CN100516771C - Coordinate inspecting apparatus and checking fixture for object for inspecting - Google Patents
Coordinate inspecting apparatus and checking fixture for object for inspecting Download PDFInfo
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- CN100516771C CN100516771C CNB2006100010757A CN200610001075A CN100516771C CN 100516771 C CN100516771 C CN 100516771C CN B2006100010757 A CNB2006100010757 A CN B2006100010757A CN 200610001075 A CN200610001075 A CN 200610001075A CN 100516771 C CN100516771 C CN 100516771C
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/47—Scattering, i.e. diffuse reflection
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/8851—Scan or image signal processing specially adapted therefor, e.g. for scan signal adjustment, for detecting different kinds of defects, for compensating for structures, markings, edges
- G01N2021/8854—Grading and classifying of flaws
- G01N2021/8861—Determining coordinates of flaws
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
- G01N2021/9513—Liquid crystal panels
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N2201/00—Features of devices classified in G01N21/00
- G01N2201/06—Illumination; Optics
- G01N2201/061—Sources
- G01N2201/06113—Coherent sources; lasers
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N2223/00—Investigating materials by wave or particle radiation
- G01N2223/40—Imaging
- G01N2223/417—Imaging recording with co-ordinate markings
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- Life Sciences & Earth Sciences (AREA)
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- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
- Length Measuring Devices By Optical Means (AREA)
Abstract
The present invention detects an accurate coordinate position steadily by irradiating spot light to a test object directly. A glass substrate 8 is laid on a holder 9 of the test object inspecting device and a guide-bar 40 is arranged movably in the direction of X-axis on the surface of glass substrate. A laser head 44 irradiating spot light to defects of the glass substrate is arranged on the guide-bar 40 so as to be movable in the direction of Y-axis by a second belt 42. Beam of light from the spot light is irradiated at the angle of [alpha]. During the time of macro observation, as an operation unit lets to move the guide-bar 40 and the laser head 44 in the direction of X-axis and Y-axis, the spot light can be moved to defects on the glass substrate 8. In that case, the coordinate data of driven amount of each motor is obtained by a coordinate detecting section as positional information. Finally, by moving an observing section equipped with microscopical function to coordinates position, micro observation is performed of defects.
Description
Technical field
The present invention relates to a kind of coordinate detecting device, the coordinate of the privileged sites such as defective that it exists the various detected bodies such as glass substrate that for example are used for flat-panel monitor detects and looks into device according to the detected health check-up that this coordinate data is observed privileged site.
Background technology
The known in the past base board checking device that the defective that is used for checking the employed glass baseplate surfaces of flat-panel monitor such as LCD is arranged.This base board checking device carries out macroscopic observation and microscopic observation, described macroscopic observation is that illumination light is shone glass baseplate surface, by its catoptrical optical change of visualization, with the damage that detects glass baseplate surface or defective such as film is inhomogeneous, dust adheres to; Described microscopic observation is to observe amplifying by the detected defective of this macroscopic observation.In order to detect the coordinate by privileged sites such as the detected defectives of macroscopic observation, this substrate detection apparatus uses coordinate detecting device.
For example, in following patent documentation 1, be provided with the shaft-like projection parts that can on glass substrate, move along the opposed both side edges of retainer, carry glass substrate on the above-mentioned retainer, also be provided with the guiding moving part that can move along the retainer parallel one lateral margin with these projection parts as detected body.This guiding moving part is provided with catoptron, the laser that this mirror reflects penetrates from the LASER Light Source that is fixed in the retainer bight, and it is shone on the projection parts.And, move along the X-Y direction of principal axis by making projection parts and guiding moving part, so that the irradiation position of laser on the projection parts is consistent with the defective locations of glass substrate, like this, detect the coordinate position of defective according to this each amount of movement.
In addition, in patent documentation 2, be provided with the shaft-like illuminating part that can move on carrying as the retainer of the glass substrate of detected body, this illuminating part is made of a plurality of light-emitting components of arranging along its length direction.And, illuminating part is moved so that illuminating part and defective are opposed along glass baseplate surface, and this illuminating part is being positioned under the state of the defective locations on the glass substrate, light a plurality of light-emitting components in turn, be under the state of lighting with the opposed locational light-emitting component of defective, detecting the coordinate position of defective according to the amount of movement and the position of the light-emitting component of lighting of illuminating part.
Patent documentation 1: the spy opens the 2002-82067 communique
Patent documentation 2: international open WO03/002934 communique
Yet the coordinate detecting device of record need leave the upper surface of glass substrate in this patent documentation 1,2, can not contact with glass substrate so that determine the projection parts or the illuminating part of the position coordinates of defective.Consider glass substrate and projection parts or the illuminating part vibration on above-below direction each other, the gap between glass substrate and projection parts or the illuminating part need be the gap about number mm, therefore causes defective to be designated as indirect indication.For this reason, when the operator determines by the position of the visual illuminating part that carries out defective locations and irradiation portion or light, there is the shortcoming that reads error that causes producing coordinate position because of the viewing angle of the relative substrate of operator.As the liquid crystal display glass substrate (female glass substrate) of checking object, the situation of 2000mm has appearred surpassing on one side particularly.When remaining on this large-size glass substrate on the retainer and make its inclination given angle carry out macroscopic observation (for example 60 °), owing to above large-size glass substrate, can produce big variation with the beneath angle, therefore, for the defective of large-size glass substrate top and the defective of below, on coordinate position, can produce big error.
