CA2091131A1 - Method and apparatus for monitoring sub-micron particles - Google Patents
Method and apparatus for monitoring sub-micron particlesInfo
- Publication number
- CA2091131A1 CA2091131A1 CA 2091131 CA2091131A CA2091131A1 CA 2091131 A1 CA2091131 A1 CA 2091131A1 CA 2091131 CA2091131 CA 2091131 CA 2091131 A CA2091131 A CA 2091131A CA 2091131 A1 CA2091131 A1 CA 2091131A1
- Authority
- CA
- Canada
- Prior art keywords
- stream
- particles
- micron particles
- light beam
- monitoring sub
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000002245 particle Substances 0.000 title abstract 5
- 238000000034 method Methods 0.000 title 1
- 238000012544 monitoring process Methods 0.000 title 1
- 230000001427 coherent effect Effects 0.000 abstract 2
- 239000012530 fluid Substances 0.000 abstract 2
- 230000003287 optical effect Effects 0.000 abstract 1
- 229910021642 ultra pure water Inorganic materials 0.000 abstract 1
- 239000012498 ultrapure water Substances 0.000 abstract 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N15/00—Investigating characteristics of particles; Investigating permeability, pore-volume or surface-area of porous materials
- G01N15/10—Investigating individual particles
- G01N15/14—Optical investigation techniques, e.g. flow cytometry
Landscapes
- Chemical & Material Sciences (AREA)
- Dispersion Chemistry (AREA)
- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Investigating Or Analysing Materials By Optical Means (AREA)
Abstract
Sub-micron particles in fluid such as ultrapure water are detected or monitored by a simple apparatus in which a light beam from a coherent light source (1) is converged (2) in such a manner that the light beam is focussed in a stream (3) of particle-containing fluid, the light passed through the stream and diffracted by the particles is received by a photo-detector (4) which is positioned at an opposite side of the coherent light source with respect to the stream and substantially on an optical axis of the light beam, so that the number of particles in the stream is counted from electrical signals emitted by the photo-detector.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CA 2091131 CA2091131C (en) | 1993-03-05 | 1993-03-05 | Method and apparatus for monitoring sub-micron particles |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CA 2091131 CA2091131C (en) | 1993-03-05 | 1993-03-05 | Method and apparatus for monitoring sub-micron particles |
Publications (2)
Publication Number | Publication Date |
---|---|
CA2091131A1 true CA2091131A1 (en) | 1994-09-06 |
CA2091131C CA2091131C (en) | 2006-06-13 |
Family
ID=4151264
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CA 2091131 Expired - Lifetime CA2091131C (en) | 1993-03-05 | 1993-03-05 | Method and apparatus for monitoring sub-micron particles |
Country Status (1)
Country | Link |
---|---|
CA (1) | CA2091131C (en) |
-
1993
- 1993-03-05 CA CA 2091131 patent/CA2091131C/en not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
CA2091131C (en) | 2006-06-13 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
EEER | Examination request | ||
MKLA | Lapsed |
Effective date: 20130305 |
|
MKEC | Expiry (correction) |
Effective date: 20131009 |