CN100538378C - Obtain the method for single particle phenomenon cross section and heavy ion linear energy transfer relation - Google Patents

Obtain the method for single particle phenomenon cross section and heavy ion linear energy transfer relation Download PDF

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CN100538378C
CN100538378C CNB2007101779605A CN200710177960A CN100538378C CN 100538378 C CN100538378 C CN 100538378C CN B2007101779605 A CNB2007101779605 A CN B2007101779605A CN 200710177960 A CN200710177960 A CN 200710177960A CN 100538378 C CN100538378 C CN 100538378C
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single particle
section
measured device
ion beam
energy transfer
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CN101158705A (en
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王群勇
陈冬梅
姜大勇
陈宇
郝有香
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BEIJING SAN-TALKING TESTING ENGINEERING ACADEMY Co Ltd
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BEIJING SAN-TALKING TESTING ENGINEERING ACADEMY Co Ltd
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Abstract

The invention discloses a kind of method of obtaining single particle phenomenon cross section and heavy ion linear energy transfer relation, comprise: measured device is placed on testing position, select energy, fluence rate, fluence, ion that homogeneity is suitable, open the baffle plate of ion beam, described measured device is carried out heavy ion radiation, the predetermined fluence of maximum takes place or reach up to the single particle phenomenon of expection; Write down the number of times of described measured device generation single particle phenomenon SEP, and write down the fluence of described ion and the single particle phenomenon cross section takes place, close ion beam; Reselect ionic species, the repeating step above-mentioned steps; At least selecting more than 5 kinds the LET value to test, is ordinate with described generation single particle phenomenon cross section, is horizontal ordinate with the LET value, obtains taking place the relation of single particle phenomenon cross section and LET.The ability of the device anti-single particle phenomenon that the present invention can be effectively uses space flight is tested, thereby instructs research institute to improve the capability of resistance to radiation of device, improves the reliability of device.

Description

Obtain the method for single particle phenomenon cross section and heavy ion linear energy transfer relation
Technical field
The present invention relates to the nuclear physics field, (Single EventPhenomena SEP), particularly relates to a kind of method of obtaining single particle phenomenon cross section and heavy ion linear energy transfer relation about single particle phenomenon.
Background technology
Fast development along with aerospace industry, it is more and more to be applied to spaceborne integrated circuit, and the function of integrated circuit is also more and more, volume is more and more littler, degree of integration improves constantly, make spacecraft become responsive more to the influence of space environment effect, particularly along with the minimizing of integrated circuit live width, integrated level increases, the electric charge that the change of unit point position/logic state needs is more and more littler, and there is a large amount of high energy particles in the cosmic space of spacecraft operation, so device is more and more responsive to single particle phenomenon.
So-called single particle phenomenon, be meant that the single high energy charged particles in cosmic space incides spacecraft microelectronic component sensitizing range, cause that microelectronic component logic error or parafunctional phenomenon are called single particle phenomenon, comprise single-particle inversion (Single Event Upset, SEU), single-particle burns (Single Event Burn-out, SEB), single event latch-up (Single Event Latch-up, SEL), single-particle gate breakdown (Single Event Gate Rupture, SEGR) and the single-particle function stop (Single Event Functionality Interrupt, SEFI).Single-particle inversion SEU is meant single-particle bump integrated circuit, cause the logic state of locking that from 1 to 0 or from 0 to 1 change takes place, comprise reversal commentaries on classics and hard error (Single Event Hard Erro, SEHE), single-particle inversion is not destructive, most cases is that reversal is changeed, and its logical block can be made carbon copies or reset.Single hard error is meant the nonvolatil destruction of semiconductor devices medium that is caused by the single-particle bump, is a kind of irreversible state.Single-particle burns the phenomenon that is meant the big electric current of power transistor leakage-source electrode that is caused by the single-particle bump, causes catastrophic component failure, and feature shows as the drain current increase and surpassed the specified leakage current of setting when dispatching from the factory of drain electrode.Single event latch-up is to cause that by the single-particle bump integrated circuit produces potential or permanent destructive state, can cause a parasitic thyristor structure (PNPN structure) that is equivalent to thyristor, produces the passage of a high electric current of Low ESR.The single-particle gate breakdown is meant the local failure gate breakdown that the single-particle bump causes, causes catastrophic component failure, and feature shows as the grid current increase and surpassed the specified gate leak current of setting when dispatching from the factory.
Spacecraft cost costliness, so spaceborne integrated circuit all needs very high reliability, only device that can the anti-single particle phenomenon in the cosmic space just can be used on the spacecraft, therefore, simulated space environment on the ground comes the ability of the anti-single particle phenomenon of the detection means means that necessitate.
Summary of the invention
The purpose of this invention is to provide and a kind ofly measured device is carried out the method for radiation test, a kind of method of obtaining single particle phenomenon cross section and heavy ion linear energy transfer relation particularly is provided in the ground simulation space environment.
For achieving the above object, technical scheme of the present invention provides a kind of method of obtaining single particle phenomenon cross section and heavy ion linear energy transfer relation, may further comprise the steps: (1) is placed on testing position with measured device, and connect with testing apparatus, start described measured device work, verify that described measured device is working properly; (2) select ionic species, and measure the linear energy transfer LET value of described ion beam, regulate ion beam cross section, make described ion beam cross section size be the area size of described measured device, and measure the homogeneity and the ion beam fluence rate of described whole ion beam cross section; (3) open the baffle plate of ion beam current, described measured device is carried out heavy ion radiation, the single particle phenomenon that statistics takes place is up to the predetermined fluence of maximum or reach the single particle phenomenon number of expectation; (4) close ion beam, obtain the single particle phenomenon cross section takes place; (5) reselect new ionic species or change described energy of ions, incident angle to obtain new LET value, repeating step (2) is to (4); (6) selecting more than 5 kinds the LET value to test at least, is ordinate with described generation single particle phenomenon cross section, is horizontal ordinate with the LET value, obtains taking place the relation of single particle phenomenon cross section and LET.
