ATE60057T1 - Verfahren zur herstellung von hexamethylcyclotrisilazan. - Google Patents
Verfahren zur herstellung von hexamethylcyclotrisilazan.Info
- Publication number
- ATE60057T1 ATE60057T1 AT86102688T AT86102688T ATE60057T1 AT E60057 T1 ATE60057 T1 AT E60057T1 AT 86102688 T AT86102688 T AT 86102688T AT 86102688 T AT86102688 T AT 86102688T AT E60057 T1 ATE60057 T1 AT E60057T1
- Authority
- AT
- Austria
- Prior art keywords
- hexamethylcyclotrisilazan
- production
- sflazane
- cyclotrisilazanes
- cyclotetrasilazanes
- Prior art date
Links
- WGGNJZRNHUJNEM-UHFFFAOYSA-N 2,2,4,4,6,6-hexamethyl-1,3,5,2,4,6-triazatrisilinane Chemical compound C[Si]1(C)N[Si](C)(C)N[Si](C)(C)N1 WGGNJZRNHUJNEM-UHFFFAOYSA-N 0.000 title 1
- UGXMKSYKRKUMGY-UHFFFAOYSA-N 1,3,5,2,4,6-triazatrisilinane Chemical class N1[SiH2]N[SiH2]N[SiH2]1 UGXMKSYKRKUMGY-UHFFFAOYSA-N 0.000 abstract 1
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 abstract 1
- JVZKVVDFQLHZBY-UHFFFAOYSA-N N1[SiH2]N[SiH2]N[SiH2]N[SiH2]1 Chemical class N1[SiH2]N[SiH2]N[SiH2]N[SiH2]1 JVZKVVDFQLHZBY-UHFFFAOYSA-N 0.000 abstract 1
- 239000002981 blocking agent Substances 0.000 abstract 1
- 239000003054 catalyst Substances 0.000 abstract 1
- 238000006243 chemical reaction Methods 0.000 abstract 1
- 238000010438 heat treatment Methods 0.000 abstract 1
- 229910052739 hydrogen Inorganic materials 0.000 abstract 1
- 239000001257 hydrogen Substances 0.000 abstract 1
- 239000000203 mixture Substances 0.000 abstract 1
- 238000006116 polymerization reaction Methods 0.000 abstract 1
- 239000000126 substance Substances 0.000 abstract 1
- 239000000758 substrate Substances 0.000 abstract 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C07—ORGANIC CHEMISTRY
- C07F—ACYCLIC, CARBOCYCLIC OR HETEROCYCLIC COMPOUNDS CONTAINING ELEMENTS OTHER THAN CARBON, HYDROGEN, HALOGEN, OXYGEN, NITROGEN, SULFUR, SELENIUM OR TELLURIUM
- C07F7/00—Compounds containing elements of Groups 4 or 14 of the Periodic Table
- C07F7/02—Silicon compounds
- C07F7/08—Compounds having one or more C—Si linkages
- C07F7/10—Compounds having one or more C—Si linkages containing nitrogen having a Si-N linkage
-
- C—CHEMISTRY; METALLURGY
- C07—ORGANIC CHEMISTRY
- C07F—ACYCLIC, CARBOCYCLIC OR HETEROCYCLIC COMPOUNDS CONTAINING ELEMENTS OTHER THAN CARBON, HYDROGEN, HALOGEN, OXYGEN, NITROGEN, SULFUR, SELENIUM OR TELLURIUM
- C07F7/00—Compounds containing elements of Groups 4 or 14 of the Periodic Table
- C07F7/02—Silicon compounds
- C07F7/21—Cyclic compounds having at least one ring containing silicon, but no carbon in the ring
Landscapes
- Chemical & Material Sciences (AREA)
- Organic Chemistry (AREA)
- Silicon Compounds (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US06/755,049 US4577039A (en) | 1985-07-15 | 1985-07-15 | Method of preparing hexamethylcyclotrisilazane |
EP86102688A EP0208831B1 (de) | 1985-07-15 | 1986-03-01 | Verfahren zur Herstellung von Hexamethylcyclotrisilazan |
Publications (1)
Publication Number | Publication Date |
---|---|
