CA2091131A1 - Method and apparatus for monitoring sub-micron particles - Google Patents

Method and apparatus for monitoring sub-micron particles

Info

Publication number
CA2091131A1
CA2091131A1 CA 2091131 CA2091131A CA2091131A1 CA 2091131 A1 CA2091131 A1 CA 2091131A1 CA 2091131 CA2091131 CA 2091131 CA 2091131 A CA2091131 A CA 2091131A CA 2091131 A1 CA2091131 A1 CA 2091131A1
Authority
CA
Canada
Prior art keywords
stream
particles
micron particles
light beam
monitoring sub
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
CA 2091131
Other languages
French (fr)
Other versions
CA2091131C (en
Inventor
Hiroshi Koshizuka
Takashi Kanatake
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shinmikuni Kikai Ltd
Original Assignee
Shinmikuni Kikai Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shinmikuni Kikai Ltd filed Critical Shinmikuni Kikai Ltd
Priority to CA 2091131 priority Critical patent/CA2091131C/en
Publication of CA2091131A1 publication Critical patent/CA2091131A1/en
Application granted granted Critical
Publication of CA2091131C publication Critical patent/CA2091131C/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N15/00—Investigating characteristics of particles; Investigating permeability, pore-volume or surface-area of porous materials
    • G01N15/10—Investigating individual particles
    • G01N15/14—Optical investigation techniques, e.g. flow cytometry

Landscapes

  • Chemical & Material Sciences (AREA)
  • Dispersion Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)

Abstract

Sub-micron particles in fluid such as ultrapure water are detected or monitored by a simple apparatus in which a light beam from a coherent light source (1) is converged (2) in such a manner that the light beam is focussed in a stream (3) of particle-containing fluid, the light passed through the stream and diffracted by the particles is received by a photo-detector (4) which is positioned at an opposite side of the coherent light source with respect to the stream and substantially on an optical axis of the light beam, so that the number of particles in the stream is counted from electrical signals emitted by the photo-detector.
CA 2091131 1993-03-05 1993-03-05 Method and apparatus for monitoring sub-micron particles Expired - Lifetime CA2091131C (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CA 2091131 CA2091131C (en) 1993-03-05 1993-03-05 Method and apparatus for monitoring sub-micron particles

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CA 2091131 CA2091131C (en) 1993-03-05 1993-03-05 Method and apparatus for monitoring sub-micron particles

Publications (2)

Publication Number Publication Date
CA2091131A1 true CA2091131A1 (en) 1994-09-06
CA2091131C CA2091131C (en) 2006-06-13

Family

ID=4151264

Family Applications (1)

Application Number Title Priority Date Filing Date
CA 2091131 Expired - Lifetime CA2091131C (en) 1993-03-05 1993-03-05 Method and apparatus for monitoring sub-micron particles

Country Status (1)

Country Link
CA (1) CA2091131C (en)

Also Published As

Publication number Publication date
CA2091131C (en) 2006-06-13

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Legal Events

Date Code Title Description
EEER Examination request
MKLA Lapsed

Effective date: 20130305

MKEC Expiry (correction)

Effective date: 20131009