BR8600322A - Valvula de silicio - Google Patents
Valvula de silicioInfo
- Publication number
- BR8600322A BR8600322A BR8600322A BR8600322A BR8600322A BR 8600322 A BR8600322 A BR 8600322A BR 8600322 A BR8600322 A BR 8600322A BR 8600322 A BR8600322 A BR 8600322A BR 8600322 A BR8600322 A BR 8600322A
- Authority
- BR
- Brazil
- Prior art keywords
- silicon valve
- silicon
- valve
- Prior art date
Links
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K99/00—Subject matter not provided for in other groups of this subclass
- F16K99/0001—Microvalves
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/17—Ink jet characterised by ink handling
- B41J2/175—Ink supply systems ; Circuit parts therefor
- B41J2/17596—Ink pumps, ink valves
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F02—COMBUSTION ENGINES; HOT-GAS OR COMBUSTION-PRODUCT ENGINE PLANTS
- F02M—SUPPLYING COMBUSTION ENGINES IN GENERAL WITH COMBUSTIBLE MIXTURES OR CONSTITUENTS THEREOF
- F02M61/00—Fuel-injectors not provided for in groups F02M39/00 - F02M57/00 or F02M67/00
- F02M61/04—Fuel-injectors not provided for in groups F02M39/00 - F02M57/00 or F02M67/00 having valves, e.g. having a plurality of valves in series
- F02M61/047—Fuel-injectors not provided for in groups F02M39/00 - F02M57/00 or F02M67/00 having valves, e.g. having a plurality of valves in series the valves being formed by deformable nozzle parts, e.g. flexible plates or discs with fuel discharge orifices
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F02—COMBUSTION ENGINES; HOT-GAS OR COMBUSTION-PRODUCT ENGINE PLANTS
- F02M—SUPPLYING COMBUSTION ENGINES IN GENERAL WITH COMBUSTIBLE MIXTURES OR CONSTITUENTS THEREOF
- F02M61/00—Fuel-injectors not provided for in groups F02M39/00 - F02M57/00 or F02M67/00
- F02M61/16—Details not provided for in, or of interest apart from, the apparatus of groups F02M61/02 - F02M61/14
- F02M61/166—Selection of particular materials
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F02—COMBUSTION ENGINES; HOT-GAS OR COMBUSTION-PRODUCT ENGINE PLANTS
- F02M—SUPPLYING COMBUSTION ENGINES IN GENERAL WITH COMBUSTIBLE MIXTURES OR CONSTITUENTS THEREOF
- F02M61/00—Fuel-injectors not provided for in groups F02M39/00 - F02M57/00 or F02M67/00
- F02M61/16—Details not provided for in, or of interest apart from, the apparatus of groups F02M61/02 - F02M61/14
- F02M61/18—Injection nozzles, e.g. having valve seats; Details of valve member seated ends, not otherwise provided for
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F02—COMBUSTION ENGINES; HOT-GAS OR COMBUSTION-PRODUCT ENGINE PLANTS
- F02M—SUPPLYING COMBUSTION ENGINES IN GENERAL WITH COMBUSTIBLE MIXTURES OR CONSTITUENTS THEREOF
- F02M61/00—Fuel-injectors not provided for in groups F02M39/00 - F02M57/00 or F02M67/00
- F02M61/16—Details not provided for in, or of interest apart from, the apparatus of groups F02M61/02 - F02M61/14
- F02M61/18—Injection nozzles, e.g. having valve seats; Details of valve member seated ends, not otherwise provided for
- F02M61/1853—Orifice plates
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F15—FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
- F15C—FLUID-CIRCUIT ELEMENTS PREDOMINANTLY USED FOR COMPUTING OR CONTROL PURPOSES