Wherein, after connecting described measured device and testing apparatus, step (1) also comprises: described testing apparatus, stube cable and signal wire are detected affirmation equipment and connect correct.
Wherein, after described testing apparatus, stube cable and signal wire are detected, also comprise: to described testing apparatus insulate, electromagnetic screen and ground connection operates, and the vacuum tank in the described testing apparatus carried out shading treatment.
Wherein, before described measured device is placed on testing position, also comprise: described measured device is uncapped, and remove the overlayer of the chip surface of described measured device, and the described measured device after uncapping is carried out functional test.
Wherein, before being uncapped, described measured device also comprises: estimate the LET threshold value according to test or the laser test of knowing the real situation of knowing the real situation of described measured device historical data, californium source, and, in step (2), select the LET value to test greater than the ion of described LET threshold value according to described LET threshold value.
Wherein, the described LET of estimating threshold value specifically comprises: (1) has α particle source test figure, has only single-particle inversion to occur, and then the LET threshold value is less than 1MeV/ (mg/cm 2); (2) have the proton test data to have only single-particle inversion to occur, then the LET threshold value is less than 6MeV/ (mg/cm 2); (3) the heavy ion test figure is arranged, then the LET threshold value LET value in the ion experiments data of attaching most importance to; (4) described measured device includes the LET threshold value of bipolarity random access memory, low-power logic circuit, low-power schottky logical circuit, processor, N NMOS N-channel MOS N field effect transistor, P-channel metal-oxide-semiconductor field effect transistor, dynamic RAM device less than 15MeV/ (mg/cm 2); Described measured device include large-scale complementary metal oxide semiconductor (CMOS) device, calibration power logical device, low speed devices, live width more than or equal to the LET threshold value of 10 μ m devices, programmable read only memory device greater than 15MeV/ (mg/cm 2); (5) with the californium source described device is carried out radiation, if single particle phenomenon takes place, then the LET threshold value is less than 43MeV/ (mg/cm 2), otherwise the LET threshold value is greater than 43MeV/ (mg/cm 2).
Wherein, the energy measuring of measuring the linear energy transfer LET of described ion beam comprises: the sheet metal of placing known thickness and density on the local surfaces of surface barrier detector, with described ion beam irradiation sheet metal, obtain two energy peaks, calculate the energy loss that ion beam penetrates described sheet metal according to described two energy peaks, obtain the LET value of described ion beam.
Wherein, described surface barrier detector is calibrated before using.
Wherein, measuring described ion beam fluence rate specifically comprises: utilize scintillation detector that scintillation detector of the every bump of described ion is produced a count signal and measure.
Wherein, select the different aperture of described scintillation detector according to the different ions fluence rate.
Wherein, described scintillation detector photoelectric tube is set and departs from 90 ° of described ion beam axis.
Wherein, the homogeneity of the described whole ion beam cross section of described measurement is specific as follows: adopt a plurality of described scintillation detectors that the whole section of described ion beam is gathered.
Wherein, a plurality of described scintillation detectors of described employing are specially the whole section collection of described ion beam: at described ion beam exterior domain four border scintillation detectors are set and gather.
Wherein, described fluence rate is 10 2～10 5Ions/ (cm 2S).
Wherein, described fluence is accumulated to 10 7Ions/cm 2Or generation single particle phenomenon number of times is accumulated to 100 times.
Wherein, the range of described ion beam penetrates the sensitizing range of described measured device.
Wherein, the range of described ion beam is greater than 30 μ m.
Wherein, reselecting ionic species specifically comprises: selecting for use ion to carry out radiation should select according to the descending order of described LET value.
Wherein, described generation single particle phenomenon is a single-particle inversion, and after single-particle inversion took place, a step or the multistep in further comprising the steps of: (1) changed fluence rate, under the situation of testing tool or gauging table nonoverload, obtain the data of the generation single-particle inversion of described measured device; (2), carry out radiation test again 2 to 3 times, be used to verify the stability of ion beam; (3) change ion beam angle, increase described point or choose different ionic speciess, energy, angle, but have under the situation of identical described LET value, carry out radiation again, whether the validation test value is consistent; (4) after the operational factor of the described measured device of change, carry out radiation again; (5) change test ambient temperature, carry out radiation again; (6) choose another measured device of same batch products, carry out radiation again, be used for the otherness between confirmatory sample; (7) change described ion beam energy to obtain a new LET value, carry out radiation again; (8) change ionic species,, carry out radiation again to obtain a new LET value.
Wherein, do not take place after the single particle phenomenon of described single-particle inversion, step of one in further comprising the steps of or multistep: (1) increases described ion beam fluence; (2) increase described ion beam angle, carry out radiation again; (3) operational factor of the described measured device of change is carried out radiation again; (4) radiation is carried out in the biasing of the described measured device of change again; (5) choose another measured device of same batch products, carry out radiation again; (6) change described ion beam energy to obtain a new LET value, carry out radiation again; (7) change ionic species,, carry out radiation again to obtain a new LET value.
Wherein, at least selecting after the LET value is tested more than 5 kinds, also comprise test figure is carried out record, the test figure of record specifically comprises: the kind of described ion and energy, the type of measured device, model, technology and production batch, the test parameter of measured device, described ion beam incident angle, the used accelerator type of described ion beam, number of times, position, the LET value of single particle phenomenon take place, and generation single event latch-up, single-particle burn, the position when the single-particle grid are worn and LET value.