Summary of the invention
The present invention proposes in light of this situation, and its objective is provides a kind of coordinate detecting device and detected health check-up to look into device, will put light to shine directly on the detected body, and can stably detect the high coordinate position of precision.
Coordinate detecting device of the present invention is characterized in that, comprising: be used for macroscopical Lighting Division from above keep the retainer of detected body under macroscopical illumination light of irradiation; Make the pendulous device of described retainer to the angle rotation of the easy visualization of observer; On described retainer, in the both sides of described detected body, Pei Zhi pair of guide rails opposed to each other; Long side direction is along the direction configuration identical with the direction of illumination of macroscopical illumination light, and the guiding parts that moves on described pair of guide rails in the surperficial non-contacting mode relative to described detected body; Be arranged on the long side direction of described guiding parts the laser head of the surface tilt of described relatively detected body ground point of irradiation light movably; Operating portion is used for by described pendulous device described retainer being tilted under the state of given angle, described guiding parts and described laser head are moved respectively and specifies defective locations on the described detected body according to the irradiation position of described light; And coordinate detection unit, be used for obtaining coordinate data by the described defective locations of described some light appointment according to the coordinate data of each shift position of described guiding parts and described laser head.
According to the present invention, ad-hoc location for detected body, guiding parts is moved in the surperficial opposed noncontact mode with detected body, by indicating device a light is moved along the direction that the moving direction with guiding parts intersects, thus, can from the opposed guiding parts of detected body directly to detected body point of irradiation light.And, by coordinate detection unit obtain with detected body on some rayed position relevant coordinate data.In this case, from the indicating device of the guiding parts that moves on the surface of detected body directly to the privileged site point of irradiation light of detected body, thereby can more stably obtain the high coordinate data of precision.
Coordinate detecting device of the present invention, keeping with given angle of inclination under the state of detected body, shine macroscopical illumination light from the top, defective on the described detected body of visualization, it is characterized in that, comprise: the swing retainer is used to keep described detected body, and can erects to described given angle of inclination; Guiding parts, it is arranged on the described swing retainer, and can move on the surface of described detected body; Indicating device, it is arranged on the described guiding parts, and the some light that shines on the described detected body is moved along the direction that the moving direction with described guiding parts intersects; Operating portion is used to make described guiding parts and described indicating device to move respectively, and specifies defective on the described detected body according to the irradiation position of described light; And coordinate detection unit, obtain coordinate data according to the coordinate data of each position of described guiding parts and described light by the defective locations of described indicating device appointment.
According to the present invention, erect the angle of carrying out macroscopic observation to the observer easily even will swing retainer, owing on this swing retainer, be provided with guiding parts and indicating device integratedly, so, no matter swing retainer and tilt to which kind of angle, can both make the some light of indicating device aim at the defective that the examiner goes out by visual detection exactly.
Device is looked in detected health check-up of the present invention, can carry out microscopic observation to the privileged site of detected body, it is characterized in that, comprising: macroscopical Lighting Division is used for shining from the top of detected body described macroscopical illumination light; Retainer is used to keep described detected body; Pendulous device is used to make the angle rotation of described retainer to the easy visualization of observer; On described retainer, in the both sides of described detected body, Pei Zhi pair of guide rails opposed to each other; Guiding parts, its long side direction disposes along the direction identical with the direction of illumination of macroscopical illumination light, and moves on described pair of guide rails in non-contacting mode relative to the surface of described detected body; Laser head is arranged on the long side direction of described guiding parts movably, the surface tilt of described relatively detected body ground point of irradiation light; Operating portion is used for by described pendulous device described retainer being tilted under the state of given angle, and described guiding parts and described laser head are moved respectively, and specifies defective locations on the described detected body according to the irradiation position of described light; And coordinate detection unit, obtain coordinate data according to the coordinate data of each shift position of described guiding parts and described laser head by the specified described defective locations of described light.
According to the present invention, privileged sites such as defective for detected body, by operating operation portion guiding parts is moved on the surface of detected body in non-contacting mode, by indicating device a light is moved along the direction that the moving direction with guiding parts intersects, thus, can from the opposed guiding parts of detected body directly to the privileged site point of irradiation light of detected body.And, obtain the relevant coordinate data in some rayed position with privileged site by coordinate detection unit, by making the relatively move position of this coordinate data of microscopic observation portion, can carry out the microscopic examination of privileged sites such as defective.
Look into device according to coordinate detecting device of the present invention and detected health check-up, for any part on the detected body, can from the direct incident point of the opposed guiding parts of detected body light, and the distance of indicating device and detected body and the crevice projection angle of some light light beam are fixed, the accuracy of detection of the coordinate on the detected body of incident point light is improved, don't-care point rayed position how, can both obtain stable accuracy of detection.
Description of drawings
Fig. 1 is the summary construction diagram that device is looked in the detected health check-up of first embodiment of the invention.
Fig. 2 is the side view that device is looked in detected health check-up shown in Fig. 1.
Fig. 3 is the partial perspective view that the coordinate detecting device of device is looked in detected health check-up shown in Fig. 1.
Fig. 4 be mounted in second with on the stereographic map of laser head.
Fig. 5 is the side view of laser head that expression will be put the state of the fault location of rayed on glass substrate.
Fig. 6 is the block scheme of the control-driven system of denotation coordination testing fixture.
