CN100394436C - Method and device for analysing surface structure in paper or board - Google Patents

Method and device for analysing surface structure in paper or board Download PDF

Info

Publication number
CN100394436C
CN100394436C CNB2004800195451A CN200480019545A CN100394436C CN 100394436 C CN100394436 C CN 100394436C CN B2004800195451 A CNB2004800195451 A CN B2004800195451A CN 200480019545 A CN200480019545 A CN 200480019545A CN 100394436 C CN100394436 C CN 100394436C
Authority
CN
China
Prior art keywords
image
reel
imaging system
pixel
analysis
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
CNB2004800195451A
Other languages
Chinese (zh)
Other versions
CN1820275A (en
Inventor
马格努斯·埃克伯格
珀-奥洛夫·埃尔森
奥尔·亨宁森
卡林·奥尔德伯格
托马斯·奥尔德伯格
卡尔-海因茨·里格尔
博斯·威格
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Stora Enso Oyj
Original Assignee
Stora Enso Oyj
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Stora Enso Oyj filed Critical Stora Enso Oyj
Publication of CN1820275A publication Critical patent/CN1820275A/en
Application granted granted Critical
Publication of CN100394436C publication Critical patent/CN100394436C/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Images

Classifications

    • GPHYSICS
    • G06COMPUTING; CALCULATING OR COUNTING
    • G06TIMAGE DATA PROCESSING OR GENERATION, IN GENERAL
    • G06T7/00Image analysis
    • G06T7/0002Inspection of images, e.g. flaw detection
    • G06T7/0004Industrial image inspection
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84Systems specially adapted for particular applications
    • G01N21/88Investigating the presence of flaws or contamination
    • G01N21/89Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles
    • GPHYSICS
    • G06COMPUTING; CALCULATING OR COUNTING
    • G06VIMAGE OR VIDEO RECOGNITION OR UNDERSTANDING
    • G06V10/00Arrangements for image or video recognition or understanding
    • G06V10/98Detection or correction of errors, e.g. by rescanning the pattern or by human intervention; Evaluation of the quality of the acquired patterns
    • G06V10/993Evaluation of the quality of the acquired pattern
    • GPHYSICS
    • G06COMPUTING; CALCULATING OR COUNTING
    • G06TIMAGE DATA PROCESSING OR GENERATION, IN GENERAL
    • G06T2207/00Indexing scheme for image analysis or image enhancement
    • G06T2207/30Subject of image; Context of image processing
    • G06T2207/30108Industrial image inspection
    • G06T2207/30124Fabrics; Textile; Paper

Landscapes

  • Engineering & Computer Science (AREA)
  • Quality & Reliability (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Theoretical Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Immunology (AREA)
  • Textile Engineering (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Multimedia (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • Computer Vision & Pattern Recognition (AREA)
  • Pathology (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
  • Paper (AREA)
  • Machines For Manufacturing Corrugated Board In Mechanical Paper-Making Processes (AREA)
  • Diaphragms For Electromechanical Transducers (AREA)
  • Sampling And Sample Adjustment (AREA)

Abstract

A method for analysing in real-time in a paper machine or board machine the surface structure of a web (1) of paper or board which method comprises the direction of an imaging system towards a pre-determined area (3) of the web (1), the arrangement of an illumination system to illuminate the region from a pre-determined direction with obliquely incident light, and the arrangement of an image analysis system in association with the imaging system. Furthermore, the method comprises, according to the invention, an image capture step (7) in which the imaging system is caused to take several digital images of the web under the said oblique incident illumination and during a pre-determined period, which images form an image sequence that images a series of surface sections (4, 4', 4'') along a band (8) in the web (1), and an evaluation step (9) that is carried out by the image analysis system and which comprises an image analysis step (11), which in turn comprises a first analysis operation (16) in which the variance of the pixel values in each pixel row in each image in the image sequence is determined within a pre-determined wavelength band, and a second analysis operation (17) in which the mean value of the variances of all pixel rows of all images in the image sequence is calculated. The invention also concerns a device for the execution of the method.

