CN101078615A - Precision determination method for angle between optical axis and mechanical axis of optical system - Google Patents
Precision determination method for angle between optical axis and mechanical axis of optical system Download PDFInfo
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- CN101078615A CN101078615A CN 200710072380 CN200710072380A CN101078615A CN 101078615 A CN101078615 A CN 101078615A CN 200710072380 CN200710072380 CN 200710072380 CN 200710072380 A CN200710072380 A CN 200710072380A CN 101078615 A CN101078615 A CN 101078615A
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Abstract
The invention relates to an accurate measuring method for angle between optical axis and mechanical axis in optical system, belonging to the measuring technology field for angle between optical axis and mechanical axis in optical system. The purpose is that the problem that angle between optical axis and mechanical axis in satellite optical communication system can not be measured accurately in prior technology is solved. Firstly, interferometer (1) is used to adjust the optical axis of high-accuracy plane mirror (3) to coincide with the optical axis of measured optical system (2). Secondly, autocollimator (4) is used to measure the angle alpha of the optical axis and the optical axis of high-accuracy plane mirror (3). Thirdly, autocollimator (4) is used to measure the angle beta of the optical axis and the optical axis of the second high-accuracy plane mirror on mechanical base plane of measured optical system (2). Finally, according to the formula of Delta = beta - alpha the angle Delta between the optical axis and the mechanical axis is calculated. The invention can measure the angle of optical axis and mechanical axis of satellite optical communication system accurately. The measuring accuracy of angle between the optical axis and the mechanical axis is 0.2 mu rad.
Description
Technical field
What the present invention relates to is the field of measuring technique of angle between optic axis in the optical system and the mechanical axis.
Background technology
Optical device in the optical system needs physical construction to support, because there is big big-difference in the machining precision of optical device and physical construction, there are angular deviation in the optic axis and the mechanical axis of optical system.Most of optical systems require not strict to the differential seat angle between optic axis and mechanical axis, do not need difference is therebetween measured.But in the satellite optical communication system, the angle between optic axis and mechanical axis needs strictness accurately to measure, and the method that there is no is at present measured it.
Summary of the invention
The objective of the invention is to carry out the strict problem of accurately measuring to the optic axis in the satellite optical communication system and the angle between mechanical axis, and then the accurate measurement method of angle between optic axis in a kind of optical system and the mechanical axis is provided in order to solve prior art.
Method step of the present invention is:
First step: interferometer 1 emission laser beam goes out to incide in the high precision plane mirror 3 after by tested optical system 2, laser beam by high precision plane mirror 3 reflection backs by in the tested optical system 2 incident interferometers 1; Adjust high precision plane mirror 3 position angles, the angle of pitch, make about the striped of interferometer 1, symmetry up and down, promptly the optical axis of the optical axis of high precision plane mirror 3 and tested optical system 2 coincides;
Second step: the place ahead that autocollimator 4 is arranged on high precision plane mirror 3, autocollimator 4 is to high precision plane mirror 3 emission laser beams, laser beam is after high precision plane mirror 3 reflection in the incident autocollimator 4, autocollimator 4 is according to the angle α value of its optical axis of incident luminous point position calculation and high precision plane mirror 3 optical axises, i.e. autocollimator 4 optical axises and system optical axis angle α value;
Third step: the bonding second high precision plane mirror 5 on the mechanical reference surface of the mechanical support of tested optical system 2, promptly the optical axis of the second high precision plane mirror 5 is parallel with the mechanical axis of tested optical system 2, autocollimator 4 is launched laser beams with the position in the step 2 to the second high precision plane mirror 5, laser beam is after the reflection of the second high precision plane mirror 5 in the incident autocollimator 4, autocollimator 4 is according to the angle β value of its optical axis of incident luminous point position calculation and the second high precision plane mirror, 5 optical axises, i.e. the mechanical axis angle β value of the optical axis of autocollimator 4 and tested optical system 2;
The 4th step: the angle α value in the step 2, the angle β value in the step 3 are brought among formula Δ=β-α, promptly draw angle Δ value between the optical axis of tested optical system 2 and the mechanical axis.
The present invention can carry out the accurate measurement of strictness to the angle between between optic axis in the satellite optical communication system and mechanical axis, and the precision that angle is measured between its optic axis and the mechanical axis is 0.2 μ rad, and has step advantage simple, that realize easily.
Description of drawings
Fig. 1 is the structural representation of first step of the present invention, and Fig. 2 is the structural representation of second step of the present invention, and Fig. 3 is the structural representation of third step of the present invention.