- F15C5/00—Manufacture of fluid circuit elements; Manufacture of assemblages of such elements integrated circuits
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K99/00—Subject matter not provided for in other groups of this subclass
- F16K99/0001—Microvalves
- F16K99/0003—Constructional types of microvalves; Details of the cutting-off member
- F16K99/0005—Lift valves
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K99/00—Subject matter not provided for in other groups of this subclass
- F16K99/0001—Microvalves
- F16K99/0003—Constructional types of microvalves; Details of the cutting-off member
- F16K99/0015—Diaphragm or membrane valves
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K99/00—Subject matter not provided for in other groups of this subclass
- F16K99/0001—Microvalves
- F16K99/0034—Operating means specially adapted for microvalves
- F16K99/0042—Electric operating means therefor
- F16K99/0048—Electric operating means therefor using piezoelectric means
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K99/00—Subject matter not provided for in other groups of this subclass
- F16K2099/0073—Fabrication methods specifically adapted for microvalves
- F16K2099/0074—Fabrication methods specifically adapted for microvalves using photolithography, e.g. etching
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K99/00—Subject matter not provided for in other groups of this subclass
- F16K2099/0082—Microvalves adapted for a particular use
- F16K2099/0096—Fuel injection devices
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K99/00—Subject matter not provided for in other groups of this subclass
- F16K99/0001—Microvalves
- F16K99/0034—Operating means specially adapted for microvalves
Landscapes
- Engineering & Computer Science (AREA)
- General Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Chemical & Material Sciences (AREA)
- Combustion & Propulsion (AREA)
- Dispersion Chemistry (AREA)
- Physics & Mathematics (AREA)
- Fluid Mechanics (AREA)
- Theoretical Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Computer Hardware Design (AREA)
- Fuel-Injection Apparatus (AREA)
- Sliding Valves (AREA)
- Particle Formation And Scattering Control In Inkjet Printers (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US06/703,962 US4647013A (en) | 1985-02-21 | 1985-02-21 | Silicon valve |
Publications (1)
Publication Number | Publication Date |
---|---|
BR8600322A true BR8600322A (pt) | 1986-10-07 |
Family
ID=24827503
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
BR8600322A BR8600322A (pt) | 1985-02-21 | 1986-01-27 | Valvula de silicio |
Country Status (9)
Country | Link |
---|---|
US (1) | US4647013A (pt) |
EP (1) | EP0208386B1 (pt) |
JP (1) | JPH0671790B2 (pt) |
AU (2) | AU5178886A (pt) |
BR (1) | BR8600322A (pt) |
CA (1) | CA1275611C (pt) |
DE (1) | DE3668230D1 (pt) |
ES (2) | ES8800396A1 (pt) |
MX (1) | MX163889B (pt) |
Families Citing this family (97)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE3621331A1 (de) * | 1986-06-26 | 1988-01-14 | Fraunhofer Ges Forschung | Mikroventil |
DE3635216A1 (de) * | 1986-10-16 | 1988-04-21 | Draegerwerk Ag | Elektrisch ansteuerbares ventil |
FR2608097B1 (fr) * | 1986-12-12 | 1994-04-08 | Markpoint System Ab | Dispositif a clapet pour imprimantes matricielles |
