CN101085508A - Substrate repairing device and method - Google Patents
Substrate repairing device and method Download PDFInfo
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- CN101085508A CN101085508A CNA2007101089563A CN200710108956A CN101085508A CN 101085508 A CN101085508 A CN 101085508A CN A2007101089563 A CNA2007101089563 A CN A2007101089563A CN 200710108956 A CN200710108956 A CN 200710108956A CN 101085508 A CN101085508 A CN 101085508A
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/1303—Apparatus specially adapted to the manufacture of LCDs
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B21/00—Machines or devices using grinding or polishing belts; Accessories therefor
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/1306—Details
- G02F1/1309—Repairing; Testing
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- Physics & Mathematics (AREA)
- Nonlinear Science (AREA)
- Chemical & Material Sciences (AREA)
- General Physics & Mathematics (AREA)
- Crystallography & Structural Chemistry (AREA)
- Optics & Photonics (AREA)
- Engineering & Computer Science (AREA)
- Analytical Chemistry (AREA)
- Pathology (AREA)
- Life Sciences & Earth Sciences (AREA)
- Mechanical Engineering (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- Immunology (AREA)
- Health & Medical Sciences (AREA)
- Manufacturing & Machinery (AREA)
- Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
- Constituent Portions Of Griding Lathes, Driving, Sensing And Control (AREA)
- Liquid Crystal (AREA)
- Grinding And Polishing Of Tertiary Curved Surfaces And Surfaces With Complex Shapes (AREA)
- Optical Filters (AREA)
- Electroluminescent Light Sources (AREA)
- Mechanical Treatment Of Semiconductor (AREA)
Abstract
This invention relates to a repair (repair) device of a substrate, and a method for the same, which can remove in more detail the projection which exists as a defect of a substrate correctly by polish. A carriage currently installed on said substrate so that it can exercise along the X-axis, a Y-axis, and Z shaft orientations to a projection projected to a substrate. An abrasive tape feeding means which transports an abrasive tape in which said carriage is equipped and an abrasive layer is applied to the surface above said projection. A contact type displacement sensor which said carriage is equipped with so that it may be located in the upper part of said abrasive tape transported by said abrasive tape feeding means, and is provided with a presser which presses a rear face of said abrasive tape and contacts said abrasive layer to said projection, and detects said pressor displacement. A repairing device of a substrate containing a displacement control machine which controls said pressor displacement so that said pressure which it is equipped with so that it may be connected that it is pressor, and is given to said projection by said pressor press is controlled by said carriage.
Description
Technical field
The present invention relates to the repair apparatus and the method thereof of substrate, more specifically to can be by grinding the repair apparatus and the method thereof of the substrate of correctly removing the projection that exists as the defective of substrate.
Background technology
In TFT-LCD (thin film transistor (TFT)-liquid crystal display), PDP (plasma panel), EL FPD such as (electrotype are luminous), use glass substrate (Glass Substrate).Produce projection on the surface at glass substrate in the operation that constitutes colour filter (ColorFilter).The projection that produces on the surface of glass substrate plays the effect of optical defect.Therefore, for improving the image quality that the plane shows, the projection that must remove glass substrate.
Fig. 1 represents the repair apparatus according to the substrate of prior art.With reference to Fig. 1, the projection 4 of substrate 2 is by grinding at the grinding-material layer 12 of grinding with 10 surface applied.Grinding is with 10 to be wound on the cylinder (Roll) 14 and to be installed on the uncoiler (Unwinder) 20, and front end is fixed on the rewinding machine (Rewinder) 22.Emit continuously to grind and be with 10 and supply with from rolling up 14 by the action of uncoiler 20, and be with 10 to be rolled onto on the rewinding machine 22 from rolling up 14 grindings of emitting.Guiding is installed between uncoiler 20 and the rewinding machine 22 grinds a pair of deflector roll (Guide Roller) 24a, 24b with 10 conveying.In addition, between deflector roll 24a, 24b, disposed with push grind with 10 the back side and make grinding-material layer 12 contact substrate 2 projection 4 the mode lifting by pressing element (Presser) 30.