Fig. 7 is the partial perspective view that the coordinate detecting device of device is looked in the detected health check-up of second embodiment.
Label declaration
1: device is looked in detected health check-up; 3,70: coordinate detecting device; 5: the microscopic observation unit; 8: glass substrate (detected body); 9: the swing retainer; 18: microscopic observation portion; 21: object lens; 33,34: guide rail; 35,36: the first bands; 40: guide pole (guiding parts); 40a: light-blocking member; 42: the second bands; 44,72: laser head (pointolite); M1, M2, M3: motor; K: defective (privileged site); S: some light.
Embodiment
Below, with reference to the accompanying drawings, device is looked in the detected health check-up of coordinate detecting device with embodiment of the present invention described.
Fig. 1 to Fig. 6 represents first embodiment, Fig. 1 is the approximate three-dimensional map that device is looked in detected health check-up, Fig. 2 is the side view that device is looked in detected health check-up, Fig. 3 is the stereographic map of coordinate detecting device major part, Fig. 4 is the stereographic map of laser head, Fig. 5 is the side view of laser head, and Fig. 6 is the block scheme of control-driven system.
Detected health check-up shown in Fig. 1 and Fig. 2 is looked into device 1 and is had apparatus main body 2 and the control module 6 that is connected with apparatus main body 2 by distribution, as apparatus main body 2, has coordinate detecting device 3 and the microscopic observation unit 5 (observation portion) that is arranged on the pedestal 4.
In apparatus main body 2, pedestal 4 is provided with the swing retainer 9 that is used to keep as the glass substrate 8 of detected body.Swing retainer 9 for example forms quadrangular frame shape, and its frame section by four limits comes bearing glass substrate 8.Glass substrate 8 is used for flat-panel monitors such as LCD, by a plurality of reference pins 9a on the both sides that are arranged on swing retainer 9 and the pressing component 9b that is separately positioned on the other both sides, glass substrate 8 is positioned on the reference position.And, on the circumference of swing retainer 9,, adsorb glass substrate 8, thereby glass substrate 8 absorption are remained on the swing retainer 9 by these holes along being provided with not shown a plurality of holes (absorption layer) week entirely.
In addition, as shown in Figure 2, swing retainer 9 can rotate by the fulcrum 10 (axis of swing) that is arranged on pedestal 4 one end margins, thereby erects the angle θ (for example 45 °～60 °) of the easy visualization of examiner from horizontality.Fulcrum 10 by belt wheel 11 be connected with the turning axle 13 of motor M1 with 12, and drive by motor M1 rotation.Constitute pendulous device like this.
In the present embodiment, show an example of the single shaft swing retainer of relative examiner direction swing forwards, backwards, but, also can use: the dual-axis swing retainer that swings forwards, backwards or forwards, backwards about freely rotate the parallel rod (parallel link) of swing or used the swing retainer of articulated robot.
In apparatus main body 2, on pedestal 4, along the both sides of swing retainer 9, along opposed first guide rail 15,16 that is arranged with microscopic observation unit 5 usefulness of Y direction, microscopic observation unit 5 can move along this first guide rail 15,16.Microscopic observation unit 5 has a type support portion 17 and microscopic observation portion 18.Second guide rail (not shown) that microscopic observation portion 18 can use along microscopic observation portion moves, and this second guide rail is arranged on the 17a of beam portion that extends along X-direction of support portion 17.
By making support portion 17 move and microscopic observation portion 18 is moved along directions X along the Y direction, the examiner observes via object lens 21 by utilizing eyepiece 22, can be in whole scope of glass substrate 8 the high magnification image on sight glass substrate 8 surfaces.In addition, by switching the light path of object lens 21 and attachment objective 23, can observe the low range image on glass substrate 8 surfaces that in wide field, are taken into by attachment objective 23 by eyepiece 22.
In addition, be connected with TV video camera 25 on the top of the eyepiece stalk of microscopic observation portion 18.25 pairs in TV video camera is made a video recording by the observation picture (low range image) on glass substrate 8 surfaces that object lens 21, attachment objective 23 obtain, and sends the control part 26 that is provided with in the control module 6 to.
In addition, in microscopic observation unit 5,17 the bottom in the support portion is provided with radioparent lighting source 28 opposed to each other with the portable cord of object lens 21.This radioparent lighting source 28 is provided in along X-axis on the liner plate 29 of support portion 17, and this liner plate 29 can be in the following side shifting (with reference to Fig. 2) of the swing retainer 9 that remains horizontality.Radioparent lighting source 28 is used for carrying out from the below of glass substrate 8 transillumination of wire, and can move along Y direction integratedly with support portion 17.
On the other hand, in control module 6, the observation image that utilizes TV video camera 25 to obtain is presented on the TV Monitor 30 by control part 26.Move indication and data as the examiner and import the input part of usefulness, keyboard 31 is connected on the control part 26.
In addition, be provided with not shown macroscopical Lighting Division above apparatus main body 2, this macroscopic view Lighting Division shines the glass substrate 8 on the swing retainer 9 on a large scale.This macroscopic view Lighting Division is opened metal halide lamp, catoptron and the Fresnel Lenses put down in writing in the flat 5-232040 communique by for example spy and is constituted.This macroscopic view Lighting Division uses when following situation: will swing under the state that retainer 9 is inclined to given angle (45 °～60 °), macroscopical illumination light is shone in the top of the glass substrate 8 from remain on this swing retainer 9, the surface of examiner's direct visual glass substrate 8 under this macroscopic view illumination, thus the defective on glass substrate 8 surfaces is carried out macroscopic observation.
