CA1070853A

CA1070853A - Seal for a semiconductor device and method therefor

Info

Publication number: CA1070853A
Application number: CA302,828A
Authority: CA
Inventors: Louis N. Pomante
Original assignee: Solid State Scientific Inc
Current assignee: Solid State Scientific Inc
Priority date: 1977-05-17
Filing date: 1978-05-08
Publication date: 1980-01-29
Also published as: DE2820469A1; JPS53142178A; FR2391562A1

Abstract

Abstract of the Disclosure A seal for a semiconductor device in which the semiconductor has a major surface with a metal layer overlying the major surface. An insulating layer of glass is formed on the metal layer and a passive sealing silicon layer is formed on the glass layer for protecting the device from contamination.

Description

1()7~8S3 E~ackground of the Invention A. Field of the Invention This invention relates to semiconductor devices and in particular to a sealing coating for protecting the device from contamination.

B. Prior Art In the fabrication of integrated circuits, a wafer of monocrystalline siIicon is variously etched and subjected to diffusion or implantation of controlled concentrations of impurities to establish desired topology and various N-type, P-type and insulating regions which form the multiplicity of active and passive semiconductor structures. A final step in fabricating an operating device is the laying on of an aluminum film pattern to establish metallic interconnections between the structures such that a desired circuit is produced. Portions of this pattern are terminated at bonding pads to which wires are later , attached; the wires extending to terminal pins of the `~ completed package.
The device at this stage of fabrication is func-tionally complete and could, with appropriate mechanical ,` _ : .
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iO7~853 support and termination, operate as part of an electronic assembly such as a television receiver, calculator, etc.
Its usefulness would be shortli~ed, however, because environmental contamination would profoundly affect the character of the semiconductor junctions and the regions abutting them. Specifically, sodium ions and moisture present in the atmosphere would easily diffuse into the silicon and radically change the electrical characteristics of the device. Such influences would cause the demise of the device in only hours at ordinary temperatures.
It is, therefore, common practice to deposit a layer of silicon dioxide ~SiO2) which in its amorphous form i8 essentially glass. This layer protects the underlying silicon from contact with atmospheric gases and vapor.
Furthermore, it protects the wafer surface and its metal-; ization against abrasion and gross contaminants such as dust particles which might be introduced during the cutting of the wafer into individual chips.
If the chip is then housed in an hermetic seal, the SiO2 passivating layer has usually been sufficient. Thechip has remained protected against residual contamination within the enclosure which i8 in turn protected against further ; , . , , -~ ; -, , , ,. ~ .

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cantamLnation by the seal. However, hermetic sealing is relatively costly and thus for most consumer and industrial products, the completed glass sealed chips are encapsulated in plastic following the bonding of the wire leads. The plastic offers adequate mechanical protection and serves to exclude gross contaminants. However, the plastic is semi- -permeable and moisture has diffused through it over periods of time. The moisture has also transported metallic ions, typically sodium. The layer of passivating glass has protected the device as described above against these contaminants over a period ranging from weeks to years ; depending on temperature, electrical biases and the thick-ness and constitution of the glass itself.
Glass containing about 3 to 10 per cent, typically 5% to ~/0, of phosphorous has been enhanced in its ability to trap sodium ions. However, these ions over a lengthy period have diffused through the glass in sufficient numbers to alter the electrical characteristics of a device. Such diffusion rates are enhanced at higher chip temperatures and by electric :.
-` 20 fields which are produced by operating potential differences : '1 ; between various regions of the chip surface.
Accordingly, an object of the present invention is protecting the major surface of a semiconductor device from moisture and metallic ions present in the atmosphere.

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~0701~S3 Summ~ry of the Invention A seal for a semiconductor device and a method therefor in which the semiconductor device has a major surface. A passive sealing silicon layer is formed overlying S the ma;or surface of the semiconductor body thereby to pro-tect the device from contamination.

rief Description of the Drawings ,j.
Fig. 1 is a cross-section of a portion of a semiconductor device having a layer of passivating glass and a sealing layer of silicon over the glass in accord-ance with one embodiment of the invention;
Fig. 2 is a plan view of the elements shown in the cross-section of Fig. l;
Fig. 3 is a schematic diagram of a diffusion furnace in which the sealing layer of silicon is formed on the semiconductor device of Figs. 1 and 2;
Fig. 4 is a cross-sectional view of another ; embodiment of the invention in which a second layer of glass is applied over the sealing layer of silicon; and - 20 Fig. 5 is a cross-section of a third embodiment of the invention.

