CN108759713B - Surface shape three-dimensional measurement system based on ray tracing - Google Patents
Surface shape three-dimensional measurement system based on ray tracing Download PDFInfo
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- CN108759713B CN108759713B CN201810491830.7A CN201810491830A CN108759713B CN 108759713 B CN108759713 B CN 108759713B CN 201810491830 A CN201810491830 A CN 201810491830A CN 108759713 B CN108759713 B CN 108759713B
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- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
Abstract
The invention discloses a light ray tracing surface shape three-dimensional measuring system, which comprises a light source, a shaping and collimating lens, a micro-reflector array DMD, a TIR prism, a lens group, a sample to be measured, a lens and a detector CCD containing a precision motion mechanism, and has the following advantages: (1) the invention adopts the DMD device of the micro-reflector array and the light source to accurately control the position of incident light. (2) The invention adopts a high-precision motion guide rail and a controller as the positioning of the detector. (3) The invention is arranged by the scanning path of the incident light. (4) The invention can measure various samples, including wave front information of transmission samples, surface shape and wave front information of reflection samples and information between two surfaces of the transmission samples plated with the semi-transparent and semi-reflective films.
Description
Technical Field
The invention relates to the technical field of high-precision measurement, in particular to a light ray tracing surface shape three-dimensional measurement system.
Background
The measurement of optical surfaces has become a key issue in the fields of aviation, aerospace, medical instruments, communication systems, and micro-electro-mechanical systems. High precision measurement is an important guarantee for the quality of optical surface machining. For optical components, the tolerance requirements for measuring the surface are on the order of microns or even nanometers. However, as the surface shape complexity of the optical element increases, the current optical element has been expanded from the conventional planar and spherical optical elements to the optical aspheric surface and the optical free-form surface. Particularly, the optical free-form surface which is widely applied at present cannot be compared with the traditional spherical surface in terms of processing efficiency and manufacturing cost, and the most urgent problem to be solved is precise detection of the surface shape. General measurement methods are classified into contact measurement and noncontact measurement.
The contact measurement has a large vertical measurement range and high vertical dynamic ratio, and can acquire comprehensive information such as surface roughness, waviness, shape errors and other morphological characteristics. However, contact measurement may damage the measurement surface due to excessive measurement pressure, and even cause deformation and wear of the probe. Meanwhile, the method has the characteristics of point-by-point measurement and low speed, and is not favorable for acquiring the three-dimensional surface data quickly.
Compared with the traditional contact type three-dimensional measurement technology, the non-contact type optical three-dimensional measurement technology has the advantages of non-contact property and high precision, and can avoid damage to a measured object, so that the method is more suitable for measuring the optical surface. A commonly used method of measuring a non-contact optical surface includes: laser interferometry, projection grating measurement, reflection grating measurement, Shack-Hartmann wavefront aberration sensor, scanning confocal microscopy, white light interferometry, and the like. However, the current non-contact optical measurement is difficult to measure the optical surface with large curvature, large slope and complex and free surface shape. And the result of the non-contact measurement is difficult to compare and analyze with the actual design model.
Disclosure of Invention
Aiming at the technical problems in the prior art, the invention aims to overcome the defects in the prior art and provide a light ray tracing three-dimensional measuring system by combining a light ray tracing theory adopted by an optical design model.
