CN100424549C - Method for manufacturing liquid crystal display device - Google Patents
Method for manufacturing liquid crystal display device Download PDFInfo
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- CN100424549C CN100424549C CNB2006101386480A CN200610138648A CN100424549C CN 100424549 C CN100424549 C CN 100424549C CN B2006101386480 A CNB2006101386480 A CN B2006101386480A CN 200610138648 A CN200610138648 A CN 200610138648A CN 100424549 C CN100424549 C CN 100424549C
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Abstract
A processing line for liquid crystal display fabrication. The process line reduces unnecessary processing steps by removing known defective (NG) individual liquid crystal panels before subsequent processing, with the knowledge about defects depending on stored information.
Description
The application is that the application number that requires on Dec 16th, 2002 to submit is 02157177.5 divides an application, and is at this that its full content is as a reference incorporated.
Technical field
The present invention relates to a kind of liquid crystal indicator.Or rather, the present invention relates to make the equipment and the method for liquid crystal indicator.
Background technology
Along with the development of information society,, produce thin, the in light weight and demand that can produce the display of high quality graphic of body and improve day by day under the little prerequisite of energy consumption.In order to satisfy these requirements, now studied various panel display apparatus, these devices comprise LCD (LCD), plasma scope (PDP), electroluminescent display (ELD), and vacuum fluorescent display (VFD).Part in these display techniques has been used for information display.
In various panel display apparatus, LCD may be the most widely used a kind of display device.In fact, in such as mancarried devices such as notebook PCs, the LCD technology has substituted the cathode ray tube (CRT) technology as the display mode of selecting for use.In addition, even in desktop PC and TV Monitor, also use the LCD device just more and more.
Basic LCD comprises opposed substrate and is arranged on liquid crystal material between the substrate.
What liquid crystal was represented is the material phase with characteristic between liquid and the solid.Liquid crystal has the flowability of liquid, but has the long-range crystal order of solid.Because liquid crystal has long-range crystal order and flowability, so liquid crystal has optical anisotropy.
Making LCD needs multiple working procedure, and these operations comprise the formation array, forms color filter (CF), perfusion (distribution) liquid crystal and making assembly (describing in order).
The operation that forms matrix is included on first substrate (TFT substrate) and deposits, photomechanical production and be etched with and form thin film transistor (TFT) (TFT) array.The operation that forms color filter (CF) is included in ITO (tin indium oxide) film that forms the red, green and blue color filter on the black matrix and formed the common electrode effect on the CF substrate.
Liquid crystal filling (distribution) operation comprises TFT substrate and CF substrate in batch is installed to together.Usually, TFT and colour filtering chip basic board are assembled into the little gap of formation between substrate.Then, inject liquid crystal to form liquid crystal board by clearance opening.
In the operation of making assembly, the driving circuit of handling input and output signal is connected on the liquid crystal board.In addition, add upper side frame and make Liquid crystal module.
LCD normally assembles on production line.In the prior art, the box that a plurality of TFT substrates or a plurality of colour filtering chip basic boards are housed respectively is transported on the charging appliance.Each TFT substrate comprises many along the select lines of a direction extension and the data line of many square crossings.Thin film transistor (TFT) and pixel capacitors are arranged between select lines and the data line on the black matrix in the zone.Each CF substrate all has black matrix layer, color filter and common electrode.Therefore, black matrix layer will be blocked except required leaking from the light the light of pixel region.
From box, take out each TFT substrate or colour filtering chip basic board respectively and be sent to the input end of oriented layer production line by charging appliance.Orientation procedure step 1S with reference among Fig. 1 forms oriented layer by production line on each substrate, described production line comprises the robot of manual programming.
Step 1S comprises: clean each substrate so that can form even orientation coating.Then, oriented material is coated on the substrate.Then, by removing the solvent in the oriented material and/or making oriented material produce heat polymerization oriented material is cured.After the curing, oriented material is carried out mechanical friction, thus form one fixedly liquid crystal make it to be orientated consistent surface.At last, carry out matting once more, and form oriented layer.
After finishing the step 1S that forms oriented layer, need to form the gap through several procedures.These operations can be carried out or parallel carrying out according to the order of sequence.The gap forms operation and comprises the matting (step 2S) of cleaning base plate (TFT substrate or colour filtering chip basic board) and wadding is distributed to wadding dispersion step (step 3S) on the substrate.Wadding is used to keep the gap thickness weighing apparatus fixed with consistent.