The repair apparatus of substrate with prior art of this type of formation will grind with 10 by the action of uncoiler 20 and rewinding machine 22 and be transported on the projection 4 of substrate 2.And, grinding when making its contact protrusion 4 by pushing with 10 the back side by the decline of pressing element 30, grinding-material layer 12 grinds also removes projection 4.
But, in the repair apparatus of the substrate of prior art, becoming very difficult by the amount of grinding of the control projection of determining by the down position of pressing element 30 4, existence can not be carried out the problem of the correct grinding of projection 4.Especially, under situation about descending in the mode consistent with the amount of grinding of projection 4 by pressing element 30, if grind with 10 and the thickness of grinding-material layer 12 be not certain, then the pressure that contacts owing to projection 4 and grinding-material layer 12 fluctuates, so exist the actual amount of grinding of projection 4 to produce the problem of great fluctuation process.In addition, exist because of excessive descent and make the bad problem of grinding that produces the grinding substrate with the upper surface of 10 grinding-material layer 12 contact substrate 2 of grinding by pressing element 30.
Summary of the invention
So the present invention its objective is repair apparatus and method thereof that the substrate that can correctly control the amount of grinding of projection and grind is provided for the variety of issue that solves prior art proposes.
Other purpose of the present invention provides the repair apparatus and the method thereof of the substrate that can grind projection fast.
Another object of the present invention provides owing to can calculate the rectangular co-ordinate value of projection and the amount of grinding that overhang is controlled projection by the automated optical detection of previous operation, makes the repair apparatus and the method thereof that constitute simple substrate so can remove the protrusion detection device.
For achieving the above object,, provide a kind of repair apparatus of substrate, comprising: with respect to the balladeur train that can on substrate, be provided with along the mode that X-axis, Y-axis and Z-direction are moved in projection outstanding on the substrate according to viewpoint of the present invention; Be installed on the balladeur train, and will apply the grinding band feed mechanism of the grinding band of grinding-material layer from the teeth outwards to the conveying of the top of projection; Possess be positioned at mode by the top of grinding the grinding band that the band feed mechanism carries be installed on the balladeur train and push the back side of grinding band and make grinding-material layer contact protrusion by pressing element, and detect the tangent displacement sensor of the displacement of pressing pressing element; And being installed on the balladeur train by the pressing element ways of connecting, and control displacement controller by being applied in by pushing of pressing element by the displacement of pressing element to the mode of the pressure of projection with control with above-mentioned.
According to other viewpoint of the present invention, a kind of repair method of substrate is provided, comprising: calculate in the rectangular co-ordinate value of the outstanding projection of substrate upper surface and the step of overhang; Step with the top of pressing the pressing element alignment protrusion of tangent displacement sensor; Calculate the step of the amount of grinding of projection; Mode with the amount of grinding that meets projection makes the above-mentioned step that moves to the operating position of grinding setting value by pressing element from the initial position of initial set value; By the back side of pushing the grinding band that is coated with the grinding-material layer by pressing element and make the step of grinding-material layer contact protrusion; When carrying the grinding band, grind the step of projection by the grinding-material layer; Detect the step of the displacement of pressing pressing element by tangent displacement sensor; If it is inconsistent with the grinding setting value to press the displacement of pressing element, then to control step by the displacement of the pressing element mode consistent by the pressure of pressing element with grinding setting value; And if the displacement of pressing pressing element is consistent with the grinding setting value, then makes the step that returns to initial position by pressing element.
As mentioned above, repair apparatus and method thereof according to substrate of the present invention, by will grind in compensation be with on the projection be pressed into substrate by carrying out the grinding of projection in the displacement of pressing element and the pressure, and can correctly control the amount of grinding of projection and grind, thereby can grind projection fast.In addition, owing to can detect rectangular co-ordinate value and the overhang of calculating projection and the amount of grinding of controlling projection by the automated optical of previous operation, so have the very useful effect that can remove the protrusion detection device and make designs simplification.
Description of drawings
Fig. 1 is the front view of expression according to the repair apparatus of the substrate of prior art.