GB8712951D0 (en) * | 1987-06-03 | 1987-07-08 | Rolls Royce Plc | Valve |
US4930701A (en) * | 1987-09-08 | 1990-06-05 | Mcdonnell Douglas Corporation | Confluent nozzle |
DE3884336T2 (de) * | 1987-10-19 | 1994-01-20 | Ford Werke Ag | Silikon-Ventileinrichtung zur Kontrolle des Durchflusses. |
US4768751A (en) * | 1987-10-19 | 1988-09-06 | Ford Motor Company | Silicon micromachined non-elastic flow valves |
JP2721882B2 (ja) * | 1987-11-05 | 1998-03-04 | ダイアグラフ コーポレーション | インクジェット印刷装置用プリントヘッド |
JPH01138172A (ja) * | 1987-11-24 | 1989-05-31 | Toyo Tanso Kk | 黒鉛とメソカーボンマイクロビーズとの焼結体 |
DE3802545A1 (de) * | 1988-01-28 | 1989-08-10 | Fraunhofer Ges Forschung | Mikropumpe zur foerderung kleinster gasmengen |
US4808260A (en) * | 1988-02-05 | 1989-02-28 | Ford Motor Company | Directional aperture etched in silicon |
DE3814150A1 (de) * | 1988-04-27 | 1989-11-09 | Draegerwerk Ag | Ventilanordnung aus mikrostrukturierten komponenten |
US4907748A (en) * | 1988-08-12 | 1990-03-13 | Ford Motor Company | Fuel injector with silicon nozzle |
US4828184A (en) * | 1988-08-12 | 1989-05-09 | Ford Motor Company | Silicon micromachined compound nozzle |
US4826131A (en) * | 1988-08-22 | 1989-05-02 | Ford Motor Company | Electrically controllable valve etched from silicon substrates |
US4869282A (en) * | 1988-12-09 | 1989-09-26 | Rosemount Inc. | Micromachined valve with polyimide film diaphragm |
US5064165A (en) * | 1989-04-07 | 1991-11-12 | Ic Sensors, Inc. | Semiconductor transducer or actuator utilizing corrugated supports |
JPH02274550A (ja) * | 1989-04-17 | 1990-11-08 | Komori Corp | 画像記録装置のヘッド制御方法 |
US5238223A (en) * | 1989-08-11 | 1993-08-24 | Robert Bosch Gmbh | Method of making a microvalve |
DE4025945C2 (de) * | 1990-08-16 | 1998-10-08 | Bosch Gmbh Robert | Verfahren zur Einstellung eines Brennstoffeinspritzventils und Brennstoffeinspritzventil |
DE4025941A1 (de) * | 1990-08-16 | 1992-02-20 | Bosch Gmbh Robert | Brennstoffeinspritzventil |
US5193781A (en) * | 1990-10-12 | 1993-03-16 | Milliken Research Corporation | Electro-pneumatic valve card assemblies |
US5144982A (en) * | 1990-10-12 | 1992-09-08 | Milliken Research Corporation | Electro-pneumatic valve card assemblies |
DE4104019C1 (pt) * | 1991-02-09 | 1992-04-23 | Robert Bosch Gmbh, 7000 Stuttgart, De | |
EP0503757B1 (en) * | 1991-03-08 | 1995-03-22 | Ford Motor Company Limited | Fuel injector with a silicon nozzle |
DE4107660C2 (de) * | 1991-03-09 | 1995-05-04 | Bosch Gmbh Robert | Verfahren zur Montage von Silizium-Plättchen auf metallischen Montageflächen |
EP0518524B1 (en) * | 1991-05-30 | 1996-09-04 | Hitachi, Ltd. | Valve and semiconductor fabricating equipment using the same |
US5176358A (en) * | 1991-08-08 | 1993-01-05 | Honeywell Inc. | Microstructure gas valve control |
JPH05203070A (ja) * | 1991-11-11 | 1993-08-10 | Robert Bosch Gmbh | 弁 |
DE4202387C2 (de) * | 1991-11-11 | 1999-09-09 | Bosch Gmbh Robert | Ventil mit einer Abspritzöffnung |
US5431342A (en) * | 1992-11-23 | 1995-07-11 | Mcdonnell Douglas Corporation | Nozzle providing a laminar exhaust stream |
US5441597A (en) * | 1992-12-01 | 1995-08-15 | Honeywell Inc. | Microstructure gas valve control forming method |