Illustrate that according to Fig. 3 to Fig. 5 detected health check-up looks into the coordinate detecting device 3 of device 1 below.On swing retainer 9,, be equipped with the 3rd guide rail 33,34 that coordinate detects usefulness opposed to each other along the both side ends of glass substrate 8 fore-and-aft directions.The outboard row of each guide rail 33,34 is shown first of a pair of ring-type and is with 35,36.Respectively be with 35,36 to be stretched in respectively on a pair of belt wheel 37a, 37b and 37c, the 37d, opposed two belt wheel 37a, 37c connect by axle 38.Axle 38 is connected by the output shaft of motor M2 such as driving-belt 39 and stepping motor, thereby this axle 38 bears the transmission of driving force.Also can use double-axis motor as motor M2, dispose this double-axis motor by shaft coupling (coupling) respectively in the centre of axle 38.
The two ends of guide pole 40 (guiding parts) are installed on these the 3rd guide rails 33,34 slidably, and the two ends of guide pole 40 first are with 35,36 to be connected with each.On the direction (Y direction) of the swing that guide pole 40 was configured in and swung retainer 9 with fulcrum 10 quadratures so that its long side direction along with the identical direction of illumination direction from the macroscopic view illumination of top irradiation.Promptly, in order to carry out macroscopic observation, erect to the state of given angle will swinging retainer 9, form on the defective that detects the examiner since from above the shadow that produces of macroscopical illumination light of illumination, so it is desirable to be configured to make its long side direction along the identical direction of direction of illumination of throwing light on macroscopic view this guide pole 40.In addition, the driving interlock with motor M2 drives first by axle 38 and is with 35,36, and thus, guide pole 40 is along the direction (directions X) of the swing of swinging retainer 9 with fulcrum 10, with non-contacting mode round moving on the surface of glass substrate 8.
And, in Fig. 3, be with 42, the second to be stretched on belt wheel 43a, the 43b that is arranged at guide pole 40 two ends being provided with second of ring-type along its length direction (Y direction) on the guide pole 40 with 42.A belt wheel 43a is connected with the output shaft of motor M3 such as stepping motor.Second is with and is connected with maintaining part 45 on 42, this maintaining part 45 be arranged to one as the laser head 44 of LASER Light Source, by the positive and negative rotation of motor M3, laser head 44 can come and go mobile in the Y direction length range of glass substrate 8.
Laser head 44 (pointolite) shown in Fig. 4 and Fig. 5 is fixed on the maintaining part 45, and makes the 44a of irradiation portion (being laser head integral body in the drawings) towards oblique below at least.Therefore, the relative glass substrate 8 of light beam from the some light s of laser head 44 irradiation throws with desirable angle [alpha] (for example 30 °～70 °).Crevice projection angle α preferably gets 40 °～60 ° scope.In the present embodiment, crevice projection angle α is set at 45 °.By the crevice projection angle of laser head 44 being set for given angle (for example 45 °), when the examiner makes swing retainer 9 when erecting the some light s of visual glass substrate 8 to the state of the angle of carrying out macroscopic observation easily (for example 45 °), can prevent to take place because of the observation place makes guide pole 40 situation that shadow can not visual some light s occur.In addition, but be configured to the diameter of examiner's Visual Confirmation degree, for example set the circle of 2mm diameter for from the some light s that laser head 44 penetrates, and the defective k of this light s examination person detected glass substrate 8 under the macroscopic view illumination etc.Therefore, the examiner by means of the defective k that confirms from macroscopical illumination light of top irradiation on the glass substrate 8, thereby can make a light s overlap with this defective k by gap 47 exactly.
In addition, guide pole 40 roughly forms tabular, on a limit of its length direction, is formed with for example tabular light-blocking member 40a across the gap 47 of wishing width.As shown in Figure 5, shine defective k that the laser on the glass substrate 8 shines glass substrate 8 as a light s from laser head 44 and reflect after going up, and cover by light-blocking member 40a.In addition, laser is owing to be to shine from the direction of intersecting with examiner's direction of visual lines, so laser can directly not reflect to the examiner, the light-blocking member 40a on laser light reflected on the glass substrate 8 also can be reflected light path covers reliably.
In addition, light-blocking member 40a so long as laser not the material of transmissive get final product, its can be coloured also can be transparent.In addition, it is desirable to, light-blocking member 40a has and the laser light reflected shading surface of quadrature roughly, to cover laser.In addition, light-blocking member not necessarily will be arranged to one with guide pole 40, for example also can be that the shadow shield of the size (for example being the several times of laser spots diameter) that can fully cover laser light reflected on glass substrate 8 is being set on the laser head 44, and make the shadow shield servo-actuated in this laser head 44.
The control-driven system 50 of the laser head 44 of coordinate detecting device 3 then, is described by Fig. 6.In this control-driven system 50, on upper personal computer 51, be connected with drive-pulse generator 52.This drive-pulse generator 52 is connected with control lever operating portions 54 such as (joy-stick) by operating portion controller 53.Operating portion 54 is not limited to control lever, so long as in order to put that defective k that light s is radiated at glass substrate 8 overlappingly goes up and the structure of giving the indication of appointed positions coordinate (X, Y) gets final product, for example, can be tracking ball, cross key two-dimensional coordinate assigned switch such as (cross).