Fig. 2 is the front view of expression according to first embodiment of the repair apparatus of substrate of the present invention.
Fig. 3 is the front view of expression according to second embodiment of the repair apparatus of substrate of the present invention.
Fig. 4 is the cutaway view of representing according to the controlling organization of repair apparatus of the present invention in order to illustrate.
Fig. 5 is the front view of action of the protrusion detection device of the rectangular co-ordinate value of detection projection of expression repair apparatus of the present invention and overhang.
Fig. 6 is the projection of expression repair apparatus of the present invention and the front view of the state that aligns by pressing element.
Fig. 7 is the front view of state of the grinding band contact protrusion of expression repair apparatus of the present invention.
Fig. 8 is the front view of the projection of expression repair apparatus of the present invention by the state that grinds belt grinding.
Fig. 9 is the front view of the state that resets by pressing element of expression repair apparatus of the present invention.
Figure 10 is the front view of action of protrusion detection device of grinding vestige of the detection projection of expression repair apparatus of the present invention.
Figure 11 is for the grinding that repair apparatus of the present invention is described and removes the repair method of projection and the flow chart represented.
The 2-substrate, the 4-projection, the 100-balladeur train, 110-grinds band, 112-grinding-material layer, 120-grind band feedway, 122-uncoiler, 124-rewinding machine, 126a, 126b-deflector roll, the 130-tangent displacement sensor, 132-presses pressing element, the 140-linear variable difference transformer, 142-iron core, 150-displacement controller, 152-air pressure actuator, 154-bar, 160-protrusion detection device, 162,164-sensor, 170-camera, 180-computer.
The specific embodiment
Below, at the reference accompanying drawing repair apparatus of substrate of the present invention and the preferred embodiment of method thereof are elaborated.
At first, with reference to Fig. 2, the repair apparatus of substrate of the present invention possesses the balladeur train (Carriage) 100 that is provided with on the top of substrate 2 in the mode along X-axis, Y-axis and Z-direction three-axis moving.The three-axis moving of balladeur train 100 is realized by the known automatics with X-axis linear movement actuator (x Linear Motion Actuator), Y-axis linear movement actuator and z axis motion actuator.
Possess and to grind the grinding of projection 4 usefulness of substrate 2 with the 110 grinding band feedwaies of on projection 4, carrying 120 according to the repair apparatus of substrate of the present invention.Grinding is ground and is with 110 to be wound on the cylinder 114 with the grinding-material layer 112 of the projection 4 that scribbles actual grinding substrate 2 on 110 the surface.
According to the repair apparatus of substrate of the present invention, possesses tangent displacement sensor (Contact TypeDisplacement Sensor) 130.Tangent displacement sensor 130 is installed on the balladeur train 110 in the mode above between deflector roll 126a and the deflector roll 126b.Tangent displacement sensor 130 possess push grind with 110 the back side and make grinding-material layer 112 contact substrate 2 projection 4 by pressing element 132, form circle (Round Shape) by the front end of pressing element 132 to reduce with the mode of grinding with 110 frictional resistance.
According to the repair apparatus of substrate of the present invention, possess and be connected with tangent displacement sensor 130 and control displacement controller (Displacement Controller) 150 by pressing element 132 displacements.Displacement controller 150 is made of air pressure actuator (Pneumatic Actuator) 152.Air pressure actuator 152 is installed on the balladeur train 100, and the bar of air pressure actuator 152 (Rod) 154 is connected to the rear end of iron core 142.Displacement controller 150 can be as required and by electric actuator (Electric Actuator), piezoelectric actuator formations such as (Piezo Actuator).
With reference to Fig. 3, also possesses the protrusion detection device 160 of the projection 4 that detects substrate 2 according to the repair apparatus of substrate of the present invention.Protrusion detection device 160 is made of the pair of sensors 162,164 that the mode with the both sides, bottom that are positioned at tangent displacement sensor 130 is installed on the balladeur train 100.Each probe (Probe) 162a, the 164a of sensor 162,164 detects from the overhang of the outstanding projection 4 of the upper surface of substrate 2.In the sensor 162,164 any for example sensor 162 detect the overhang of the projection 4 before grinding, another sensor 164 detects the overhang of the projection 4 after grinding.