US5309943A (en) * | 1992-12-07 | 1994-05-10 | Ford Motor Company | Micro-valve and method of manufacturing |
US5286002A (en) * | 1993-01-12 | 1994-02-15 | Siemens Automotive L.P. | Fuel injector having a composite silicon valve |
CA2115819C (en) * | 1993-02-17 | 2000-07-25 | Yasuhide Tani | Fluid injection nozzle |
WO1994028318A1 (de) * | 1993-05-27 | 1994-12-08 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Mikroventil |
WO1995004881A1 (en) * | 1993-08-06 | 1995-02-16 | Ford Motor Company | A fuel injector |
US5383597A (en) * | 1993-08-06 | 1995-01-24 | Ford Motor Company | Apparatus and method for controlling the cone angle of an atomized spray from a low pressure fuel injector |
US5435884A (en) * | 1993-09-30 | 1995-07-25 | Parker-Hannifin Corporation | Spray nozzle and method of manufacturing same |
US5401963A (en) * | 1993-11-01 | 1995-03-28 | Rosemount Analytical Inc. | Micromachined mass spectrometer |
US5381826A (en) * | 1993-11-29 | 1995-01-17 | The Futurestar Corporation | Fluid flow controller and meter |
JPH07289953A (ja) * | 1994-03-03 | 1995-11-07 | Nippondenso Co Ltd | 流体噴射ノズル |
DE4413217A1 (de) * | 1994-04-15 | 1995-10-19 | Bosch Gmbh Robert | Kraftstoffeinspritzdüse für Brennkraftmaschinen |
JP3560174B2 (ja) * | 1994-05-17 | 2004-09-02 | 株式会社デンソー | 流体噴射ノズル及びそれを用いた燃料噴射弁 |
DE4433689C2 (de) * | 1994-09-21 | 1996-07-11 | Siemens Ag | Chipkonfiguration und Verwendung eines entsprechenden Chips |
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JP4186135B2 (ja) * | 1998-05-15 | 2008-11-26 | Smc株式会社 | シリンダ用速度制御装置 |
ATE393319T1 (de) | 1998-09-03 | 2008-05-15 | Ge Novasensor Inc | Proportionale, mikromechanische vorrichtung |
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US6540203B1 (en) | 1999-03-22 | 2003-04-01 | Kelsey-Hayes Company | Pilot operated microvalve device |
US6305779B1 (en) | 1999-04-09 | 2001-10-23 | Eastman Kodak Company | MEMS inkjet nozzle cleaning and closing mechanism |
GB0002798D0 (en) * | 2000-02-09 | 2000-03-29 | Glaxo Group Ltd | Actuator nozzle for metered dose inhaler |
US6694998B1 (en) | 2000-03-22 | 2004-02-24 | Kelsey-Hayes Company | Micromachined structure usable in pressure regulating microvalve and proportional microvalve |
US6845962B1 (en) | 2000-03-22 | 2005-01-25 | Kelsey-Hayes Company | Thermally actuated microvalve device |
US6494804B1 (en) | 2000-06-20 | 2002-12-17 | Kelsey-Hayes Company | Microvalve for electronically controlled transmission |
US6505811B1 (en) * | 2000-06-27 | 2003-01-14 | Kelsey-Hayes Company | High-pressure fluid control valve assembly having a microvalve device attached to fluid distributing substrate |
US6581640B1 (en) | 2000-08-16 | 2003-06-24 | Kelsey-Hayes Company | Laminated manifold for microvalve |
DE10063259A1 (de) * | 2000-12-19 | 2002-07-11 | Bosch Gmbh Robert | Brennstoffeinspritzventil |
EP1370318B1 (en) | 2001-03-15 | 2005-07-20 | The Government of the United States of America, as represented by the Secretary, Department of Health & Human Services | Systems and methods for aerosol delivery of agents |
US7025324B1 (en) | 2002-01-04 | 2006-04-11 | Massachusetts Institute Of Technology | Gating apparatus and method of manufacture |
DE10212152A1 (de) * | 2002-03-19 | 2003-12-04 | Bosch Gmbh Robert | Brennstoffeinspritzventil |
