ATE528690T1 - Negative resistzusammensetzung und verfahren zur strukturformung damit - Google Patents
Negative resistzusammensetzung und verfahren zur strukturformung damitInfo
- Publication number
- ATE528690T1 ATE528690T1 AT08006042T AT08006042T ATE528690T1 AT E528690 T1 ATE528690 T1 AT E528690T1 AT 08006042 T AT08006042 T AT 08006042T AT 08006042 T AT08006042 T AT 08006042T AT E528690 T1 ATE528690 T1 AT E528690T1
- Authority
- AT
- Austria
- Prior art keywords
- resist composition
- negative resist
- therefrom
- acid
- soluble polymer
- Prior art date
Links
Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/0045—Photosensitive materials with organic non-macromolecular light-sensitive compounds not otherwise provided for, e.g. dissolution inhibitors
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/0047—Photosensitive materials characterised by additives for obtaining a metallic or ceramic pattern, e.g. by firing
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/038—Macromolecular compounds which are rendered insoluble or differentially wettable
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/038—Macromolecular compounds which are rendered insoluble or differentially wettable
- G03F7/0382—Macromolecular compounds which are rendered insoluble or differentially wettable the macromolecular compound being present in a chemically amplified negative photoresist composition
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Ceramic Engineering (AREA)
- Materials For Photolithography (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
- Addition Polymer Or Copolymer, Post-Treatments, Or Chemical Modifications (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2007088557 | 2007-03-29 | ||
JP2008079338A JP4958821B2 (ja) | 2007-03-29 | 2008-03-25 | ネガ型レジスト組成物及びそれを用いたパターン形成方法 |
Publications (1)
Publication Number | Publication Date |
---|---|
ATE528690T1 true ATE528690T1 (de) | 2011-10-15 |
Family
ID=40048431
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
AT08006042T ATE528690T1 (de) | 2007-03-29 | 2008-03-28 | Negative resistzusammensetzung und verfahren zur strukturformung damit |
Country Status (4)
Country | Link |
---|---|
JP (1) | JP4958821B2 (de) |
KR (2) | KR20080088508A (de) |
AT (1) | ATE528690T1 (de) |
TW (1) | TWI398730B (de) |
Families Citing this family (21)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP5656413B2 (ja) | 2009-01-30 | 2015-01-21 | 富士フイルム株式会社 | ネガ型レジストパターン形成方法、それに用いられる現像液及びネガ型化学増幅型レジスト組成物、並びにレジストパターン |
JP5557550B2 (ja) | 2009-02-20 | 2014-07-23 | 富士フイルム株式会社 | 電子線又はeuv光を用いた有機溶剤系現像又は多重現像パターン形成方法 |
JP5352320B2 (ja) * | 2009-03-31 | 2013-11-27 | 富士フイルム株式会社 | ネガ型パターン形成方法およびそれに用いられる現像後処理液 |
JP5630181B2 (ja) * | 2010-03-05 | 2014-11-26 | 大日本印刷株式会社 | ネガ型レジスト組成物、当該レジスト組成物を用いたレリーフパターンの製造方法及びフォトマスクの製造方法 |
JPWO2012014576A1 (ja) * | 2010-07-30 | 2013-09-12 | Jsr株式会社 | ネガ型感放射線性樹脂組成物 |
JP5514759B2 (ja) | 2011-03-25 | 2014-06-04 | 富士フイルム株式会社 | レジストパターン形成方法、レジストパターン、有機溶剤現像用の架橋性ネガ型化学増幅型レジスト組成物、レジスト膜、及びレジスト塗布マスクブランクス |
JP5358630B2 (ja) * | 2011-08-17 | 2013-12-04 | 富士フイルム株式会社 | レジストパターン形成方法、ナノインプリント用モールドの製造方法、及びフォトマスクの製造方法 |
JP5732364B2 (ja) | 2011-09-30 | 2015-06-10 | 富士フイルム株式会社 | パターン形成方法、及び、電子デバイスの製造方法 |
JP6209307B2 (ja) | 2011-09-30 | 2017-10-04 | 富士フイルム株式会社 | パターン形成方法、及びこれを用いた電子デバイスの製造方法 |
JP5879209B2 (ja) * | 2012-06-21 | 2016-03-08 | 東京応化工業株式会社 | レジスト組成物及びレジストパターン形成方法 |
JP5873826B2 (ja) | 2012-07-27 | 2016-03-01 | 富士フイルム株式会社 | パターン形成方法、及び電子デバイスの製造方法 |
JP6095231B2 (ja) | 2013-03-29 | 2017-03-15 | 富士フイルム株式会社 | パターン形成方法、及びこれを用いた電子デバイスの製造方法 |
