CN1359188A - Curve and straight combined straight line ulrasonic motor - Google Patents
Curve and straight combined straight line ulrasonic motor Download PDFInfo
- Publication number
- CN1359188A CN1359188A CN 02103615 CN02103615A CN1359188A CN 1359188 A CN1359188 A CN 1359188A CN 02103615 CN02103615 CN 02103615 CN 02103615 A CN02103615 A CN 02103615A CN 1359188 A CN1359188 A CN 1359188A
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- piezoelectric patches
- motor
- ulrasonic
- curve
- straight line
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- 229910000831 Steel Inorganic materials 0.000 description 5
- 239000010959 steel Substances 0.000 description 5
- HFGPZNIAWCZYJU-UHFFFAOYSA-N lead zirconate titanate Chemical compound [O-2].[O-2].[O-2].[O-2].[O-2].[Ti+4].[Zr+4].[Pb+2] HFGPZNIAWCZYJU-UHFFFAOYSA-N 0.000 description 4
- 239000002131 composite material Substances 0.000 description 3
- 238000010586 diagram Methods 0.000 description 3
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 2
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 2
- 229910052782 aluminium Inorganic materials 0.000 description 2
- 229910052802 copper Inorganic materials 0.000 description 2
- 239000010949 copper Substances 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 239000004411 aluminium Substances 0.000 description 1
- 230000006835 compression Effects 0.000 description 1
- 238000007906 compression Methods 0.000 description 1
- 230000008878 coupling Effects 0.000 description 1
- 238000010168 coupling process Methods 0.000 description 1
- 238000005859 coupling reaction Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 229920001971 elastomer Polymers 0.000 description 1
- 239000000806 elastomer Substances 0.000 description 1
- 239000011796 hollow space material Substances 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 229910052451 lead zirconate titanate Inorganic materials 0.000 description 1
- 230000010358 mechanical oscillation Effects 0.000 description 1
- 230000001360 synchronised effect Effects 0.000 description 1
- 238000002604 ultrasonography Methods 0.000 description 1
- 238000004804 winding Methods 0.000 description 1
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- General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
Abstract
The motor contains two elastic vibration bodies, between the two elastic vibration bodies a piezoelectric plate group for flexural movement, a piezoelectric plate group for longitudinal movement and another piezoelectric plate group for flexural movement are held in turn, the piezoelectric plates for flexural movement are divided into two portions whose polarized directions are opposite along diameter, and polarized from thickness direction. All the piezoelectric plates in every group of piezoelectric plates are overlaid in identical polarity mode and connected with A.C. signal, and two sides of every group of piezoelectric plates are copotential-connected. When the vibration directions of two groups of piezoelectric plates for flexural movement are identical, the motor can make one-D movement along X or Y direction, and when said vibration directions are mutually perpendicular, the motor can make two-D movement in X-Y plane.
Description
Technical field
A kind of curve and straight combined straight line ulrasonic motor belongs to linear ultrasonic motor technologies field.
Background technology
Piezoelectric ultrasound motor has the slow-speed of revolution, big torque, can directly drive load; Volume is little, structure is flexible, and power to volume ratio is 3～10 times of electromagnetic motor; Dynamic response time is less than 1 millisecond; Do not produce and be not subjected to electromagnetic interference yet; Self-sustaining moment is arranged, gearless gap, but precision positioning; Advantage such as quiet noiseless during operation.Curved vertical composite straight line motor π type commonly used wherein moves motor, and it is made of elastomer 1 and the stacked oscillator 2 that the piezoelectric element bonding forms, and asks for an interview Fig. 1.The flexural vibrations and the longitudinal tensile strain vibration of shank will be coupled when the vertical resonance frequency that makes π type oscillator foot (column) equates substantially with the flexural resonance frequency and to adopt phase difference be 90 ° two-phase alternating voltage exciting, form the elliptic motion of foot front end, thereby CD-ROM drive motor is advanced.Its shortcoming is that structure is simple inadequately, and can only carry out one dimension and move.
Summary of the invention
The object of the present invention is to provide a kind of simple in structurely, can carry out the curve and straight combined straight line ulrasonic motor of two dimensional motion.
