CH474856A - Verfahren zur Herstellung einer Halbleitervorrichtung - Google Patents
Verfahren zur Herstellung einer HalbleitervorrichtungInfo
- Publication number
- CH474856A CH474856A CH420667A CH420667A CH474856A CH 474856 A CH474856 A CH 474856A CH 420667 A CH420667 A CH 420667A CH 420667 A CH420667 A CH 420667A CH 474856 A CH474856 A CH 474856A
- Authority
- CH
- Switzerland
- Prior art keywords
- manufacturing
- semiconductor device
- semiconductor
- Prior art date
Links
- 238000004519 manufacturing process Methods 0.000 title 1
- 239000004065 semiconductor Substances 0.000 title 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/06—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of metallic material
- C23C16/08—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of metallic material from metal halides
- C23C16/12—Deposition of aluminium only
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/06—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of metallic material
- C23C16/08—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of metallic material from metal halides
- C23C16/14—Deposition of only one other metal element
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S148/00—Metal treatment
- Y10S148/142—Semiconductor-metal-semiconductor
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/31504—Composite [nonstructural laminate]
- Y10T428/31678—Of metal
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- General Physics & Mathematics (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Computer Hardware Design (AREA)
- General Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Ceramic Engineering (AREA)
- Manufacturing & Machinery (AREA)
- Electrodes Of Semiconductors (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2020866 | 1966-03-29 | ||
JP1020866 | 1966-03-29 |
Publications (1)
Publication Number | Publication Date |
---|---|
CH474856A true CH474856A (de) | 1969-06-30 |
Family
ID=26345437
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CH420667A CH474856A (de) | 1966-03-29 | 1967-03-23 | Verfahren zur Herstellung einer Halbleitervorrichtung |
Country Status (8)
Country | Link |
---|---|
US (1) | US3515583A (de) |
BE (1) | BE696170A (de) |
CH (1) | CH474856A (de) |
DE (1) | DE1614140B2 (de) |
FR (1) | FR1517241A (de) |
GB (1) | GB1107700A (de) |
NL (1) | NL149860B (de) |
SE (1) | SE336848B (de) |
Families Citing this family (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3562606A (en) * | 1969-08-13 | 1971-02-09 | Varian Associates | Subsurface gallium arsenide schottky-type diode and method of fabricating same |
US3664874A (en) * | 1969-12-31 | 1972-05-23 | Nasa | Tungsten contacts on silicon substrates |
DE2012031A1 (de) * | 1970-03-13 | 1971-09-23 | Siemens Ag | Verfahren zum Herstellen von aus Chrom oder Molybdän bestehenden Kontaktmetallschichten in Halbleiterbauelementen |
US4024299A (en) * | 1973-10-15 | 1977-05-17 | General Electric Company | Process for preparing magnetic member |
FR2396974A1 (fr) | 1977-07-04 | 1979-02-02 | Anvar | Procede de detection et d'etude d'une activite cellulaire ou analogue et moyens pour la mise en oeuvre d'un tel procede |
US4206540A (en) * | 1978-06-02 | 1980-06-10 | International Rectifier Corporation | Schottky device and method of manufacture using palladium and platinum intermetallic alloys and titanium barrier |
JPS57194569A (en) * | 1981-05-15 | 1982-11-30 | Fairchild Camera Instr Co | Schottky diode polysilicon resistor memory cell |
JP6839939B2 (ja) * | 2016-07-26 | 2021-03-10 | 株式会社Screenホールディングス | 熱処理方法 |
Family Cites Families (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US1226925A (en) * | 1915-08-09 | 1917-05-22 | Arthur J Thowless | Ductile filament. |
US2475601A (en) * | 1946-04-26 | 1949-07-12 | Ohio Commw Eng Co | Bonding of metal carbonyl deposits |
US3349297A (en) * | 1964-06-23 | 1967-10-24 | Bell Telephone Labor Inc | Surface barrier semiconductor translating device |
DE1289188B (de) * | 1964-12-15 | 1969-02-13 | Telefunken Patent | Metallbasistransistor |
-
1967
- 1967-03-14 GB GB1189067A patent/GB1107700A/en not_active Expired
- 1967-03-20 US US3515583D patent/US3515583A/en not_active Expired - Lifetime
- 1967-03-23 DE DE19671614140 patent/DE1614140B2/de not_active Withdrawn
- 1967-03-23 CH CH420667A patent/CH474856A/de not_active IP Right Cessation
- 1967-03-28 NL NL6704438A patent/NL149860B/xx unknown
- 1967-03-28 BE BE696170D patent/BE696170A/xx unknown
- 1967-03-29 FR FR100634A patent/FR1517241A/fr not_active Expired
- 1967-03-29 SE SE426767A patent/SE336848B/xx unknown
Also Published As
Publication number | Publication date |
---|---|
BE696170A (de) | 1967-09-01 |
FR1517241A (fr) | 1968-03-15 |
DE1614140A1 (de) | 1971-02-25 |
NL149860B (nl) | 1976-06-15 |
NL6704438A (de) | 1967-10-02 |
US3515583A (en) | 1970-06-02 |
SE336848B (de) | 1971-07-19 |
DE1614140B2 (de) | 1971-08-19 |
GB1107700A (en) | 1968-03-27 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
PL | Patent ceased |