CA2251875A1 - Aluminum nitride heater - Google Patents

Aluminum nitride heater

Info

Publication number
CA2251875A1
CA2251875A1 CA002251875A CA2251875A CA2251875A1 CA 2251875 A1 CA2251875 A1 CA 2251875A1 CA 002251875 A CA002251875 A CA 002251875A CA 2251875 A CA2251875 A CA 2251875A CA 2251875 A1 CA2251875 A1 CA 2251875A1
Authority
CA
Canada
Prior art keywords
aluminum nitride
compound
silicon
percent
terms
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
CA002251875A
Other languages
French (fr)
Other versions
CA2251875C (en
Inventor
Masuhiro Natsuhara
Hirohiko Nakata
Yasuhisa Yushio
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sumitomo Electric Industries Ltd
Original Assignee
Sumitomo Electric Industries Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sumitomo Electric Industries Ltd filed Critical Sumitomo Electric Industries Ltd
Publication of CA2251875A1 publication Critical patent/CA2251875A1/en
Application granted granted Critical
Publication of CA2251875C publication Critical patent/CA2251875C/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
    • H05B3/00—Ohmic-resistance heating
    • H05B3/20—Heating elements having extended surface area substantially in a two-dimensional plane, e.g. plate-heater
    • H05B3/22—Heating elements having extended surface area substantially in a two-dimensional plane, e.g. plate-heater non-flexible
    • H05B3/26—Heating elements having extended surface area substantially in a two-dimensional plane, e.g. plate-heater non-flexible heating conductor mounted on insulating base
    • H05B3/265—Heating elements having extended surface area substantially in a two-dimensional plane, e.g. plate-heater non-flexible heating conductor mounted on insulating base the insulating base being an inorganic material, e.g. ceramic
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
    • H05B3/00—Ohmic-resistance heating
    • H05B3/10—Heater elements characterised by the composition or nature of the materials or by the arrangement of the conductor
    • H05B3/12—Heater elements characterised by the composition or nature of the materials or by the arrangement of the conductor characterised by the composition or nature of the conductive material
    • H05B3/14—Heater elements characterised by the composition or nature of the materials or by the arrangement of the conductor characterised by the composition or nature of the conductive material the material being non-metallic
    • H05B3/141—Conductive ceramics, e.g. metal oxides, metal carbides, barium titanate, ferrites, zirconia, vitrous compounds

Abstract

A ceramic heater according to the present invention includes a substrate (1) consisting of an aluminum nitride sintered body, and a heating element (2) and a feed electrode (3), mainly composed of silver or a silver alloy, formed on a surface of the substrate (1). The aluminum nitride sintered body contains a group 2A or 3A element in the periodic table or a compound thereof and silicon or a silicon compound of 0.01 to 0.5 percent by weight in terms of the silicon element, and preferably further contains a group 8 transition element or a compound thereof by 0.01 to 1 percent by weight in terms of the element.
CA002251875A 1997-10-30 1998-10-27 Aluminum nitride heater Expired - Fee Related CA2251875C (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP9-298076 1997-10-30
JP29807697A JP3820706B2 (en) 1997-10-30 1997-10-30 Aluminum nitride heater

Publications (2)

Publication Number Publication Date
CA2251875A1 true CA2251875A1 (en) 1999-04-30
CA2251875C CA2251875C (en) 2004-01-06

Family

ID=17854847

Family Applications (1)

Application Number Title Priority Date Filing Date
CA002251875A Expired - Fee Related CA2251875C (en) 1997-10-30 1998-10-27 Aluminum nitride heater

Country Status (7)

Country Link
US (1) US6084221A (en)
EP (1) EP0914022B1 (en)
JP (1) JP3820706B2 (en)
KR (1) KR100539634B1 (en)
CA (1) CA2251875C (en)
DE (1) DE69809687T2 (en)
HK (1) HK1017564A1 (en)

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CA2252113A1 (en) * 1997-10-29 1999-04-29 Yoshihiko Numata Substrate and process for producing the same
EP1258752A4 (en) * 2000-01-28 2008-10-01 Sumitomo Electric Industries Heater module and optical waveguide module
DE10042000A1 (en) * 2000-08-26 2002-05-16 Bosch Gmbh Robert Heating device, in particular for a sensor element for analyzing gases
JP2002151236A (en) * 2000-11-07 2002-05-24 Sumitomo Electric Ind Ltd Fluid heating heater
US20030000938A1 (en) * 2000-12-01 2003-01-02 Yanling Zhou Ceramic heater, and ceramic heater resistor paste
JP3949483B2 (en) * 2001-04-27 2007-07-25 ハリソン東芝ライティング株式会社 Plate heater, fixing device, and image forming apparatus
US7106167B2 (en) * 2002-06-28 2006-09-12 Heetronix Stable high temperature sensor system with tungsten on AlN
US9574774B2 (en) * 2014-03-27 2017-02-21 Kyocera Corporation Heater and ignition apparatus equipped with the heater
JP7018307B2 (en) * 2017-12-26 2022-02-10 京セラ株式会社 heater
JP7025258B2 (en) 2018-03-20 2022-02-24 京セラ株式会社 heater
JP7129485B2 (en) 2018-09-11 2022-09-01 京セラ株式会社 Heater and heating tool with the same

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01203270A (en) * 1988-02-08 1989-08-16 Sumitomo Electric Ind Ltd Sintered aluminum nitride body having high thermal conductivity and its production
US5264388A (en) * 1988-05-16 1993-11-23 Sumitomo Electric Industries, Inc. Sintered body of aluminum nitride
JP2567491B2 (en) * 1990-04-17 1996-12-25 住友電気工業株式会社 High thermal conductivity colored aluminum nitride sintered body and method for producing the same
JP3214890B2 (en) * 1991-05-30 2001-10-02 京セラ株式会社 Aluminum nitride sintered body, method for producing the same, and firing jig using the same
US5744411A (en) * 1993-07-12 1998-04-28 The Dow Chemical Company Aluminum nitride sintered body with high thermal conductivity and its preparation
EP0743290B1 (en) * 1994-02-03 2003-05-07 Ngk Insulators, Ltd. Aluminum nitride sinter and production method therefor
JPH0881267A (en) * 1994-09-16 1996-03-26 Toshiba Corp Aluminum nitride sintered compact, its production, aluminum nitride circuit board and its production
JPH08227933A (en) * 1995-02-20 1996-09-03 Shin Etsu Chem Co Ltd Wafer heater with electrostatic attracting function
JPH09197861A (en) * 1995-11-13 1997-07-31 Sumitomo Electric Ind Ltd Heater and thermal fixing device with heater

Also Published As

Publication number Publication date
DE69809687T2 (en) 2003-04-10
JPH11135234A (en) 1999-05-21
DE69809687D1 (en) 2003-01-09
JP3820706B2 (en) 2006-09-13
EP0914022A3 (en) 1999-09-15
CA2251875C (en) 2004-01-06
US6084221A (en) 2000-07-04
EP0914022A2 (en) 1999-05-06
EP0914022B1 (en) 2002-11-27
HK1017564A1 (en) 1999-11-19
KR19990037488A (en) 1999-05-25
KR100539634B1 (en) 2006-02-28

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Legal Events

Date Code Title Description
EEER Examination request
MKLA Lapsed