AU2003241757A1 - Method of electroless plating - Google Patents
Method of electroless platingInfo
- Publication number
- AU2003241757A1 AU2003241757A1 AU2003241757A AU2003241757A AU2003241757A1 AU 2003241757 A1 AU2003241757 A1 AU 2003241757A1 AU 2003241757 A AU2003241757 A AU 2003241757A AU 2003241757 A AU2003241757 A AU 2003241757A AU 2003241757 A1 AU2003241757 A1 AU 2003241757A1
- Authority
- AU
- Australia
- Prior art keywords
- electroless plating
- electroless
- plating
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Abandoned
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/6715—Apparatus for applying a liquid, a resin, an ink or the like
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C18/00—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating
- C23C18/16—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by reduction or substitution, e.g. electroless plating
- C23C18/18—Pretreatment of the material to be coated
- C23C18/1851—Pretreatment of the material to be coated of surfaces of non-metallic or semiconducting in organic material
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C18/00—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating
- C23C18/16—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by reduction or substitution, e.g. electroless plating
- C23C18/18—Pretreatment of the material to be coated
- C23C18/20—Pretreatment of the material to be coated of organic surfaces, e.g. resins
- C23C18/28—Sensitising or activating
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C18/00—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating
- C23C18/16—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by reduction or substitution, e.g. electroless plating
- C23C18/31—Coating with metals
- C23C18/38—Coating with copper
- C23C18/40—Coating with copper using reducing agents
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C18/00—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating
- C23C18/16—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by reduction or substitution, e.g. electroless plating
- C23C18/31—Coating with metals
- C23C18/38—Coating with copper
- C23C18/40—Coating with copper using reducing agents
- C23C18/405—Formaldehyde
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/28—Manufacture of electrodes on semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/268
- H01L21/283—Deposition of conductive or insulating materials for electrodes conducting electric current
- H01L21/288—Deposition of conductive or insulating materials for electrodes conducting electric current from a liquid, e.g. electrolytic deposition
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2002-283297 | 2002-09-27 | ||
JP2002283297A JP2004115885A (en) | 2002-09-27 | 2002-09-27 | Electroless plating method |
PCT/JP2003/006499 WO2004029328A1 (en) | 2002-09-27 | 2003-05-23 | Method of electroless plating |
Publications (1)
Publication Number | Publication Date |
---|---|
AU2003241757A1 true AU2003241757A1 (en) | 2004-04-19 |
Family
ID=32040558
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
AU2003241757A Abandoned AU2003241757A1 (en) | 2002-09-27 | 2003-05-23 | Method of electroless plating |
Country Status (5)
Country | Link |
---|---|
JP (1) | JP2004115885A (en) |
KR (1) | KR20050059178A (en) |
CN (1) | CN1685081A (en) |
AU (1) | AU2003241757A1 (en) |
WO (1) | WO2004029328A1 (en) |
Families Citing this family (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20070048447A1 (en) * | 2005-08-31 | 2007-03-01 | Alan Lee | System and method for forming patterned copper lines through electroless copper plating |
JP5308622B2 (en) * | 2006-12-01 | 2013-10-09 | 廖智良 | Horizontal electroplating electrodeposition method and horizontal electroless plating method on a substrate |
CN101578394B (en) | 2007-07-31 | 2011-08-03 | 日矿金属株式会社 | Plated material having metal thin film formed by electroless plating, and method for production thereof |
US8395264B2 (en) | 2009-01-30 | 2013-03-12 | Jx Nippon Mining & Metals Corporation | Substrate comprising alloy film of metal element having barrier function and metal element having catalytic power |
JP2013213263A (en) * | 2012-04-03 | 2013-10-17 | Tokyo Electron Ltd | Plating apparatus, plating method, and storage medium |
JP5602790B2 (en) * | 2012-06-06 | 2014-10-08 | 学校法人関東学院 | Electroless plating bath and electroless plating film |
US9469902B2 (en) * | 2014-02-18 | 2016-10-18 | Lam Research Corporation | Electroless deposition of continuous platinum layer |
JP6404174B2 (en) * | 2015-04-16 | 2018-10-10 | 東京エレクトロン株式会社 | Plating processing method, storage medium, and plating processing system |
JP6201029B1 (en) * | 2016-12-26 | 2017-09-20 | 日本エレクトロプレイテイング・エンジニヤース株式会社 | Electroless platinum plating solution and electroless platinum plating method |
Family Cites Families (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2000212754A (en) * | 1999-01-22 | 2000-08-02 | Sony Corp | Plating method, its device and plated structure |
JP2001181851A (en) * | 1999-10-12 | 2001-07-03 | Sony Corp | Plating method and plated structure |
US6451689B1 (en) * | 1999-10-20 | 2002-09-17 | Rohm Co., Ltd. | Method for manufacturing semiconductor device |
JP2001355074A (en) * | 2000-04-10 | 2001-12-25 | Sony Corp | Electroless plating method, and apparatus thereof |
JP2001316834A (en) * | 2000-04-28 | 2001-11-16 | Sony Corp | Apparatus for electroless plating and method for forming conductive film |
JP2002053971A (en) * | 2000-08-03 | 2002-02-19 | Sony Corp | Plating method, plating structure, method for producing semiconductor device, and semiconductor device |
JP4083968B2 (en) * | 2000-11-02 | 2008-04-30 | 株式会社東芝 | Manufacturing method of semiconductor device |
JP3850226B2 (en) * | 2001-04-02 | 2006-11-29 | 株式会社荏原製作所 | Substrate processing equipment |
-
2002
- 2002-09-27 JP JP2002283297A patent/JP2004115885A/en not_active Withdrawn
-
2003
- 2003-05-23 CN CNA03822688XA patent/CN1685081A/en active Pending
- 2003-05-23 KR KR1020057004928A patent/KR20050059178A/en not_active Application Discontinuation
- 2003-05-23 AU AU2003241757A patent/AU2003241757A1/en not_active Abandoned
- 2003-05-23 WO PCT/JP2003/006499 patent/WO2004029328A1/en active Application Filing
Also Published As
Publication number | Publication date |
---|---|
JP2004115885A (en) | 2004-04-15 |
KR20050059178A (en) | 2005-06-17 |
WO2004029328A1 (en) | 2004-04-08 |
CN1685081A (en) | 2005-10-19 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
MK6 | Application lapsed section 142(2)(f)/reg. 8.3(3) - pct applic. not entering national phase |