CN205580406U - Autocollimator - Google Patents
Autocollimator Download PDFInfo
- Publication number
- CN205580406U CN205580406U CN201620358714.4U CN201620358714U CN205580406U CN 205580406 U CN205580406 U CN 205580406U CN 201620358714 U CN201620358714 U CN 201620358714U CN 205580406 U CN205580406 U CN 205580406U
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- China
- Prior art keywords
- autocollimator
- collimating lens
- beam splitter
- blazed grating
- grating
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- Length Measuring Devices By Optical Means (AREA)
Abstract
The utility model discloses an autocollimator, autocollimator includes light source, beam splitter, collimating lens, blazed grating and receiver, the laser of light source output passes through beam splitter, collimating lens and blazed grating in proper order, blazed grating places with the littrow angle in the light path, and n level diffraction light that blazed grating produced passes through collimating lens, beam splitter and receiver in proper order, and wherein n be non zero integer, and 0 grade of diffraction light of blazed grating production passes through blazed grating, collimating lens, beam splitter and receiver after being awaited measuring the surface reflection in proper order, the utility model discloses an autocollimator has the blazed grating that can produce real -time reference beam, can realize the automatic, real -time, accurate of indicating value drift and revise that greatly reduced high accuracy autocollimator is to the requirement of environment.
Description
Technical field
This utility model relates to small angle measurement instrument technical field, in particular to one certainly
Collimator.
Background technology
Autocollimator is the common equipment of small angle measurement, and the flatness at angular surveying, flat board is surveyed
Amount, the straight line degree measurement of guide rail, the angle of axle system are rocked the fields such as measurement and are widely used.High-precision
Autocollimator is primarily limited to use environment, temperature in environment, air-flow, vibration etc. all can cause
The drift of indicating value and beating.Even if environment is strictly controlled, indicating value drift also cannot be completely eliminated
Move.Most common method is periodically autocollimator to be delivered to metrological service examine and determine at present, but
Use environment to be typically difficult to as calibrating environment stable, use the indicating value drift that environmental change brings
Remain uncontrollable.Thus cause the inaccurate of measurement result.
Utility model content
For above-mentioned problems of the prior art, this utility model provides a kind of autocollimator,
Autocollimator of the present utility model with producing the balzed grating, of real-time reference light beam, Ke Yishi
Existing indicating value drift automatic, real-time, accurately revise, be substantially reduced ultra-precise autocollimator to environment
Requirement.
For achieving the above object, the following technical scheme of this utility model offer:
A kind of autocollimator, described autocollimator includes light source, beam splitter, collimating lens, glitters
Grating and receptor, the laser of described light source output sequentially passes through beam splitter, collimating lens and glitters
Grating, described balzed grating, is in the optical path with the placement of Littrow angle, the n level that balzed grating, produces
Diffraction light sequentially passes through collimating lens, beam splitter and receptor, and wherein n is nonzero integer, glitters
Grating produce 0 order diffraction light reflected by tested surface after, sequentially pass through balzed grating, collimating lens,
Beam splitter and receptor.
Further, the one during described n order diffraction light is ± 1 grade and ± 2 order diffraction light.
Further, described balzed grating, surface is coated with aluminum film.
Further, described receptor is that charge coupled cell, four-quadrant photo detector or position are quick
Sense detector.
The beneficial effects of the utility model: autocollimator of the present utility model is with producing in real time
The balzed grating, of reference beam, the n order diffraction light work returned along original optical path that balzed grating, is produced
For the reference beam of autocollimator, 0 order diffraction light of balzed grating, is incided as test beams
Surface to be measured, owing to reference beam and test beams are produced by the same sheet gration within autocollimator
Raw, the drift that environmental change causes is identical, by realizing indicating value after taking both difference
The automatic correction of drift, it is thus achieved that real test result.
Accompanying drawing explanation
Fig. 1 is balzed grating, overall structure schematic diagram of the present utility model;
Fig. 2 is that tested surface heeling condition test beams transmits schematic diagram;
Fig. 3 is the reference beam drift schematic diagram that environment causes.
