BR112014011644A2 - célula transdutora micromecanizada capacitiva pré-colapsada e método de fabricação de uma célula transdutora micromecanizada capacitiva pré-colapsada - Google Patents

célula transdutora micromecanizada capacitiva pré-colapsada e método de fabricação de uma célula transdutora micromecanizada capacitiva pré-colapsada

Info

Publication number
BR112014011644A2
BR112014011644A2 BR112014011644A BR112014011644A BR112014011644A2 BR 112014011644 A2 BR112014011644 A2 BR 112014011644A2 BR 112014011644 A BR112014011644 A BR 112014011644A BR 112014011644 A BR112014011644 A BR 112014011644A BR 112014011644 A2 BR112014011644 A2 BR 112014011644A2
Authority
BR
Brazil
Prior art keywords
micromechanized
transducer cell
collapsed
collapsed capacitive
capacitive
Prior art date
Application number
BR112014011644A
Other languages
English (en)
Inventor
Lee Robinson Andrew
Douglas Fraser John
Original Assignee
Koninklijke Philips Nv
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Koninklijke Philips Nv filed Critical Koninklijke Philips Nv
Publication of BR112014011644A2 publication Critical patent/BR112014011644A2/pt

Links

Classifications

    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N1/00—Electrostatic generators or motors using a solid moving electrostatic charge carrier
    • H02N1/002—Electrostatic motors
    • H02N1/006—Electrostatic motors of the gap-closing type
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B06—GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
    • B06B—METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
    • B06B1/00—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency
    • B06B1/02—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B06—GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
    • B06B—METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
    • B06B1/00—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency
    • B06B1/02—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy
    • B06B1/0292—Electrostatic transducers, e.g. electret-type
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/49—Method of mechanical manufacture
    • Y10T29/49002—Electrical device making
    • Y10T29/49005—Acoustic transducer

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Transducers For Ultrasonic Waves (AREA)
  • Pressure Sensors (AREA)
  • Micromachines (AREA)
  • Fixed Capacitors And Capacitor Manufacturing Machines (AREA)
  • Electrostatic, Electromagnetic, Magneto- Strictive, And Variable-Resistance Transducers (AREA)

Abstract

resumo célula transdutora micromecanizada capacitiva pré- colapsada e método de fabricação de uma célula transdutora micromecanizada capacitiva pré-colapsada a presente invenção se refere a uma célula transdutora micromecanizada capacitiva pré-colapsada (10) que compreende um substrato (12) que compreende um primeiro eletrodo (16), uma membrana (14) que compreende um segundo eletrodo (18), em que a célula tem uma região externa (22) na qual a membrana (14) é montada ao substrato (12), e uma região interna (20) no interior ou cercada pela região externa (22), em que a membrana (14) está colapsada no substrato (12) em uma primeira região de forma anular colapsada (24) localizada na região interna (20). 1/1
BR112014011644A 2011-11-17 2012-11-05 célula transdutora micromecanizada capacitiva pré-colapsada e método de fabricação de uma célula transdutora micromecanizada capacitiva pré-colapsada BR112014011644A2 (pt)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US201161560836P 2011-11-17 2011-11-17
PCT/IB2012/056152 WO2013072803A1 (en) 2011-11-17 2012-11-05 Pre-collapsed capacitive micro-machined transducer cell with annular-shaped collapsed region

Publications (1)

Publication Number Publication Date
BR112014011644A2 true BR112014011644A2 (pt) 2017-05-02

Family

ID=47324242

Family Applications (1)

Application Number Title Priority Date Filing Date
BR112014011644A BR112014011644A2 (pt) 2011-11-17 2012-11-05 célula transdutora micromecanizada capacitiva pré-colapsada e método de fabricação de uma célula transdutora micromecanizada capacitiva pré-colapsada

Country Status (9)

Country Link
US (2) US9762148B2 (pt)
EP (1) EP2747905B1 (pt)
JP (1) JP6265906B2 (pt)
CN (1) CN103958079B (pt)
BR (1) BR112014011644A2 (pt)
IN (1) IN2014CN03656A (pt)
MX (1) MX2014005795A (pt)
RU (1) RU2609917C2 (pt)
WO (1) WO2013072803A1 (pt)

