CA1125922A - Mis heterojunction structures - Google Patents
Mis heterojunction structuresInfo
- Publication number
- CA1125922A CA1125922A CA319,450A CA319450A CA1125922A CA 1125922 A CA1125922 A CA 1125922A CA 319450 A CA319450 A CA 319450A CA 1125922 A CA1125922 A CA 1125922A
- Authority
- CA
- Canada
- Prior art keywords
- layer
- insulative layer
- crystal
- gaas
- mis
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000013078 crystal Substances 0.000 claims abstract description 21
- 229910001218 Gallium arsenide Inorganic materials 0.000 claims abstract description 20
- 239000004065 semiconductor Substances 0.000 claims abstract description 18
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims abstract description 11
- 229910052760 oxygen Inorganic materials 0.000 claims abstract description 11
- 239000001301 oxygen Substances 0.000 claims abstract description 11
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 claims abstract description 8
- 239000011651 chromium Substances 0.000 claims abstract description 7
- 239000012535 impurity Substances 0.000 claims abstract description 6
- 229910052804 chromium Inorganic materials 0.000 claims abstract description 4
- 229910052742 iron Inorganic materials 0.000 claims abstract description 4
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 claims abstract description 3
- 229910052751 metal Inorganic materials 0.000 claims description 15
- 239000002184 metal Substances 0.000 claims description 15
- 239000000463 material Substances 0.000 claims description 8
- 150000001875 compounds Chemical class 0.000 claims description 3
- 238000001451 molecular beam epitaxy Methods 0.000 claims description 2
- 125000005842 heteroatom Chemical group 0.000 claims 1
- 229910000980 Aluminium gallium arsenide Inorganic materials 0.000 abstract 1
- 238000005259 measurement Methods 0.000 description 12
- 239000006185 dispersion Substances 0.000 description 7
- 238000001894 space-charge-limited current method Methods 0.000 description 7
- 239000012212 insulator Substances 0.000 description 5
- 239000000758 substrate Substances 0.000 description 5
- 238000002347 injection Methods 0.000 description 4
- 239000007924 injection Substances 0.000 description 4
- 230000005527 interface trap Effects 0.000 description 4
- 238000001773 deep-level transient spectroscopy Methods 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 102100031920 Dihydrolipoyllysine-residue succinyltransferase component of 2-oxoglutarate dehydrogenase complex, mitochondrial Human genes 0.000 description 2
- 101000992065 Homo sapiens Dihydrolipoyllysine-residue succinyltransferase component of 2-oxoglutarate dehydrogenase complex, mitochondrial Proteins 0.000 description 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- 230000002939 deleterious effect Effects 0.000 description 2
- 239000003989 dielectric material Substances 0.000 description 2
- 238000002955 isolation Methods 0.000 description 2
- 229910052581 Si3N4 Inorganic materials 0.000 description 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 238000009825 accumulation Methods 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- 238000004458 analytical method Methods 0.000 description 1
- 230000004888 barrier function Effects 0.000 description 1
- 239000000969 carrier Substances 0.000 description 1
- 230000001276 controlling effect Effects 0.000 description 1
- 230000000875 corresponding effect Effects 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 238000011982 device technology Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000010494 dissociation reaction Methods 0.000 description 1
- 230000005593 dissociations Effects 0.000 description 1
- 230000005669 field effect Effects 0.000 description 1
- 229910052733 gallium Inorganic materials 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
- 238000000691 measurement method Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 235000012239 silicon dioxide Nutrition 0.000 description 1
- 239000000377 silicon dioxide Substances 0.000 description 1
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Chemical compound O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/40—Electrodes ; Multistep manufacturing processes therefor
- H01L29/43—Electrodes ; Multistep manufacturing processes therefor characterised by the materials of which they are formed