In figure: 1 light source, 2 beam splitters, 3 collimating lens, 4 balzed grating,s, 5 receive
Device, 6 tested surfaces, 7 reference beams, 8 test beams.
Detailed description of the invention
In order to make those skilled in the art be more fully understood that the technical solution of the utility model, below in conjunction with
Accompanying drawing of the present utility model, carries out clear, complete description to the technical solution of the utility model,
Based on the embodiment in the application, those of ordinary skill in the art are not making creative work
Other the similar embodiment obtained under premise, all should belong to the scope of the application protection.
Embodiment one:
As it is shown in figure 1, a kind of autocollimator, described autocollimator include light source 1, beam splitter 2,
Collimating lens 3, balzed grating, 4 and receptor 5, the laser of described light source 1 output sequentially passes through
Beam splitter 2, collimating lens 3 and balzed grating, 4, described balzed grating, 4 is in the optical path in order to spy
Sieve angle is placed, and described balzed grating, 4 surface is coated with aluminum film, for reflective balzed grating, to appointing
Meaning optical maser wavelength has high reflectance, and the n order diffraction light that balzed grating, 4 produces is as reference beam
7, reference beam 7 sequentially passes through collimating lens 3, beam splitter 2 and receptor 5, and wherein n is non-
Zero integer, the one during preferred n order diffraction light is ± 1 grade and ± 2 order diffraction light in the present embodiment,
The 0 order diffraction light that balzed grating, 4 produces is as test beams 8, and test beams 8 is by tested surface 6
After reflection, sequentially pass through balzed grating, 4, collimating lens 3, beam splitter 2 and receptor 5.Described
Receptor 5 is charge coupled cell, four-quadrant photo detector or position sensitive detectors.Light source
1 is the LASER Light Source of any wavelength.Light source 1 is positioned at the focal position of collimating lens 3, benchmark
Light beam 7 and test beams 8 all focus on after beam splitter 2 at receptor 5.
If as in figure 2 it is shown, tested surface 6 is relative to test beams 8 cant angle theta angle, through tested surface 6
After reflection, test beams 8 again passes by balzed grating, 4, collimating lens 3, beam splitter 2, finally
Being received by receptor 5, the test beams 8 convergent point on receptor 5 is with meeting during vertical incidence
Ideal distance between accumulation is d, according to autocollimating measurement principle, can calculate tested surface 6
Inclination angle:
D=2f θ
Wherein, f is the focal length of collimating lens.
As shown in Figure 3, it is assumed that the displacement that the angle drift that environment causes is corresponding on receptor 5
For Δ d, then the displacement of test beams 8 correspondence is that d '=(d+ Δ d), wherein d ' is receptor
5 displacements detecting test beams 8, d is that tested surface 6 tilts the actual displacement amount caused,
And reference beam 7 displacement of correspondence on receptor 5 is Δ d ', due to reference beam 7 and survey
Examination light beam 8 comes from the same a piece of balzed grating, 4 in autocollimator, therefore, Δ d '=Δ d, can
To form difference structure, from the displacement of test beams 8, deduct the displacement of reference beam 7 i.e.
Tested surface 6 can be obtained and tilt the actual displacement amount caused, it is achieved the real-time correction of indicating value drift.Pass through
Regulation direction of displacement, makes d, d ', Δ d, Δ d ' on the occasion of or negative value, thus obtain tested surface
The deflection angle of 6 and yawing moment.