In addition, operating portion 54 is provided with defective locations coordinate registration switch 55, and this defective locations coordinate registration switch 55 is used to register following two coordinates: glass substrate 8 is lip-deep along the first X coordinate with the stop position of the guide pole 40 of 35,36 length directions (X-direction), and along the Y coordinate of the stop position of the laser head 44 of the length direction (Y direction) of guide pole 40.As the registration switch, in the present embodiment, near the operating rod of control lever, be provided with pushbutton switch, still, also can carry out on the base plate of position of visualization foot-switch being set the examiner that device 1 is looked in detected health check-up.
Operating portion controller 53 has following function: the two-dimensional coordinate information that produces during input checking person operating operation portion 54, according to X-direction and two direction of operating of Y direction of the relative operating portion 54 of this two-dimensional coordinate information separated, and export the driving pulse output indication of this X-direction and the driving pulse output indication of Y direction.
Drive-pulse generator 52 has following function: reception is indicated from the driving pulse output indication of the X-direction of operating portion controller 53 outputs and the driving pulse output of Y direction, driving pulse output indication according to X-direction sends to motor driver 57 with the X-direction driving pulse, indicates according to the driving pulse output of Y direction the Y direction driving pulse is sent to motor driver 58.
Motor driver 57 has following function: receive the X-direction driving pulse from drive-pulse generator 52, thereby rotary driving motor M2 makes guide pole 40 only move the distance corresponding with this umber of pulse along X-direction.Motor driver 58 has following function: receive the Y direction driving pulse from drive-pulse generator 52, thereby rotary driving motor M3 makes laser head 44 only move the distance corresponding with this umber of pulse along Y direction.
Upper personal computer 51 has the various functions of coordinate detecting device 60, initial point variset 61.Coordinate detecting device 60 from the number of drive pulses of the X-direction of drive-pulse generator 52 and the number of drive pulses of Y direction, calculates the X of the defective k that light s is shone, Y coordinate data (two-dimensional coordinate data) during according to the defective locations coordinate registration switch 55 of operation setting on operating portion 54.
Initial point variset 61 has the true origin of the some rayed position that makes laser head 44 and the X of glass substrate 8, the function of Y coordinate basis position consistency.For example, if the X of glass substrate 8, Y coordinate basis position are the bights of the left end or the right-hand member of glass substrate 8, the true origin that then will put light s is set on the position of the laser head 44 that a light s shines the bight of the left end of this glass substrate 8 or right-hand member.When on glass substrate 8, finding defective k and during to this position point of irradiation light s, true origin being made as 0 point of X coordinate, 0 point of Y coordinate, from this true origin (0,0) umber of pulse of each motor M2, M 3 is counted, thereby obtain coordinate (X, Y).
In addition, this true origin is not limited to the bight of the left end or the right-hand member of glass substrate 8, can set the optional position for.
In addition, as shown in Figure 3, swing retainer 9 is provided with and makes the zone of keeping out of the way that guide pole 40 keeps out of the way, and produces interference so that prevent at the object lens 21 of side edge part of the glass substrate 8 parallel with guide pole 40 and microscopic observation portion 18.Keep out of the way the zone so long as to leave glass substrate 8 at least just passable,, outside the scanning area of object lens 21 scannings of microscopic observation portion 18, guide pole 40 is kept out of the way above swing retainer 9 downwards in the outside of glass substrate 8.
The detected health check-up of present embodiment is looked into device 1 and is had said structure, below, as its effect, coordinate detection method and the observational technique of defective k described.
At first, in order to check defective, carry out macroscopic observation by visual as the glass substrate 8 of detected body.
In this macroscopic observation, when swing retainer 9 is swung, the sense of rotation of motor M1 is periodically carried out positive anti-switching in the given angle scope.
By macroscopic observation, when on the surface of glass substrate 8, detecting defective k by the examiner, swing retainer 9 is stopped under the state of the angle that can see defective, operating operation portion 54, make guide pole 40 and laser head 44 carry out the X-Y axle and move, make the irradiation position of light s consistent with defective locations.This operation is carried out in the following manner.
That is, consistent with defective locations for the some rayed position that makes laser head 44, the examiner operates operating portions 54 such as control lever.Like this, be imported in the operating portion controller 53, and export the driving pulse output indication of X-direction respectively and the driving pulse output of Y direction is indicated according to this two-dimensional coordinate information from the two-dimensional coordinate information of operating portion 54.
In drive-pulse generator 52, reception is from the driving pulse output indication of the X-direction of operating portion controller 53 outputs and the driving pulse output indication of Y direction, the X-direction driving pulse is sent to motor driver 57, the Y direction driving pulse is sent to motor driver 58.In motor driver 57, rotary driving motor M2 makes guide pole 40 only move and the corresponding distance of exporting from drive-pulse generator 52 of umber of pulse along X-direction.In motor driver 58, rotary driving motor M3 makes laser head 44 only move the distance corresponding with above-mentioned umber of pulse along Y direction.
The rotation of motor M2 drives, and passes to first from axle 38 through belt wheel 37a, 37c and is with 35,36, thereby make first to be with 35,36 same moved further, and like this, guide pole 40 only moves needed amount along the 3rd guide rail 33,34 on X-direction.Meanwhile, the rotation of motor M3 driving passes to second from belt wheel 43a and is with 42, thereby makes second to be with 42 to move, and like this, laser head 44 and second is with 42 only to move needed amount along Y direction integratedly.
