AU2002363300A1 - Universal modular wafer transport system - Google Patents

Universal modular wafer transport system

Info

Publication number
AU2002363300A1
AU2002363300A1 AU2002363300A AU2002363300A AU2002363300A1 AU 2002363300 A1 AU2002363300 A1 AU 2002363300A1 AU 2002363300 A AU2002363300 A AU 2002363300A AU 2002363300 A AU2002363300 A AU 2002363300A AU 2002363300 A1 AU2002363300 A1 AU 2002363300A1
Authority
AU
Australia
Prior art keywords
transport system
wafer transport
universal modular
modular wafer
universal
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU2002363300A
Inventor
Anthony C. Bonora
Richard H. Gould
Roger G. Hine
Michael Krolak
Jerry Speasl
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Asyst Technologies Inc
Original Assignee
Asyst Technologies Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Asyst Technologies Inc filed Critical Asyst Technologies Inc
Publication of AU2002363300A1 publication Critical patent/AU2002363300A1/en
Abandoned legal-status Critical Current

Links

AU2002363300A 2001-08-31 2002-09-03 Universal modular wafer transport system Abandoned AU2002363300A1 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US60/316,722 2001-08-31

Publications (1)

Publication Number Publication Date
AU2002363300A1 true AU2002363300A1 (en) 2003-05-12

Family

ID=

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