It is exemplified below:
Balzed grating, 4 use 1 order diffraction light as reference beam 7, with incident beam overlaps;0
Order diffraction light is as test beams 8, with incident beam is vertical;Tested surface 6 inclination angle is θ, places
Before autocollimator, test beams 8 reflects post deflection 2 θ through tested surface 6, again through glittering
Grating 4, collimating lens 3, beam splitter 2, focus on receptor 5, according to the angle of collimating lens
Degree-displacement relation, works as f=2m, and the inclination angle of tested surface 6 is 1 ', then tested surface tilts to cause
Actual displacement amount be d=1mm, but the existence of the angle drift caused due to environment, test light
The displacement restrainting 8 correspondences further comprises the displacement that environmental drift is corresponding, i.e. d '=d+ Δ d, d '
Directly recorded by receptor 5, in order to obtain real d value, it is necessary to record Δ d value, and reference light
Restraint displacement Δ the d '=Δ d of 7 correspondences, be also directly to be recorded by receptor 5.The drift that environment causes
The drift value of reference beam 7 correspondence within shifting amount is typically 5 " within, be calculated 5 " with
Relation between the deviation angle of test beams 8 correspondence is as shown in the table:
Table 1
Environmental drift amount/" | 1 | 2 | 3 | 4 | 5 |
Displacement/μm that reference beam is corresponding | 4.9 | 9.7 | 14.5 | 19.4 | 24.2 |
Displacement/μm that test beams is corresponding | 1004.9 | 1009.7 | 1014.5 | 1019.4 | 1024.2 |
Real d value/μm | 1000 | 1000 | 1000 | 1000 | 1000 |
Real θ value/' | 1 | 1 | 1 | 1 | 1 |
Moreover, it will be appreciated that although this specification is been described by according to embodiment, but the most every
Individual embodiment only comprises an independent technical scheme, and this narrating mode of description is only
For clarity sake, those skilled in the art should be using description as an entirety, in each embodiment
Technical scheme can also form other that it will be appreciated by those skilled in the art that real through appropriately combined
Execute mode.
Claims (4)
1. an autocollimator, it is characterised in that described autocollimator include light source, beam splitter,
Collimating lens, balzed grating, and receptor, described light source output laser sequentially pass through beam splitter,
Collimating lens and balzed grating, described balzed grating, is placed with Littrow angle in the optical path, is glittered
The n order diffraction light that grating produces sequentially passes through collimating lens, beam splitter and receptor, and wherein n is
Nonzero integer, after the 0 order diffraction light that balzed grating, produces is reflected by tested surface, sequentially passes through and glitters
Grating, collimating lens, beam splitter and receptor.
Autocollimator the most according to claim 1, it is characterised in that described n order diffraction light
For the one in ± 1 grade and ± 2 order diffraction light.
Autocollimator the most according to claim 1, it is characterised in that described balzed grating, table
Face is coated with aluminum film.
Autocollimator the most according to claim 1, it is characterised in that described receptor is electricity
Lotus coupling element, four-quadrant photo detector or position sensitive detectors.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
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CN201620358714.4U CN205580406U (en) | 2016-04-26 | 2016-04-26 | Autocollimator |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201620358714.4U CN205580406U (en) | 2016-04-26 | 2016-04-26 | Autocollimator |
Publications (1)
Publication Number | Publication Date |
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CN205580406U true CN205580406U (en) | 2016-09-14 |
Family
ID=56861289
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CN201620358714.4U Expired - Fee Related CN205580406U (en) | 2016-04-26 | 2016-04-26 | Autocollimator |
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Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN105783789A (en) * | 2016-04-26 | 2016-07-20 | 中国工程物理研究院激光聚变研究中心 | Autocollimator |
CN117871044A (en) * | 2023-12-14 | 2024-04-12 | 中国计量科学研究院 | Device and method for measuring Littrow diffraction angle |
-
2016
- 2016-04-26 CN CN201620358714.4U patent/CN205580406U/en not_active Expired - Fee Related
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN105783789A (en) * | 2016-04-26 | 2016-07-20 | 中国工程物理研究院激光聚变研究中心 | Autocollimator |
CN105783789B (en) * | 2016-04-26 | 2018-06-19 | 中国工程物理研究院激光聚变研究中心 | A kind of autocollimator |
CN117871044A (en) * | 2023-12-14 | 2024-04-12 | 中国计量科学研究院 | Device and method for measuring Littrow diffraction angle |
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Date | Code | Title | Description |
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C14 | Grant of patent or utility model | ||
GR01 | Patent grant | ||
CF01 | Termination of patent right due to non-payment of annual fee | ||
CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20160914 Termination date: 20170426 |