Also can not use the operation that forms the gap, but on substrate, carry out sealant working procedure of coating (step 4S) (substrate [TFT or CF] forms the operation in gap, and another piece substrate carries out the sealant coating).After cleaning step 2S, encapsulant is placed on the peripheral part of substrate.Finally, with encapsulant the TFT base plate bonding to the CF substrate, to form assembled plate.It should be noted that sealant working procedure of coating (4S) carries out on a kind of substrate (TFT or CF), and wadding disperses to carry out on another kind of substrate.Therefore, as shown in Figure 1, production line has two branches.A branch cleans (step 2S) and disperses wadding (step 3S).Another branch cleans (step 2S) and seals (step 4S).
After wadding dispersion step 3S and sealant working procedure of coating 4S, aim at, heat and the TFT substrate is pressed onto with colour filtering chip basic board so that make the assembling procedure (5S) of LCD plate.In assembling procedure, TFT substrate and colour filtering chip basic board are arranged to opposed form and mutually combine form the LCD plate.
Assembling procedure (step 5S) afterwards, in cutting action (step 6S) by the cored slab that assembles being rule and splitting and the hollow LCD plate that will assemble cuts into a plurality of cell boards.
Finish cutting action (step 6S) afterwards, liquid crystal is injected in the cell board, then with filling orifice sealing (step 7S) by the liquid crystal filling orifice on the encapsulant.
At last, after step 7S,, each liquid crystal cells plate is ground (burr of removing cutting), and check with reference to step 8S.Just made liquid crystal cell thus.
Schematically show the liquid crystal filling operation of the typical prior art of carrying out after each process step 6S among Fig. 2.As shown in FIG., liquid crystal 1 is put into a container 3.Container 3 is inserted in the vacuum chamber 2.Vacuum chamber 2 is found time a period of time to remove the water that sticks on pocket 3 inwalls, water in the liquid crystal 1 and the microbubble in the liquid crystal 1.
With further reference to Fig. 2, subsequently the seal of a few module unit plates 4 is immersed in the liquid crystal.In chamber 2, introduce nitrogen (N
2) gas makes it to produce atmospheric pressure.Pressure differential between the vacuum of cell board 4 and chamber 2 forces liquid crystal to enter cell board.
After each cell board 4 all injects liquid crystal 1, liquid crystal injecting port is sealed.Then the unit liquid crystal board is cleaned.Finished step 7S thus.
Although said method is useful, injects liquid crystal with said method and have some problems.For example, the liquid crystal injection process need take a long time, and for example, pour into time that 10 inches plate needs above 10 hours.Infusion time is so long, and reason is that the very little area of perfusion that needs in the gap between the substrate is then relatively large.When making large tracts of land LCD, this problem makes and seems particularly serious.In addition, owing to liquid crystal can be polluted and/or because of impurity and chemical reaction cause degradation reason under the performance, makes to reuse remaining liquid crystal material, thereby said method can cause the liquid crystal waste.In order to overcome these problems, and the method that applies liquid crystal by drip is adopted in suggestion.
Introduce the liquid crystal drip-injection method simply with reference to Fig. 3 below.It should be noted that TFT and colour filtering chip basic board preferably adopt big glass substrate, this substrate comprises a plurality of substrate plates district (tft array and color filter array) of the single LCD display of final formation.In the liquid crystal drip-injection method, with liquid crystal drip-injection to the substrate plate district of substrate.When first and second substrate in batch are installed to a time-out, the liquid crystal of instillation will be dispersed in the plate district of whole base plate thereupon.
As shown in Figure 3, before being assembled into TFT substrate 20 and CF substrate 30 together, liquid crystal 25 is instilled in the substrate plate district of TFT substrate 20 (also can be the CF substrate).
Suppose liquid crystal drip-injection to TFT substrate 20, and encapsulant 35 is assigned on the substrate plate district periphery of colour filtering chip basic board 30.At dispenser method with after distributing encapsulant, TFT substrate 20 and colour filtering chip basic board 30 be assembled into make it to become liquid crystal board together with liquid crystal board district, a plurality of unit.Board unit need be aimed at, vacuumizes and pressurize.Assembling pressure forces liquid crystal to disperse in each liquid crystal board district, unit and forms uniform liquid crystal layer.