Wherein, burn SEB or single-particle gate breakdown SEGR if described single particle phenomenon SEP is a single-particle, then described measured device is being carried out also comprising after the heavy ion radiation: (1) writes down the current impulse number of times of each radiation if carry out the SEB attribute testing; If carry out the SEGR attribute testing,, stop ion beam irradiation detecting when described measured device grid current changes the gate current range that surpasses regulation; (2) carry out SEB or SEGR demonstration test, monitor described measured device grid and drain current, change, write down observed condition if observe electric current; (3) turn off ion beam, apply nominal gate voltage at described measured device, the monitoring grid current changes if observe electric current, writes down observed condition; (4) record test figure specifically comprises: record ionic species, ion energy, range, LET value mean fluence rate, fluence and test condition.
Wherein, described SEB attribute testing specifically comprises: to gate source voltage, the drain source voltage bias condition that described measured device is exerted pressure and stipulated, and the fluence of radiation regulation, if SEB takes place, then counter increases counting and carries out record, regulates fluence rate, makes per second that the SEB number take place and is no more than 100, when the fluence of setting reaches, close the ion beam baffle plate, record SEB sum is selected different ions, obtain new LET value, repeat the above step.
Wherein, also carry out the SEB demonstration test after the described SEB attribute testing, specifically may further comprise the steps: electric capacity is placed in the drain electrode at described measured device, gate source voltage, the drain source voltage bias condition of the regulation of exerting pressure, the fluence of radiation regulation if described measured device lost efficacy, then stops radiation.
Wherein, described SEGR attribute testing specifically comprises: to gate source voltage, the drain source voltage bias condition that described measured device is exerted pressure and stipulated, the fluence of radiation regulation if SEGR takes place, then stops radiation, record accumulative total fluence.
Wherein, also carry out the SEGR demonstration test after the described SEGR attribute testing, specifically may further comprise the steps: to gate source voltage, the drain source voltage bias condition that described measured device is exerted pressure and stipulated, the fluence of radiation regulation, if described measured device lost efficacy, then stop radiation.
Technique scheme only is an optimal technical scheme of the present invention, has following advantage: by above technical scheme, the ability of the device anti-single particle phenomenon of can be effectively space flight being used is tested, thereby instruct research institute to improve the capability of resistance to radiation of device, effectively improve the radioresistance means of device, thereby improve the reliability of device and even integrated circuit, finally improve the reliability of spacecraft.But also can improve China's single particle experiment level.
Description of drawings
Fig. 1 is a kind of process flow diagram that obtains the method for single particle phenomenon cross section and heavy ion linear energy transfer relation of the embodiment of the invention;
Fig. 2 is a kind of synoptic diagram that obtains single particle phenomenon cross section and heavy ion linear energy transfer relation of the embodiment of the invention.
Fig. 3 is a kind of proving installation connection diagram of the embodiment of the invention;
Fig. 4 is a kind of device connection diagram of regulating heavy ion beam of the embodiment of the invention;
Fig. 5 is a kind of single event latch-up monitoring and the holding circuit schematic diagram of the embodiment of the invention.
Wherein: 1: the electric charge stripping foil; 2: the surface barrier detector; 3: scintillation detector; 4: vacuum target chamber; 5: the single particle effect test macro.
Embodiment
Below in conjunction with drawings and Examples, the specific embodiment of the present invention is described in further detail.Following examples are used to illustrate the present invention, but are not used for limiting the scope of the invention.
At first the term of using in the embodiment of the invention is made an explanation, fluence rate is meant the number of ions that passes through on the vertical ion beam unit area in the unit interval, and unit is ions/ (cm 2S).Fluence is meant the integration of fluence rate to the epicycle test period, and unit is ions/cm 2Range is meant the specific ion of known charge state and energy under no scattering situation, the distance of incident in target material.Energy is meant that accelerator is given and energy of ions, and unit is the energy of gross energy MeV or every atomic mass unit (MeV/AMU).LET (The Linear Energy Transfer) value is meant that existing energy shifts, i.e. the energy that in dielectric material, deposits on the unit length along the ion incidence track, and unit is MeVcm 2/ mg.The LET threshold value is meant that for a given device single-particle can cause the minimum LET value of a single-particle inversion SEU when vertical irradiation.The quantity of the single particle phenomenon that the single particle phenomenon SEP cross section unit of being meant ion fluence causes is the physical quantity of describing the single particle phenomenon probability of happening, and unit is cm 2/ device or cm 2/ bit represents the SEP cross section with σ, σ=SEP quantity/(ion fluence * cos θ), and θ is the normal angle of ion beam incident direction and measured device, i.e. the incident angle of ion beam.Saturated cross section claims the limit or progressive cross section again, and in saturated cross section, the increase of LET value can not cause the increase in single particle phenomenon cross section.The heavy ion of being mentioned in the present embodiment is meant that electric charge Z is more than or equal to 2 heavy ion.
Fig. 1 is a kind of process flow diagram that obtains the method for single particle phenomenon cross section and heavy ion linear energy transfer relation of the embodiment of the invention.In conjunction with Fig. 1, this method is described in detail.