Like this,, guide pole 40 and laser head 44 are moved along X-axis and Y direction by operating portion 54 being operated adjustment by the examiner, when the some light s that penetrates from laser head 44 and the defective k on the glass substrate 8 are overlapping, the operation of shut-down operation portion 54.
At this moment, owing to penetrate from the laser of the 44a of irradiation portion of laser head 44 state with relative glass substrate 8 inclination certain angle α, and a light s and defective k are shone overlappingly, therefore, for the examiner, point light s and defective k can not become the shadow of the main body of guide pole 40, thereby can pass through gap 47 Visual Confirmation point light s reliably.
In addition, after thereby operating operation portion 54 is by some light s given defect k, by defective locations registration coordinate switch 55 this defective of registration k, at this moment, utilize upper personal computer 51, according to from the number of drive pulses of the X-direction of drive-pulse generator 52 and the number of drive pulses of Y direction, calculate a defective k that light s is overlapping coordinate Q (X, Y).Coordinate Q (X, carry out at glass substrate 8 lip-deep each defective k, and be stored in respectively in the storer of upper personal computer 51 by calculating Y).
Like this, when macroscopic observation finishes, motor M1 counter-rotating, swing retainer 9 turns back to original horizontality, and guide pole 40 moves to keeps out of the way the zone.
In addition, in operating portion 54, by specifying the microscopic observation pattern, swing retainer 9 automatically returns to horizontality, and makes guide pole 40 automatically keep out of the way the zone.
When carrying out microscopic observation, by upper personal computer 51 read detected each defect part in the macroscopic observation coordinate Q (X, Y).According to this coordinate Q (X, Y), move in each guide rail 15,16 upper edge Y direction the support portion 17 of microscopic observation unit 5, meanwhile, microscopic observation portion 18 moves on X-direction along the not shown guide rail of the 17a of beam portion.Thus, the observation axle of the object lens 21 of microscopic observation portion 18 be configured in coordinate Q (X, Y) on.
At this moment, owing to guide pole 40 is kept out of the way in the zone, so the object lens 21 of microscopic observation portion 18 can not collide with guide pole 40.In addition, object lens 21 are opposed with radioparent lighting source 28 across glass substrate 8 and swing retainer 9, can be observed the defective k of these light source 28 transilluminations.
The examiner can utilize microscope that the defective k on the glass substrate 8 is carried out microscopic observation (high magnification observation) via object lens 21 by spying on eyepiece 22.In addition, the defective k of the glass substrate 8 that obtains by object lens 21 of 25 pairs in TV video camera takes.The examiner carries out microscopic observation by observing the image of defective k shown on the TV Monitor 30.
As mentioned above, in macroscopic observation, device 1 is looked in the coordinate detecting device 3 and the detected health check-up of present embodiment, owing to utilize the defective k on laser spots light s direct irradiation glass substrate 8 surfaces of laser head 44, so, can be as existing coordinate detecting device between position, do not produce deviation by the coordinate position of indications such as luminophor and defective k, but can detect accurately defective k coordinate Q (X, Y).In addition, by coordinate detecting device 3 and swing retainer 9 are arranged to one, even the angle of inclination of swing retainer 9 changes, the relative glass substrate 8 of irradiating angle α of the point light s of laser head 44 is also fixing all the time, and, since from the top of glass substrate 8 with very short shining to set a distance, so, no matter the position of the defective k on the glass substrate 8 how, can both be easily and carry out the examiner reliably to a Visual Confirmation of rayed position, can improve the accuracy of detection of the position of defective k.
In addition, coordinate Q (the X of glass substrate 8 lip-deep defective k, determining Y) obtains by following shirtsleeve operation: operating portions 54 such as operation control lever, so that guide pole 40 moves, makes laser head 44 to move along Y direction along X-direction, press defective locations coordinate registration switch 55 then.When microscopic observation and the taking out of of glass substrate, when moving into, because guide pole 40 is kept out of the way the zone, so guide pole 40 can not bump with the object lens 21 of microscopic observation portion 18 or the substrate transferring robot that takes out of, moves into glass substrate 8.
Next, illustrate that by Fig. 7 the detected health check-up of second embodiment of the invention looks into the coordinate detecting device 70 of device 1,, use identical label, and omit its explanation for part, parts identical with above-mentioned embodiment or that be equal to.
In coordinate detecting device shown in Figure 7 70, be with on 42 second, replace the laser head 44 and the maintaining part 45 of use in the first embodiment, and catoptron 71 (indicating device) is installed.In addition, an end on guide pole 40 is fixed with laser head 72 (pointolite).The laser that catoptron 71 reflections are penetrated from laser head 72, and tilt towards glass substrate 8, then, the laser after the reflection tilts according to the form identical with above-mentioned embodiment, so that glass substrate 8 is with inclined angle alpha and to arrive the defective k of glass substrate 8 to set a distance relatively.
According to this second embodiment, in order to detect defective k, owing to only need mobile mirror 71 to get final product, therefore, compare, can reduce second with 42 driving force with first embodiment of mobile laser head 44 and maintaining part 45, as motor M3, can adopt the miniature motor of low output.