US6933660B2 (en) * | 2002-06-06 | 2005-08-23 | Caterpillar Inc | Piezoelectric bender with increased activating force, and valve using same |
EP1694990A4 (en) * | 2003-11-24 | 2009-12-09 | Microstaq Inc | MICRO-VALVE DEVICE FOR CONTROLLING A VARIABLE DISPLACEMENT COMPRESSOR |
US20070251586A1 (en) * | 2003-11-24 | 2007-11-01 | Fuller Edward N | Electro-pneumatic control valve with microvalve pilot |
US8011388B2 (en) * | 2003-11-24 | 2011-09-06 | Microstaq, INC | Thermally actuated microvalve with multiple fluid ports |
EP1723359A2 (en) * | 2004-02-27 | 2006-11-22 | Alumina Micro LLC | Hybrid micro/macro plate valve |
EP1732653A2 (en) * | 2004-03-05 | 2006-12-20 | Alumina Micro LLC | Selective bonding for forming a microvalve |
ATE483488T1 (de) * | 2004-04-02 | 2010-10-15 | Us Gov Health & Human Serv | Aerosolabgabesysteme |
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US8628055B2 (en) * | 2005-07-27 | 2014-01-14 | The Board Of Trustees Of The University Of Illinois | Bi-direction rapid action electrostatically actuated microvalve |
EP1945981A2 (en) * | 2005-07-27 | 2008-07-23 | The Board Of Trustees Of The University Of Illinois | Bi-direction rapid action electrostatically actuated microvalve |
US8123834B2 (en) * | 2005-10-06 | 2012-02-28 | The Board Of Trustees Of The University Of Illinois | High gain selective metal organic framework preconcentrators |
CN101617155B (zh) | 2006-12-15 | 2012-03-21 | 麦克罗斯塔克公司 | 微阀装置 |
DE112008000862T5 (de) | 2007-03-30 | 2010-03-11 | Microstaq, Inc., Austin | Vorgesteuertes Mikroschieberventil |
CN101668973B (zh) | 2007-03-31 | 2013-03-13 | 盾安美斯泰克公司(美国) | 先导式滑阀 |
US8152908B2 (en) * | 2008-01-16 | 2012-04-10 | The Board Of Trustees Of The University Of Illinois | Micromachined gas chromatography columns for fast separation of Organophosphonate and Organosulfur compounds and methods for deactivating same |
US8269029B2 (en) * | 2008-04-08 | 2012-09-18 | The Board Of Trustees Of The University Of Illinois | Water repellent metal-organic frameworks, process for making and uses regarding same |
US20090277971A1 (en) * | 2008-05-12 | 2009-11-12 | James Scott | Economical, dripless, reciprocating atomizer |
CN102164846B (zh) * | 2008-08-09 | 2016-03-30 | 盾安美斯泰克公司(美国) | 改进的微型阀装置 |
US8113482B2 (en) * | 2008-08-12 | 2012-02-14 | DunAn Microstaq | Microvalve device with improved fluid routing |
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CN102812538B (zh) | 2010-01-28 | 2015-05-13 | 盾安美斯泰克股份有限公司 | 用以促进接合的重调节半导体表面的方法 |
EP2359886A1 (en) * | 2010-02-12 | 2011-08-24 | Debiotech S.A. | Micromechanic passive flow regulator |
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DE102010042265A1 (de) | 2010-10-11 | 2012-04-12 | PARltec GmbH | Ventil, Vorrichtung mit Ventil, Verwendung des Ventils in der Vorrichtung, Mikropumpe mit Ventil, Verneblersystem mit Ventil und Dosier-/Mischvorrichtung mit Ventil |
US8925793B2 (en) | 2012-01-05 | 2015-01-06 | Dunan Microstaq, Inc. | Method for making a solder joint |
US9140613B2 (en) | 2012-03-16 | 2015-09-22 | Zhejiang Dunan Hetian Metal Co., Ltd. | Superheat sensor |
US9188375B2 (en) | 2013-12-04 | 2015-11-17 | Zhejiang Dunan Hetian Metal Co., Ltd. | Control element and check valve assembly |