Step 101, at first according to the measured device that will carry out the single particle phenomenon test, search have similar functions, the historical data of the domestic and international single particle phenomenon test of the device of technology or similar characteristics size (transistor density), if have, the LET threshold value of this measured device generation single particle phenomenon can be set: judged whether α particle source test figure according to this historical data, α particle source test figure is arranged, have single-particle inversion to occur, then the LET threshold value is less than 1MeV/ (mg/cm 2); Judged whether the proton test data, the proton test data are arranged, had single-particle inversion to occur, then the LET threshold value is less than 6MeV/ (mg/cm 2); If the heavy ion test figure is arranged, then near the LET value of LET threshold value in the heavy ion test figure; In addition, if measured device is the excessive risk device, as bipolarity random access memory, low-power logic circuit, low-power schottky logical circuit, processor, N NMOS N-channel MOS N field effect transistor, P-channel metal-oxide-semiconductor field effect transistor, dynamic RAM, then the LET threshold value generally should be less than 15; If measured device includes the low-risk device, more than or equal to 10 μ m devices, programmable read only memory, then the LET threshold value is generally greater than 15 as large-scale complementary metal oxide semiconductor (CMOS) device, calibration power logical device, low speed devices, live width; In addition, can also carry out radiation to described device, estimate the LET threshold value with the californium source, the californium source ( 252Cf) be a kind of fissionable material, radiate the α particle, decay into the transuranium radioactive nucleus, the decay semiperiod is 2.27, the californium source ( 252Cf) fission automatically, the half life period is 85 years, this source radiation α particle, fission fragment and fast neutron.Fission fragment can be used to carry out single particle phenomenon test, and the average LET value of 95% fission fragment is 41 and 45MeV/ (mg/cm 2) (si) between, average LET value is 43MeV/ (mg/cm 2) (si), the mean range in silicon is 14.2 μ m.With the californium source ( 252Cf) radiation measured device, the fragment of supposing the californium source fission arrives in the measured device process does not have energy loss, if single particle phenomenon takes place, then the LET threshold value is less than 43, otherwise the LET threshold value is greater than 43.Can also adopt laser to know the real situation in addition and test definite initial LET threshold range roughly.
Step 102, need be to the measured device processing of uncapping, the encapsulation of measured device outside is opened, guarantee that heavy ion beam enters chip, if chip surface has special overlayer (as the inferior peace of polyamides), preferably remove overlayer, according to the striping procedure operation of uncapping of producer suggestion, the process of uncapping may damage device, therefore, must carry out functional test after uncapping, the device after guaranteeing to uncap is intact.
Step 103 is placed on measured device on the testing position, and connects with testing apparatus, because have a large amount of electrical noises around the accelerator, for fear of noise effect, cable length should be lacked as far as possible.Testing apparatus, stube cable and signal wire are detected, and affirmation equipment and connection are correct.To testing apparatus insulate, the operation of electromagnetic screen and ground connection, and the vacuum tank in the testing apparatus carried out shading treatment.Start described measured device work, verify that described measured device is working properly.Because single event latch-up can cause the catastrophic timeliness of some device, therefore, can adopt power supply current limliting or power supply linear resistance to prevent the device timeliness, but must be noted that, current limiting measures cannot stop or influence the generation of the single event latch-up phenomenon that should occur.
Step 104, LET threshold value according to measured device, select ionic species, should select for use the LET value greater than near the ion the LET threshold value, in general, the LET value that heavy more ion produces is big more, should at first use heavier ion during test, after having determined the saturated cross section of LET value, select lower LET value ion to determine the threshold value starting point of point of inflexion on a curve shape and curve again with heavier ion.It should be noted that the incident degree of depth of selected ion beam is greater than the charged region degree of depth of measured device, level off to steady state value to guarantee ion beam LET when passing through the transistor charged region, the range of general ion beam is greater than 30 μ m.In addition, also need to measure the energy of ion beam, and fluence, fluence rate and homogeneity.The ion beam energy fluctuation all is satisfactory in positive and negative 10% scope, and the surface barrier detector can be used for measuring the energy of ion beam.The surface barrier detector briefly is a diode with large-scale dissipation district, can collect the electron-hole pair that is produced by ion beam strikes in the silicon materials.The electron-hole pair quantity that produces in silicon is the function of this unique variable of ion initial energy of impact surface potential barrier detector.Almost all energy of ion all dissipate by this way, and the energy of only taking advantage of can cause crystal lattice damage, and are very little but the energy of only taking advantage of accounts for the ratio of gross energy.The space distribution of these electron-hole pairs is functions of ionic species, and based on above reason, therefore, the dissipation district of surface barrier detector should be bigger on a large scale than ion/energy of being paid close attention to.The ion fluence rate should enough hang down to avoid ion to pile up.Ion beam nephelometric turbidity unit and energy peak can display requirement ion whether access.In the cycle in serviceable life of surface barrier detector, crystal lattice damage will build up formation, and this will cause the charge-trapping rate to be degenerated, and in addition, also must or go into the electric charge that deposits in the vented fire to dead layer and take measures.Therefore, the surface barrier detector must be calibrated before use, to improve the efficient of charge-trapping.On the local surfaces of surface barrier detector, place the sheet metal of known thickness and density, with described ion beam irradiation sheet metal, an ion beam part is radiated on the sheet metal, part direct radiation is to the surface barrier detector, so just obtain two energy peaks, obtain the LET value of ion beam according to the energy loss of two energy peaks and ion beam penetrating metal thin slice, promptly the energy difference is exactly the LET value of ion beam divided by the thickness of sheet metal.Utilize scintillation detector to measure the fluence rate and the fluence of ion beam, scintillation detector comprises two parts, first is a kind of special material, can produce photon when being clashed into by energetic ion, second portion is a photomultiplier, be photon technology, the every bump primary detector of ion, photomultiplier will produce a count signal.Scintillation detector needs time enough (being commonly called the dead time) to allow photomultiplier recover between twice ionic bombardment.If ion during this period of time clashes into scintillation detector, will can correctly do not added up, this being called " ion beam accumulation ", do not take place in order to ensure this situation, can select suitable aperture size at different ion fluence rates, for example, for 10 3～10 6Ions/ (cm 2S) fluence rate, general aperture size is selected 0.1cm 2Can also make the scintillation detector state that do not reach capacity in addition, make intrafascicular axis 90 degree of the luxuriant son of photomultiplier, this method can limit the photon numbers of bump photomultiplier, the area that scintillation material is exposed under the ion beam increases a lot, even reach whole ion beam, because photomultiplier is not on the directions of rays of ion beam, so scintillation detector can be placed on original position and needn't remove in duration of test.For the scintillation detector that adopts lightlng hole, scintillation detector has only been measured the fluence rate in the aperture, owing to must measure the fluence rate of whole ion beam, therefore need to adopt a plurality of scintillation detectors to gather the whole section of the particle beams, generally, distance 2cm place, sub-axis is provided with 4 scintillation detectors, these detectors are positioned at outside the effective ion beam, therefore, can be used as the homogeneity of ion beam under the worst case, the ion beam that test is adopted typically has a diameter from 1～2cm.Because these 4 scintillation detectors are positioned at the ion beam exterior domain, therefore continuous monitoring ion beam in test.Generalized case, fluence rate are 10 2～10 5Ions/ (cm 2S).Fluence is accumulated to 10 7Ions/cm 2Or generation single particle phenomenon number of times is accumulated to 100 times.In addition, also need the homogeneity of ion beam is detected, detection method has, if during in the work of high fluence rate, can see the uniform ion bundle on the quartzy display board in the beam transmission pipe at accelerator by suitably adjusting accelerator.After intensity weakens, can detect the homogeneity of ion beam with following way, (1) measures the ring-type homogeneity by the ion beam quantity that compares on two different concentric circless.(2) the measured device board mount that the horizontal level sensing detector is housed by one of vertical moving is measured the homogeneity of ion beam.(3) at ion beam periphery Chosen Point, compare, measure the homogeneity of ion beam.Acceptable when in general, amplitude of variation is in 10%.