Description

Be used for analyzing the method and apparatus of the surface structure of paper or cardboard
Technical field
The present invention relates to a kind of method that is used for analyzing in real time the surface structure of the reel of in paper machine or lap machine, producing at paper machine or lap machine.
The present invention also relates to a kind of device that is used for analyzing in real time the surface structure of the reel of in paper machine or lap machine, producing at paper machine or lap machine.
Be specially adapted to determine the quantity and the seriousness of defective of the corrugated form of shrinkage creases in reel (web) or other types according to method and apparatus of the present invention.
Background technology
During the manufacturing of the reel of paper in paper machine or lap machine or cardboard (board), particularly during producing cardboard from chemical heat mechanical pulp (chemo-thermo mechanical pulp CTMP), formation is unusual along the shrinkage creases of the longitudinal extension of reel.Described shrinkage creases constitutes the bad defective of reel, should reduce described defective as much as possible by changing being provided with of lap machine.
Be used to check that the method that reel outward appearance and shrinkage creases occur makes the operator for example visually to check reel during the volume of more changing planes (machine roll), and estimate the shrinkage creases degree.The operator can for example be estimated as described degree once to three degree.But, have some problem that is associated with such rules.At first, described rules are subjective, and such risk is promptly arranged: different operators will differently estimate the degree of same shrinkage creases.Secondly, check that area is limited to that part of of on the machine volume visible reel, the i.e. part of the reel of the covering surfaces of formation machine volume.The 3rd, in visual inspection, only might find major variation.In other words, the resolution of visual inspection is lower.
A kind of mode of measuring the surface structure of paper reel has objectively been described in patent SE 516999.According to described method, in the precalculated position at two images transversely taking reel of reel.By illuminating reel from the light of two different directions oblique fires for two images, promptly during taking first image, illuminate reel with light from first direction incident, during taking second image, illuminate reel with light from second direction incident.Described image is subsequently by Fourier transform, and the spectrum that is obtained is combined with the approximate form of correct spectrum that reel is provided.But, become obviously, when having shrinkage creases, it is not too suitable that the method for the surface structure of this measurement reel becomes.Particularly, use that to take the step of two images from the illumination of two different directions complicated inconveniently.
Summary of the invention
The objective of the invention is to realize a kind of be particularly suitable for determining the in real time quantity of shrinkage creases and the method and apparatus of seriousness.
-it is characterized in that according to method of the present invention this method comprises: image capture step (7), wherein make when reel (1) passes through the imaging system front, imaging system is taken several digital pictures of reel (1) under described oblique illumination and during scheduled time slot, described image forms an image sequence, described image sequence will be in reel (1) along a series of surface portions (4 of a band (8), 4 ', 4 ") imaging, and
-appraisal procedure (9), carried out by image analysis system, and comprise image analysis step (11), it comprises: first analysis operation (16), wherein, in the predetermined wavelength band, determine the variation of the pixel value in each pixel column in each image in described image sequence; And, second analysis operation (17), wherein, the mean value of the variation of all pixel columns of all images of calculating in image sequence.
It is characterized in that according to device of the present invention:
-imaging system is arranged feasible: when reel (1) passes through the imaging system front, under described oblique illumination and during scheduled time slot, take several digital pictures of reel (1), described image is formed in the reel (1) a series of surface portions (4 along a band (8), 4 '; 4 "), and
-image analysis system is arranged the variation of calculating the pixel value in each pixel column in each image in described image sequence, and the mean value of the variation of all pixel columns of all images of calculating in image sequence.
