CN100555585C - 三重扩散法制备绝缘栅双极晶体管用n-/p-/p+衬底方法 - Google Patents
三重扩散法制备绝缘栅双极晶体管用n-/p-/p+衬底方法 Download PDFInfo
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- CN100555585C CN100555585C CNB2008101216455A CN200810121645A CN100555585C CN 100555585 C CN100555585 C CN 100555585C CN B2008101216455 A CNB2008101216455 A CN B2008101216455A CN 200810121645 A CN200810121645 A CN 200810121645A CN 100555585 C CN100555585 C CN 100555585C
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CNB2008101216455A CN100555585C (zh) | 2008-10-23 | 2008-10-23 | 三重扩散法制备绝缘栅双极晶体管用n-/p-/p+衬底方法 |
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CNB2008101216455A CN100555585C (zh) | 2008-10-23 | 2008-10-23 | 三重扩散法制备绝缘栅双极晶体管用n-/p-/p+衬底方法 |
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CN101399202A CN101399202A (zh) | 2009-04-01 |
CN100555585C true CN100555585C (zh) | 2009-10-28 |
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JP5979993B2 (ja) * | 2012-06-11 | 2016-08-31 | ルネサスエレクトロニクス株式会社 | 狭アクティブセルie型トレンチゲートigbtの製造方法 |
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