CA1090183A - System for illuminating an annular field - Google Patents

System for illuminating an annular field

Info

Publication number: CA1090183A
Authority: CA; Canada
Prior art keywords: axis; field; illuminating; mirror; disposed
Prior art date: 1976-09-22
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.): Expired

Application number

CA287,089A

Other languages

English (en)

French (fr)

Inventor

David A. Markle

Abe Offner

Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)

Applied Biosystems Inc

Original Assignee

Perkin Elmer Corp

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

1976-09-22

Filing date

1977-09-20

Publication date

1980-11-25

1977-09-20 Application filed by Perkin Elmer Corp filed Critical Perkin Elmer Corp

1980-06-17 Priority to CA354,214A priority Critical patent/CA1110890A/en

1980-11-25 Application granted granted Critical

1980-11-25 Publication of CA1090183A publication Critical patent/CA1090183A/en

Status Expired legal-status Critical Current

Links

230000005855 radiation Effects 0.000 claims abstract description 25
238000003384 imaging method Methods 0.000 claims abstract description 18
210000001747 pupil Anatomy 0.000 claims description 32
238000005286 illumination Methods 0.000 claims description 30
238000012546 transfer Methods 0.000 claims description 22
210000000887 face Anatomy 0.000 claims description 2
230000003287 optical effect Effects 0.000 description 29
VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 6
QSHDDOUJBYECFT-UHFFFAOYSA-N mercury Chemical compound [Hg] QSHDDOUJBYECFT-UHFFFAOYSA-N 0.000 description 6
229910052753 mercury Inorganic materials 0.000 description 6
239000000463 material Substances 0.000 description 5
239000005350 fused silica glass Substances 0.000 description 4
238000009434 installation Methods 0.000 description 3
RZVAJINKPMORJF-UHFFFAOYSA-N Acetaminophen Chemical compound CC(=O)NC1=CC=C(O)C=C1 RZVAJINKPMORJF-UHFFFAOYSA-N 0.000 description 2
230000004075 alteration Effects 0.000 description 2
239000005297 pyrex Substances 0.000 description 2
239000007787 solid Substances 0.000 description 2
FGRBYDKOBBBPOI-UHFFFAOYSA-N 10,10-dioxo-2-[4-(N-phenylanilino)phenyl]thioxanthen-9-one Chemical compound O=C1c2ccccc2S(=O)(=O)c2ccc(cc12)-c1ccc(cc1)N(c1ccccc1)c1ccccc1 FGRBYDKOBBBPOI-UHFFFAOYSA-N 0.000 description 1
XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
229910052782 aluminium Inorganic materials 0.000 description 1
201000009310 astigmatism Diseases 0.000 description 1
238000012937 correction Methods 0.000 description 1
238000013461 design Methods 0.000 description 1
239000011521 glass Substances 0.000 description 1
230000006872 improvement Effects 0.000 description 1
238000000034 method Methods 0.000 description 1
230000004048 modification Effects 0.000 description 1
238000012986 modification Methods 0.000 description 1
229920000136 polysorbate Polymers 0.000 description 1
230000008569 process Effects 0.000 description 1
230000001902 propagating effect Effects 0.000 description 1
238000007493 shaping process Methods 0.000 description 1
239000000377 silicon dioxide Substances 0.000 description 1
230000003595 spectral effect Effects 0.000 description 1
230000026676 system process Effects 0.000 description 1
239000012780 transparent material Substances 0.000 description 1