The invention is characterized in that it contains: two elastic vibration bodies, be clipped in the piezoelectric patches group that the middle generation flexural vibrations of above-mentioned two elastic vibration bodies are used in order, the piezoelectric patches group that middle generation extensional vibration is used and two groups of piezoelectric patches groups that the generation flexural vibrations are used; Wherein, the piezoelectric patches that the generation flexural vibrations are used is to polarize from thickness direction after diameter is divided into piezoelectric patches the opposite two parts of polarised direction again, and the piezoelectric patches that produces extensional vibration polarizes along thickness direction; In every group of piezoelectric patches group between each piezoelectric patches be at the interface polarity stacked in the same manner and connect ac signal, and the both sides of respectively organizing piezoelectric patches are common-battery positions; Described two groups of piezoelectric patches that produce flexural vibrations all are that the diameter by horizontal level is divided into opposite two-part of polarised direction; Their diameters of being used to divide the polairzed area of described two groups of piezoelectric patches that produce flexural vibrations are orthogonal; Described vibrating body is cylindrical; The end of described cylinder vibrating body has one in order to amplify the double wedge of vibration amplitude; Described motor axially be that a centre bore in order to be screwed into the fixing motor each several part and to provide the screw of pretightning force to use is provided; The center fixed of the piezoelectric patches of described generation extensional vibration a dish in order to be connected with extraneous parts.
Evidence: it has reached intended purposes.
Description of drawings: Fig. 1. the π type moves the structural representation of motor.Fig. 2. the structural representation of first embodiment of curve and straight combined straight line ulrasonic motor of the present invention.Fig. 3, respectively to organize piezoelectric patches be one group of expansion and vertical direction cutaway view: 3a that shows with two: top one group in order to the polarised direction vertical view of the piezoelectric patches that produces flexural vibrations and the cutaway view of vertical direction thereof; 3b: middle one group of polarised direction vertical view and vertical direction cutaway view thereof in order to the piezoelectric patches of generation extensional vibration; 3c: following one group in order to produce flexural vibrations but polarized area phase place and Fig. 3 a differ two parts of 90 degree also differs 90 cutaway views of spending by upper and lower polarised direction vertical view and vertical direction thereof to the piezoelectric patches that distributes.Fig. 4. each organizes the mode of vibration schematic diagram of piezoelectric patches: 4a: the schematic perspective view of top one group of piezoelectric patches flexural vibrations; 4b: the schematic perspective view of middle one group of piezoelectric patches extensional vibration; 4c: two groups of piezoelectric patches complex vibrations are at the terminal elliptic motion schematic perspective view that produces of motor in going up.Fig. 5. the schematic diagram of transversely movable curve and straight combined straight line ulrasonic motor.Fig. 6. the structural representation of second embodiment of curve and straight combined straight line ulrasonic motor of the present invention.
Embodiment
The structural representation of curve and straight combined straight line ulrasonic motor is referring to Fig. 2.
The 1--vibrating body
2--flexural vibrations piezoelectric patches
3--extensional vibration piezoelectric patches
4--flexural vibrations piezoelectric patches
The 5--vibrating body
6--extensional vibration electrode slice connects signal and uses
7--flexural vibrations electrode slice connects signal and uses
8--flexural vibrations electrode slice connects signal and uses
In Fig. 2, the 1st, the capable elastic vibration body of cylinder is formed from aluminium, also available copper or other composite materials, the 3rd, produce the piezoelectric patches of extensional vibration, 4,5 is respectively upper and lower two groups of piezoelectric patches that produce flexural vibrations, they use PZT-8 (lead zirconate titanate) piezoelectric to make, and every group has two.The 6th, with the conducting strip of ac signal, 7,8 is respectively to connect two conducting strips that connect different piezoelectric patches groups of flexural vibrations with ac signal by extensional vibration, the 9th, and make and respectively organize the piezoelectric patches both sides or the conducting strip of common-battery position at the interface.
On piezoelectric patches, add ac signal, evoke the mechanical oscillation of piezoelectric device by the inverse piezoelectric effect of piezoelectric patches.The extensional vibration piezoelectric patches produces single order extensional vibration, and the flexural vibrations piezoelectric patches produces the second order flexural vibrations, and the end that is coupling in motor of two kinds of vibrations produces elliptic motion, sees Fig. 4 c.Motor integral body is cylindrical, adopts the hollow sandwich type structural to assemble, and two ends constitute (two cylindrical vibrating bodies or aluminum, or copper, or composite material) by two stainless cylindrical vibrating bodies, see 1 among Fig. 2 and 5.Two vibrating bodies clip three groups of piezoelectric patches (Fig. 3), and wherein 2 and 4 are used to produce flexural vibrations, middle 3 (can 2 or 4) is used to produce extensional vibration.2 and 4 piezoelectric patches groups can be made up of 4 to 8 piezoelectric patches respectively, and the polarised direction of each piezoelectric patches is divided into two different parts by diameter, and each part polarizes along thickness direction, and two parts polarised direction is opposite, and the part that polarity is identical during installation is to together.3 piezoelectric patches groups can be made up of 2 to 4 piezoelectric patches, polarize along thickness direction.The axial hollow space of motor is screwed into by screw, and screw plays a part each part of fixing motor and precompression is provided.