Embodiment
Embodiment one: in conjunction with Fig. 1, Fig. 2, Fig. 3 present embodiment is described, the method step of this embodiment is:
First step: interferometer 1 emission laser beam goes out to incide in the high precision plane mirror 3 after by tested optical system 2, laser beam by the first high precision plane mirror, 3 reflection backs by in the tested optical system 2 incident interferometers 1; Adjust the first high precision plane mirror, 3 position angles, the angle of pitch, make about the striped of interferometer 1, symmetry up and down, promptly the optical axis of the optical axis of the first high precision plane mirror 3 and tested optical system 2 coincides;
Second step: the place ahead that autocollimator 4 is arranged on high precision plane mirror 3, autocollimator 4 is to the first high precision plane mirror, 3 emission laser beams, laser beam is after the reflection of the first high precision plane mirror 3 in the incident autocollimator 4, autocollimator 4 is according to the angle α value of its optical axis of incident luminous point position calculation and the first high precision plane mirror, 3 optical axises, i.e. autocollimator 4 optical axises and system optical axis angle α value;
Third step: the bonding second high precision plane mirror 5 on the mechanical reference surface of the mechanical support of tested optical system 2, promptly the optical axis of the second high precision plane mirror 5 is parallel with the mechanical axis of tested optical system 2, autocollimator 4 is launched laser beams with the position in the step 2 to the second high precision plane mirror 5, laser beam is after the reflection of the second high precision plane mirror 5 in the incident autocollimator 4, autocollimator 4 is according to the angle β value of its optical axis of incident luminous point position calculation and the second high precision plane mirror, 5 optical axises, i.e. the mechanical axis angle β value of the optical axis of autocollimator 4 and tested optical system 2;
The 4th step: the angle α value in the step 2, the angle β value in the step 3 are brought among formula Δ=β-α, promptly draw angle Δ value between the optical axis of tested optical system 2 and the mechanical axis.
It is the level crossing of φ 300 that the first high precision plane mirror 3, the second high precision plane mirror 5 are all selected bore for use, and surface precision is that RMS is 1/70 λ.The GHI-4 that interferometer 1 selects for use U.S. ZYGO company to produce " HS type interferometer transmitted-reference light beam, and the interference fringe of detection reflected wavefront and reference wave front; The ZYGO interferometer has ccd detector, interference fringe image directly can be imported the computing machine that has data collecting card, carries out Flame Image Process; ZYGO interferometer major parameter is: bore φ 300mm, operation wavelength 632.8nm.The ELCCMAT3000 autocollimator that autocollimator 4 selects for use German ELCCMAT company to produce, angle measurement accuracy is 0.2 μ rad.Adopt orientation, pitching two-dimension high-precision adjustment rack that the first high precision plane mirror, 3 angles are adjusted.
Claims (1)
1, the accurate measurement method of angle between optic axis in the optical system and the mechanical axis is characterized in that its method step is:
First step: interferometer (1) emission laser beam goes out to incide in the high precision plane mirror (3) after by tested optical system (2), laser beam by high precision plane mirror (3) reflection back by in tested optical system (2) the incident interferometer (1); Adjust high precision plane mirror (3) position angle, the angle of pitch, make about the striped of interferometer (1), symmetry up and down, promptly the optical axis of the optical axis of high precision plane mirror (3) and tested optical system (2) coincides;
Second step: the place ahead that autocollimator (4) is arranged on high precision plane mirror (3), autocollimator (4) is to high precision plane mirror (3) emission laser beam, laser beam is after high precision plane mirror (3) reflection in the incident autocollimator (4), autocollimator (4) is according to the angle α value of its optical axis of incident luminous point position calculation and high precision plane mirror (3) optical axis, i.e. autocollimator (4) optical axis and system optical axis angle α value;
Third step: the bonding second high precision plane mirror (5) on the mechanical reference surface of the mechanical support of tested optical system (2), promptly the optical axis of the second high precision plane mirror (5) is parallel with the mechanical axis of tested optical system (2), autocollimator (4) is launched laser beam with the position in the step 2 to the second high precision plane mirror (5), laser beam is after the second high precision plane mirror (5) reflection in the incident autocollimator (4), autocollimator (4) is according to the angle β value of its optical axis of incident luminous point position calculation and second high precision plane mirror (5) optical axis, i.e. the mechanical axis angle β value of the optical axis of autocollimator (4) and tested optical system (2);
The 4th step: the angle α value in the step 2, the angle β value in the step 3 are brought among formula Δ=β-α, promptly draw angle Δ value between the optical axis of tested optical system (2) and the mechanical axis.