With reference to Fig. 3 and Fig. 4, pressing a side of pressing element 132, the image of acquisition projection 4 and the video camera 170 of output image data are installed.Video camera 170 can be made of ccd video camera (Charge Coupled DeviceCamera).Tangent displacement sensor 130, displacement controller 150, protrusion detection device 160 and video camera 170 are connected on the computer 180 as controlling organization.Computer 180 will be from the action by routine processes control bit shift controller 150 of the signal of tangent displacement sensor 130 and protrusion detection device 160 inputs.Computer 180 will be shown at monitor 182 by the image of routine processes with projection 4 from the view data of video camera 170 inputs.
Secondly, the repair method of the substrate that repair apparatus carried out of the substrate of the present invention with this type of formation is described according to Figure 11.
With reference to Fig. 3 and Fig. 5, calculate rectangular co-ordinate value and overhang (S100) simultaneously in the outstanding projection 2 of the upper surface of substrate 2.Be in the initial position P of initial set value by pressing element 132
1The place, under the state of the upper surface of probe 162a, the 164a of sensor 162,164 contact substrate 2, the action by automatics makes balladeur train 100 move and follow projection 4 along the rectangular co-ordinate value of X-direction and Y direction.Any for example during the probe 162a of sensor 162, detects the position of projection 4 by the motion of sensor 162 in projection 4 feelers 162,164.The probe 162a of sensor 162 detects the overhang of projection 4 in the summit of contact protrusion 4.
On the other hand, the rectangular co-ordinate value of projection 4 and overhang detect (Automated optical Inspection) by the automated optical of the substrate 2 that carries out in the operation formerly and calculate.The data input computer 180 that this can be calculated and the action of controlling automatics.Under this situation, as shown in Figure 2, can omit protrusion detection device 160.
With reference to Fig. 6, when rectangular co-ordinate value that detects projection 4 and overhang, the motion by balladeur train 100 makes the top (S102) by pressing element 132 alignment protrusion 4.Computer 180 is calculated amount of grinding (S104) to the overhang of projection 4 by the processing of program, to meet the mode of the amount of grinding of calculating, makes by the initial position P of pressing element 132 from initial set value
1Move to the operating position P that grinds setting value
2(S106).
When the bar 154 of air pressure actuator 152 advanced on Z-direction, the iron core 142 of the linear variable difference transformer 140 that is connected with bar 154 advanced.When the iron core 142 of linear variable difference transformer 140 advanced to the position of the displacement with the setting value of grinding from its zero point, the bar 154 of air pressure actuator 152 stopped.Therefore, press the initial position P of pressing element 132 from initial set value
1Advance to the operating position P that grinds setting value
2The place.
With reference to Fig. 7 and Fig. 8, grind with 110 the back side and make grinding-material layer 112 contact protrusion 4 (S108) by pushing, and the limit is carried to grind and is with 110 limits to grind projections 4 (S110) by grinding-material layer 112 by the decline of pressing element 132.When the action by automatics descends balladeur train 100, also descend and push the back side of grinding by pressing element 132 with 110, the grinding that is pressed is with 110 grinding-material layer 112 contact protrusion 4.Action by uncoiler 122 and rewinding machine 124 emits to grind from the cylinder 114 of uncoiler 122 to be with 110.The grinding of emitting from cylinder 114 is with 110 to be rolled by rewinding machine 124.Grinding is ground projection with 110 in above by projection 4.
Secondly, the action by linear variable difference transformer 140 detects the displacement (S112) by pressing element 132.Computer 180 will pass through routine processes from the displacement of pressing pressing element 132 of linear variable difference transformer 140 inputs, and judge whether the displacement of pressing pressing element 132 sets value consistent (S114) with grinding.Set value under the inconsistent situation in displacement of pressing pressing element 132 and grinding, to control pressure (S116) by the displacement of pressing element 132 mode consistent by pressing element 132 with grinding setting value.