In liquid crystal drip-injection method, can instil liquid crystal rapidly (applying) to substrate plate district.Therefore, the liquid crystal drip-injection method can obviously be saved time, and is particularly all the more so concerning the large-area liquid crystal plate.In addition,,, reduced cost, reduced waste so reduced liquid crystal consumption to greatest extent because the amount of liquid crystal that instils is scheduled to.
Unfortunately, even adopt the liquid crystal drip-injection method to have some problems too.A basket discussed below is that the result that this method produces has a plurality of substrate plates district on each substrate.
As mentioned above, TFT substrate and colour filtering chip basic board comprise a plurality of substrate plates district that forms a plurality of independent liquid crystal boards the most at last.For example, Fig. 4 shows four substrate plate districts on first substrate 100 and four substrate plate districts on second substrate 200.Mate together the most mutually in these substrate plate districts.With further reference to Fig. 4, may comprise NG (bad/defective) substrate plate district on first substrate 100 and/or second substrate 200.
After first substrate 100 and second substrate 200 were assembled into the liquid crystal board of combination, the liquid crystal board district, unit with CF substrate plate district that good TFT becomes reconciled can constitute good unit liquid crystal board.Yet there is defective in the liquid crystal board district with NGTFT and/or NG CF substrate plate district.
In addition, along with the increase of substrate upper substrate plate district quantity, have more NG substrate plate district and good substrate plate district (or with other NG substrate plate districts) and match.After the unit liquid crystal board is cut into single liquid crystal board, need carry out such as unnecessary processing such as grinding, cleaning and tests each NG liquid crystal board.The time of so promptly having wasted the workman has increased processing cost again.
Therefore, be starved of a kind of method that each NG liquid crystal board is carried out unnecessary processing avoided that provides.
Summary of the invention
Therefore, the invention reside in and provide a kind of equipment and method of making single liquid crystal board, described equipment and method to overcome basically because of the limitation of prior art and shortcoming to guide the one or more problems that cause.
Advantage of the present invention provides a kind of equipment and method of making liquid crystal board, and described equipment and method can avoid carrying out unnecessary operation.
Other features and advantages of the present invention will provide in the following description, and wherein a part of feature and advantage can obviously draw from explanation or obtain by practice of the present invention.Structure by particularly pointing out in explanatory note part, claims and accompanying drawing can realize and obtain purpose of the present invention and other advantage.
In order to obtain these and other advantage and according to purpose of the present invention, as recapitulative and description broad sense, the step that the method for described manufacturing LCD comprises has: preparation has the composite liquid crystal panel in liquid crystal board district, a plurality of unit, and each liquid crystal board district is made up of the substrate plate district that is complementary each other.Described step further comprises the information in the liquid crystal board district, unit that generation is become reconciled about liquid crystal board district, NG unit, and liquid crystal board district, described NG unit comprises at least one NG substrate plate district, and described good liquid crystal board district, unit is made of good substrate plate district.Then, by cutting, composite liquid crystal panel is separated into a plurality of unit liquid crystal board, the NG liquid crystal board is transplanted in the buffering barrier box, outward appearance and the electrical characteristics of testing good liquid crystal board are checked in the surface of ground unit liquid crystal board.
Obviously, all be exemplary and indicative to general description of the present invention and following detailed description above, it is intended to claim of the present invention is further explained.
Description of drawings
The accompanying drawing that the application comprised is used for further understanding the present invention, and it combines with instructions and constitutes the part of instructions, and described accompanying drawing is represented embodiments of the invention and explained principle of the present invention with instructions.
In the accompanying drawing:
Fig. 1 represents to make of vacuum impregnation the process flow diagram of LCD;
Fig. 2 represents that the method for using in the flow process according to Fig. 1 carries out vacuum and inject;
Fig. 3 represents the liquid crystal drip-injection method;
Fig. 4 is the exemplary diagram of substrate, and described substrate has good and NG substrate plate district;
Fig. 5 is expression forms operation according to an oriented layer of the present invention process flow diagram;
Fig. 6 is the process flow diagram that forms operation according to gap of the present invention;
Fig. 7 represents the exemplary diagram of substrate, and described substrate has good and NG substrate plate district; With
Fig. 8 represents the arrangenent diagram according to production line of the present invention.
Embodiment
To describe embodiments of the invention in detail now, the example of described embodiment is shown in the drawings.