Description of drawings
Illustrate in greater detail the present invention with reference to the accompanying drawings.
Fig. 1 schematically and show device according to a preferred embodiment of the present invention on principle.
Fig. 2 shows the process flow diagram that illustrates in regular turn according to the preferred steps sequence of quantity of the present invention, as to be used for definite shrinkage creases and seriousness.
Fig. 3 shows the image of the cardboard reel surface portion that is used to demonstrate shrinkage creases.
Fig. 4 show according to behind the image processing step of the present invention, according to the image of Fig. 3.
Embodiment
Fig. 1 show be used in real time determining when when the lap machine (not shown in FIG.) is made reel 1 at the quantity of the shrinkage creases of reel 1 formation of cardboard and the device of seriousness.Described device comprises imaging system, and it comprises the camera 2 with the digital CCD camera form of the type that is called as " progressive scan ".Camera 2 is disposed on the reel 1, and the presumptive area 3 of direction subtend reel 1, and in zone 3, the surface structure of reel 1 is analyzed in expectation.In this case, zone 3 is positioned at the part on a limit of reel 1.The angle of image of camera 2 and be selected such that in the distance between camera 2 and the reel 1 camera 2 might be taken the surface portion 4 of the pre-sizing of reel 1 in described regional 3 when reel 1 during by camera 2 fronts.Described device also comprises illuminator, and it comprises lamp 5, and lamp 5 is disposed in the precalculated position on the reel, so that with skew ray illuminated area 3.The position of lamp 5 in this case be positioned at camera 2 reel 1 vertically on equal height, and the irradiation axis of lamp 5 and reel 1 are formed on the 1-15 ° of angle in the interval.But lamp 5 can be disposed in another position, to use skew ray illuminated area 3.Preferably, lamp 5 comprises the xenon incandescent lamp, is used for providing needed light intensity with suitable wavelength interval.But, can use other light sources.Described device also comprises image processing system, and it comprises computing machine 6.
With reference to Fig. 2-4 a kind of preferred sequence of steps is described below, is used to use above-mentioned device to determine the quantity and the seriousness of shrinkage creases.
Initial step is an image capture step 7, wherein, make when reel 1 during by camera 2 fronts camera 2 in light, catch the image of the reel 1 of predetermined quantity from lamp 5.Therefore described image forms and is illustrated in the reel 1 along with a series of surface portions 4,4 ', 4 of 8 " ... image sequence.Suitable image sequence can for example be made up of 50 images taking at 2 seconds duration.Fig. 3 shows the illuminated surface part from such sequence, vertically about 0.200 meter in the drawings of described surface portion along the longitudinal extension of reel, and flatly in the transversely extension of reel 1 about 0.267 meter in the drawings.Camera 2 has the imaging surface part in this case, such as the digital picture with 580 pixel column height and 770 pixel column width.Shrinkage creases is shown as a plurality of blanking bars in Fig. 3, their scope described surface portion vertically on, promptly on the vertical direction in Fig. 3.
After image capture step 7, image is sent to computing machine 6, thus, and beginning appraisal procedure 9.Appraisal procedure 9 comprises prepare image treatment step 10 and image analyzing section subsequently 11.
Computing machine 6 during image processing step 10 for each image carries out image sequence of operation.The purpose of this step is the influence from the interference source of mistake that reduces such as irregular and the illumination that changes, and is image analysis step 11 prepare image subsequently.First image manipulation 12 comprises the average pixel value of each pixel value in each image divided by described image, thereafter each pixel value be multiply by pre-determined factor, such as 100.Second image manipulation 13 comprises the finishing image border, so that image obtains predetermined size.The such finishing operation of rectangle indication in Fig. 3, wherein, the image of being repaired has the height of 470 pixel columns and the width of 512 pixel columns.The 3rd image manipulation 14 comprises image along the many groups of vertically being divided into of reel 1, and in each group, has the predetermined number of consecutive pixel column, by the