AU579776B2 - Electroless copper plating solution and process for electrolessly plating copper - Google Patents

Electroless copper plating solution and process for electrolessly plating copper

Info

Publication number
AU579776B2
AU579776B2 AU80840/87A AU8084087A AU579776B2 AU 579776 B2 AU579776 B2 AU 579776B2 AU 80840/87 A AU80840/87 A AU 80840/87A AU 8084087 A AU8084087 A AU 8084087A AU 579776 B2 AU579776 B2 AU 579776B2
Authority
AU
Australia
Prior art keywords
copper
plating
electrolessly
plating solution
electroless
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
AU80840/87A
Other versions
AU8084087A (en
Inventor
Futoshi Ishikawa
Nobumasa Isida
Junji Isikawa
Koji Kondo
Katuhiko Murakawa
Kaoru Nomoto
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Denso Corp
Original Assignee
NipponDenso Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP27349387A external-priority patent/JPH0723539B2/en
Application filed by NipponDenso Co Ltd filed Critical NipponDenso Co Ltd
Publication of AU8084087A publication Critical patent/AU8084087A/en
Application granted granted Critical
Publication of AU579776B2 publication Critical patent/AU579776B2/en
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

Links

Classifications

    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C18/00Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating
    • C23C18/16Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by reduction or substitution, e.g. electroless plating
    • C23C18/31Coating with metals
    • C23C18/38Coating with copper
    • C23C18/40Coating with copper using reducing agents
AU80840/87A 1986-11-06 1987-11-05 Electroless copper plating solution and process for electrolessly plating copper Ceased AU579776B2 (en)

Applications Claiming Priority (6)

Application Number Priority Date Filing Date Title
JP26261986 1986-11-06
JP30877986 1986-12-26
JP61-262619 1986-12-26
JP61-308779 1986-12-26
JP27349387A JPH0723539B2 (en) 1986-11-06 1987-10-30 Chemical copper plating solution and method for forming copper plating film using the same
JP62-273493 1987-10-30

Publications (2)

Publication Number Publication Date
AU8084087A AU8084087A (en) 1988-05-26
AU579776B2 true AU579776B2 (en) 1988-12-08

Family

ID=27335148

Family Applications (1)

Application Number Title Priority Date Filing Date
AU80840/87A Ceased AU579776B2 (en) 1986-11-06 1987-11-05 Electroless copper plating solution and process for electrolessly plating copper

Country Status (2)

Country Link
AU (1) AU579776B2 (en)
DE (1) DE3737778C2 (en)

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4301196A (en) * 1978-09-13 1981-11-17 Kollmorgen Technologies Corp. Electroless copper deposition process having faster plating rates
EP0164580A2 (en) * 1984-05-17 1985-12-18 International Business Machines Corporation Electroless copper plating bath and plating method using such bath
US4650691A (en) * 1983-09-28 1987-03-17 C. Uyemura & Co., Ltd. Electroless copper plating bath and method

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3329512A (en) * 1966-04-04 1967-07-04 Shipley Co Chemical deposition of copper and solutions therefor
DE1621352C3 (en) * 1967-02-03 1975-05-28 Schering Ag, 1000 Berlin Und 4619 Bergkamen Stabilized alkaline copper bath for the electroless deposition of copper
US3793038A (en) * 1973-01-02 1974-02-19 Crown City Plating Co Process for electroless plating

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4301196A (en) * 1978-09-13 1981-11-17 Kollmorgen Technologies Corp. Electroless copper deposition process having faster plating rates
US4650691A (en) * 1983-09-28 1987-03-17 C. Uyemura & Co., Ltd. Electroless copper plating bath and method
EP0164580A2 (en) * 1984-05-17 1985-12-18 International Business Machines Corporation Electroless copper plating bath and plating method using such bath

Also Published As

Publication number Publication date
DE3737778C2 (en) 1996-03-07
AU8084087A (en) 1988-05-26
DE3737778A1 (en) 1988-05-11

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Legal Events

Date Code Title Description
MK14 Patent ceased section 143(a) (annual fees not paid) or expired