Fig. 5 is expression forms operation according to an oriented layer of the present invention process flow diagram, Fig. 6 is the process flow diagram that forms operation according to gap of the present invention, Fig. 7 represents the exemplary diagram of substrate, described substrate has good and bad (NG) substrate plate district and Fig. 8 and represents process arrangenent diagram according to production line of the present invention.
Make first substrate and second substrate that has a plurality of substrate plates district separately by operation that forms array and the operation (not shown) that forms color filter.Some substrate plate districts are good, some be bad (NG).Can and estimate substrate plate district and the NG substrate plate district that discerns by electrical measurement.First substrate and second substrate comprise TFT cell substrate and CF cell substrate.After finishing the operation that forms array and formation color filter, first substrate and second substrate are put into first and second boxes and be transported to another production line, on this production line, first and second substrate in batch are installed to together.
The operation in manufacturing cell liquid crystal board district will be described below.Whole operation comprises three branch production lines, all is provided with loading bin and emptier on every production line.These production lines comprise orientation procedure production line, gap operation production line and test step production line.
The orientation procedure production line is finished matting, oriented layer working procedure of coating, oriented layer curing process, friction process and test step.Gap operation production line is finished matting, liquid crystal drip-injection operation, encapsulant instillation operation, vacuum assembling procedure and encapsulant curing process.Test step finishes and rules/operation of splitting, grinding step and liquid crystal board test step.
Fig. 5 represents the working condition of orientation procedure production line.Remove degranulation by matting 20S.In oriented layer working procedure of coating 21S, apply oriented layer then.In oriented layer working procedure of coating 21S, the solution of oriented material is instilled between the Doctor roller and Anilox roller that rotates in divider.Described oriented material remains on the surface of Aililox roller with the form of liquid film.Oriented material is transferred to from the Anilox roller and is had on the print roller of printing rubber slab.By substrate being fixed on the worktable of coating machine, the oriented material on the print roller is printed onto on the substrate.
With further reference to Fig. 5,22S is cured oriented layer by the plasticising operation.In operation 22S, remove the solvent in the oriented material that is printed onto on the substrate, and/or make the oriented material polymerization.
With further reference to Fig. 5,, oriented layer is rubbed to form alignment surfaces by friction process 24S by inspection process 235 check oriented layer.After this, just finished friction process 23S.At last, by test step 24S test oriented layer so that identification causes the NG cell substrate district that occurs because of defective oriented layer.For example, can find out NG cell substrate district by range estimation.This information stores in the processing unit of computing machine or other types.It should be noted, on first and second substrates, all will carry out orientation procedure.
After finishing orientation procedure, first and second substrates are unloaded deliver in third and fourth box.Then, load the 3rd box and the 4th box by the loading bin on the second production line that produces the gap.The second production line is divided into the first gap production line of handling first substrate, handles the second gap production line of second substrate and first substrate and second substrate in batch are installed to together assembly line.That is to say, handle first substrate (substrate in the said TFT of having cell substrate district) and second substrate (substrate in the said CF of having cell substrate district) with the production line of two separation.Assembly line is continuous production line.
The gap forms operation and is undertaken by following step.
As shown in Figure 6, clean selected substrate (25S).Make first substrate through liquid-crystal distributor, make second substrate through silver (Ag) distributing equipment and sealant distributing equipment.
Silver coating (Ag) point (step 26S) on second substrate of realizing between the pixel capacitors of the common electrode that can make a plurality of unit CF substrate zone and a plurality of unit TFT substrate zone electrically connecting.At the marginal portion of each unit CF substrate zone coating encapsulant (step 27S).What can be used as the encapsulant use can be photosensitive resin or thermosetting resin.After first substrate and second substrate in batch are installed, encapsulant is solidified by optical processing or thermal treatment.
Therebetween, in liquid crystal distributes operation, liquid crystal drip-injection (step 28S) to each substrate plate district of TFT substrate.These substrate plate districts are corresponding with the substrate plate district on the CF substrate.
Liquid crystal drip-injection operation 28S carries out according to the following steps.At first, by vacuumizing the dissolved air of removing in the liquid crystal that comprises in the liquid crystal container.Liquid crystal container is installed in the liquid crystal syringe of liquid-crystal distributor head.Dispenser method makes it to form the liquid crystal dots with unified spacing on each unit TFT substrate zone then.