In order to realize the aim of the invention, the invention provides a light ray tracing surface shape three-dimensional measuring system, which comprises a light source, a shaping and collimating lens, a micro-reflector array DMD, a TIR prism, a lens group, a sample to be measured, a lens and a detector CCD containing a precise motion mechanism,
obtaining wavefront information of a transmission sample based on a light ray tracing principle and a light field expression method;
the method comprises the steps of building an illustration system, removing a sample to be tested, controlling a light source and a micromirror array (DMD) by using a computer, carrying out structured light coding on incident light, controlling a detector CCD (charge coupled device) to move along the direction of a main light through a precision motion mechanism, obtaining position, angle and light intensity information of the incident light, and completing system calibration;
placing a sample to be measured at a measuring position, controlling a light source and the DMD (micro mirror device), and scanning incident light, wherein the distribution and scanning mode of the incident light can be point-by-point scanning, and a scanning light structure can be arranged according to the surface shape characteristics to be measured;
the position, angle and light intensity information of emergent rays are obtained by controlling a detector CCD through a precise movement mechanism, and sample measurement is completed;
and reconstructing the emergent light slope into actual wavefront information according to the calibration information and the measurement information to obtain the wavefront of the transmission sample to be measured.
The invention also provides another light ray tracing surface shape three-dimensional measuring system, which comprises a light source, a shaping and collimating lens, a micro-reflector array DMD, a TIR prism, a beam splitter prism, a lens group and a detector CCD containing a precise motion mechanism,
obtaining wavefront information and surface shape information of a reflection sample based on a light ray tracing principle and a light field expression method;
building a graphic system, firstly placing a standard reflector at the position of a sample to be measured, controlling a light source and a micromirror array DMD by using a computer, carrying out structured light coding on incident light, controlling a detector CCD to move along the direction of a main light through a precision motion mechanism, obtaining the position, angle and light intensity information of the incident light, and finishing system calibration;
removing a standard reflector at a measuring position, placing a sample to be measured, controlling a light source and a micro reflector array DMD, and performing scanning control on incident light rays, wherein the distribution and scanning mode of the incident light rays can be scanned point by point, and a scanning light structure can also be arranged according to the surface shape characteristics to be measured;
the position, angle and light intensity information of emergent rays are obtained by controlling a detector CCD through a precise movement mechanism, and sample measurement is completed;
obtaining the wavefront and the surface shape of the reflection sample to be measured according to the calibration information and the measurement information;
and reconstructing the slope of emergent light of different phase planes into actual wavefront information, and calculating the surface shape information of the sample to be measured according to the reflection law by adopting the positions and angles of incident light and emergent light of the same light.
The invention also provides another light ray tracing surface shape three-dimensional measuring system which comprises a light source, a shaping and collimating lens, a micro-reflector array DMD, a TIR prism, a beam splitter prism, a lens group, a lens, a detector CCD1 containing a precise movement mechanism and a detector CCD2 containing the precise movement mechanism,
based on a light ray tracing principle and a light field expression method, surface shape and position information of two surfaces of a transmission sample are obtained;
the graphic system is set up, firstly, a standard parallel flat plate plated with a semi-transparent and semi-reflective film is placed at the position of a sample to be measured, a computer is used for controlling a light source and a micro-mirror array DMD, incident light is subjected to structured light coding, a precision motion mechanism is used for controlling a detector CCD1 and a detector CCD2 to move along the direction of a main light respectively, the position, the angle and the light intensity information of the incident light are obtained, and system calibration is completed;
placing a sample to be measured at a measuring position, controlling a light source and the DMD (micro mirror device), and scanning incident light, wherein the distribution and scanning mode of the incident light can be point-by-point scanning, and a scanning light structure can be arranged according to the surface shape characteristics to be measured;
the position, angle and light intensity information of emergent rays are obtained by controlling the detectors CCD1 and CCD2 through a precise motion mechanism, and sample measurement is completed; the first detector CCD1 can calculate the surface shape information of the first surface of the sample to be measured according to the reflection law by using the positions and angles of incident light and emergent light of the same light, and the second detector CCD2 can calculate the surface shape information of the second surface of the sample to be measured according to the refraction law, the surface shape of the first surface and the refractive index of the element by using the positions and angles of the incident light and the emergent light of the same light.
Due to the adoption of the technical scheme, the invention has the following advantages:
(1) the invention adopts the DMD device of the micro-reflector array and the light source to accurately control the position of incident light. The angle of the incident light can be precisely controlled by using a proper optical lens. Therefore, various requirements of incident light of light ray tracing can be met, and the application range of the measuring system is effectively widened.