In addition, under the situation of this second embodiment, also can adopt following structure: in the end of guide pole 40, dispose second catoptron opposed to each other with first catoptron 71, and laser head 72 is arranged on integratedly on the swing retainer 9 of the 3rd guide rail 33, laser from laser head 72 reflects by second catoptron and first catoptron 71, and arrives the defective k of glass substrate 8.
In addition, some light s is not limited to circle, also can be cruciform or annular.Motor M1, M2, M3 are not limited to stepping motor, can also adopt suitable drive sources such as servomotor.
In addition, though device is looked in the detected health check-up that the present invention adopts when the surface imperfection of the semiconducting glass substrates such as glass substrate that use in the flat-panel monitors (FPD) such as for example LCD or organic electroluminescent (EL) display is checked and the coordinate detecting device that is included in this device is illustrated, but device is looked in the coordinate detecting device or the detected health check-up that also can be used for any part detection usefulness of other suitable detected bodies.
In addition, for example, in the above-described embodiment, an example that is provided with the microscopic observation unit that carries out microscopic observation is illustrated, but, also can omit this microscopic observation unit, thereby in macro inspection apparatus, use coordinate detecting device of the present invention with swing retainer and macroscopical Lighting Division.
Though more than with reference to accompanying drawing embodiments of the present invention are illustrated,, these embodiments are illustration of the present invention only, the present invention is not limited to these embodiments obviously.Therefore, in the scope that does not break away from spirit of the present invention and scope, can carry out interpolation, omission, displacement and other changes of textural element.That is, the present invention is not limited to above-mentioned explanation, and only the scope by claim limits.
Claims (8)
1. a coordinate detecting device is characterized in that, comprising:
Be used for macroscopical Lighting Division from above keep the retainer of detected body under macroscopical illumination light of irradiation;
Make the pendulous device of described retainer to the angle rotation of the easy visualization of observer;
On described retainer, in the both sides of described detected body, Pei Zhi pair of guide rails opposed to each other;
Long side direction is along the direction configuration identical with the direction of illumination of macroscopical illumination light, and the guiding parts that moves on described pair of guide rails in the surperficial non-contacting mode relative to described detected body;
Be arranged on the long side direction of described guiding parts the laser head of the surface tilt of described relatively detected body ground point of irradiation light movably;
Operating portion is used for by described pendulous device described retainer being tilted under the state of given angle, described guiding parts and described laser head are moved respectively and specifies defective locations on the described detected body according to the irradiation position of described light; And
Coordinate detection unit is used for obtaining coordinate data by the described defective locations of described some light appointment according to the coordinate data of each shift position of described guiding parts and described laser head.
2. coordinate detecting device according to claim 1 is characterized in that, described laser head is configured to make described light towards oblique below that the long side direction with described guiding parts intersects.
3. coordinate detecting device according to claim 1 is characterized in that, described laser head is provided with light-blocking member on described some reflection of light light path by the surface reflection of described detected body, and described light-blocking member is followed the tracks of described laser head.
4. coordinate detecting device according to claim 1, it is characterized in that, described guiding parts forms and makes the examiner can the visual gap that is radiated at lip-deep described light of described detected body from described laser head, and light-blocking member is set, and this light-blocking member is used for covering described light by the surface reflection of described detected body on a side relative with described laser head.
5. device is looked in a detected health check-up, shines macroscopical illumination light from the top of detected body, and the defective on the described detected body of visualization is characterized in that, comprising:
The macroscopic view Lighting Division is used for shining from the top of detected body described macroscopical illumination light;
Retainer is used to keep described detected body;
Pendulous device is used to make the angle rotation of described retainer to the easy visualization of observer;
On described retainer, in the both sides of described detected body, Pei Zhi pair of guide rails opposed to each other;
Guiding parts, its long side direction disposes along the direction identical with the direction of illumination of macroscopical illumination light, and moves on described pair of guide rails in non-contacting mode relative to the surface of described detected body;
Laser head is arranged on the long side direction of described guiding parts movably, the surface tilt of described relatively detected body ground point of irradiation light;
Operating portion is used for by described pendulous device described retainer being tilted under the state of given angle, and described guiding parts and described laser head are moved respectively, and specifies defective locations on the described detected body according to the irradiation position of described light; And
Coordinate detection unit is obtained coordinate data by the specified described defective locations of described light according to the coordinate data of each shift position of described guiding parts and described laser head.
6. device is looked in detected health check-up according to claim 5, it is characterized in that, described laser head is configured to make described light towards oblique below that the long side direction with described guiding parts intersects.
7. device is looked in detected health check-up according to claim 5, it is characterized in that, described laser head is provided with light-blocking member on described some reflection of light light path by the surface reflection of described detected body, and described light-blocking member is followed the tracks of described laser head.