US9638092B2 (en) * | 2014-06-20 | 2017-05-02 | Joseph S. Adams | Combustion-powered tool with flexible silicone control check valve operable between a primary combustion chamber and a secondary combustion chamber |
US9914116B2 (en) * | 2015-09-10 | 2018-03-13 | Panasonic Intellectual Property Management Co., Ltd. | Microelement |
CN207430592U (zh) * | 2017-11-15 | 2018-06-01 | 常州铭赛机器人科技股份有限公司 | 流体微量喷射装置及其流道组件 |
Family Cites Families (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3424063A (en) * | 1964-11-19 | 1969-01-28 | Ibm | Apparatus using diaphragm - type fluidcontrolled logic devices and method of making same |
US3477693A (en) * | 1966-12-16 | 1969-11-11 | Perry S Bezanis | Cam operated fluid valve |
US3918495A (en) * | 1973-11-14 | 1975-11-11 | Waters Associates Inc | Novel gasket and valve comprising same |
DE2407856C3 (de) * | 1974-02-19 | 1978-09-14 | Ulrich Dipl.-Ing. 5160 Dueren Rohs | Einspritzdüse für flüssige Medien, insbesondere Kraftstoff |
US3921916A (en) * | 1974-12-31 | 1975-11-25 | Ibm | Nozzles formed in monocrystalline silicon |
US4203128A (en) * | 1976-11-08 | 1980-05-13 | Wisconsin Alumni Research Foundation | Electrostatically deformable thin silicon membranes |
US4157935A (en) * | 1977-12-23 | 1979-06-12 | International Business Machines Corporation | Method for producing nozzle arrays for ink jet printers |
DE2832932A1 (de) * | 1978-07-27 | 1980-02-14 | Bosch Gmbh Robert | Membran und verfahren zur herstellung einer membran |
JPS57182449A (en) * | 1981-05-07 | 1982-11-10 | Fuji Xerox Co Ltd | Forming method of ink jet multinozzle |
US4581624A (en) * | 1984-03-01 | 1986-04-08 | Allied Corporation | Microminiature semiconductor valve |
-
1985
- 1985-02-21 US US06/703,962 patent/US4647013A/en not_active Expired - Lifetime
- 1985-12-16 MX MX979A patent/MX163889B/es unknown
-
1986
- 1986-01-02 AU AU51788/86A patent/AU5178886A/en not_active Abandoned
- 1986-01-27 BR BR8600322A patent/BR8600322A/pt not_active IP Right Cessation
- 1986-02-03 CA CA000500931A patent/CA1275611C/en not_active Expired - Lifetime
- 1986-02-11 DE DE8686300906T patent/DE3668230D1/de not_active Expired - Fee Related
- 1986-02-11 ES ES551825A patent/ES8800396A1/es not_active Expired
- 1986-02-11 EP EP86300906A patent/EP0208386B1/en not_active Expired
- 1986-02-19 JP JP61033136A patent/JPH0671790B2/ja not_active Expired - Fee Related
-
1987
- 1987-03-12 ES ES557440A patent/ES8708043A1/es not_active Expired
-
1990
- 1990-03-14 AU AU51258/90A patent/AU628140B2/en not_active Ceased
Also Published As
Publication number | Publication date |
---|---|
EP0208386B1 (en) | 1990-01-10 |
US4647013A (en) | 1987-03-03 |
ES551825A0 (es) | 1987-11-01 |
JPH0671790B2 (ja) | 1994-09-14 |
EP0208386A1 (en) | 1987-01-14 |
MX163889B (es) | 1992-06-30 |
DE3668230D1 (de) | 1990-02-15 |
CA1275611C (en) | 1990-10-30 |
ES557440A0 (es) | 1987-09-01 |
AU5125890A (en) | 1990-08-09 |
AU628140B2 (en) | 1992-09-10 |
ES8800396A1 (es) | 1987-11-01 |
JPS61193862A (ja) | 1986-08-28 |
AU5178886A (en) | 1986-08-28 |
ES8708043A1 (es) | 1987-09-01 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
RH | Request refused | ||
B21A | Expiry acc. art. 78, item i of ipl- expiry of the term of protection |
Free format text: PATENTE EXTINTA EM 27/01/2001 |