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~etailed Description Referring now to Fig. 1, there is shown a cross-section of a portion of a ~S se~iconductor device or integrated circuit 10. Using well known processes, a circuit is fabricated starting with a body of silicon 11 having a major surface lla and having a specified concentration of N-type impurities. The break shown in the representation of the wafer thickness is presen~ because the thickness is very large compared to the dimensions of the diffused and deposited regions which constitute the active portion of the circuit.
Using standard photolithographic techniques, various masking, etching and oxidation steps follow which lead, for example, to the production of a P-type region 12 into which further diffusions resulting in N-type regions 13a-b are produced. It will be understood that many discrete regions may be formed and provided with other - various circuit elements such as resisters, diodes, tran-sistors, etc. Additional oxidation and etching steps follow which provides an insulating layer of silicon dioxide 14 having windows through which a subsequently applied film of a suitable metal such as aluminum 15 extends to make contact with the silicon substrate. In conventional manner, aluminum deposition is effected by evaporation of the . . . . :: ........... . . : : ...... . . . . . .

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-~07~53 metal onto substrates which are at room temperature or up to about 300C in a high vacuum. Under these conditions, the aluminum 15 interacts very little with silicon in the areas not protected by oxide layer 14.
In the subsequent masking and etching step, the aluminum film 15 is divided into many individual traces that interconnect specific regions. For circuit nodes which are to be connected externally, these traces lead to extended metallization areas such as indicated by 15a in Figs. 1 and 2.
Following the metal pattern definition, the aluminum is "sintered" or "alloyed". In a conventional example, sintering takes place ranging from about 400C to 500C for from abou~ 20 to 40 minutes. In these examples, the ambient is nitrogen or hydrogen or a mixture of nitrogen and hydrogen.
The foregoing results in alloyed regions 16a-c where the silicon is not protected by oxide layer 14. It will be understood that higher alloying temperatures much above about 500C, for example, would result in rapid spreading of the alloyed regions to the point where regions 16a-c would extend completely through the N-regions 13a,b to thereby contact the underlying P-region 12. This would result in an undesirable shorting of the P-~ junctions.

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0~$3 For the next step, an insulating layer is then dleposited over the entire oxide layer 14 and aluminum layer 15 as well as metallized areas 15a. A passivating layer of amorphous glass, (SiO2) has been used as the insulating layer 5 17 where the amorphous glass has a phosphorous content, as previously described, in the range of about 3 to 10 per cent, ; as operative limits, and about 5-7 per cer~t preferred limits.
A^, The glass cannot be deposited at a temperature much above about 500C or there results the above described undesirable - 10 shorting of the P-N junctions. In other examples, the insulating layer is formed of glass without phosphorous and is also formed of silicon nitride (Si3N4) Following deposition of insulating layer 17, a passive sealing or protective layer 18 is deposited over 15 the entire layer 17 by placing chip 10 in a diffusion furnace shown in Fig. 3. Diffusion furnace 30 comprises a chamber 30a surrounded by refactory 30b within which thermostatically controlled electric heating coils 30c are embedded. The atmosphere within chamber 30a is 20 supplied with a mixture of silane (SiH4) and nitrogen (N2) gases. A tank 25 containing nitrogen 25a and'a tank 26 containing 3% silarle in nitrogen 26a are attached to a mani-fold 29 which leads to the furnace chamber 30a. The flow , ; :: - : . , : . :

rates of the nitrogen and silane as lndicated by flow meters 27a, 28a are controlled by valves 27 and 28 respectively and commensurate with the desired deposition rate. One or more wafer~ 10 may be supported in an upright position on a quartz or silicon carrier 31 which is inserted into or removed from ~he furnace by a conventional manually or automatic or machine operated rod 32. Wafer 10 is heated in furnace 30 for the growth of a silicon layer. The temperature of furnace 30 is in a range of 450C to 525C, approximately, where a temperature of about 475C is a preferred temperature. The rate of growth of silicon layer 18 goes up sharply with temperature and thus for temperatures below about 450C in furnace 30 a useful silicon layer may be deposited but the growth process is uneconomically long.
For temperatures below about 425C, from run to run, the silicon in some wafers 10 in some runs does not deposit at all.
The degree of silicon aluminum alloying also increases sh~rply with temperature. Thus, at the upper limit of the temperature range at about 525C, from run to run, some of the wafers 10 in some runs may have their P-N junction regions near the aluminum-silicon contact points destroyed. Above about 525C, there is an increase in the destruction of the wafers with temperature in furnace 30.