Step 105, the starting outfit service condition is moved measured device, detects the electrical property of measured device successively, and it is normal to examine operation.Open the ion beam baffle plate, measured device is carried out heavy ion radiation, and writing time, the fluence rate of detection ion beam begins to be preferably 10 4Ions/ (cm 2S), the frequency of guaranteeing to occur single particle phenomenon is not too high also not too low, raises or reduces fluence rate, and the single particle phenomenon that per second is produced occurs by testing requirements.
Step 106, the radiation measured device, the single particle phenomenon that statistics takes place is closed baffle plate, writing time up to reaching maximum predetermined fluence or reaching single ionic phenomenon number of expectation.The generation single particle phenomenon is a single-particle inversion, general definite the generation after the single-particle inversion, in further comprising the steps of one step or multistep: (1) changes fluence rate, under the situation of testing tool or gauging table nonoverload, obtain having the data of generation single-particle inversion of the measured device of statistical significance; (2), carry out radiation test again 2 to 3 times, be used to verify the stability of ion beam; (3) change ion beam angle and increase described point, perhaps choose different ionic speciess, energy, angle, but have under the situation of identical described LET value, carry out radiation again, whether the validation test value is consistent; (4) after the operational factor of the described measured device of change, carry out radiation again; (5) if desired, change test ambient temperature, carry out radiation again, be used to confirm whether test value is consistent; (6) choose another measured device of same batch products, carry out radiation again, be used for the otherness between confirmatory sample; (7) change described ion beam energy to obtain a new LET value, carry out radiation again; (8) change ionic species,, carry out radiation again to obtain a new LET value.If the single particle phenomenon of single-particle inversion does not take place, then should carry out step of one in the following steps or multistep: (1) increases described ion beam fluence; (2) increase described ion beam angle, carry out radiation again; (3) operational factor of the described measured device of change is carried out radiation again; (4) radiation is carried out in the biasing of the described measured device of change again; (5) choose another measured device of same batch products, carry out radiation again; (6) change described ion beam energy to obtain a new LET value, carry out radiation again; (7) change ionic species,, carry out radiation again to obtain a new LET value.
Should take into full account the latch protection measure during test fixture design, when big electric current occurring, current limiting measures should be arranged, guarantee not occur lasting big electric current.And possesses the function of restarting.Step 107 is reselected new LET value, repeating step 104,105 and 106, and up to selecting above LET value in 5 at least, LET value scope should cover from threshold value to saturated cross section, satisfies test objective, then changes step 108.
Step 108, data according to test data sheet, so that single particle phenomenon cross section σ to take place is ordinate, with the LET value is horizontal ordinate, obtain taking place the plot of single particle phenomenon cross section σ and ion LET value, as shown in Figure 2, by drawing on the figure, the LET threshold value of measured device and saturated cross section value, be the LET threshold value that the pairing LET value of dotted line parallel with ordinate cross section σ among Fig. 2 is exactly a measured device, and the dotted line pairing cross section σ value parallel with horizontal ordinate LET value is exactly the boundary saturation value of measured device.According to the each point that test is determined, retouch out the relation curve of description generation single particle phenomenon cross section and LET.According to this curve, then can instruct with measured device to have the ability of anti-single particle phenomenon that class is the device of function, technology or similar characteristics size (transistor density).
If energetic ion equipment can provide the energy of every atomic mass unit up to several GeV, than other ion gun more near the feature of cosmic rays, above test procedure can be simplified, and does not need to the measured device step of uncapping, because the energy of the particle beams enough penetrates the entire device structure.
In addition, also can not predict the LET threshold value of measured device, but need time enough and fund at that rate, because the accent survey of ion beam is needed a large amount of time, and, at present, the expense of carrying out single particle experiment is also very expensive, therefore, and in order to save test period and test funds, the LET threshold value of prediction measured device is very necessary, can finish test more accurately sooner.