(2) The invention adopts a high-precision motion guide rail and a controller as the positioning of the detector. A high resolution CCD is used as the detector. When the two are combined, the light ray position can be measured, namely the light field principle represents the position, the angle and the light intensity of the emergent light ray, and more measurement information can be effectively obtained.
(3) The invention can accurately trace the incident and emergent information of each ray through the arrangement of the scanning path of the incident light, increases the measuring range of the ray, increases the measuring slope and curvature range of the optical element, and is suitable for the optical element with a more complex surface shape.
(4) The invention can measure various samples, including wave front information of transmission samples, surface shape and wave front information of reflection samples and information between two surfaces of the transmission samples plated with the semi-transparent and semi-reflective films.
Drawings
FIG. 1 is a schematic diagram of a light ray tracing system of the present invention measuring a transmission sample.
FIG. 2 is a schematic diagram of a light ray tracing system of the present invention measuring a reflective sample.
FIG. 3 is a schematic diagram of a light tracing system for measuring a transmission sample coated with a transflective film according to the present invention.
In FIG. 1, 1-light source, 2-shaping and collimating lens, 3-micromirror array DMD, 4-TIR prism, 5-lens group, 6-sample to be measured, 7-lens, 8-detector CCD containing precision motion mechanism;
in FIG. 2, 1-light source, 2-shaping and collimating lens, 3-detector CCD containing precision motion mechanism, 4-lens group, 5-emission sample, 6-beam splitter prism, 7-TIR prism, 8-micromirror array DMD;
in FIG. 3, 1-light source, 2-shaping and collimating lens, 10-micromirror array DMD, 9-TIR prism, 8-beam splitter prism, 4-lens group, 5-standard parallel flat plate sample plated with semi-transparent and semi-reflective film, 6-lens, 7-detector CCD1 containing precise motion mechanism and 3-detector CCD2 containing precise motion mechanism.
Detailed Description
The invention is described in further detail below with reference to the figures and specific examples. It should be understood that the specific embodiments described herein are merely illustrative of the invention and are not intended to limit the invention.
It is noted that the terminology used herein is for the purpose of describing particular embodiments only and is not intended to be limiting of example embodiments according to the present application. As used herein, the singular forms "a", "an" and "the" are intended to include the plural forms as well, and it should be understood that when used in this specification the singular forms "a", "an" and/or "the" include "specify the presence of stated features, steps, operations, elements, or modules, components, and/or combinations thereof, unless the context clearly indicates otherwise.
It should be noted that the terms "first," "second," and the like in the description and claims of this application and in the drawings described above are used for distinguishing between similar elements and not necessarily for describing a particular sequential or chronological order. It is to be understood that the data so used is interchangeable under appropriate circumstances such that the embodiments of the application described herein are, for example, capable of operation in sequences other than those illustrated or otherwise described herein. Furthermore, the terms "comprises," "comprising," and "having," and any variations thereof, are intended to cover a non-exclusive inclusion, such that a process, method, system, article, or apparatus that comprises a list of steps or elements is not necessarily limited to those steps or elements expressly listed, but may include other steps or elements not expressly listed or inherent to such process, method, article, or apparatus.
It should be noted that the embodiments and features of the embodiments in the present application may be combined with each other without conflict.
The invention can increase the measurement slope and curvature range of the optical element based on the light modulation element DMD device, the high-precision motion controller and the image acquisition technology, and is suitable for optical elements with more surface shapes.
Example 1
Referring to fig. 1, the light ray tracing three-dimensional surface shape measuring system for measuring a transmission sample comprises a light source, a shaping and collimating lens, a micromirror array DMD, a TIR prism, a lens group, a sample to be measured, a lens and a detector CCD containing a precision motion mechanism. The system obtains the wavefront information of the transmission sample based on a light ray tracing principle and a light field expression method.