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~Ot7Q853 At the preferred temperature of about 475C, depositions of passive sealing silicon layers have been made in the range of 500-1000 A, approximately. This range has been found to be a preferred range of silicon thickness and provides contamination protection with a compromise between ' a more costly thicker silicon layer while at the thinner -- limit, a lower device reliability. For silicon layers thinner than 500 A, the saving is only a relatively shorter duration of deposition time. In addition, for these layers thinner than 500 A, during fabrication the plus or minus variation in thickness from run to run may result in some undesirably thin silicon thicknesses on some of the wafers.
In other examples, the silicon is formed in the range of 50~3000 A, approximately. The silicon film is -- 15 desirably not very conductive and provides a high electrical resistivity of approximately .25 megohm-centimeter. Thus, a relatively thin passive silicon layer 18 provides a very high resistance but as the film becomes thicker, the resis-tance decreases. If the silicon layer is of such a thickness that the resistance has substantially decreased, a problem may arise if wire 20 would accidentally touch the silicon layer.
Examples of silicon layer deposition rates in furnace 30 at temperatures ranging from 450C to 525C at the indicated silane nitrogen flow rates in a 100 mm.
diameter tube are set forth in the following table.

Table 1 Furnace 3% Silane in NitrogenRate of Silicon Temperature Nitro~en Rate Rate Layer Growth C liter7min. liter/min. A/hr 450 2.7 6.8 1,600 475 2.7 6.8 5,000 500 2.7 6.8 8,500 525 2.7 6.8 13,000 Examination of wafers fabricated in the foregoing examples of TabLe l show silicon layer 18 to be poly- -crystalline.
By the selective etching of silicon layer 18 and insulating layer 17, a window 19 as shown in Figs. 1, 2 is formed through layers 18 and 17 to allow passage of terminal wire 20 for connecting to node 15a.
In this manner, there is produced a semiconductor device 10 having a silicon layer 18 for protecting the device from contamination from moisture and metallic ions. While device 10 is shown as a portion of a CMOS device, it will be understood that silicon .. . . . .

1~ 1, a~s3 layer 18 may be used in connection with other semiconductor de~ices requiring such protection from contamination.
Fig 4 illustrates another embodiment of the invention in a CMOS semiconductor device lOa. All of the fabrication steps up to and including the selective etching of a window in silicon layer 18 and insulating SiO2 layer 17 are the same as those described previously. In this embodi-ment, before terminal wire 20 is attached, an additional layer 35 of amorphous glass is deposited over the top of the device such that the edges of this layer at window l9a flow down to coat the sides of the window thus protecting silicon layer 18 from contact with wire 20. By sele~tive etching, layer 35 must be opened over the aluminum pad to allow wire 20 to be attached. Alternatively, the vertical section of layer 35 within window l9a may aLso be etched away leaving the edges of layers 17, 18 and 35 extending within window l9a. In this alternative, layer 35no longer completely protects layer 18 from contact with wire 20. By enclsoing the silicon 18 in a glass "sandwich" between layers 17 and 35, the silicon is further protected against abrasion and chemical attack which might occur during and after installa-tion within the encapsulating plastic.

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Fig. 5 illustrates yet another embodiment of the invention in CMOS device 10b. Fabrication of this embodiment is similar to that of the embodiment illustrated in Figs. 1 and 2. However, in conventional manner, a thin film 36 of nichrome is disposed during the fabrication of the device, as illustrated in Fig. 5, on top of the active silicon regions 11, 12, and 13 prior to the deposition of aluminum layer 15. During the "sintering" or "alloying" process, trimetallic alloy regions 37a-c are formed where the aluminum meets the silicon due to the presence of the nichrome film 36.
ThiE inhibits the alloying of aluminum into the silicon and allows the wafer to be subjected to higher temperatures, for example over about 525C, which would allow the silicon layer to be deposited to the preferred thickness of 500 to 1,000 A units in a shorter time thus greatly increasing the manufacturing through put.
Alloying can also be inhibited by depositing aluminum silicon instead of pure aluminum for the interconnects. In this case, regions 15 in Fig. 1 would be of an aluminum silicon composition as deposited. The aluminum now being partially saturated with silicon will not consume as much silicon from the device contact areas when alloyed. This in turn would allow a higher deposition temperature for silicon layer 18.