ATE60057T1 true ATE60057T1 (de) | 1991-02-15 |
Family
ID=25037512
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
AT86102688T ATE60057T1 (de) | 1985-07-15 | 1986-03-01 | Verfahren zur herstellung von hexamethylcyclotrisilazan. |
Country Status (5)
Country | Link |
---|---|
US (1) | US4577039A (de) |
EP (1) | EP0208831B1 (de) |
JP (1) | JPS6219597A (de) |
AT (1) | ATE60057T1 (de) |
DE (1) | DE3676896D1 (de) |
Families Citing this family (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4869854A (en) * | 1986-10-31 | 1989-09-26 | Shin-Etsu Chemical Co., Ltd. | Process for manufacturing organic silazane polymers and ceramics therefrom |
US5084423A (en) * | 1987-11-07 | 1992-01-28 | Hoechst Aktiengesellschaft | Polysilazanes, process for the preparation thereof, silicon, nitride-containing ceramic materials which can be prepared therefrom, and the preparation thereof |
US4855469A (en) * | 1988-11-09 | 1989-08-08 | Dow Corning Corporation | Preparation of cycloorganotrisilazanes |
JP2793008B2 (ja) * | 1990-04-20 | 1998-09-03 | 信越化学工業株式会社 | ヘキサメチルシクロトリシラザンの製造方法 |
JP2626336B2 (ja) * | 1991-08-22 | 1997-07-02 | 信越化学工業株式会社 | ヘキサメチルシクロトリシラザンの製造方法 |
JP3446291B2 (ja) * | 1993-10-29 | 2003-09-16 | 信越化学工業株式会社 | ヘキサメチルシクロトリシラザンの製造方法 |
US7122222B2 (en) * | 2003-01-23 | 2006-10-17 | Air Products And Chemicals, Inc. | Precursors for depositing silicon containing films and processes thereof |
CN107778327A (zh) * | 2016-08-29 | 2018-03-09 | 张家港市国泰华荣化工新材料有限公司 | 一种六甲基环三硅氮烷的制备方法 |
CN112552334A (zh) * | 2020-12-08 | 2021-03-26 | 江西贝特利新材料有限公司 | 一种六甲基环三硅氮烷的制备方法 |
Family Cites Families (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US2885370A (en) * | 1957-10-03 | 1959-05-05 | American Cyanamid Co | Method of preparing polymers of monomeric cyclotrisilazanes |
DE1187615B (de) * | 1961-01-26 | 1965-02-25 | Monsanto Co | Verfahren zur Herstellung von N-Silylcyclosilazanen |
US3228895A (en) * | 1963-05-15 | 1966-01-11 | Southern Res Inst | Infusible silylamine polymer and process for producing same |
DE1593040A1 (de) * | 1965-07-05 | 1970-07-23 | Monsanto Co | Verfahren zur Herstellung von N-Silylcyclosilazanen |
-
1985
- 1985-07-15 US US06/755,049 patent/US4577039A/en not_active Expired - Lifetime
-
1986
- 1986-03-01 EP EP86102688A patent/EP0208831B1/de not_active Expired - Lifetime
- 1986-03-01 AT AT86102688T patent/ATE60057T1/de not_active IP Right Cessation
- 1986-03-01 DE DE8686102688T patent/DE3676896D1/de not_active Expired - Lifetime
- 1986-03-17 JP JP61057181A patent/JPS6219597A/ja active Granted
Also Published As
Publication number | Publication date |
---|---|
DE3676896D1 (de) | 1991-02-21 |
EP0208831A3 (en) | 1987-04-15 |
EP0208831B1 (de) | 1991-01-16 |
JPS6219597A (ja) | 1987-01-28 |
JPS6358838B2 (de) | 1988-11-17 |
US4577039A (en) | 1986-03-18 |
EP0208831A2 (de) | 1987-01-21 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
UEP | Publication of translation of european patent specification | ||
REN | Ceased due to non-payment of the annual fee |