The method comprises the steps of building an illustration system, removing a sample to be tested, controlling a light source and a micromirror array (DMD) by using a computer, carrying out structured light coding on incident light, controlling a detector CCD (charge coupled device) to move along the direction of a main light through a precision motion mechanism, obtaining position, angle and light intensity information of the incident light, and completing system calibration; placing a sample to be measured at a measuring position, controlling a light source and the DMD (micro mirror device), and scanning incident light, wherein the distribution and scanning mode of the incident light can be point-by-point scanning, and a scanning light structure can be arranged according to the surface shape characteristics to be measured; the position, angle and light intensity information of emergent rays are obtained by controlling a detector CCD through a precise movement mechanism, and sample measurement is completed; and reconstructing the emergent light slope into actual wavefront information according to the calibration information and the measurement information to obtain the wavefront of the transmission sample to be measured.
Structural arrangement and propagation path: during measurement, a light source is vertically arranged above a shaping and collimating lens, a TIR prism is arranged below the shaping and collimating lens, the left side of the TIR prism is a micromirror array (DMD), the right side of the TIR prism is sequentially provided with a lens group, a lens and a CCD, and a transmission sample is placed between the lens group and the lens;
light is emitted from a light source and sequentially passes through a micro shaping and collimating lens, a mirror array DMD, a TIR prism, a lens group, a transmission sample, a lens and a CCD.
Example 2
Referring to fig. 2, the light ray tracing three-dimensional surface shape measuring system for measuring a reflection sample comprises a light source, a shaping and collimating lens, a micromirror array DMD, a TIR prism, a beam splitter prism, a lens group, a sample to be measured and a detector CCD containing a precise motion mechanism. The system obtains the wavefront information and the surface shape information of a reflection sample based on a light ray tracing principle and a light field expression method.
Building a graphic system, firstly placing a standard reflector at the position of a sample to be measured, controlling a light source and a micromirror array DMD by using a computer, carrying out structured light coding on incident light, controlling a detector CCD to move along the direction of a main light through a precision motion mechanism, obtaining the position, angle and light intensity information of the incident light, and finishing system calibration; removing a standard reflector at a measuring position, placing a sample to be measured, controlling a light source and a micro reflector array DMD, and performing scanning control on incident light rays, wherein the distribution and scanning mode of the incident light rays can be scanned point by point, and a scanning light structure can also be arranged according to the surface shape characteristics to be measured; the position, angle and light intensity information of emergent rays are obtained by controlling a detector CCD through a precise movement mechanism, and sample measurement is completed; obtaining the wavefront and the surface shape of the reflection sample to be measured according to the calibration information and the measurement information; and reconstructing the slope of emergent light of different phase planes into actual wavefront information, and calculating the surface shape information of the sample to be measured according to the reflection law by adopting the positions and angles of incident light and emergent light of the same light.
Structural arrangement and propagation path: during measurement, the light source is vertically arranged above the shaping and collimating lens, the TIR prism is arranged below the shaping and collimating lens, the left side of the TIR prism is the micromirror array DMD, the right side of the TIR prism is the beam splitter prism and the lens group in sequence, the CCD is arranged above the beam splitter prism, and the emission sample is placed on the right side of the lens group.
Light is emitted from a light source and sequentially passes through a shaping and collimating lens, a reflector array DMD, a TIR prism, a beam splitter prism, a lens group and a reflection sample, and the reflected light passes through the beam splitter prism and a CCD.
Example 3
Referring to fig. 3, the light-tracing three-dimensional surface shape measuring system of the present invention measures the surface shapes and position information of two surfaces of a transmission sample, and includes a light source, a shaping and collimating lens, a micromirror array DMD, a TIR prism, a beam splitter prism, a lens group, a sample to be measured, a lens, a detector CCD1 including a precision motion mechanism, and a detector CCD2 including a precision motion mechanism. The system obtains surface shape and position information of two surfaces of a transmission sample based on a light ray tracing principle and a light field expression method.