If being single-particle, single particle phenomenon SEP burns SEB or single-particle gate breakdown SEGR, wherein, if being single-particle, described single particle phenomenon SEP burns SEB or single-particle gate breakdown SEGR, then measured device is being carried out also comprising after the heavy ion radiation: (1) writes down the current impulse number of times of each radiation if carry out the SEB attribute testing; If carry out the SEGR attribute testing,, stop ion beam irradiation detecting when described measured device grid current changes the gate current range that surpasses regulation; (2) carry out SEB or SEGR demonstration test, monitor described measured device grid current I GSWith drain current I DSIf observe electric current and change generalized case, I GS10 -7Ampere writes down observed condition; (3) turn off ion beam, apply nominal gate voltage at described measured device, the monitoring grid current changes generalized case, I if observe electric current GS10 -7Ampere writes down observed condition; (4) record test figure specifically comprises: record ionic species, ion energy, range, LET value mean fluence rate, fluence and test condition.The SEB attribute testing specifically comprises: to measured device exert pressure the regulation gate source voltage, drain source voltage bias condition, the fluence of radiation regulation, if SEB takes place, then counter increases counting and carries out record, regulate fluence rate, make per second that the SEB number take place and be no more than 100, when the fluence of setting reaches, close the ion beam baffle plate, record SEB sum, select different ions, obtain new LET value, repeat the above step.
Also carry out the SEB demonstration test after the SEB attribute testing, specifically may further comprise the steps: electric capacity is placed in the drain electrode at measured device, gate source voltage, the drain source voltage bias condition of the regulation of exerting pressure, and the fluence of radiation regulation if measured device lost efficacy, then stops radiation.
The SEGR attribute testing specifically comprises: to gate source voltage, the drain source voltage bias condition that measured device is exerted pressure and stipulated, the fluence of radiation regulation if SEGR takes place, then stops radiation, record accumulative total fluence.Also carry out the SEGR demonstration test after the SEGR attribute testing, specifically may further comprise the steps: to gate source voltage, the drain source voltage bias condition that measured device is exerted pressure and stipulated, the fluence of radiation regulation if measured device lost efficacy, then stops radiation.
Point out simultaneously, the various devices of being mentioned in the present embodiment after submitting to the test application to be given the ratification, all can obtain using at China's nuclear physics laboratory, therefore, be not described in detail about technology contents such as the concrete structure of realizing the device in the embodiment of the invention scheme, using method.
Fig. 3 is a kind of proving installation connection diagram of the embodiment of the invention.Test board and the measured device that is placed on the test board are arranged in the vacuum tank, the fixture of measured device is rack-mount, guarantee that the cable that connects the measured device anchor clamps can not influence the rotation of support and measured device, and can not arrive measured device by the blocks ions bundle.Whether each pin that should detect the measured device socket after installing is normal, and whether erecting equipment connects correctly.And should utilize built-in He-Ne laser instrument to check the alignment case and the position of each socket on the fixture.Power supply is that the electricity consumption device in the vacuum tank is powered.Data acquisition equipment is connected with test board, is used for acquired signal.Test board in upper PC (robot calculator) machine and data acquisition equipment and the vacuum tank is connected, is used for detecting and storing test signal.
Fig. 4 is a kind of device connection diagram of regulating heavy ion beam of the embodiment of the invention.The heavy ion of ion gun emission enters into accelerator through electric charge stripping foil 1, through accelerator quicken the back heavy ion by analysis magnet screen and decontaminated ion beam, measure the energy and the LET value thereof of ion beam by surface barrier detector 2, the feedback measured value makes ion beam reach required value with adjusting for accelerator operation person, utilize scintillation detector 3 to measure the fluence of ion beam, fluence rate and homogeneity then, generally can utilize scattering and method of focusing to regulate the fluence rate and the homogeneity of ion beam.The ion beam that regulates is injected on the single particle effect test macro 5 of vacuum target chamber 4, carries out single particle experiment.
Fig. 5 is a kind of single event latch-up monitoring and the holding circuit schematic diagram of the embodiment of the invention.Wherein judge whether to be meant that less than setting whether the electric current of judging on the restrictor is less than measured device breech lock electric current, if then be communicated with measured device; If not, then restrictor sends to this signal on the processor, and processor disconnects according to this signal control relay, thereby measured device is protected, and is designated as the single event latch-up incident simultaneously one time, restarts then.Necessary writing time during the breech lock, purpose is to calculate effective fluence.
As can be seen from the above embodiments; the embodiment of the invention is carried out the single particle phenomenon test by adopting to spaceborne integrated circuit (IC)-components; thereby obtain the relation between measured device generation single particle phenomenon cross section and the LET value; and then can obtain the ability size of measured device anti-single particle phenomenon; the researchist can be according to the relation between measured device generation single particle phenomenon cross section and the LET value; find the design defect and the design advantage of device; improve the anti-radiation protection measure; improve the reliability of integrated circuit, finally can improve the reliability of spacecraft.
The above only is a preferred implementation of the present invention; should be pointed out that for those skilled in the art, under the prerequisite that does not break away from the technology of the present invention principle; can also make some improvements and modifications, these improvements and modifications also should be considered as protection scope of the present invention.

Claims (28)

1, a kind of method of obtaining single particle phenomenon cross section and heavy ion linear energy transfer relation is characterized in that, may further comprise the steps:
(1) measured device is placed on testing position, and connects, start described measured device work, verify that described measured device is working properly with testing apparatus;
(2) select ionic species, and measure the linear energy transfer LET value of described ion beam, regulate ion beam cross section, make described ion beam cross section size be the area size of described measured device, and measure the homogeneity and the ion beam fluence rate of described whole ion beam cross section; The homogeneity of the described whole ion beam cross section of described measurement is specific as follows: adopt a plurality of scintillation detectors that the whole section of described ion beam is gathered;
(3) open the baffle plate of ion beam, described measured device is carried out heavy ion radiation, the single particle phenomenon that statistics takes place is up to reaching maximum predetermined fluence or reaching the single particle phenomenon number of expectation;
(4) close ion beam, obtain the single particle phenomenon cross section takes place;
(5) reselect new ionic species or change described energy of ions, incident angle to obtain new LET value, repeating step (2) is to (4);
(6) selecting more than 5 kinds the LET value to test at least, is ordinate with described generation single particle phenomenon cross section, is horizontal ordinate with the LET value, obtains taking place the relation of single particle phenomenon cross section and LET.