mean value that calculates pixel value in each pixel column in each group and pixel that this mean value be assigned in new pixel column form a plurality of new pixel columns thereafter.The 4th image manipulation 15 is included in the high-pass filter of image transversely.Preferably, by deducting the low-pass signal that is obtained, for example, calculate high communication number by making FIR (finite impulse response) Blackman filter operations image from original image.Fig. 4 shows the image according to Fig. 3 after above-mentioned image manipulation, wherein, during the 3rd image manipulation, form 47 groups, each group has 10 pixel columns, by the mean value that calculates pixel value in each pixel column in each group and pixel that it be assigned in new pixel column form 47 new pixel columns thereafter.Fig. 4 makes obviously, has reduced visual inhomogeneous the illuminating of seeing by image manipulation in Fig. 3.Therefore, obtain a series of images from image processing step 10, it has the height of 47 pixel columns and the width of 512 pixel columns in this case, wherein, has reduced the influence from the interference source of mistake.
Image analysis step 11 begins behind image processing step 10.Image analysis step 11 comprises first analysis operation 16, wherein, calculates the variation of the pixel value in each pixel column in each image in the predetermined space wavelength band.Preferably, carry out this analysis operation 16:, thereafter, calculate the variation in the predetermined wavelength band by Fourier transform by means of each pixel column of FFT (Fast Fourier Transform (FFT)) algorithm by following manner.Therefore, this Fourier transform is an one dimension.By using the more visual classification results of various wavelength bands to make obviously: it is irregular good related that the wavelength band that comprises wavelength 0.7-4 millimeter and shrinkage creases cause in cardboard.Other wavelength bands may be associated with paper.For example, the wavelength band of the verified 3-15 of comprising millimeter is suitable for folding cause irregular in thin paper.Image analysis step 11 also comprises second analysis operation 17, and wherein, the mean value of the variation of all pixel columns of all images in described series is calculated, and is displayed on the watch-dog, or storage is to be used for assessment in the future.The mean value of this variation constitutes for the quantity of the shrinkage creases in reel 1 and measuring of seriousness, and the operator can see the trend of shrinkage creases by the mean value of more described variation and the result of the former image sequence of assessing rapidly and easily, and takes adequate measures.
Shrinkage creases can occur on the integral width of reel, but they mainly occur in the marginal portion of reel.It is therefore preferable that according to the marginal portion of device of the present invention, as shown in Figure 1 at reel.But, can recognize that described layout can comprise several imagings and illuminator, they are at the different piece of reel.For example, imaging system and the illuminator that is associated can be at second marginal portions of reel, and an imaging system and the illuminator that is associated can be at the cores of reel.Therefore might comprise that several layouts to imaging system and illuminator determine the quantity and the seriousness of the shrinkage creases on the whole width of reel in real time by use.Perhaps, a pair of imaging system and illuminator can be arranged and make and might cross reel, and by this way, same imaging system can be used for the different piece or the whole reel of imaging reel.Described imaging system and illuminator can be disposed on the reel, under reel or about reel.
Described above be used for determining in the quantity of the shrinkage creases of reel and the preferred steps sequence of seriousness.But, can recognize, can in framework of the present invention, change described imaging and analysis operation.Under the situation that does not depart from principle of the present invention, specific operation can be omitted maybe and can be modified, and can increase other operation.Also can recognize, under the situation that does not depart from principle of the present invention, can change according to those parts that comprise in the device of the present invention.For example, can use linear recording CCD camera to replace the camera of described " progressive scan " type.In this case, described image will be made of several row, described several capable formation will be in reel along the sequence of the surface portion imaging of band.