As shown in Figure 7, when being with 110 to contact, retreat by acting on to make by pressing element 132 by the pressure on the pressing element 132 by pressing element 132 and grinding.At this moment, press pressing element 132 from grinding the operating position P of setting value
2Retreat into the initial position P of initial set value
1The place.When the primary winding 144 to linear variable difference transformer 140 applies voltage,, change from the size of voltage and the phase place of secondary coil 146a, 146b output according to the position of iron core 142.According to the size of the voltage of exporting from secondary coil 146a, 146b and the displacement that phase place detects iron core 142.Calculate displacement by the displacement of iron core 142 by pressing element 132.
As shown in Figure 8, in the displacement of pressing pressing element 132 under not consistent with the grinding setting value situation, the control by computer 180 is worked air pressure actuator 152.Air pressure actuator 152 and bar 154 are together with iron core 142 with press pressing element 132 and arrive and grind the operating position P that sets value
2Mode exert pressure.By when compensation is by the displacement of pressing element 132 and pressure, carry out the grinding of projection 4 by the work of this class air pressure actuator 150, can correctly grind and remove projection 4.In addition, by when detecting displacement in action by pressing element 132 by linear variable difference transformer 140, control displacement by the action of air pressure actuator 150 by pressing element 132, can omit the sensor 162,164 of protrusion detection device 160, therefore not only structure becomes simple, and can shorten used time of detection of sensor 162,164, thereby can grind projection 2 rapidly.
With reference to Fig. 9, set value under the consistent situation with grinding in the displacement of pressing pressing element 132, return to initial position P by pressing element 132
1, finish the grinding (S118) of projection 4.When the action by air pressure actuator 152 retreats bar 154, iron core 142 and together retreat by pressing element 132 and bar 154.Returning to initial position P by pressing element 132
1The time, the control by computer 180 stops the action of grinding band feedway 120 and air pressure actuator 152.On the other hand, in the grinding of projection 4, video camera 170 obtains the image of projection 4 and shows on monitor 182.The operator can see on the monitor 182 image of the projection 4 that shows and confirm the process of lapping of projection 4 and state etc.
At last,, make balladeur train 100 when the rectangular co-ordinate value moves in action by automatics with reference to Figure 10, the probe 164a of sensor 164 by projection 4 places grinding part 6 and the work by sensor 164 detect grinding part 6 (S120).Computer 180 judges that overhang by the grinding part that work detected 6 of sensor 164 is whether in error range (S122).If the overhang of grinding part 6 in error range, then finishes the grinding of projection 4.If outside error range, then return above-mentioned steps (S102) and carry out the grinding of projection 4 once more by the overhang of the grinding part that work detected 6 of sensor 1 64.Action by automatics makes balladeur train 100 move along the rectangular co-ordinate value, and carries out the grinding of the projection 4 that exists in the entire upper surface of substrate 2 successively.
The foregoing description only is explanation the preferred embodiments of the present invention, does not limit interest field of the present invention.Those skilled in the art can change, be out of shape or replace in the scope of technological thought of the present invention and patent application certainly, should be appreciated that this also belongs to scope of the present invention.
Claims (7)
1. the repair apparatus of a substrate is characterized in that, comprising:
With with respect to the balladeur train that can on above-mentioned substrate, be provided with along the mode that X-axis, Y-axis and Z-direction are moved in projection outstanding on the substrate;
Be installed on the above-mentioned balladeur train, and will be coated with the grinding band feed mechanism of the grinding band of grinding-material layer from the teeth outwards to the conveying of the top of above-mentioned projection;
Possess mode with the top that is positioned at the above-mentioned grinding band of carrying by above-mentioned grinding band feed mechanism be installed on the above-mentioned balladeur train and push the back side of above-mentioned grinding band and make above-mentioned grinding-material layer contact above-mentioned projection by pressing element, and detect the tangent displacement sensor of above-mentioned displacement by pressing element; And,
Being installed on the above-mentioned balladeur train by the pressing element ways of connecting with above-mentioned, and with control by the above-mentioned displacement controller of controlling above-mentioned displacement by pressing element to the mode of the pressure of above-mentioned projection that is applied in by pushing of pressing element.
