CN100594254C - 薄膜制备装置及薄膜生长的观察方法 - Google Patents
薄膜制备装置及薄膜生长的观察方法 Download PDFInfo
- Publication number
- CN100594254C CN100594254C CN200810108517A CN200810108517A CN100594254C CN 100594254 C CN100594254 C CN 100594254C CN 200810108517 A CN200810108517 A CN 200810108517A CN 200810108517 A CN200810108517 A CN 200810108517A CN 100594254 C CN100594254 C CN 100594254C
- Authority
- CN
- China
- Prior art keywords
- film
- heater
- evaporation
- coating chamber
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Images
Landscapes
- Physical Vapour Deposition (AREA)
Abstract
Description
Claims (3)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN200810108517A CN100594254C (zh) | 2008-05-21 | 2008-05-21 | 薄膜制备装置及薄膜生长的观察方法 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN200810108517A CN100594254C (zh) | 2008-05-21 | 2008-05-21 | 薄膜制备装置及薄膜生长的观察方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
CN101275218A CN101275218A (zh) | 2008-10-01 |
CN100594254C true CN100594254C (zh) | 2010-03-17 |
Family
ID=39995066
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN200810108517A Expired - Fee Related CN100594254C (zh) | 2008-05-21 | 2008-05-21 | 薄膜制备装置及薄膜生长的观察方法 |
Country Status (1)
Country | Link |
---|---|
CN (1) | CN100594254C (zh) |
Families Citing this family (13)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN102337503A (zh) * | 2010-07-19 | 2012-02-01 | 鸿富锦精密工业(深圳)有限公司 | 膜料加工装置及具有该膜料加工装置的蒸镀设备 |
CN102877029B (zh) * | 2012-09-11 | 2014-03-05 | 中国科学技术大学 | 一种太阳能电池片用纳米薄膜蒸发套件 |
CN103805956B (zh) * | 2014-02-27 | 2015-10-21 | 苏州大学 | 一种原位形貌和光学性能监控蒸发源及真空沉积设备 |
CN104073764B (zh) | 2014-06-17 | 2016-05-18 | 京东方科技集团股份有限公司 | 一种用于oled蒸镀的旋转蒸发源装置 |
CN104928640B (zh) * | 2015-07-05 | 2017-11-07 | 林志苹 | 一种多孔活性炭颗粒与二氧化钛薄膜复合的方法 |
JP6600519B2 (ja) * | 2015-09-28 | 2019-10-30 | 株式会社Screenホールディングス | 成膜装置およびデータ作成方法 |
CN106978587B (zh) * | 2016-01-15 | 2019-11-08 | 张家港康得新光电材料有限公司 | 真空镀膜设备与单质薄膜的镀制方法 |
CN107841722A (zh) * | 2017-11-15 | 2018-03-27 | 中山市创科科研技术服务有限公司 | 一种光学镀膜直接监控控制蒸镀的防护装置 |
CN108796450A (zh) * | 2018-08-17 | 2018-11-13 | 北京铂阳顶荣光伏科技有限公司 | 一种连接装置及共蒸加热装置 |
CN109609915B (zh) * | 2019-01-09 | 2020-12-01 | 张晓军 | 无序工程半导体纳米材料制备*** |
CN111826628B (zh) * | 2020-06-24 | 2022-07-29 | 合肥科晶材料技术有限公司 | 一种使用磁铁控制石英坩埚的装置 |
CN111850496A (zh) * | 2020-07-28 | 2020-10-30 | 合肥科晶材料技术有限公司 | 一种用于制作固态薄膜电池的rf和pvd*** |
CN112195443A (zh) * | 2020-09-14 | 2021-01-08 | 武汉电信器件有限公司 | 一种薄膜沉积***及镀膜方法 |
-
2008
- 2008-05-21 CN CN200810108517A patent/CN100594254C/zh not_active Expired - Fee Related
Non-Patent Citations (6)
Title |
---|
紫外光下观察有机发光膜. 宋长安等.甘肃科技,第20卷第8期. 2004 |
紫外光下观察有机发光膜. 宋长安等.甘肃科技,第20卷第8期. 2004 * |
辐射式衬底加热器及加热坩锅的研制. 宋长安等.真空,第41卷第5期. 2004 |
辐射式衬底加热器及加热坩锅的研制. 宋长安等.真空,第41卷第5期. 2004 * |
采用低温辐射加热源的有机半导体薄膜真空蒸发设备的研制. 李训栓等.真空,第45卷第2期. 2008 |
采用低温辐射加热源的有机半导体薄膜真空蒸发设备的研制. 李训栓等.真空,第45卷第2期. 2008 * |