With reference to step 30S, be put into first substrate that processes by above-mentioned operation and second substrate in the vacuum chamber and be assembled into composite liquid crystal panel.Thus, thus liquid crystal uniformly dispersing in whole base plate plate district forms liquid crystal board district, unit.After this, encapsulant is solidified the back and form the composite liquid crystal panel that constitutes by two substrate plate districts with liquid crystal board district, a plurality of unit.
Assembling procedure 30S is undertaken by following step.
At first, preferably with first adsorbent equipment first substrate is installed on the worktable in the vacuum tank, described vacuum tank can move by along continuous straight runs.Then, second substrate is fixed on second adsorbent equipment, makes second substrate be in first substrate top by vacuum suction.Close vacuum chamber and form vacuum.Then, make second adsorbent equipment drop to the position of between first and second substrates, reserving predetermined gap.Then, moving horizontally first substrate makes it and second base plate alignment.
Then, allowing second adsorbent equipment drop to makes second substrate match with first substrate by sealant.Then, first and second substrates are pressed onto together, and make liquid crystal be filled in (dispersed liquid crystal is to whole unit liquid crystal board district) in the liquid crystal board zone, unit.Therefore, just produce composite liquid crystal panel with liquid crystal board district, a plurality of unit.After this, thus composite liquid crystal panel taken out from vacuum chamber and solidify encapsulant with ultraviolet ray irradiation composite liquid crystal panel.Need then composite liquid crystal panel is tested.The collection information relevant with NG cell substrate district with storage for future use.
Composite liquid crystal panel has the liquid crystal board district, a plurality of unit corresponding to TFT and CF substrate plate district.Fig. 7 represents to be respectively formed at nine TFT substrate plate districts 300 and nine the CF substrate plate districts 400 on first and second substrates 500 and 600.First and second substrates 500 and 600 may comprise NG (bad) TFT or the CF substrate plate district that forms operation and the making of color filter formation operation by array.
The information stores relevant with NG substrate plate district to handling in the CPU (central processing unit) of relevant all information of production line.With these information conveyance to the processing unit on the spot of the test production line of then operating subsequently.
Therebetween, after finishing gap formation operation, composite liquid crystal panel is put on the 3rd production line.Article three, production line is continuous production line, on this production line, liquid crystal board is cut into a plurality of independently liquid crystal boards, and this production line also comprises grinding step that the cutting surface of each liquid crystal board is ground and the outward appearance of checking each liquid crystal board and determines the test step of its electric fault.
Fig. 8 represents according to the operation process setting of test of the present invention with production line 800.As shown in FIG., the box (not shown) that a plurality of composite liquid crystal panel are housed is arranged on the loading bin 810.Then, composite liquid crystal panel is cut into single liquid crystal board.
Cutting action 30S forms the ditch line with predetermined depth and makes a plurality of independently liquid crystal boards by be pressed onto cutting wheel on the composite liquid crystal panel in order to predetermined pressure on composite liquid crystal panel.Then, realize cutting by the crack expansion downwards that described ditch line is formed.
Then, enter checking procedure 31S.In this step, check the state of each liquid crystal board cutting part, whether there is burr so that determine along the line of cut of each liquid crystal board.
Referring to step 32S, transport in the way of the grinding step section that the cutting surface of unit liquid crystal board is ground at single liquid crystal board well cutting, make it through buffer compartment 1000 (32S) leaving from station.Yet according to embodiments of the invention, before grinding step 32S, processing unit 900 receives the relevant information with NG cell substrate district on the spot.Buffer compartment leaving from station 1000 can judge whether certain the specific liquid crystal board by buffer compartment leaving from station 1000 is identified as defectiveness (NG) according to the information that receives from CPU (central processing unit), and this is because defective liquid crystal board is made by at least one NG substrate plate district.
Be identified as flawless unit liquid crystal board (because they are made by good substrate plate district) and will deliver to grinding step.But each NG liquid crystal board to be taken out and is stored in the buffering barrier box simultaneously.At last, the unit liquid crystal board in the discardable buffering barrier box.
Therefore, the present invention can reach the purpose that reduces the test of grinding and carrying out subsequently by removing each liquid crystal board that is identified as NG.Can reduce thus the workman when handling defective unit fatigue strength and the time that is spent.
After grinding, check the outward appearance and the electrical combination property of each liquid crystal board by last inspection step 33S.Then, each liquid crystal board is discharged in the box that is located on the emptier 910.Just finished manufacturing process thus.