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~)7Q853 In the embodiment of Fig. 5, it will be noted that window l9b has been etched wider in area 19c which is defined by silicon layer 18. In this manner, there is substantially decreased any possibility of contact between terminal wire 20 and layer 18.
It is understood that the above described arrange-ments and embodiments are merely illustrative of the many specific embodiments which can be devised to represent application of the principles of the invention. For example, passive silicon layer 18 can also be deposited by means of evaporation techniques, sputtering techniques and RF plasma methods. In these examples, the wafer is maintained at about room temperature or slightly higher and the silicon layer also results in a polycrystalline structure.
However, the grain size can become so small so as to characterize the polycrystalline structure as amorphous.

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Claims

The embodiment of the invention in which an exclusive property or privilege is claimed are defined as follows:

1. A seal for a semiconductor device for an electrical circuit comprising a semiconductor body having a major surface, a layer of metal overlying said major surface, a passivation layer overlying said layer of metal, and a sealing silicon layer overlying the passivation layer for protecting and sealing said device from contamination, said sealing silicon layer being passive and inactive in the electrical circuit or field shielding function of the semiconductor device.

2. The semiconductor device of claim 1 in which said silicon layer is polycrystalline silicon.

3. The semiconductor device of claim 1 in which said passivation layer comprises glass.

4. The semiconductor device of claim 1 in which said sealing silicon layer is directly formed on and contacts substan-tially the entirety of the passivation layer.

5. The semiconductor device of claim 1 in which there is further provided an additional passivation layer contacting said sealing silicon layer.

6. The semiconductor device of claim 2 in which said polycrystalline silicon layer has a thickness in the range of 500 to 3000 A approximately.

7. The semiconductor device of claim 2 in which said polycrystalline silicon layer has a thickness in a preferred range of 500 to 1000 A approximately.

8. The semiconductor device of claim l in which said passivation layer is also inactive in the electrical circuit function of the semiconductor device and in which said sealing silicon layer is substantially continuous over substantially the entirety of said major surface.

9. The semiconductor device of claim 5 in which said additional passivation layer is the outermost layer of the semi-conductor device.

10. The semiconductor device of claim 8 in which said sealing silicon layer is not overlied by any layer active in the electrical circuit function of the semiconductor device.

11. The semiconductor device of claim 1 in which said sealing silicon layer is formed of elemental silicon.

12. The semiconductor device of claim 11 in which said silicon layer is polycrystalline silicon and in which said passi-vation layer comprises glass.

13. The semiconductor device of claim 12 in which said glass layer has a phosphorous content and in which said sealing silicon layer is directly formed on the contacts substantially the entirety of the glass layer.

14. The semiconductor device of claim 13 in which said polycrystalline silicon layer has a thickness in the range of 500 to 3,000 A approximately.

15. The semiconductor device of claim 13 in which there is provided an additional glass layer overlying and contacting said sealing silicon layer.

16. The semiconductor device of claim 15 in which said additional glass layer is the outermost layer of the semiconductor device.

17. A method of fabricating semiconductor devices comprising the steps of:
(a) forming a layer of metal overlying the major surface, (b) forming a passivation layer overlying the layer of metal, and (c) forming a passive sealing silicon layer overlying the passivation layer for protecting the device from contamination.

18. The method of claim 17 in which step (c) includes forming the sealing silicon layer in a chamber at a temperature range of 450 to 525°C approximately.

19. The method of claim 17 in which step (c) includes forming the sealing silicon layer in a chamber at a temperature of about 475°C.

20. The method of claim 18 in which step (c) includes forming the sealing silicon layer for a time duration sufficient to provide a thickness in the range of 500 to 3000 A approximately.

21. The method of claim 20 in which step (c) includes forming the sealing silicon layer for a time duration sufficient to provide a thickness in a range of 500 to 1000 A approximately.

22. The method of claim 20 in which the sealing silicon layer is polycrystalline silicon.

23. The method of claim 22 in which step (b) includes forming the passivation layer of glass.

24. The method of claim 23 in which step (c) includes forming the sealing silicon layer directly on and contacting the insulating layer.

25. The method of claim 24 in which there is provided the further step of forming an additional passivation layer contacting the sealing silicon layer after step (a).

26. A method of fabricating semiconductor devices comprising the steps of:
(a) forming a layer of metal overlying a major surface of a semiconductor body, (b) forming an insulating passivating layer of silicon dioxide overlying and contacting the metal layer, (c) forming a passive sealing silicon layer over-lying and contacting the insulating layer in a chamber at a temperature range of 450 to 525°C approximately and for a time duration sufficient to provide a thickness in the range of 500 to 3000 A approximately, and (d) etching windows in the sealing silicon layer and insulating layer to provide openings to receive terminal connections to said metal layer.