Also Published As
Publication number | Publication date |
---|---|
CN101275218A (zh) | 2008-10-01 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
CN100594254C (zh) | 薄膜制备装置及薄膜生长的观察方法 | |
CN201305624Y (zh) | 薄膜制备装置 | |
CN105720132B (zh) | 一种柔性衬底上制备cigs吸收层碱金属掺杂方法 | |
CN105244416B (zh) | 一种铜锑硒太阳能电池光吸收层薄膜的低温沉积工艺 | |
CN103343318B (zh) | 太阳能电池的光吸收层的制备方法 | |
CN100594255C (zh) | 一种用于制备稀土掺杂氮化镓发光薄膜的方法和装置 | |
CN101168836A (zh) | 一种采用共溅射沉积法制备碲化铋合金薄膜的方法 | |
Zhao et al. | A study on Ti-doped ZnO transparent conducting thin films fabricated by pulsed laser deposition | |
KR101125008B1 (ko) | 하향식 증발원과 이를 구비한 증착장치 | |
CN107058962A (zh) | 一种低温磁控溅射制备低电阻率氮化钛薄膜的方法 | |
CN101591764B (zh) | 材料成膜方法及其制备的有机电致发光器件 | |
CN102286721B (zh) | 采用磁控溅射法制备碲化镉纳米线阵列的方法 | |
Fuster et al. | System for manufacturing complete Cu (In, Ga) Se2 solar cells in situ under vacuum | |
Parshina et al. | Properties of SnO 2: Sb films produced on flexible organic substrates by droplet-free pulsed laser deposition method | |
TW201842224A (zh) | 鍍膜裝置以及用於在真空下於基板上進行反應性氣相沉積的方法 | |
JP4167833B2 (ja) | 成膜装置、酸化物薄膜成膜用基板及びその製造方法 | |
CN201713566U (zh) | 蒸发镀膜装置 | |
US9856578B2 (en) | Methods of producing large grain or single crystal films | |
CN111403550B (zh) | 一种钙钛矿太阳能电池及其制备方法 | |
TWI496919B (zh) | Film manufacturing method and film manufacturing apparatus | |
US9103032B2 (en) | Apparatus and method for forming thin films in solar cells | |
CN102157262B (zh) | 一种以Ta2O5薄膜为电介质膜的电容器制备方法 | |
CN103681960A (zh) | 一种制备cigs薄膜的前驱层cig的多步溅射工艺 | |
JP2002348658A (ja) | 蒸着源並びにそれを用いた薄膜形成方法及び形成装置 | |
CN104505462A (zh) | 一种有机金属卤化物薄膜及其制备方法与应用 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
C06 | Publication | ||
PB01 | Publication | ||
C10 | Entry into substantive examination | ||
SE01 | Entry into force of request for substantive examination | ||
C14 | Grant of patent or utility model | ||
GR01 | Patent grant | ||
ASS | Succession or assignment of patent right |
Owner name: TIANJIN BAITENG PRODUCTIVITY CENTER CO., LTD. Free format text: FORMER OWNER: LANZHOU UNIVERSITY Effective date: 20110505 |
|
C41 | Transfer of patent application or patent right or utility model | ||
COR | Change of bibliographic data |
Free format text: CORRECT: ADDRESS; FROM: 730000 NO. 222, TIANSHUI SOUTH ROAD, LANZHOU CITY, GANSU PROVINCE TO: 300300 NO. 28, FUSHAN ROAD, DONGLI DISTRICT, TIANJIN CITY |
|
TR01 | Transfer of patent right |
Effective date of registration: 20110505 Address after: 300300 Tianjin City, Dongli District Fuk Road, No. 28 Patentee after: Tianjin Baiteng Productivity Promotion Center Co. Ltd. Address before: 730000 Tianshui South Road, Gansu, Lanzhou, No. 222 Patentee before: Lanzhou University |
|
C17 | Cessation of patent right | ||
CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20100317 Termination date: 20140521 |