Classifications

- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B17/00—Systems with reflecting surfaces, with or without refracting elements
- G02B17/08—Catadioptric systems
- G02B17/0836—Catadioptric systems using more than three curved mirrors
- G02B17/0848—Catadioptric systems using more than three curved mirrors off-axis or unobscured systems in which not all of the mirrors share a common axis of rotational symmetry, e.g. at least one of the mirrors is warped, tilted or decentered with respect to the other elements
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B19/00—Condensers, e.g. light collectors or similar non-imaging optics
- G02B19/0004—Condensers, e.g. light collectors or similar non-imaging optics characterised by the optical means employed
- G02B19/0028—Condensers, e.g. light collectors or similar non-imaging optics characterised by the optical means employed refractive and reflective surfaces, e.g. non-imaging catadioptric systems
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B19/00—Condensers, e.g. light collectors or similar non-imaging optics
- G02B19/0033—Condensers, e.g. light collectors or similar non-imaging optics characterised by the use
- G02B19/0047—Condensers, e.g. light collectors or similar non-imaging optics characterised by the use for use with a light source
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B19/00—Condensers, e.g. light collectors or similar non-imaging optics
- G02B19/0033—Condensers, e.g. light collectors or similar non-imaging optics characterised by the use
- G02B19/0095—Condensers, e.g. light collectors or similar non-imaging optics characterised by the use for use with ultraviolet radiation
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03B—APPARATUS OR ARRANGEMENTS FOR TAKING PHOTOGRAPHS OR FOR PROJECTING OR VIEWING THEM; APPARATUS OR ARRANGEMENTS EMPLOYING ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ACCESSORIES THEREFOR
- G03B27/00—Photographic printing apparatus
- G03B27/32—Projection printing apparatus, e.g. enlarger, copying camera
- G03B27/52—Details
- G03B27/54—Lamp housings; Illuminating means
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70216—Mask projection systems
- G03F7/70225—Optical aspects of catadioptric systems, i.e. comprising reflective and refractive elements

Landscapes

Physics & Mathematics (AREA)
General Physics & Mathematics (AREA)
Optics & Photonics (AREA)
Lenses (AREA)
Microscoopes, Condenser (AREA)
Non-Portable Lighting Devices Or Systems Thereof (AREA)
Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
Investigating Or Analysing Materials By Optical Means (AREA)

CA287,089A 1976-09-22 1977-09-20 System for illuminating an annular field Expired CA1090183A (en)

Priority Applications (1)

Application Number	Priority Date	Filing Date	Title
CA354,214A CA1110890A (en)	1976-09-22	1980-06-17	System for illuminating an annular field

Applications Claiming Priority (2)

Application Number	Priority Date	Filing Date	Title
US72535176A	1976-09-22	1976-09-22
US725,351		1976-09-22

Publications (1)

Publication Number	Publication Date
CA1090183A true CA1090183A (en)	1980-11-25

Family

ID=24914185

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
CA287,089A Expired CA1090183A (en)	1976-09-22	1977-09-20	System for illuminating an annular field

Country Status (7)

Country	Link
JP (1)	JPS5341079A (de)
CA (1)	CA1090183A (de)
CH (1)	CH623659A5 (de)
DE (1)	DE2742488A1 (de)
FR (1)	FR2372379A1 (de)
GB (1)	GB1589784A (de)
IT (1)	IT1090469B (de)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
US4321628A (en) *	1980-04-02	1982-03-23	Xerox Corporation	Scanning apparatus
GB2173608A (en) *	1985-03-25	1986-10-15	Richard George Bingham	Imaging system having three curved and one aspherical mirror
JPH11326759A (ja) *	1998-05-18	1999-11-26	Ricoh Co Ltd	画像表示装置
JP2001228401A (ja)	2000-02-16	2001-08-24	Canon Inc	投影光学系、および該投影光学系による投影露光装置、デバイス製造方法

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
FR1541379A (fr) *	1966-11-02	1968-10-04	Eltro Gmbh	Procédé et dispositif de formation d'images
US3644030A (en) *	1968-07-12	1972-02-22	Ricoh Kk	Light source system
US3748015A (en) *	1971-06-21	1973-07-24	Perkin Elmer Corp	Unit power imaging catoptric anastigmat
DE2410924A1 (de) *	1973-03-09	1974-09-26	Perkin Elmer Corp	Vorrichtung zur fotografischen belichtung einer oberflaeche
DE2348567A1 (de) *	1973-09-27	1975-04-17	Guido Georg Reinert	Fluoreszenzlampe des entladungsroehrentyps mit uv-strahlendem leuchtstoff, sogenannter schwarzlichtleuchtstoffroehre fuer die beobachtung feiner strukturen mittels einer lupe, eines stereomikroskops oder aequivalenter optischer geraete
US3878419A (en) *	1973-12-17	1975-04-15	Carlo F Lafiandra	Precision base mercury vapor lamp
CH597618A5 (de) *	1975-12-02	1978-04-14	Zelacolor Syst