The graphic system is set up, firstly, a standard parallel flat plate plated with a semi-transparent and semi-reflective film is placed at the position of a sample to be measured, a computer is used for controlling a light source and a micro-mirror array DMD, incident light is subjected to structured light coding, a precision motion mechanism is used for controlling a detector CCD1 and a detector CCD2 to move along the direction of a main light respectively, the position, the angle and the light intensity information of the incident light are obtained, and system calibration is completed; placing a sample to be measured at a measuring position, controlling a light source and the DMD (micro mirror device), and scanning incident light, wherein the distribution and scanning mode of the incident light can be point-by-point scanning, and a scanning light structure can be arranged according to the surface shape characteristics to be measured; the position, angle and light intensity information of emergent rays are obtained by controlling the detectors CCD1 and CCD2 through a precise motion mechanism, and sample measurement is completed; the first detector CCD1 can calculate the surface shape information of the first surface of the sample to be measured according to the reflection law by using the positions and angles of incident light and emergent light of the same light, and the second detector CCD2 can calculate the surface shape information of the second surface of the sample to be measured according to the refraction law, the surface shape of the first surface and the refractive index of the element by using the positions and angles of the incident light and the emergent light of the same light.
Structural arrangement and propagation path: during measurement, a light source is vertically arranged above a shaping and collimating lens, a TIR prism is arranged below the shaping and collimating lens, the left side of the TIR prism is a micro-reflector array DMD, the right side of the TIR prism is a beam splitter prism, a lens group, a lens and a CCD2 in sequence, CC and 1 are arranged above the beam splitter prism, and an emission sample is placed between the lens group and the lens.
Light is emitted from a light source and sequentially passes through a shaping and collimating lens micro lens, a reflector array DMD, a TIR prism, a beam splitter prism, a lens group, a sample, a lens and a CCD2, and the light emitted from the sample passes through the lens group, the beam splitter prism and a CCD 2.
The foregoing is only a preferred embodiment of the present invention, and it should be noted that, for those skilled in the art, various modifications and decorations can be made without departing from the principle of the present invention, and these modifications and decorations should also be regarded as the protection scope of the present invention.
Claims (3)
1. A three-dimensional measuring system for the surface shape of a light ray tracing is characterized by comprising a light source, a shaping and collimating lens, a micro-reflector array DMD, a TIR prism, a lens group, a sample to be measured, a lens and a detector CCD containing a precise motion mechanism,
obtaining wavefront information of a transmission sample based on a light ray tracing principle and a light field expression method;
the method comprises the steps of building a light ray tracing surface shape three-dimensional measuring system, firstly removing a sample to be measured, controlling a light source and a micro-reflector array DMD by using a computer, carrying out structured light coding on incident light, controlling a detector CCD to move along the direction of a main light ray by a precise motion mechanism, obtaining the position, angle and light intensity information of the incident light ray, and completing system calibration;
placing a sample to be measured at a measuring position, controlling a light source and the DMD (micro mirror device), and scanning incident light, wherein the distribution and scanning mode of the incident light can be point-by-point scanning, and a scanning light structure can be arranged according to the surface shape characteristics to be measured;
the position, angle and light intensity information of emergent rays are obtained by controlling a detector CCD through a precise movement mechanism, and sample measurement is completed;
reconstructing the emergent light slope into actual wavefront information according to the calibration information and the measurement information to obtain the wavefront of the transmission sample to be measured; through a precise movement mechanism and point-by-point scanning, both incident light and emergent light can be calculated and obtained through calibration and measurement, so that the optical surface shape is calculated through light tracing, and further the method is applied to surface shape measurement of an optical element; in the optical measurement system, the spatial positional relationship of each member needs to be optically designed according to the focal length of the optical element, the field of view, the size of the element to be measured, and the like.
