AU579776B2 - Electroless copper plating solution and process for electrolessly plating copper - Google Patents
Electroless copper plating solution and process for electrolessly plating copperInfo
- Publication number
- AU579776B2 AU579776B2 AU80840/87A AU8084087A AU579776B2 AU 579776 B2 AU579776 B2 AU 579776B2 AU 80840/87 A AU80840/87 A AU 80840/87A AU 8084087 A AU8084087 A AU 8084087A AU 579776 B2 AU579776 B2 AU 579776B2
- Authority
- AU
- Australia
- Prior art keywords
- copper
- plating
- electrolessly
- plating solution
- electroless
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Ceased
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C18/00—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating
- C23C18/16—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by reduction or substitution, e.g. electroless plating
- C23C18/31—Coating with metals
- C23C18/38—Coating with copper
- C23C18/40—Coating with copper using reducing agents
Applications Claiming Priority (6)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP26261986 | 1986-11-06 | ||
JP30877986 | 1986-12-26 | ||
JP61-262619 | 1986-12-26 | ||
JP61-308779 | 1986-12-26 | ||
JP27349387A JPH0723539B2 (en) | 1986-11-06 | 1987-10-30 | Chemical copper plating solution and method for forming copper plating film using the same |
JP62-273493 | 1987-10-30 |
Publications (2)
Publication Number | Publication Date |
---|---|
AU8084087A AU8084087A (en) | 1988-05-26 |
AU579776B2 true AU579776B2 (en) | 1988-12-08 |
Family
ID=27335148
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
AU80840/87A Ceased AU579776B2 (en) | 1986-11-06 | 1987-11-05 | Electroless copper plating solution and process for electrolessly plating copper |
Country Status (2)
Country | Link |
---|---|
AU (1) | AU579776B2 (en) |
DE (1) | DE3737778C2 (en) |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4301196A (en) * | 1978-09-13 | 1981-11-17 | Kollmorgen Technologies Corp. | Electroless copper deposition process having faster plating rates |
EP0164580A2 (en) * | 1984-05-17 | 1985-12-18 | International Business Machines Corporation | Electroless copper plating bath and plating method using such bath |
US4650691A (en) * | 1983-09-28 | 1987-03-17 | C. Uyemura & Co., Ltd. | Electroless copper plating bath and method |
Family Cites Families (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3329512A (en) * | 1966-04-04 | 1967-07-04 | Shipley Co | Chemical deposition of copper and solutions therefor |
DE1621352C3 (en) * | 1967-02-03 | 1975-05-28 | Schering Ag, 1000 Berlin Und 4619 Bergkamen | Stabilized alkaline copper bath for the electroless deposition of copper |
US3793038A (en) * | 1973-01-02 | 1974-02-19 | Crown City Plating Co | Process for electroless plating |
-
1987
- 1987-11-05 AU AU80840/87A patent/AU579776B2/en not_active Ceased
- 1987-11-06 DE DE3737778A patent/DE3737778C2/en not_active Expired - Fee Related
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4301196A (en) * | 1978-09-13 | 1981-11-17 | Kollmorgen Technologies Corp. | Electroless copper deposition process having faster plating rates |
US4650691A (en) * | 1983-09-28 | 1987-03-17 | C. Uyemura & Co., Ltd. | Electroless copper plating bath and method |
EP0164580A2 (en) * | 1984-05-17 | 1985-12-18 | International Business Machines Corporation | Electroless copper plating bath and plating method using such bath |
Also Published As
Publication number | Publication date |
---|---|
DE3737778C2 (en) | 1996-03-07 |
AU8084087A (en) | 1988-05-26 |
DE3737778A1 (en) | 1988-05-11 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
MK14 | Patent ceased section 143(a) (annual fees not paid) or expired |