Claims (8)

1. method that is used for analyzing in real time the surface structure of the reel of in paper machine or lap machine, producing (1) at paper machine or lap machine, described method comprises:
It is last or following that-imaging system is disposed in reel (1), and the presumptive area (3) of direction subtend reel (1);
-illuminator is disposed in that reel (1) is gone up or down, so that use skew ray from predetermined direction illuminated area (3), and imaging system and illuminator be disposed in the same side of reel, and this same side refers to the upside or the downside of reel; And
-be arranged to the picture analytic system explicitly with imaging system,
It is characterized in that described method also comprises:
-image capture step (7), wherein make when reel (1) passes through the imaging system front, imaging system is taken several digital pictures of reel (1) under described oblique illumination and during scheduled time slot, described image forms an image sequence, described image sequence will be in reel (1) along a series of surface portions (4 of a band (8), 4 ', 4 ") imaging, and
-appraisal procedure (9), carry out by image analysis system, and comprise image analysis step (11), it comprises: first analysis operation (16), wherein, in the predetermined wavelength band, determine the variation of the pixel value in each pixel column in each image in described image sequence, and, second analysis operation (17), wherein, the mean value of the variation of all pixel columns of all images of calculating in image sequence; This appraisal procedure (9) also comprises image processing step (10), and it is used to reduce the influence from the interference source of mistake in image analysis step (11) before.
2. according to the method for claim 1, it is characterized in that first analysis operation (16) comprises the Fourier transform by means of each pixel column of fast fourier transform algorithm, calculates the variation in described wavelength band thereafter.
3. according to the method for claim 2, it is characterized in that described reel (1) is a cardboard, and described wavelength band comprises the 0.7-4 millimeter.
4. according to the method for claim 2, it is characterized in that reel (1) is a paper, and described wavelength band comprises wavelength 3-15 millimeter.
5. according to the method for claim 4, it is characterized in that described image processing step (10) comprising:
-the first image manipulation (12), wherein, each pixel value in each image in image sequence is by the average pixel value divided by image, and multiply by pre-determined factor;
-the second image manipulation (13), wherein, the finishing edge of image is so that image obtains predetermined size;
-Di three image manipulations (14), wherein, image vertically is divided into several groups along reel (1), and in each group, the predetermined number of consecutive pixel column is arranged, thereafter, form new pixel column by mean value that calculates the pixel value in each pixel column in each group and the pixel that it is assigned in new pixel column, and
-Di four image manipulations (15), wherein, at the described image of transversely high-pass filter of reel (1).
6. according to the method for claim 5, it is characterized in that, by the calculating low-pass signal and from described image it is deducted and carry out described high-pass filter.
7. according to the method for claim 6, it is characterized in that, obtain described low-pass signal by making finite impulse response Blackman wave filter act on image.
8. device that is used for analyzing in real time the surface structure of the reel of in paper machine or lap machine, producing (1) at paper machine or lap machine, described device comprises:
-imaging system, it is disposed on the reel or descends, and the presumptive area of direction subtend reel;
-illuminator, it is disposed on the reel or down, so that use skew ray to illuminate described zone from predetermined direction, and imaging system and illuminator be disposed in the same side of reel, this same side refers to the upside or the downside of reel;
-image analysis system, it is arranged to communicate by letter with imaging system,
It is characterized in that:
-described imaging system is arranged feasible: when reel (1) passes through the imaging system front, under described oblique illumination and during scheduled time slot, take several digital pictures of reel (1), described image is formed in the reel (1) a series of surface portions (4 along a band (8), 4 '; 4 "), and
-described image analysis system is arranged the variation of calculating the pixel value in each pixel column in each image in described image sequence, and the mean value of the variation of all pixel columns of all images of calculating in image sequence, described image analysis system also is arranged to be prepared to handle to the image of catching, this processing is used to reduce the influence from the interference source of mistake, and is graphical analysis prepare image subsequently.
CNB2004800195451A 2003-07-08 2004-06-28 Method and device for analysing surface structure in paper or board Expired - Fee Related CN100394436C (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
SE0302011A SE525502C2 (en) 2003-07-08 2003-07-08 Method and apparatus for analyzing the surface structure of a web of paper or cardboard
SE03020112 2003-07-08

Publications (2)

Publication Number Publication Date
CN1820275A CN1820275A (en) 2006-08-16
CN100394436C true CN100394436C (en) 2008-06-11

Family

ID=27731132

Family Applications (1)

Application Number Title Priority Date Filing Date
CNB2004800195451A Expired - Fee Related CN100394436C (en) 2003-07-08 2004-06-28 Method and device for analysing surface structure in paper or board

Country Status (8)

Country Link
US (1) US7510629B2 (en)
EP (1) EP1654691B1 (en)
CN (1) CN100394436C (en)
AT (1) ATE414954T1 (en)
DE (1) DE602004017876D1 (en)
PL (1) PL1654691T3 (en)
SE (1) SE525502C2 (en)
WO (1) WO2005004042A1 (en)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100916615B1 (en) * 2007-06-20 2009-09-14 건국대학교 산학협력단 System for measuring the wrinkle on web in R2R process
GB201406002D0 (en) 2014-04-03 2014-05-21 Univ Lancaster Unique identifier

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0366235A1 (en) * 1988-09-26 1990-05-02 Picker International, Inc. Monitoring systems and methods
US5155558A (en) * 1990-09-19 1992-10-13 E. I. Du Pont De Nemours And Company Method and apparatus for analyzing the appearance features of a surface
CN1264836A (en) * 1999-02-25 2000-08-30 希尔德科股份有限公司 Break monitoring system for web in papermaking machine
US20020054694A1 (en) * 1999-03-26 2002-05-09 George J. Vachtsevanos Method and apparatus for analyzing an image to direct and identify patterns
WO2003039156A1 (en) * 2001-11-02 2003-05-08 Metso Paper Automation Oy Flexible camera interface

