CH365362A - Vorrichtung zum tiegelfreien Zonenziehen von stabförmigem Halbleitermaterial - Google Patents
Vorrichtung zum tiegelfreien Zonenziehen von stabförmigem HalbleitermaterialInfo
- Publication number
- CH365362A CH365362A CH6595358A CH6595358A CH365362A CH 365362 A CH365362 A CH 365362A CH 6595358 A CH6595358 A CH 6595358A CH 6595358 A CH6595358 A CH 6595358A CH 365362 A CH365362 A CH 365362A
- Authority
- CH
- Switzerland
- Prior art keywords
- crucible
- rod
- semiconductor material
- shaped semiconductor
- free zone
- Prior art date
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B13/00—Single-crystal growth by zone-melting; Refining by zone-melting
- C30B13/16—Heating of the molten zone
- C30B13/20—Heating of the molten zone by induction, e.g. hot wire technique
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S117/00—Single-crystal, oriented-crystal, and epitaxy growth processes; non-coating apparatus therefor
- Y10S117/90—Apparatus characterized by composition or treatment thereof, e.g. surface finish, surface coating
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T117/00—Single-crystal, oriented-crystal, and epitaxy growth processes; non-coating apparatus therefor
- Y10T117/10—Apparatus
- Y10T117/1024—Apparatus for crystallization from liquid or supercritical state
- Y10T117/1032—Seed pulling
- Y10T117/1068—Seed pulling including heating or cooling details [e.g., shield configuration]
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T117/00—Single-crystal, oriented-crystal, and epitaxy growth processes; non-coating apparatus therefor
- Y10T117/10—Apparatus
- Y10T117/1024—Apparatus for crystallization from liquid or supercritical state
- Y10T117/1076—Apparatus for crystallization from liquid or supercritical state having means for producing a moving solid-liquid-solid zone
- Y10T117/1088—Apparatus for crystallization from liquid or supercritical state having means for producing a moving solid-liquid-solid zone including heating or cooling details
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Crystallography & Structural Chemistry (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Furnace Details (AREA)
- Crucibles And Fluidized-Bed Furnaces (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DES55905A DE1076623B (de) | 1957-11-15 | 1957-11-15 | Vorrichtung zum tiegelfreien Zonenziehen von stabfoermigem Halbleitermaterial |
Publications (1)
Publication Number | Publication Date |
---|---|
CH365362A true CH365362A (de) | 1962-11-15 |
Family
ID=7490747
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CH6595358A CH365362A (de) | 1957-11-15 | 1958-11-08 | Vorrichtung zum tiegelfreien Zonenziehen von stabförmigem Halbleitermaterial |
Country Status (5)
Country | Link |
---|---|
US (1) | US2904663A (de) |
CH (1) | CH365362A (de) |
DE (1) | DE1076623B (de) |
FR (1) | FR1204149A (de) |
GB (1) | GB844570A (de) |
Families Citing this family (14)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE1061527B (de) * | 1953-02-14 | 1959-07-16 | Siemens Ag | Verfahren zum zonenweisen Umschmelzen von Staeben und anderen langgestreckten Werkstuecken |
BE581195A (de) * | 1958-07-30 | |||
US2957064A (en) * | 1958-09-30 | 1960-10-18 | Westinghouse Electric Corp | Stabilizing of levitation melting |
NL130822C (de) * | 1959-08-14 | |||
NL249360A (de) * | 1960-03-12 | |||
US3203768A (en) * | 1961-08-01 | 1965-08-31 | Westinghouse Electric Corp | Apparatus of zone refining and controlling solute segregation in solidifying melts by electromagnetic means |
DE1916317C3 (de) * | 1969-03-29 | 1975-07-24 | Siemens Ag, 1000 Berlin Und 8000 Muenchen | Stromzuführung für eine Induktionsspule beim tiegelfreien Zonenschmelzen |
DE1916318C3 (de) * | 1969-03-29 | 1975-07-24 | Siemens Ag, 1000 Berlin Und 8000 Muenchen | Stromdurchführung für eine Vorrichtung zum Zonenschmelzen |
DE2141188C3 (de) * | 1971-08-17 | 1979-09-13 | Siemens Ag, 1000 Berlin Und 8000 Muenchen | Vorrichtung für das tiegellose Zonenschmelzen |
DE2308136C3 (de) * | 1973-02-19 | 1982-03-25 | Siemens AG, 1000 Berlin und 8000 München | Gasdichte Stromzuführung |
DE2700856A1 (de) * | 1977-01-11 | 1978-07-13 | Raphael Dr Leonhardt | Vorrichtung zum zuechten von kristallen oder fuer dgl. verfahren |
DE2823611C2 (de) * | 1978-05-30 | 1986-09-11 | Siemens AG, 1000 Berlin und 8000 München | Stromzuführung für eine Induktionsheizspule |
DE2919988A1 (de) * | 1979-05-17 | 1980-11-27 | Siemens Ag | Stromzufuehrung in koaxialbauweise |
US5554836A (en) * | 1994-05-23 | 1996-09-10 | The Boc Group, Inc. | Induction heating in low oxygen-containing atmosphere |
Family Cites Families (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US2686864A (en) * | 1951-01-17 | 1954-08-17 | Westinghouse Electric Corp | Magnetic levitation and heating of conductive materials |
NL89230C (de) * | 1952-12-17 | 1900-01-01 | ||
US2743199A (en) * | 1955-03-30 | 1956-04-24 | Westinghouse Electric Corp | Process of zone refining an elongated body of metal |
US2870309A (en) * | 1957-06-11 | 1959-01-20 | Emil R Capita | Zone purification device |
-
1957
- 1957-11-15 DE DES55905A patent/DE1076623B/de active Pending
-
1958
- 1958-10-09 FR FR1204149D patent/FR1204149A/fr not_active Expired
- 1958-10-31 US US771037A patent/US2904663A/en not_active Expired - Lifetime
- 1958-11-06 GB GB35712/58A patent/GB844570A/en not_active Expired
- 1958-11-08 CH CH6595358A patent/CH365362A/de unknown
Also Published As
Publication number | Publication date |
---|---|
DE1076623B (de) | 1960-03-03 |
FR1204149A (fr) | 1960-01-22 |
US2904663A (en) | 1959-09-15 |
GB844570A (en) | 1960-08-17 |
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