AU2440000A - Microswitching contact - Google Patents

Microswitching contact

Info

Publication number
AU2440000A
AU2440000A AU24400/00A AU2440000A AU2440000A AU 2440000 A AU2440000 A AU 2440000A AU 24400/00 A AU24400/00 A AU 24400/00A AU 2440000 A AU2440000 A AU 2440000A AU 2440000 A AU2440000 A AU 2440000A
Authority
AU
Australia
Prior art keywords
contact
microswitching
nitride
gallium nitride
aluminum
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU24400/00A
Inventor
Mario Adamschik
Stefan Ertl
Erhard Kohn
Philipp Schmid
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
GFD Gesellschaft fuer Diamantprodukte mbH
Original Assignee
GFD Gesellschaft fuer Diamantprodukte mbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by GFD Gesellschaft fuer Diamantprodukte mbH filed Critical GFD Gesellschaft fuer Diamantprodukte mbH
Publication of AU2440000A publication Critical patent/AU2440000A/en
Abandoned legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H1/00—Contacts
    • H01H1/0036—Switches making use of microelectromechanical systems [MEMS]
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H1/00—Contacts
    • H01H1/02—Contacts characterised by the material thereof
    • H01H1/021—Composite material
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H1/00—Contacts
    • H01H1/0036—Switches making use of microelectromechanical systems [MEMS]
    • H01H2001/0052—Special contact materials used for MEMS
    • H01H2001/0057—Special contact materials used for MEMS the contact materials containing refractory materials, e.g. tungsten
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H50/00—Details of electromagnetic relays
    • H01H50/005—Details of electromagnetic relays using micromechanics
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H59/00—Electrostatic relays; Electro-adhesion relays
    • H01H59/0009—Electrostatic relays; Electro-adhesion relays making use of micromechanics

Landscapes

  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Contacts (AREA)
  • Micromachines (AREA)
  • Mechanical Treatment Of Semiconductor (AREA)
  • Push-Button Switches (AREA)

Abstract

The invention relates to a mechanically closing, electric microswitching contact (1) comprising two electrically conductive contact elements (7, 8) whose respective contact surfaces come into contact with one another. According to the invention, at least one of the contact surfaces is at least partially comprised of highly-doped conductive diamond, silicon carbide, gallium nitride, boron nitride, aluminum gallium nitride, and/or aluminum nitride.
AU24400/00A 1999-01-25 2000-01-25 Microswitching contact Abandoned AU2440000A (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
DE19902868 1999-01-25
DE19902868 1999-01-25
PCT/EP2000/000552 WO2000044012A1 (en) 1999-01-25 2000-01-25 Microswitching contact

Publications (1)

Publication Number Publication Date
AU2440000A true AU2440000A (en) 2000-08-07

Family

ID=7895324

Family Applications (1)

Application Number Title Priority Date Filing Date
AU24400/00A Abandoned AU2440000A (en) 1999-01-25 2000-01-25 Microswitching contact

Country Status (6)

Country Link
EP (1) EP1151446B1 (en)
JP (1) JP2003527727A (en)
AT (1) ATE239974T1 (en)
AU (1) AU2440000A (en)
DE (2) DE10080131D2 (en)
WO (1) WO2000044012A1 (en)

Families Citing this family (21)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6396368B1 (en) 1999-11-10 2002-05-28 Hrl Laboratories, Llc CMOS-compatible MEM switches and method of making
US6426722B1 (en) 2000-03-08 2002-07-30 Hrl Laboratories, Llc Polarization converting radio frequency reflecting surface
US6812903B1 (en) 2000-03-14 2004-11-02 Hrl Laboratories, Llc Radio frequency aperture
US6518931B1 (en) 2000-03-15 2003-02-11 Hrl Laboratories, Llc Vivaldi cloverleaf antenna
US6552696B1 (en) 2000-03-29 2003-04-22 Hrl Laboratories, Llc Electronically tunable reflector
US6483480B1 (en) 2000-03-29 2002-11-19 Hrl Laboratories, Llc Tunable impedance surface
US6538621B1 (en) 2000-03-29 2003-03-25 Hrl Laboratories, Llc Tunable impedance surface
US6483481B1 (en) 2000-11-14 2002-11-19 Hrl Laboratories, Llc Textured surface having high electromagnetic impedance in multiple frequency bands
DE10061278B4 (en) * 2000-12-08 2004-09-16 GFD-Gesellschaft für Diamantprodukte mbH Instrument for surgical purposes
US6558380B2 (en) 2000-12-08 2003-05-06 Gfd Gesellschaft Fur Diamantprodukte Mbh Instrument for surgical purposes and method of cleaning same
US6740942B2 (en) 2001-06-15 2004-05-25 Hrl Laboratories, Llc. Permanently on transistor implemented using a double polysilicon layer CMOS process with buried contact
US6739028B2 (en) 2001-07-13 2004-05-25 Hrl Laboratories, Llc Molded high impedance surface and a method of making same
US6670921B2 (en) 2001-07-13 2003-12-30 Hrl Laboratories, Llc Low-cost HDMI-D packaging technique for integrating an efficient reconfigurable antenna array with RF MEMS switches and a high impedance surface
US6545647B1 (en) 2001-07-13 2003-04-08 Hrl Laboratories, Llc Antenna system for communicating simultaneously with a satellite and a terrestrial system
JP2005500655A (en) * 2001-08-20 2005-01-06 ハネウェル・インターナショナル・インコーポレーテッド Snap action thermal switch
EP1426992A3 (en) * 2002-12-05 2005-11-30 Omron Corporation Electrostatic mems switch
JP4182861B2 (en) 2002-12-05 2008-11-19 オムロン株式会社 Contact switch and device with contact switch
JP5626972B2 (en) * 2010-07-21 2014-11-19 独立行政法人物質・材料研究機構 Manufacturing method of electromechanical switch
US9466887B2 (en) 2010-11-03 2016-10-11 Hrl Laboratories, Llc Low cost, 2D, electronically-steerable, artificial-impedance-surface antenna
US8994609B2 (en) 2011-09-23 2015-03-31 Hrl Laboratories, Llc Conformal surface wave feed
US8982011B1 (en) 2011-09-23 2015-03-17 Hrl Laboratories, Llc Conformal antennas for mitigation of structural blockage

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4954170A (en) * 1989-06-30 1990-09-04 Westinghouse Electric Corp. Methods of making high performance compacts and products
GB9111474D0 (en) * 1991-05-29 1991-07-17 De Beers Ind Diamond Boron doped diamond
US5413668A (en) * 1993-10-25 1995-05-09 Ford Motor Company Method for making mechanical and micro-electromechanical devices
FR2731715B1 (en) * 1995-03-17 1997-05-16 Suisse Electronique Microtech MICRO-MECHANICAL PART AND METHOD FOR PRODUCING THE SAME

Also Published As

Publication number Publication date
EP1151446A1 (en) 2001-11-07
WO2000044012A1 (en) 2000-07-27
DE10080131D2 (en) 2002-04-25
ATE239974T1 (en) 2003-05-15
EP1151446B1 (en) 2003-05-07
DE50002067D1 (en) 2003-06-12
JP2003527727A (en) 2003-09-16

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Legal Events

Date Code Title Description
MK6 Application lapsed section 142(2)(f)/reg. 8.3(3) - pct applic. not entering national phase