Families Citing this family (45)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2013061298A2 (en) * 2011-10-28 2013-05-02 Koninklijke Philips Electronics N.V. Pre-collapsed capacitive micro-machined transducer cell with stress layer
EP3038764A1 (en) * 2013-08-27 2016-07-06 Koninklijke Philips N.V. Dual mode cmut transducer
CN105658343A (zh) * 2013-08-30 2016-06-08 皇家飞利浦有限公司 电容性微机械超声换能器单元
JP6534190B2 (ja) 2013-09-27 2019-06-26 コーニンクレッカ フィリップス エヌ ヴェＫｏｎｉｎｋｌｉｊｋｅ Ｐｈｉｌｉｐｓ Ｎ．Ｖ． 超音波トランスデューサアセンブリ並びに超音波を送信及び受信するための方法
CN108025331B (zh) * 2015-06-30 2019-11-05 皇家飞利浦有限公司 超声***和超声脉冲发射方法
US10656255B2 (en) * 2016-05-04 2020-05-19 Invensense, Inc. Piezoelectric micromachined ultrasonic transducer (PMUT)
US10315222B2 (en) 2016-05-04 2019-06-11 Invensense, Inc. Two-dimensional array of CMOS control elements
US10445547B2 (en) 2016-05-04 2019-10-15 Invensense, Inc. Device mountable packaging of ultrasonic transducers
US10670716B2 (en) 2016-05-04 2020-06-02 Invensense, Inc. Operating a two-dimensional array of ultrasonic transducers
US11673165B2 (en) 2016-05-10 2023-06-13 Invensense, Inc. Ultrasonic transducer operable in a surface acoustic wave (SAW) mode
US10706835B2 (en) 2016-05-10 2020-07-07 Invensense, Inc. Transmit beamforming of a two-dimensional array of ultrasonic transducers
US10408797B2 (en) 2016-05-10 2019-09-10 Invensense, Inc. Sensing device with a temperature sensor
US10539539B2 (en) 2016-05-10 2020-01-21 Invensense, Inc. Operation of an ultrasonic sensor
US10562070B2 (en) 2016-05-10 2020-02-18 Invensense, Inc. Receive operation of an ultrasonic sensor
US10632500B2 (en) 2016-05-10 2020-04-28 Invensense, Inc. Ultrasonic transducer with a non-uniform membrane
US10600403B2 (en) 2016-05-10 2020-03-24 Invensense, Inc. Transmit operation of an ultrasonic sensor
US10441975B2 (en) 2016-05-10 2019-10-15 Invensense, Inc. Supplemental sensor modes and systems for ultrasonic transducers
US10452887B2 (en) 2016-05-10 2019-10-22 Invensense, Inc. Operating a fingerprint sensor comprised of ultrasonic transducers
WO2018041658A2 (en) * 2016-08-30 2018-03-08 Koninklijke Philips N.V. Imaging device with ultrasound transducer array
US10891461B2 (en) 2017-05-22 2021-01-12 Invensense, Inc. Live fingerprint detection utilizing an integrated ultrasound and infrared sensor
US10474862B2 (en) 2017-06-01 2019-11-12 Invensense, Inc. Image generation in an electronic device using ultrasonic transducers
US10643052B2 (en) 2017-06-28 2020-05-05 Invensense, Inc. Image generation in an electronic device using ultrasonic transducers
US10997388B2 (en) 2017-12-01 2021-05-04 Invensense, Inc. Darkfield contamination detection
US10984209B2 (en) 2017-12-01 2021-04-20 Invensense, Inc. Darkfield modeling
US10936841B2 (en) 2017-12-01 2021-03-02 Invensense, Inc. Darkfield tracking
US11151355B2 (en) 2018-01-24 2021-10-19 Invensense, Inc. Generation of an estimated fingerprint
EP3533386A1 (en) 2018-02-28 2019-09-04 Koninklijke Philips N.V. Pressure sensing with capacitive pressure sensor
US10755067B2 (en) 2018-03-22 2020-08-25 Invensense, Inc. Operating a fingerprint sensor comprised of ultrasonic transducers
CN108793061B (zh) * 2018-05-25 2020-11-27 岭南师范学院 一种全电极凸纹结构cmut器件的制备方法
EP3833249B1 (en) * 2018-08-09 2023-10-18 Koninklijke Philips N.V. Intraluminal device with capacitive pressure sensor
CN109530194B (zh) * 2018-10-18 2020-07-14 天津大学 一种多电极cmut单元及多频式电容微机械超声换能器
US10936843B2 (en) 2018-12-28 2021-03-02 Invensense, Inc. Segmented image acquisition
KR102196437B1 (ko) * 2019-01-29 2020-12-30 한국과학기술연구원 정전용량형 미세가공 초음파 트랜스듀서
CN109909140B (zh) * 2019-03-06 2021-06-04 中国工程物理研究院电子工程研究所 一种压电微机械超声换能器及其制备方法
WO2020263875A1 (en) 2019-06-24 2020-12-30 Invensense, Inc. Fake finger detection using ridge features
WO2020264046A1 (en) 2019-06-25 2020-12-30 Invensense, Inc. Fake finger detection based on transient features
US11176345B2 (en) 2019-07-17 2021-11-16 Invensense, Inc. Ultrasonic fingerprint sensor with a contact layer of non-uniform thickness
US11216632B2 (en) 2019-07-17 2022-01-04 Invensense, Inc. Ultrasonic fingerprint sensor with a contact layer of non-uniform thickness
US11232549B2 (en) 2019-08-23 2022-01-25 Invensense, Inc. Adapting a quality threshold for a fingerprint image
US11392789B2 (en) 2019-10-21 2022-07-19 Invensense, Inc. Fingerprint authentication using a synthetic enrollment image
WO2021183457A1 (en) 2020-03-09 2021-09-16 Invensense, Inc. Ultrasonic fingerprint sensor with a contact layer of non-uniform thickness
US11243300B2 (en) 2020-03-10 2022-02-08 Invensense, Inc. Operating a fingerprint sensor comprised of ultrasonic transducers and a presence sensor
US11328165B2 (en) 2020-04-24 2022-05-10 Invensense, Inc. Pressure-based activation of fingerprint spoof detection
US11995909B2 (en) 2020-07-17 2024-05-28 Tdk Corporation Multipath reflection correction
TWI814403B (zh) * 2022-05-26 2023-09-01 佳世達科技股份有限公司 超聲波換能器