2 with the direction of vibration of 4 piezoelectric patches groups both can be identical, also can be orthogonal.When 2 when identical with 4 direction of vibration, to 2,3,4 respectively by line 7,6,8 input signals, and motor can realize that the straight line of one dimension moves, and when the input signal phase place is anti-phase, motor will carry out oppositely moving; When 2 and 4 direction of vibration are orthogonal, 2 and 3 insert signals, can on platform, carry out X to straight line move, 3 and 4 when inserting signals, then can on platform, carry out Y to straight line move, these two moving directions combine the two dimensional surface that can realize motor and move.
Double wedge shape is made in cylinder vibrating body of the present invention end, can amplify vibration amplitude.Double wedge is circular, can adapt to two-dimensional motion; Double wedge is a rectangle, motion in one dimension preferably.
With reference to the explanation of front, we have made some model machines.The advance schematic diagram of first model machine on experiment porch that Fig. 5 makes for us.Its diameter is 11 millimeters, and length is 40 millimeters.To 2 and 3 input drive signals, motor just begins to carry out straight line along the upper surface of steel plate and moves.To 3 and 4 input drive signals, motor realize to move along upper surface equally, but to that indicated in the drawings perpendicular of direction.Motor operates steadily on platform, noiseless.Fig. 6 is the another kind of model machine that we make, structure and Fig. 2 broadly similar, but difference slightly.Adopted 4 extensional vibration piezoelectric patches (part 3 of Fig. 6) in the middle of at first being, the flexural vibrations piezoelectric patches has used 8 (parts 2 and 4 of Fig. 6) altogether.Next is that the middle thin disk (part 6 of Fig. 6) of a ground connection that added is used for motor is fixed to other objects, and links to each other with other grounding electrode sheet.8,9,10 is electrode slices that three winding signals are used.The bottom of following vibrating body (part 5 of Fig. 6) has increased a rectangle double wedge (part 7 of Fig. 6).Whole diameter of motor is 11 millimeters, and length is 41 millimeters.Can do the reciprocating motion of one dimension.
In Fig. 3～Fig. 4, what Fig. 3 a showed is top one group of piezoelectric patches that the generation flexural vibrations are used, be the vertical view after upper and lower original overlapping piezoelectric patches is launched above, the diameter of vertical direction is divided into two opposite polarized areas of polarised direction to piezoelectric patches, they all polarize along thickness direction, behind two piezoelectric patches upper-lower overlappings, their polarised direction is shown in the cutaway view of bottom vertical direction.When the outside at two piezoelectric patches be connected in they intersection and the outside between add ac-excited signal after, between the AC signal positive half period, two piezoelectric patches repel each other in the left side, i.e. elongation, at the right side pressurized, make motor do flexural vibrations along directions X along the direction of vibration of Fig. 4 a; Then opposite at the simple alternating current negative half period; What Fig. 3 b showed is the middle piezoelectric patches group that produces extensional vibration, between the simple alternating current positive half period, and longitudinal tensile strain, otherwise then compression; What Fig. 3 c showed is the piezoelectric patches group of following generation flexural vibrations, but flexural vibrations are along the Y direction.If if motor moves along directions X, then among Fig. 3 a, Fig. 3 c employed two groups of piezoelectric patches groups all should to make its flexural vibrations all be along directions X, and add that the AC signal on them is a same phase; If motor is moved along the opposite direction of X, then must make the phase place of the AC signal on these two groups anti-phase simultaneously.No matter be that motor is advanced along directions X or anti-directions X, all must on middle one group of piezoelectric patches, add the AC signal of coordination phase simultaneously.In like manner, if desire to make motor to move along the Y direction, then the piezoelectric patches group among Fig. 3 a must replace with the piezoelectric patches group of Fig. 3 c.
If add synchronous AC signal on three groups of piezoelectric patches in Fig. 3, then motor can move in X-Y plane, the projection of the track of its end each point on the X-Z plane shown in Fig. 4 c, ovalize.In Fig. 5, motor is the sketch of Fig. 2.2,4 is respectively upper and lower two piezoelectric patches that the generation flexural vibrations of identical polairzed area distribution situation and identical polarised direction are arranged, the 3rd, produce one group of piezoelectric patches of extensional vibration, on above-mentioned three groups of piezoelectric patches 2,3,4, add the ac signal of same phase, motor along continuous straight runs on steel plate 10 is moved to right.Also can make 2, the 4 piezoelectric patches groups that adopt Fig. 3 a and Fig. 3 c respectively, then when 2 with 3 liang of group piezoelectric patches on add identical AC signal, motor is moved at steel plate 10 upper edge directions Xs; Add that identical ac signal just can make motor in steel plate 10 upper edge Y directions move with 4 liang of groups on the piezoelectric patches 3; 2,3 with 4 three groups of piezoelectric patches on add identical ac signal, then move on the motor plane that can be X-Y on steel plate 10, its terminal each locus of points is oval on the X-Z plane.In Fig. 6, different is the middle four PZT-8 extensional vibration piezoelectric patches that adopt, and the flexural vibrations piezoelectric patches is upper and lower respectively with 4 PZT-5's; The centre has added the thin disk 11 of a ground connection, and it can be fixed on motor on other objects, and links to each other with other grounding electrode sheets 9; Bottom at following vibrating body 1 has increased a rectangle double wedge, works to amplify vibration amplitude.Double wedge 12 is rectangular, is suitable for doing motion in one dimension; Rounded, then be suitable for doing two dimensional motion.Whole diameter of motor is 11 millimeters, and length is 41 millimeters, can do the one dimension reciprocating motion.