Check that step preferably includes the inspection outward appearance and carries out A/P (automatic/detecting device) test to determine the problem of appearance, these problems comprise opening circuit of the speckle of the banded speckle of intersection, black speckle, color filter projection, inclination, rub band, pin hole, select lines and data line or short circuit etc.These speckle shape flaws can both the observed person eyes or CCD (charge-coupled image sensor) find automatically.
After this, finish the installation of driver IC, back light etc. at the assembling procedure (not shown).
Therefore, the production line of LCD and manufacture method thereof have the following advantages or effect.Because each NG liquid crystal board be deposited and be handled to the buffering barrier box can according to the information relevant with the NG substrate zone, therefore reduced grinding and testing procedure, and then reduced workman's fatigue strength and reduced the time that is spent regarding as defective cell board.
To those skilled in the art, obviously, on basis of the present invention, can make various modifications and variations.Therefore, the invention is intended to cover those and fall into claims and interior improvement and the modification of equivalent scope thereof.
Claims (6)
1. method of making LCD, it comprises:
Preparation has the composite liquid crystal panel in liquid crystal board district, a plurality of unit, and wherein each liquid crystal board district, unit is made of two substrate plate districts;
The information of discerning liquid crystal board district, defective unit and storing defective unit liquid crystal board;
Composite liquid crystal panel is divided into a plurality of independently liquid crystal boards, and each liquid crystal board is made of unit liquid crystal board district;
Remove each defective liquid crystal board according to canned data; With the surface of grinding each good liquid crystal board.
2. the method for manufacturing LCD according to claim 1 further comprises each good liquid crystal board is estimated and electrical measurement.
3. method according to claim 2 is wherein by being bonded together formation liquid crystal board district, unit with sealant with the first and second substrate plate districts and wherein before bonding liquid crystal being applied on first substrate.
4. method according to claim 2 wherein according to collected and the relevant information in liquid crystal board district, defective unit, is removed each defective liquid crystal board.
5. method according to claim 4 is wherein according to defect recognition in the substrate plate district and the relevant information in liquid crystal board district, defective unit.
6. method according to claim 2 further comprises the projection of checking on each good liquid crystal board.
Applications Claiming Priority (5)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| KRP-2002-13529 | 2002-03-13 | ||
| KR20020013529 | 2002-03-13 | ||
| KRP200213529 | 2002-03-13 | ||
| KRP200214184 | 2002-03-15 | ||
| KRP-2002-14184 | 2002-03-15 |
Related Parent Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNB021571775A Division CN100378546C (en) | 2002-03-13 | 2002-12-16 | Apparatus and method for making liquid crystal display device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN1963597A CN1963597A (en) | 2007-05-16 |
| CN100424549C true CN100424549C (en) | 2008-10-08 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNB2006101386480A Expired - Fee Related CN100424549C (en) | 2002-03-13 | 2002-12-16 | Method for manufacturing liquid crystal display device |
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Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1118075A (en) * | 1994-07-18 | 1996-03-06 | 夏普株式会社 | Substrate carrier JIG and method of producing liquid crystal display element by using the substrate carrier JIG |
| JP2000214102A (en) * | 1999-01-20 | 2000-08-04 | Sharp Corp | Foreign-matter detecting device and process line containing foreign-matter detecting device |
| JP2001002236A (en) * | 1999-06-22 | 2001-01-09 | Nippon Soda Co Ltd | Sorting system |
| JP2001048347A (en) * | 1999-06-03 | 2001-02-20 | Tokyo Electron Ltd | Substrate conveyor and processor |
-
2002
- 2002-12-16 CN CNB2006101386480A patent/CN100424549C/en not_active Expired - Fee Related
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1118075A (en) * | 1994-07-18 | 1996-03-06 | 夏普株式会社 | Substrate carrier JIG and method of producing liquid crystal display element by using the substrate carrier JIG |
| JP2000214102A (en) * | 1999-01-20 | 2000-08-04 | Sharp Corp | Foreign-matter detecting device and process line containing foreign-matter detecting device |
| JP2001048347A (en) * | 1999-06-03 | 2001-02-20 | Tokyo Electron Ltd | Substrate conveyor and processor |
| JP2001002236A (en) * | 1999-06-22 | 2001-01-09 | Nippon Soda Co Ltd | Sorting system |
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| CN1963597A (en) | 2007-05-16 |
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