2. A three-dimensional measuring system for the surface shape of a light ray tracing is characterized by comprising a light source, a shaping and collimating lens, a micro-reflector array DMD, a TIR prism, a beam splitting prism, a lens group and a detector CCD containing a precise motion mechanism,
obtaining wavefront information and surface shape information of a reflection sample based on a light ray tracing principle and a light field expression method;
the method comprises the steps of building a light ray tracing surface shape three-dimensional measuring system, firstly placing a standard reflector at the position of a sample to be measured, controlling a light source and a micro-reflector array DMD by using a computer, carrying out structured light coding on incident light, controlling a detector CCD to move along the direction of a main light ray through a precise motion mechanism, obtaining the position, angle and light intensity information of the incident light ray, and completing system calibration;
removing a standard reflector at a measuring position, placing a sample to be measured, controlling a light source and a micro reflector array DMD, and performing scanning control on incident light rays, wherein the distribution and scanning mode of the incident light rays can be scanned point by point, and a scanning light structure can also be arranged according to the surface shape characteristics to be measured;
the position, angle and light intensity information of emergent rays are obtained by controlling a detector CCD through a precise movement mechanism, and sample measurement is completed;
obtaining the wavefront and the surface shape of the reflection sample to be measured according to the calibration information and the measurement information;
reconstructing the slope of emergent light of different phase planes into actual wavefront information, and calculating the surface shape information of the sample to be measured according to the reflection law by adopting the positions and angles of incident light and emergent light of the same light; through a precise movement mechanism and point-by-point scanning, both incident light and emergent light can be calculated and obtained through calibration and measurement, so that the optical surface shape is calculated through light tracing, and further the method is applied to surface shape measurement of an optical element; in the optical measurement system, the spatial positional relationship of each member needs to be optically designed according to the focal length of the optical element, the field of view, the size of the element to be measured, and the like.
3. A light ray tracing surface shape three-dimensional measuring system is characterized by comprising a light source, a shaping and collimating lens, a micro-reflector array DMD, a TIR prism, a beam splitter prism, a lens group, a lens, a detector CCD1 containing a precise movement mechanism and a detector CCD2 containing the precise movement mechanism,
based on a light ray tracing principle and a light field expression method, surface shape and position information of two surfaces of a transmission sample are obtained;
the method comprises the steps of building a light ray tracing surface shape three-dimensional measuring system, firstly placing a sample to be measured on a standard parallel flat plate plated with a semi-transparent and semi-reflective film, controlling a light source and a micro-reflector array DMD by using a computer, carrying out structured light encoding on incident light rays, controlling detectors CCD1 and CCD2 to move along the direction of main light rays respectively through a precision motion mechanism, obtaining position, angle and light intensity information of the incident light rays, and completing system calibration;
placing a sample to be measured at a measuring position, controlling a light source and the DMD (micro mirror device), and scanning incident light, wherein the distribution and scanning mode of the incident light can be point-by-point scanning, and a scanning light structure can be arranged according to the surface shape characteristics to be measured;
the position, angle and light intensity information of emergent rays are obtained by controlling the detectors CCD1 and CCD2 through a precise motion mechanism, and sample measurement is completed; the first detector CCD1 can calculate the surface shape information of the first surface of the sample to be measured according to the reflection law by using the positions and angles of incident light and emergent light of the same light, and the second detector CCD2 can calculate the surface shape information of the second surface of the sample to be measured according to the refraction law, the surface shape of the first surface and the refractive index of the element by using the positions and angles of the incident light and the emergent light of the same light; through a precise movement mechanism and point-by-point scanning, both incident light and emergent light can be calculated and obtained through calibration and measurement, so that the optical surface shape is calculated through light tracing, and further the method is applied to surface shape measurement of an optical element; in the optical measurement system, the spatial positional relationship of each member needs to be optically designed according to the focal length of the optical element, the field of view, the size of the element to be measured, and the like.
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