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6198537B1 (en) * 1997-07-11 2001-03-06 Philip Morris Incorporated Optical inspection system for the manufacture of banded cigarette paper
ATE197503T1 (en) * 1997-08-22 2000-11-11 Fraunhofer Ges Forschung METHOD AND DEVICE FOR AUTOMATICALLY TESTING MOVING SURFACES
US6266437B1 (en) * 1998-09-04 2001-07-24 Sandia Corporation Sequential detection of web defects
SE516999C2 (en) 2000-05-05 2002-04-02 Roger Tuomas Measuring method for a surface structure of a material by lighting up the surface with drag light and photographing it electronically with a CCD-camera
JP4666914B2 (en) * 2001-11-08 2011-04-06 ジヤンセン・フアーマシユーチカ・ナームローゼ・フエンノートシヤツプ Synergistic antifouling composition comprising 4-bromo-2- (4-chlorophenyl) -5- (trifluoromethyl) -1H-pyrrole-3-carbonitrile

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0366235A1 (en) * 1988-09-26 1990-05-02 Picker International, Inc. Monitoring systems and methods
US5155558A (en) * 1990-09-19 1992-10-13 E. I. Du Pont De Nemours And Company Method and apparatus for analyzing the appearance features of a surface
CN1264836A (en) * 1999-02-25 2000-08-30 希尔德科股份有限公司 Break monitoring system for web in papermaking machine
US20020054694A1 (en) * 1999-03-26 2002-05-09 George J. Vachtsevanos Method and apparatus for analyzing an image to direct and identify patterns
WO2003039156A1 (en) * 2001-11-02 2003-05-08 Metso Paper Automation Oy Flexible camera interface

Also Published As

Publication number Publication date
US7510629B2 (en) 2009-03-31
SE525502C2 (en) 2005-03-01
EP1654691B1 (en) 2008-11-19
SE0302011L (en) 2005-01-09
CN1820275A (en) 2006-08-16
DE602004017876D1 (en) 2009-01-02
PL1654691T3 (en) 2009-04-30
ATE414954T1 (en) 2008-12-15
SE0302011D0 (en) 2003-07-08
WO2005004042A1 (en) 2005-01-13
EP1654691A1 (en) 2006-05-10
US20060272788A1 (en) 2006-12-07

Similar Documents

Publication Publication Date Title
DE60225354T2 (en) METHOD AND DEVICE FOR PRODUCING A REFERENCE PICTURE IN A TESTING DEVICE FOR GLASS BOTTLES
KR101338576B1 (en) Defect inspection device for inspecting defect by image analysis
US7751036B2 (en) Apparatus of inspecting defect in semiconductor and method of the same
KR100235476B1 (en) Method and apparatus of inspecting surface irregularity of an object
DE102010003376A1 (en) investigation process
JP2007114843A (en) Quality deciding device
CN103097879A (en) Method and device for analyzing the optical quality of a transparent substrate
DE102005049607A1 (en) Method and device for detecting the deformation of objects
KR101203210B1 (en) Apparatus for inspecting defects
CN100394436C (en) Method and device for analysing surface structure in paper or board
DE102017106764B4 (en) TEST APPARATUS, TEST METHOD, STORAGE MEDIUM AND PROGRAM FOR CHECKING THE PRESENCE OR ABSENCE OF A DEFECT ON THE SURFACE OF A TEST TARGET
JP2009204388A (en) Defect inspection method
JP3597484B2 (en) Solder printing inspection equipment
KR100211427B1 (en) Method and device for inspection of plate with through hole
JP2004020482A (en) Method for evaluating uniformity
TW594001B (en) Method and system of multiple band UV light illumination of wafers for optical microscopy wafer inspection and metrology system
JPH01297542A (en) Defect inspecting device
JP3302863B2 (en) Inspection method and inspection device for perforated plate
JP2002350361A (en) Method and apparatus for testing unevenness of periodic pattern
JP3254288B2 (en) Line inspection method
KR100689890B1 (en) method for detecting defects in a light-related plate element for a flat panel
CN114305340B (en) Resolution detection method and device applied to OCT (optical coherence tomography) host
JPH02110306A (en) Detection of observation position and device therefor
WO2022008909A1 (en) Method and apparatus for inspecting the surface of a transparent object
JPH0845999A (en) Surface inspection method of wafer having regular pattern

Legal Events

Date Code Title Description
C06 Publication
PB01 Publication
C10 Entry into substantive examination
SE01 Entry into force of request for substantive examination
C14 Grant of patent or utility model
GR01 Patent grant
CF01 Termination of patent right due to non-payment of annual fee
CF01 Termination of patent right due to non-payment of annual fee

Granted publication date: 20080611

Termination date: 20190628