This shows that it simple in structure can also be done two dimensional motion.
Claims (7)
1. curve and straight combined straight line ulrasonic motor, contain elastic vibration body and piezoelectric patches, it is characterized in that it contains: two elastic vibration bodies, be clipped in the piezoelectric patches group that the middle generation flexural vibrations of above-mentioned two elastic vibration bodies are used in order, the piezoelectric patches group that middle generation extensional vibration is used and another group produce the piezoelectric patches group that flexural vibrations are used; Wherein, the piezoelectric patches that the generation flexural vibrations are used is to polarize from thickness direction after diameter is divided into piezoelectric patches the opposite two parts of polarised direction again, and the piezoelectric patches that produces extensional vibration polarizes along thickness direction; In every group of piezoelectric patches group between each piezoelectric patches be at the interface polarity stacked in the same manner and connect ac signal, and the both sides of respectively organizing piezoelectric patches are common-battery positions.
2. curve and straight combined straight line ulrasonic motor according to claim 1 is characterized in that: described two groups of piezoelectric patches that produce flexural vibrations all are that the diameter by horizontal level is divided into opposite two-part of polarised direction.
3. curve and straight combined straight line ulrasonic motor according to claim 1 is characterized in that: their diameters of being used to divide the polairzed area of described two groups of piezoelectric patches that produce flexural vibrations are orthogonal.
4. curve and straight combined straight line ulrasonic motor according to claim 1 is characterized in that: described vibrating body is cylindrical.
5. according to claim 1 or 4 described curve and straight combined straight line ulrasonic motors, it is characterized in that: the end of described cylinder vibrating body has one in order to amplify the double wedge of vibration amplitude.
6. curve and straight combined straight line ulrasonic motor according to claim 1 is characterized in that: described motor axially be that a centre bore in order to be screwed into the fixing motor each several part and to provide the screw of pretightning force to use is provided.
7. curve and straight combined straight line ulrasonic motor according to claim 1 is characterized in that: the center fixed of the piezoelectric patches of described generation extensional vibration a dish in order to be connected with extraneous parts.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNB021036152A CN1159835C (en) | 2002-01-29 | 2002-01-29 | Curve and straight combined straight line ulrasonic motor |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNB021036152A CN1159835C (en) | 2002-01-29 | 2002-01-29 | Curve and straight combined straight line ulrasonic motor |
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| Publication Number | Publication Date |
|---|---|
| CN1359188A true CN1359188A (en) | 2002-07-17 |
| CN1159835C CN1159835C (en) | 2004-07-28 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNB021036152A Expired - Fee Related CN1159835C (en) | 2002-01-29 | 2002-01-29 | Curve and straight combined straight line ulrasonic motor |
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN100367650C (en) * | 2004-09-29 | 2008-02-06 | 清华大学 | Micro supersonic motor device using magnetic pressure |
| CN100375380C (en) * | 2004-07-30 | 2008-03-12 | 清华大学 | Curve swing head supersonic mciro motor composed of multiple piezoelectric lamination pile transducer |
| CN102229137A (en) * | 2011-05-26 | 2011-11-02 | 南京航空航天大学 | Three-degree-of-freedom piezoelectric drive platform |
-
2002
- 2002-01-29 CN CNB021036152A patent/CN1159835C/en not_active Expired - Fee Related
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN100375380C (en) * | 2004-07-30 | 2008-03-12 | 清华大学 | Curve swing head supersonic mciro motor composed of multiple piezoelectric lamination pile transducer |
| CN100367650C (en) * | 2004-09-29 | 2008-02-06 | 清华大学 | Micro supersonic motor device using magnetic pressure |
| CN102229137A (en) * | 2011-05-26 | 2011-11-02 | 南京航空航天大学 | Three-degree-of-freedom piezoelectric drive platform |
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| Publication number | Publication date |
|---|---|
| CN1159835C (en) | 2004-07-28 |
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Granted publication date: 20040728 Termination date: 20140129 |