8. device is looked in detected health check-up according to claim 5, it is characterized in that, described guiding parts is formed with and makes the examiner can the visual gap that is radiated at lip-deep described light of described detected body from described laser head, and light-blocking member is set, and this light-blocking member is used for covering described light by the surface reflection of described detected body on a side relative with described laser head.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2005010239A JP4653500B2 (en) | 2005-01-18 | 2005-01-18 | Coordinate detection apparatus and subject inspection apparatus |
| JP2005010239 | 2005-01-18 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN1808055A CN1808055A (en) | 2006-07-26 |
| CN100516771C true CN100516771C (en) | 2009-07-22 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNB2006100010757A Expired - Fee Related CN100516771C (en) | 2005-01-18 | 2006-01-16 | Coordinate inspecting apparatus and checking fixture for object for inspecting |
Country Status (4)
| Country | Link |
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| JP (1) | JP4653500B2 (en) |
| KR (1) | KR100827342B1 (en) |
| CN (1) | CN100516771C (en) |
| TW (1) | TWI342967B (en) |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4517354B2 (en) * | 2004-11-08 | 2010-08-04 | 株式会社ニコン | Exposure apparatus and device manufacturing method |
| CN101446699B (en) * | 2008-12-30 | 2010-06-02 | 友达光电股份有限公司 | Detection device and method for same |
| TWI474068B (en) * | 2010-05-05 | 2015-02-21 | Hon Hai Prec Ind Co Ltd | Displacement measuring device |
| CN102253506B (en) * | 2010-05-21 | 2019-05-14 | 京东方科技集团股份有限公司 | The manufacturing method and detection repair apparatus of liquid crystal display substrate |
| CN102393576A (en) * | 2011-08-03 | 2012-03-28 | 深圳市华星光电技术有限公司 | Visual checking machine of glass baseplate in liquid crystal display and checking method thereof |
| US8854616B2 (en) | 2011-08-03 | 2014-10-07 | Shenzhen China Star Optoelectronics Technology Co., Ltd. | Visual inspection apparatus for glass substrate of liquid crystal display and inspection method thereof |
| CN102927928B (en) * | 2012-10-30 | 2016-08-17 | 三峡大学 | Solid object upper end face scanner and scan method |
| US9080865B2 (en) | 2012-12-27 | 2015-07-14 | Shenzhen China Star Optoelectronics Technology Co., Ltd | Orthogonality compensation method for length measurement device and length measurement device using same |
| CN103075970B (en) * | 2012-12-27 | 2015-07-01 | 深圳市华星光电技术有限公司 | Method of compensating orthogonal degree of length measuring device and length measuring device using the same |
| KR101751801B1 (en) * | 2016-05-18 | 2017-06-29 | 한국기계연구원 | Defect inspecting device for substrate and inspecting method using the same |
| JP2018059830A (en) * | 2016-10-06 | 2018-04-12 | 川崎重工業株式会社 | Exterior appearance inspection method |
| CN106770355A (en) * | 2016-12-09 | 2017-05-31 | 武汉华星光电技术有限公司 | The detection device for foreign matter and method of a kind of CF coating machines, CF coating machines |
| CN106773189A (en) * | 2017-03-27 | 2017-05-31 | 武汉华星光电技术有限公司 | The method that macroscopical automatic check machine and lifting display abnormal area measure efficiency |
| CN107014826A (en) * | 2017-04-12 | 2017-08-04 | 武汉华星光电技术有限公司 | CF substrate micro examination machines |
| CN108613990A (en) * | 2018-07-13 | 2018-10-02 | 江苏东旭亿泰智能装备有限公司 | A kind of microcosmic and compound check machine of macroscopic view |
| CN109141303B (en) * | 2018-08-14 | 2020-06-19 | 哈尔滨工业大学 | Component geometric defect detection system and detection method |
| CN116448371B (en) * | 2023-06-16 | 2023-08-25 | 苗疆(武汉)机器人科技有限公司 | Industrial robot multi-angle detection device |
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| JPH01201144A (en) * | 1988-02-05 | 1989-08-14 | Nikon Corp | Scattered light detector |
| JP3190406B2 (en) * | 1992-02-18 | 2001-07-23 | オリンパス光学工業株式会社 | Defect inspection equipment |
| JPH10206121A (en) | 1997-01-23 | 1998-08-07 | Laser Tec Kk | Detecting apparatus for rotation of x-y stage |
| JPH1134299A (en) * | 1997-07-18 | 1999-02-09 | Shinohara Tekkosho:Kk | Method for detecting register mark |
| JP2000266511A (en) * | 1999-03-19 | 2000-09-29 | Olympus Optical Co Ltd | Inspection device |
| JP2002082067A (en) * | 2000-09-05 | 2002-03-22 | Olympus Optical Co Ltd | Substrate inspecting device |
| JP2002267620A (en) * | 2001-03-09 | 2002-09-18 | Hitachi Kokusai Electric Inc | Apparatus for visually examining plate-shaped object |
| JP4690584B2 (en) * | 2001-06-06 | 2011-06-01 | 有限会社ユナテック | Surface evaluation apparatus and surface evaluation method |
| JP2003002934A (en) * | 2001-06-25 | 2003-01-08 | Toagosei Co Ltd | Aqueous resin dispersion, method for producing the same and use of the same |
| JP4347028B2 (en) * | 2003-12-01 | 2009-10-21 | 株式会社日立国際電気 | Visual inspection device |
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2005
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- 2006-01-04 TW TW095100331A patent/TWI342967B/en not_active IP Right Cessation
- 2006-01-16 KR KR1020060004448A patent/KR100827342B1/en not_active IP Right Cessation
- 2006-01-16 CN CNB2006100010757A patent/CN100516771C/en not_active Expired - Fee Related
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| KR20060083890A (en) | 2006-07-21 |
| JP4653500B2 (en) | 2011-03-16 |
| TWI342967B (en) | 2011-06-01 |
| TW200628902A (en) | 2006-08-16 |
| KR100827342B1 (en) | 2008-05-06 |
| CN1808055A (en) | 2006-07-26 |
| JP2006200917A (en) | 2006-08-03 |
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