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| CNB200710072380XA CN100462674C (en) | 2007-06-22 | 2007-06-22 | Precision determination method for angle between optical axis and mechanical axis of optical system |
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Cited By (10)
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| CN102095390A (en) * | 2010-12-29 | 2011-06-15 | 哈尔滨工业大学 | Method for accurately measuring included angles between optical axis of space optical communication terminal and positioning grinding surfaces on terminal |
| CN102141386A (en) * | 2010-12-29 | 2011-08-03 | 哈尔滨工业大学 | Method for measuring included angle between optical axis and reference plane of satellite optical communication terminal |
| CN102818542A (en) * | 2012-08-16 | 2012-12-12 | 中国科学院光电技术研究所 | Method for measuring cone angle of cone mirror |
| CN103064195A (en) * | 2011-12-17 | 2013-04-24 | 中国航空工业集团公司洛阳电光设备研究所 | Adjustment method of non-coaxial optical system |
| CN103267497A (en) * | 2013-05-23 | 2013-08-28 | 哈尔滨理工大学 | Method based on optical fiber coupling for measuring included angle of mechanical axis and optical axis of optical fiber rotating collimator |
| CN103968783A (en) * | 2013-01-31 | 2014-08-06 | 北京智朗芯光科技有限公司 | Method for measuring optical axis deviation angle in double-wave-plate compensator |
| CN106338261A (en) * | 2016-09-13 | 2017-01-18 | 湖北航天技术研究院总体设计所 | Angle deviation calibration method between two interferometer emergence plane wave light beams |
| CN107941469A (en) * | 2017-10-27 | 2018-04-20 | 南京理工大学 | A kind of equilateral prism apex angle bias measurement method |
| CN108709515A (en) * | 2018-07-23 | 2018-10-26 | 中国工程物理研究院激光聚变研究中心 | Pivoting angle measurement method |
| CN110887637A (en) * | 2019-11-11 | 2020-03-17 | 中国科学院上海技术物理研究所 | Coaxial collimator optical axis leading-out device and method |
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| JPH11281863A (en) * | 1998-03-31 | 1999-10-15 | Nippon Signal Co Ltd:The | Optical axis adjusting device |
| EP2306229A1 (en) * | 1998-05-25 | 2011-04-06 | Panasonic Corporation | Range finder device and camera |
| CN2622670Y (en) * | 2003-05-30 | 2004-06-30 | 成都太科光电技术有限责任公司 | Globoid interfrometer |
| JP2006234489A (en) * | 2005-02-23 | 2006-09-07 | Casio Comput Co Ltd | Optical sensor, tilt calculating device, acceleration calculating device, photographing device, display device, and display program |
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| CN102095390A (en) * | 2010-12-29 | 2011-06-15 | 哈尔滨工业大学 | Method for accurately measuring included angles between optical axis of space optical communication terminal and positioning grinding surfaces on terminal |
| CN102141386A (en) * | 2010-12-29 | 2011-08-03 | 哈尔滨工业大学 | Method for measuring included angle between optical axis and reference plane of satellite optical communication terminal |
| CN102141386B (en) * | 2010-12-29 | 2012-11-28 | 哈尔滨工业大学 | Method for measuring included angle between optical axis and reference plane of satellite optical communication terminal |
| CN103064195A (en) * | 2011-12-17 | 2013-04-24 | 中国航空工业集团公司洛阳电光设备研究所 | Adjustment method of non-coaxial optical system |
| CN102818542A (en) * | 2012-08-16 | 2012-12-12 | 中国科学院光电技术研究所 | Method for measuring cone angle of cone mirror |
| CN103968783A (en) * | 2013-01-31 | 2014-08-06 | 北京智朗芯光科技有限公司 | Method for measuring optical axis deviation angle in double-wave-plate compensator |
| CN103968783B (en) * | 2013-01-31 | 2016-08-17 | 北京智朗芯光科技有限公司 | A kind of measure the method at optical axis deviation angle in biplate plate compensator |
| CN103267497A (en) * | 2013-05-23 | 2013-08-28 | 哈尔滨理工大学 | Method based on optical fiber coupling for measuring included angle of mechanical axis and optical axis of optical fiber rotating collimator |
| CN103267497B (en) * | 2013-05-23 | 2015-12-02 | 哈尔滨理工大学 | Based on the fiber spinning collimating apparatus mechanical axis of coupling fiber and the measuring method of optical axis included angle |
| CN106338261A (en) * | 2016-09-13 | 2017-01-18 | 湖北航天技术研究院总体设计所 | Angle deviation calibration method between two interferometer emergence plane wave light beams |
| CN106338261B (en) * | 2016-09-13 | 2018-12-25 | 湖北航天技术研究院总体设计所 | A kind of two beam interferometer instrument exit plane glistening light of waves interfascicular angular deviation scaling methods |
| CN107941469A (en) * | 2017-10-27 | 2018-04-20 | 南京理工大学 | A kind of equilateral prism apex angle bias measurement method |
| CN107941469B (en) * | 2017-10-27 | 2019-11-15 | 南京理工大学 | A kind of equilateral prism apex angle bias measurement method |
| CN108709515A (en) * | 2018-07-23 | 2018-10-26 | 中国工程物理研究院激光聚变研究中心 | Pivoting angle measurement method |
| CN110887637A (en) * | 2019-11-11 | 2020-03-17 | 中国科学院上海技术物理研究所 | Coaxial collimator optical axis leading-out device and method |
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| CN100462674C (en) | 2009-02-18 |
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