置
DE3900467C2 (de) 1989-01-10 1995-09-07 Trumpf Lasertechnik Gmbh Vorrichtung mit einem Spiegelkopf
JPH03128187A (ja) * 1989-10-12 1991-05-31 Yoshizawa Kogyo Kk レーザ切断装置
DE4108419C2 (de) 1991-03-15 1995-03-16 Diehl Gmbh & Co Einrichtung zur Beeinflussung der Divergenz eines Laserstrahles
DE9215361U1 (de) * 1992-11-11 1994-03-17 Diehl Stiftung & Co., 90478 Nürnberg Bearbeitungslaser mit Strahlbeeinflussungsanordnung
FR2786938B1 (fr) * 1998-12-04 2001-10-12 Thomson Csf Dispositif de generation d'un faisceau laser de puissance, de haute qualite
DE19914984B4 (de) * 1999-04-01 2006-06-01 Precitec Kg Vorrichtung zum Feststellen der Lage eines Arbeitsfokus relativ zu einer Oberfläche eines zu bearbeitenden Werkstücks in einer Laserbearbeitungsanlage
DE10033071A1 (de) * 2000-07-07 2002-01-17 Trumpf Lasertechnik Gmbh Laseranordnung für die Materialbearbeitung
DE10128609B4 (de) * 2001-06-13 2005-06-23 Esab Cutting Systems Gmbh Anordnung zur Verstellung mindestens eines Parameters eines über einem Werkstück fokussierten Strahls für die Laserstrahlmaterialbearbeitung
ATE355543T1 (de) 2002-11-29 2006-03-15 Trumpf Werkzeugmaschinen Gmbh Spiegel einer laserbearbeitungsmaschine

Also Published As

Publication number Publication date
WO2006117153A1 (de) 2006-11-09
US20080088924A1 (en) 2008-04-17
US7859752B2 (en) 2010-12-28
EP1896218A1 (de) 2008-03-12
DE202005006838U1 (de) 2006-08-31
DE502006009006D1 (de) 2011-04-14
ATE500021T1 (de) 2011-03-15
EP1896218B1 (de) 2011-03-02

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Application publication date: 20080521