1977
- 1977-09-20 CA CA287,089A patent/CA1090183A/en not_active Expired
- 1977-09-21 IT IT5110977A patent/IT1090469B/it active
- 1977-09-21 DE DE19772742488 patent/DE2742488A1/de active Granted
- 1977-09-21 CH CH1154177A patent/CH623659A5/fr not_active IP Right Cessation
- 1977-09-21 FR FR7728457A patent/FR2372379A1/fr active Granted
- 1977-09-21 JP JP11387277A patent/JPS5341079A/ja active Granted
- 1977-09-21 GB GB3935877A patent/GB1589784A/en not_active Expired

Also Published As

Publication number	Publication date
CH623659A5 (en)	1981-06-15
DE2742488A1 (de)	1978-03-23
GB1589784A (en)	1981-05-20
IT1090469B (it)	1985-06-26
DE2742488C2 (de)	1988-01-21
FR2372379B1 (de)	1982-08-13
FR2372379A1 (fr)	1978-06-23
JPS5341079A (en)	1978-04-14
JPH0315170B2 (de)	1991-02-28

Legal Events

Date	Code	Title	Description
1997-11-25	MKEX	Expiry
2023-05-26	MKEX	Expiry	Effective date: 19971125

Publication	Publication Date	Title
US4241390A (en)	1980-12-23	System for illuminating an annular field
EP0095622B1 (de)	1988-01-13	Optisches System
KR100451339B1 (ko)	2005-04-28	높은개구수의링필드광학축소시스템
JPH075365A (ja)	1995-01-10	オフアクシス反射屈折型投影光学系
US4747678A (en)	1988-05-31	Optical relay system with magnification
KR100724784B1 (ko)	2007-06-04	두 개의 중간 이미지를 포함하는 카타디옵트릭 대물렌즈
US6213610B1 (en)	2001-04-10	Catoptric reduction projection optical system and exposure apparatus and method using same
US5559338A (en)	1996-09-24	Deep ultraviolet optical imaging system for microlithography and/or microfabrication
US4953960A (en)	1990-09-04	Optical reduction system
USRE39024E1 (en)	2006-03-21	Exposure apparatus having catadioptric projection optical system
TWI420249B (zh)	2013-12-21	投影曝光裝置、投影曝光方法及投影物
JPH043528B2 (de)	1992-01-23
JPH0627382A (ja)	1994-02-04	再投影光学システム
KR20000011933A (ko)	2000-02-25	카타다이옵트릭광학시스템및그를구비한노광장치
JP2000031041A (ja)	2000-01-28	縮小オブジェクティブ
JP2001343589A (ja)	2001-12-14	投影光学系、および該投影光学系による投影露光装置、デバイス製造方法
US8134687B2 (en)	2012-03-13	Illumination system of a microlithographic exposure apparatus
US6144495A (en)	2000-11-07	Projection light source
US6597511B2 (en)	2003-07-22	Microlithographic illuminating system and microlithographic projection exposure arrangement incorporating said system
KR100888011B1 (ko)	2009-03-09	리소그래피 시스템의 조명 시스템에서 사용되는 릴레이렌즈
JPS61502640A (ja)	1986-11-13	球面鏡によりガウスビ−ムを整形する装置
CA1090183A (en)	1980-11-25	System for illuminating an annular field
JP2002323658A (ja)	2002-11-08	照明システムの分割形対物レンズ
JPH06118341A (ja)	1994-04-28	走査型投影装置
Wood et al.	1989	Short‐wavelength annular‐field optical system for imaging tenth‐micron features