- H01L29/432—Heterojunction gate for field effect devices
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/02—Semiconductor bodies ; Multistep manufacturing processes therefor
- H01L29/12—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by the materials of which they are formed
- H01L29/20—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by the materials of which they are formed including, apart from doping materials or other impurities, only AIIIBV compounds
- H01L29/207—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by the materials of which they are formed including, apart from doping materials or other impurities, only AIIIBV compounds further characterised by the doping material
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/40—Electrodes ; Multistep manufacturing processes therefor
- H01L29/43—Electrodes ; Multistep manufacturing processes therefor characterised by the materials of which they are formed
- H01L29/47—Schottky barrier electrodes
- H01L29/475—Schottky barrier electrodes on AIII-BV compounds
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/40—Electrodes ; Multistep manufacturing processes therefor
- H01L29/43—Electrodes ; Multistep manufacturing processes therefor characterised by the materials of which they are formed
- H01L29/49—Metal-insulator-semiconductor electrodes, e.g. gates of MOSFET
- H01L29/495—Metal-insulator-semiconductor electrodes, e.g. gates of MOSFET the conductor material next to the insulator being a simple metal, e.g. W, Mo
- H01L29/4958—Metal-insulator-semiconductor electrodes, e.g. gates of MOSFET the conductor material next to the insulator being a simple metal, e.g. W, Mo with a multiple layer structure
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
- H01L29/76—Unipolar devices, e.g. field effect transistors
- H01L29/772—Field effect transistors
- H01L29/80—Field effect transistors with field effect produced by a PN or other rectifying junction gate, i.e. potential-jump barrier
- H01L29/802—Field effect transistors with field effect produced by a PN or other rectifying junction gate, i.e. potential-jump barrier with heterojunction gate, e.g. transistors with semiconductor layer acting as gate insulating layer, MIS-like transistors
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S438/00—Semiconductor device manufacturing: process
- Y10S438/914—Doping
- Y10S438/917—Deep level dopants, e.g. gold, chromium, iron or nickel
Landscapes
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Physics & Mathematics (AREA)
- Ceramic Engineering (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Insulated Gate Type Field-Effect Transistor (AREA)
- Junction Field-Effect Transistors (AREA)
- Electrodes Of Semiconductors (AREA)
- Thin Film Transistor (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US869,369 | 1978-01-13 | ||
| US05/869,369 US4160261A (en) | 1978-01-13 | 1978-01-13 | Mis heterojunction structures |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CA1125922A true CA1125922A (en) | 1982-06-15 |
Family
ID=25353428
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CA319,450A Expired CA1125922A (en) | 1978-01-13 | 1979-01-11 | Mis heterojunction structures |
Country Status (10)
| Country | Link |
|---|---|
| US (1) | US4160261A (it) |
| JP (1) | JPS54129886A (it) |
| BE (1) | BE873428A (it) |
| CA (1) | CA1125922A (it) |
| DE (1) | DE2901094A1 (it) |
| FR (1) | FR2414796A1 (it) |
| GB (1) | GB2013028B (it) |
| IT (1) | IT1111954B (it) |
| NL (1) | NL7900274A (it) |
| SE (1) | SE7900083L (it) |
Families Citing this family (28)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4291327A (en) * | 1978-08-28 | 1981-09-22 | Bell Telephone Laboratories, Incorporated | MOS Devices |
| US4297783A (en) * | 1979-01-30 | 1981-11-03 | Bell Telephone Laboratories, Incorporated | Method of fabricating GaAs devices utilizing a semi-insulating layer of AlGaAs in combination with an overlying masking layer |
| US4231050A (en) * | 1979-01-30 | 1980-10-28 | Bell Telephone Laboratories, Incorporated | Reduction of surface recombination current in GaAs devices |
| FR2465317A2 (fr) * | 1979-03-28 | 1981-03-20 | Thomson Csf | Transistor a effet de champ a frequence de coupure elevee |