2, a kind of method of obtaining single particle phenomenon cross section and heavy ion linear energy transfer relation as claimed in claim 1 is characterized in that, also comprises after step (1) connects described measured device and testing apparatus:
Described testing apparatus, stube cable and signal wire are detected, and affirmation equipment and connection are correct.
3, a kind of method of obtaining single particle phenomenon cross section and heavy ion linear energy transfer relation as claimed in claim 2 is characterized in that, also comprises after described testing apparatus, stube cable and signal wire are detected:
To described testing apparatus insulate, the operation of electromagnetic screen and ground connection, and the vacuum tank in the described testing apparatus carried out shading treatment.
4, a kind of method of obtaining single particle phenomenon cross section and heavy ion linear energy transfer relation as claimed in claim 3 is characterized in that, before described measured device is placed on testing position, also comprises:
Described measured device is uncapped, and remove the overlayer of the chip surface of described measured device, and the described measured device after uncapping is carried out functional test.
5, a kind of method of obtaining single particle phenomenon cross section and heavy ion linear energy transfer relation as claimed in claim 4 is characterized in that, also comprises before described measured device is uncapped:
Estimate the LET threshold value according to test or the laser test of knowing the real situation of knowing the real situation of described measured device historical data, californium source, and according to described LET threshold value, selection LET value is tested greater than the ion of described LET threshold value in step (2).
6, a kind of method of obtaining single particle phenomenon cross section and heavy ion linear energy transfer relation as claimed in claim 5 is characterized in that the described LET of estimating threshold value specifically comprises:
α particle source test figure is arranged, have only single-particle inversion to occur, then the LET threshold value is less than 1MeV/ (mg/cm 2).
7, a kind of method of obtaining single particle phenomenon cross section and heavy ion linear energy transfer relation as claimed in claim 5 is characterized in that the described LET of estimating threshold value specifically comprises:
The proton test data are arranged, have only single-particle inversion to occur, then the LET threshold value is less than 6MeV/ (mg/cm 2).
8, a kind of method of obtaining single particle phenomenon cross section and heavy ion linear energy transfer relation as claimed in claim 5 is characterized in that the described LET of estimating threshold value specifically comprises:
The heavy ion test figure is arranged, then the LET threshold value LET value in the ion experiments data of attaching most importance to.
9, a kind of method of obtaining single particle phenomenon cross section and heavy ion linear energy transfer relation as claimed in claim 5 is characterized in that the described LET of estimating threshold value specifically comprises:
Described measured device includes the LET threshold value of device of bipolarity random access memory, low-power logic circuit, low-power schottky logical circuit, processor, N NMOS N-channel MOS N field effect transistor, P-channel metal-oxide-semiconductor field effect transistor, dynamic RAM less than 15MeVcm 2/ mg; Described measured device include large-scale complementary metal oxide semiconductor (CMOS) device, calibration power logical device, low speed devices, live width more than or equal to the LET threshold value of 10 μ m devices, programmable read only memory device greater than 15MeVcm 2/ mg.
10, a kind of method of obtaining single particle phenomenon cross section and heavy ion linear energy transfer relation as claimed in claim 5 is characterized in that the described LET of estimating threshold value specifically comprises:
With the californium source described device is carried out radiation, if single particle phenomenon takes place, then the LET threshold value is less than 43MeVcm 2/ mg, otherwise the LET threshold value is greater than 43MeVcm 2/ mg.
11, a kind of method of obtaining single particle phenomenon cross section and heavy ion linear energy transfer relation as claimed in claim 1 is characterized in that the energy measuring of measuring the linear energy transfer LET of described ion beam comprises:
On the local surfaces of surface barrier detector, place the sheet metal of known thickness and density, with described ion beam irradiation sheet metal, obtain two energy peaks, calculate the energy loss that ion beam penetrates described sheet metal according to described two energy peaks, obtain the LET value of described ion beam.
12, a kind of method of obtaining single particle phenomenon cross section and heavy ion linear energy transfer relation as claimed in claim 11 is characterized in that described surface barrier detector is calibrated before using.
13, a kind of method of obtaining single particle phenomenon cross section and heavy ion linear energy transfer relation as claimed in claim 1 is characterized in that, measures described ion beam fluence rate and specifically comprises:
Utilizing scintillation detector that scintillation detector of the every bump of described ion is produced a count signal measures.
14, a kind of method of obtaining single particle phenomenon cross section and heavy ion linear energy transfer relation as claimed in claim 13 is characterized in that, selects the different aperture of described scintillation detector according to the different ions fluence rate.
15, a kind of method of obtaining single particle phenomenon cross section and heavy ion linear energy transfer relation as claimed in claim 13 is characterized in that the photoelectric tube that described scintillation detector is set departs from 90 ° of described ion beam axis.
16, a kind of method of obtaining single particle phenomenon cross section and heavy ion linear energy transfer relation as claimed in claim 1 is characterized in that a plurality of described scintillation detectors of described employing are specially the whole section collection of described ion beam:
At described ion beam exterior domain four border scintillation detectors being set gathers.
17, a kind of method of obtaining single particle phenomenon cross section and heavy ion linear energy transfer relation as claimed in claim 1 is characterized in that described fluence rate is 10 2～10 5Ions/ (cm 2S).