2. the repair apparatus of substrate according to claim 1 is characterized in that,
Above-mentioned grinding band feed mechanism comprises:
Above-mentioned grinding tape wrapping is installed on the cylinder, and emits the uncoiler of above-mentioned grinding band from above-mentioned cylinder;
The rewinding machine of the above-mentioned grinding roll coil of strip that will emit from above-mentioned uncoiler; And,
Be installed between above-mentioned uncoiler and the above-mentioned rewinding machine, and guide a pair of deflector roll of the conveying of above-mentioned grinding band,
Above-mentioned grinding band contacts the outer basifacial of above-mentioned deflector roll.
3. the repair apparatus of substrate according to claim 1 is characterized in that,
Above-mentioned tangent displacement sensor comprises linear variable difference transformer, and this linear variable difference transformer has the above-mentioned iron core by pressing element and above-mentioned displacement controller of connection.
4. the repair apparatus of substrate according to claim 3 is characterized in that,
Also comprise be installed on above-mentioned by on the pressing element and obtain the video camera of the image of above-mentioned projection.
5. the repair apparatus of substrate according to claim 3 is characterized in that,
Also comprise pair of sensors, this pair of sensors is installed in the both sides, bottom of above-mentioned tangent displacement sensor in the mode of the rectangular co-ordinate value that can detect above-mentioned projection and overhang.
6. the repair method of a substrate is characterized in that, comprising:
Calculate in the rectangular co-ordinate value of the outstanding projection of the upper surface of substrate and the step of overhang;
The step of aiming at the top of above-mentioned projection by pressing element with tangent displacement sensor;
Calculate the step of the amount of grinding of above-mentioned projection;
Mode with the amount of grinding that meets above-mentioned projection makes the above-mentioned step that moves to the operating position of grinding setting value by pressing element from the initial position of initial set value;
Push the back side of the grinding band that is coated with the grinding-material layer and make the step of grinding-material layer contact protrusion by pressing element by above-mentioned;
When carrying above-mentioned grinding band, grind the step of above-mentioned projection by above-mentioned grinding-material layer;
Detect above-mentioned step of pressing the displacement of pressing element by above-mentioned tangent displacement sensor;
If above-mentioned displacement of pressing pressing element and above-mentioned grinding setting value are inconsistent, then set value the step that consistent mode is controlled above-mentioned pressure by pressing element with above-mentioned displacement of pushing tool and above-mentioned grinding; And,
If above-mentioned displacement of pressing pressing element is consistent with above-mentioned grinding setting value, then make the above-mentioned step that returns to above-mentioned initial position by pressing element.
7. the repair method of substrate according to claim 6 is characterized in that,
Also be included in the grinding of above-mentioned projection and obtain the image of above-mentioned projection and the step that shows by video camera.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| KR1020060052024 | 2006-06-09 | ||
| KR1020060052024A KR100807089B1 (en) | 2006-06-09 | 2006-06-09 | Device for Removing Protrusion on Substrate |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN101085508A true CN101085508A (en) | 2007-12-12 |
| CN100540217C CN100540217C (en) | 2009-09-16 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNB2007101089563A Expired - Fee Related CN100540217C (en) | 2006-06-09 | 2007-06-08 | The repair apparatus of substrate and method thereof |
Country Status (4)
| Country | Link |
|---|---|
| JP (1) | JP2007326212A (en) |
| KR (1) | KR100807089B1 (en) |
| CN (1) | CN100540217C (en) |
| TW (1) | TWI326238B (en) |
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Also Published As
| Publication number | Publication date |
|---|---|
| KR100807089B1 (en) | 2008-02-26 |
| TWI326238B (en) | 2010-06-21 |
| CN100540217C (en) | 2009-09-16 |
| KR20070117858A (en) | 2007-12-13 |
| JP2007326212A (en) | 2007-12-20 |
| TW200744793A (en) | 2007-12-16 |
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