| FR2469002A1 (fr) * | 1979-10-26 | 1981-05-08 | Thomson Csf | Dispositif semiconducteur a effet de champ pour hautes frequences et transistor et dispositif a transfert de charges utilisant un tel semiconducteur |
| FR2489045A1 (fr) * | 1980-08-20 | 1982-02-26 | Thomson Csf | Transistor a effet de champ gaas a memoire non volatile |
| FR2492167A1 (fr) * | 1980-10-14 | 1982-04-16 | Thomson Csf | Transistor a effet de champ a frequence de coupure elevee |
| GB2089119A (en) * | 1980-12-10 | 1982-06-16 | Philips Electronic Associated | High voltage semiconductor devices |
| FR2497603A1 (fr) * | 1981-01-06 | 1982-07-09 | Thomson Csf | Transistor a faible temps de commutation, de type normalement bloquant |
| US4605912A (en) * | 1981-12-03 | 1986-08-12 | General Electric Company | Continuously variable phase shifting element comprised of interdigitated electrode MESFET |
| US4468851A (en) * | 1981-12-14 | 1984-09-04 | The United States Of America As Represented By The Secretary Of The Navy | Process for making a heterojunction source-drain insulated gate field-effect transistors utilizing diffusion to form the lattice |
| US4482906A (en) * | 1982-06-30 | 1984-11-13 | International Business Machines Corporation | Gallium aluminum arsenide integrated circuit structure using germanium |
| US4532695A (en) * | 1982-07-02 | 1985-08-06 | The United States Of America As Represented By The Secretary Of The Air Force | Method of making self-aligned IGFET |
| US4672423A (en) * | 1982-09-30 | 1987-06-09 | International Business Machines Corporation | Voltage controlled resonant transmission semiconductor device |
| GB2133928B (en) * | 1982-12-04 | 1986-07-30 | Plessey Co Plc | Coatings for semiconductor devices |
| JPS59127839A (ja) * | 1983-01-11 | 1984-07-23 | Nec Corp | ３―５族化合物半導体表面の不活性化法 |
| US4578126A (en) * | 1983-06-22 | 1986-03-25 | Trw Inc. | Liquid phase epitaxial growth process |
| US4568958A (en) * | 1984-01-03 | 1986-02-04 | General Electric Company | Inversion-mode insulated-gate gallium arsenide field-effect transistors |
| GB2163002B (en) * | 1984-08-08 | 1989-01-05 | Japan Res Dev Corp | Tunnel injection static induction transistor and its integrated circuit |
| JPS61100968A (ja) * | 1984-10-22 | 1986-05-19 | Seiko Epson Corp | 電界効果型トランジスタ |
| JPS63144580A (ja) * | 1986-12-09 | 1988-06-16 | Nec Corp | 電界効果トランジスタ |
| KR880010509A (ko) * | 1987-02-11 | 1988-10-10 | 오레그 이. 앨버 | 전계효과 트랜지스터 |
| US5196907A (en) * | 1990-08-20 | 1993-03-23 | Siemens Aktiengesellschaft | Metal insulator semiconductor field effect transistor |
| JP3101321B2 (ja) * | 1991-02-19 | 2000-10-23 | 富士通株式会社 | 酸素を含んだアイソレーション領域を有する半導体装置およびその製造方法 |
| JP2616287B2 (ja) * | 1991-07-08 | 1997-06-04 | 株式会社村田製作所 | 半導体装置 |
| GB9116341D0 (en) * | 1991-07-29 | 1991-09-11 | Hitachi Europ Ltd | Lt-gaas semiconductor device |
| DE69202554T2 (de) * | 1991-12-25 | 1995-10-19 | Nippon Electric Co | Tunneltransistor und dessen Herstellungsverfahren. |
| TW319916B (it) * | 1995-06-05 | 1997-11-11 | Hewlett Packard Co |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4062035A (en) * | 1975-02-05 | 1977-12-06 | Siemens Aktiengesellschaft | Luminescent diode |
-
1978
- 1978-01-13 US US05/869,369 patent/US4160261A/en not_active Expired - Lifetime
-
1979
- 1979-01-04 SE SE7900083A patent/SE7900083L/xx unknown
- 1979-01-11 CA CA319,450A patent/CA1125922A/en not_active Expired
- 1979-01-12 BE BE192854A patent/BE873428A/xx not_active IP Right Cessation
- 1979-01-12 IT IT19260/79A patent/IT1111954B/it active
- 1979-01-12 DE DE19792901094 patent/DE2901094A1/de not_active Withdrawn
- 1979-01-12 NL NL7900274A patent/NL7900274A/xx not_active Application Discontinuation
- 1979-01-12 GB GB791321A patent/GB2013028B/en not_active Expired
- 1979-01-12 FR FR7900796A patent/FR2414796A1/fr active Pending
- 1979-01-13 JP JP179579A patent/JPS54129886A/ja active Pending
Also Published As
| Publication number | Publication date |
|---|---|
| JPS54129886A (en) | 1979-10-08 |
| FR2414796A1 (fr) | 1979-08-10 |
| GB2013028A (en) | 1979-08-01 |
| IT1111954B (it) | 1986-01-13 |
| SE7900083L (sv) | 1979-07-14 |
| DE2901094A1 (de) | 1979-07-19 |
| IT7919260A0 (it) | 1979-01-12 |
| US4160261A (en) | 1979-07-03 |
| BE873428A (fr) | 1979-05-02 |
| GB2013028B (en) | 1982-03-03 |
| NL7900274A (nl) | 1979-07-17 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| MKEX | Expiry |