18, a kind of method of obtaining single particle phenomenon cross section and heavy ion linear energy transfer relation as claimed in claim 17 is characterized in that described fluence is accumulated to 10 7Ions/cm 2Or generation single particle phenomenon number of times is accumulated to 100 times.
19, a kind of method of obtaining single particle phenomenon cross section and heavy ion linear energy transfer relation as claimed in claim 18 is characterized in that the range of described ion beam penetrates the sensitizing range of described measured device.
20, a kind of method of obtaining single particle phenomenon cross section and heavy ion linear energy transfer relation as claimed in claim 19 is characterized in that the range of described ion beam is greater than 30 μ m.
21, a kind of method of obtaining single particle phenomenon cross section and heavy ion linear energy transfer relation as claimed in claim 1 is characterized in that, reselects ionic species and specifically comprises:
Selecting for use ion to carry out radiation should select according to the descending order of described LET value.
22, a kind of method of obtaining single particle phenomenon cross section and heavy ion linear energy transfer relation as claimed in claim 1, it is characterized in that, described generation single particle phenomenon is a single-particle inversion, single-particle inversion takes place after, and a step or the multistep in further comprising the steps of:
(1) changes fluence rate, under the situation of testing tool or gauging table nonoverload, obtain the data of the generation single-particle inversion of described measured device;
(2) carry out radiation test again 2 to 3 times, be used to verify the stability of ion beam;
(3) change ion beam angle, increase described point or choose different ionic speciess, energy, angle, but have under the situation of identical described LET value, carry out radiation again, whether the validation test value is consistent;
(4) after the operational factor of the described measured device of change, carry out radiation again;
(5) change test ambient temperature, carry out radiation again;
(6) choose another measured device of same batch products, carry out radiation again, be used for the otherness between confirmatory sample;
(7) change described ion beam energy to obtain a new LET value, carry out radiation again;
(8) change ionic species,, carry out radiation again to obtain a new LET value.
23, a kind of method of obtaining single particle phenomenon cross section and heavy ion linear energy transfer relation as claimed in claim 1, it is characterized in that, described measured device is carried out after the heavy ion radiation, the single particle phenomenon of described single-particle inversion does not take place, step of one in further comprising the steps of or multistep:
(1) increases described ion beam fluence;
(2) increase described ion beam angle, carry out radiation again;
(3) operational factor of the described measured device of change is carried out radiation again;
(4) radiation is carried out in the biasing of the described measured device of change again;
(5) choose another measured device of same batch products, carry out radiation again;
(6) change described ion beam energy to obtain a new LET value, carry out radiation again;
(7) change ionic species,, carry out radiation again to obtain a new LET value.
24, a kind of method of obtaining single particle phenomenon cross section and heavy ion linear energy transfer relation as claimed in claim 1, it is characterized in that, at least selecting to comprise also test figure is carried out record that the test figure of record specifically comprises after the LET value is tested more than 5 kinds:
The kind of described ion and energy, the type of measured device, model, technology and production batch, the test parameter of measured device, described ion beam incident angle, the used accelerator type of described ion beam, number of times, position, the LET value of single particle phenomenon take place, and generation single event latch-up, single-particle burn, the position when the single-particle grid are worn and LET value.
25, a kind of method of obtaining single particle phenomenon cross section and heavy ion linear energy transfer relation as claimed in claim 1, it is characterized in that, burn SEB or single-particle gate breakdown SEGR if described single particle phenomenon SEP is a single-particle, then described measured device carried out also comprising after the heavy ion radiation:
(1), writes down the current impulse number of times of each radiation if carry out the SEB attribute testing; If carry out the SEGR attribute testing,, stop ion beam irradiation detecting when described measured device grid current changes the gate current range that surpasses regulation;
(2) carry out SEB or SEGR demonstration test, monitor described measured device grid and drain current, change, write down observed condition if observe electric current;
(3) turn off ion beam, apply nominal gate voltage at described measured device, the monitoring grid current changes if observe electric current, writes down observed condition;
(4) record test figure specifically comprises: record ionic species, ion energy, ion beam incident angle, range, LET value mean fluence rate, fluence and test condition.
26, a kind of method of obtaining single particle phenomenon cross section and heavy ion linear energy transfer relation as claimed in claim 25 is characterized in that described SEB attribute testing specifically comprises:
To described measured device exert pressure the regulation gate source voltage, drain source voltage bias condition, the fluence of radiation regulation, if SEB takes place, then counter increases counting and carries out record, regulate fluence rate, make per second that the SEB number take place and be no more than 100, when the fluence of setting reaches, close the ion beam baffle plate, record SEB sum, select different ions, obtain new LET value, repeat the above step.
27 a kind of methods of obtaining single particle phenomenon cross section and heavy ion linear energy transfer relation as claimed in claim 26 is characterized in that, also carry out the SEB demonstration test after the described SEB attribute testing, specifically may further comprise the steps:
Electric capacity is placed in drain electrode at described measured device, gate source voltage, the drain source voltage bias condition of the regulation of exerting pressure, and the fluence of radiation regulation if described measured device lost efficacy, then stops radiation.
28, a kind of method of obtaining single particle phenomenon cross section and heavy ion linear energy transfer relation as claimed in claim 25 is characterized in that described SEGR attribute testing specifically comprises:
To gate source voltage, the drain source voltage bias condition that described measured device is exerted pressure and stipulated, the fluence of radiation regulation if SEGR takes place, then stops radiation, record accumulative total fluence.
29, a kind of method of obtaining single particle phenomenon cross section and heavy ion linear energy transfer relation as claimed in claim 28 is characterized in that, also carries out the SEGR demonstration test after the described SEGR attribute testing, specifically may further comprise the steps:
To gate source voltage, the drain source voltage bias condition that described measured device is exerted pressure and stipulated, the fluence of radiation regulation if described measured device lost efficacy, then stops radiation.
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