Family Cites Families (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2003009319A1 (en) 2001-07-17 2003-01-30 Redwood Microsystems, Inc. Micro-electromechanical sensor
JP2007527285A (ja) * 2004-02-27 2007-09-27 ジョージア テック リサーチ コーポレイション 多要素電極ｃｍｕｔ素子及び製作方法
US20060004289A1 (en) * 2004-06-30 2006-01-05 Wei-Cheng Tian High sensitivity capacitive micromachined ultrasound transducer
JP4724505B2 (ja) * 2005-09-09 2011-07-13 株式会社日立製作所 超音波探触子およびその製造方法
US7615834B2 (en) * 2006-02-28 2009-11-10 The Board Of Trustees Of The Leland Stanford Junior University Capacitive micromachined ultrasonic transducer(CMUT) with varying thickness membrane
US8203912B2 (en) * 2007-07-31 2012-06-19 Koninklijke Philips Electronics N.V. CMUTs with a high-k dielectric
CN101969856B (zh) * 2007-09-17 2013-06-05 皇家飞利浦电子股份有限公司 预塌陷的电容微机械超声传感器的制造及其应用
JP5408935B2 (ja) 2007-09-25 2014-02-05 キヤノン株式会社 電気機械変換素子及びその製造方法
WO2009041675A1 (en) * 2007-09-25 2009-04-02 Canon Kabushiki Kaisha Electrostatic transducer and manufacturing method therefor
JP5337813B2 (ja) * 2007-12-03 2013-11-06 コロ テクノロジーズ インコーポレイテッド デュアルモード動作マイクロマシン超音波トランスデューサ
WO2009077961A2 (en) * 2007-12-14 2009-06-25 Koninklijke Philips Electronics, N.V. Collapsed mode operable cmut including contoured substrate
EP2145696A1 (en) * 2008-07-15 2010-01-20 UAB Minatech Capacitive micromachined ultrasonic transducer and its fabrication method
CN102159334A (zh) 2008-09-16 2011-08-17 皇家飞利浦电子股份有限公司 电容性微机械加工的超声换能器
KR101689346B1 (ko) 2009-02-27 2016-12-23 코닌클리케 필립스 엔.브이. 기계적 붕괴 보유를 갖는 사전 붕괴된 ｃｍｕｔ
EP2269746B1 (en) 2009-07-02 2014-05-14 Nxp B.V. Collapsed mode capacitive sensor
JP2012095112A (ja) * 2010-10-27 2012-05-17 Olympus Corp 超音波発生ユニット

Also Published As

Publication number Publication date
JP2014533907A (ja) 2014-12-15
EP2747905A1 (en) 2014-07-02
JP6265906B2 (ja) 2018-01-24
CN103958079A (zh) 2014-07-30
US10128777B2 (en) 2018-11-13
IN2014CN03656A (pt) 2015-10-16
WO2013072803A1 (en) 2013-05-23
US20170353129A1 (en) 2017-12-07
CN103958079B (zh) 2016-08-24
MX2014005795A (es) 2014-05-30
EP2747905B1 (en) 2021-10-20
RU2014124363A (ru) 2015-12-27
RU2609917C2 (ru) 2017-02-07
US9762148B2 (en) 2017-09-12
US20140265721A1 (en) 2014-09-18

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B06U Preliminary requirement: requests with searches performed by other patent offices: procedure suspended [chapter 6.21 patent gazette]
B11B Dismissal acc. art. 36, par 1 of ipl - no reply within 90 days to fullfil the necessary requirements
B350 Update of information on the portal [chapter 15.35 patent gazette]