JP6185874B2 (ja) | 2013-05-02 | 2017-08-23 | 富士フイルム株式会社 | パターン形成方法、感活性光線性又は感放射線性樹脂組成物、レジスト膜、電子デバイスの製造方法、及び、電子デバイス |
JP6247858B2 (ja) | 2013-08-01 | 2017-12-13 | 富士フイルム株式会社 | パターン形成方法、及びこれを用いた電子デバイスの製造方法 |
JP6200721B2 (ja) | 2013-08-01 | 2017-09-20 | 富士フイルム株式会社 | パターン形成方法、及びこれを用いた電子デバイスの製造方法 |
JP6122754B2 (ja) | 2013-09-30 | 2017-04-26 | 富士フイルム株式会社 | 感活性光線性又は感放射線性樹脂組成物、感活性光線性又は感放射線性膜、感活性光線性又は感放射線性膜を備えたマスクブランクス、パターン形成方法、及び電子デバイスの製造方法 |
JP6313604B2 (ja) | 2014-02-05 | 2018-04-18 | 富士フイルム株式会社 | 感活性光線性又は感放射線性樹脂組成物、感活性光線性又は感放射線性膜、感活性光線性又は感放射線性膜を備えたマスクブランクス、パターン形成方法、及び電子デバイスの製造方法 |
JP6220695B2 (ja) | 2014-02-18 | 2017-10-25 | 富士フイルム株式会社 | 感活性光線性又は感放射線性樹脂組成物、感活性光線性又は感放射線性膜、感活性光線性又は感放射線性膜を備えたマスクブランクス、パターン形成方法及び電子デバイスの製造方法 |
KR101877029B1 (ko) * | 2016-05-13 | 2018-07-11 | 영창케미칼 주식회사 | 화학증폭형 네가티브형 포토레지스트 조성물 |
JP7166151B2 (ja) * | 2018-11-22 | 2022-11-07 | 東京応化工業株式会社 | レジスト組成物及びレジストパターン形成方法 |
CN115850950B (zh) * | 2022-12-21 | 2024-06-11 | 安徽远征传导科技股份有限公司 | 一种新能源汽车用移动抗曲挠交流充电枪电缆 |
Family Cites Families (15)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP3638743B2 (ja) * | 1996-12-26 | 2005-04-13 | 東京応化工業株式会社 | 化学増幅型ネガ型レジスト組成物 |
JPH11149159A (ja) * | 1997-11-17 | 1999-06-02 | Hitachi Ltd | パタン形成方法及び半導体素子の製造方法 |
JP3707655B2 (ja) * | 1998-10-24 | 2005-10-19 | 東京応化工業株式会社 | ネガ型レジスト組成物 |
JP2000206679A (ja) * | 1999-01-08 | 2000-07-28 | Hitachi Ltd | パタン形成方法および半導体素子の製造方法 |
JP4132642B2 (ja) * | 1999-11-15 | 2008-08-13 | 東京応化工業株式会社 | ネガ型レジスト基材及びそれを用いたイオン注入基板の製造方法 |
JP4092083B2 (ja) * | 2001-03-21 | 2008-05-28 | 富士フイルム株式会社 | 電子線又はx線用ネガ型レジスト組成物 |
JP2002365802A (ja) * | 2001-06-08 | 2002-12-18 | Fuji Photo Film Co Ltd | ネガ型レジスト組成物 |
JP2002372783A (ja) * | 2001-06-15 | 2002-12-26 | Fuji Photo Film Co Ltd | ネガ型レジスト組成物 |
TWI242689B (en) * | 2001-07-30 | 2005-11-01 | Tokyo Ohka Kogyo Co Ltd | Chemically amplified negative photoresist composition for the formation of thick films, photoresist base material and method of forming bumps using the same |
KR100840635B1 (ko) * | 2001-11-30 | 2008-06-24 | 와코 쥰야꾸 고교 가부시키가이샤 | 비스이미드 화합물, 이것을 이용한 산 발생제 및 레지스트조성물 및 해당 조성물을 이용한 패턴 형성 방법 |
JP3856306B2 (ja) * | 2002-03-29 | 2006-12-13 | 富士フイルムホールディングス株式会社 | ネガ型レジスト組成物 |
EP1566700B1 (de) * | 2004-02-23 | 2016-08-03 | FUJIFILM Corporation | Automatisches Entwicklungsverfahren von fotoempfindlichen lithographischen Druckplatten und automatische Entwicklungsvorrichtung |
JP4407815B2 (ja) * | 2004-09-10 | 2010-02-03 | 信越化学工業株式会社 | フォトマスクブランク及びフォトマスク |
JP4789599B2 (ja) * | 2004-12-06 | 2011-10-12 | ローム・アンド・ハース・エレクトロニック・マテリアルズ,エル.エル.シー. | フォトレジスト組成物 |
JP4505357B2 (ja) * | 2005-03-16 | 2010-07-21 | 富士フイルム株式会社 | 感光性組成物、該感光性組成物に用いる化合物及び該感光性組成物を用いたパターン形成方法 |
-
2008
- 2008-03-25 JP JP2008079338A patent/JP4958821B2/ja active Active
- 2008-03-28 KR KR1020080029054A patent/KR20080088508A/ko active Application Filing
- 2008-03-28 TW TW097111165A patent/TWI398730B/zh active
- 2008-03-28 AT AT08006042T patent/ATE528690T1/de not_active IP Right Cessation
-
2014
- 2014-03-05 KR KR1020140025861A patent/KR101502617B1/ko active IP Right Grant
Also Published As
Publication number | Publication date |
---|---|
KR20140041649A (ko) | 2014-04-04 |
TWI398730B (zh) | 2013-06-11 |
JP2008268935A (ja) | 2008-11-06 |
TW200905394A (en) | 2009-02-01 |
JP4958821B2 (ja) | 2012-06-20 |
KR101502617B1 (ko) | 2015-03-12 |
KR20080088508A (ko) | 2008-10-02 |
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Legal Events
Date | Code | Title | Description |
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RER | Ceased as to paragraph 5 lit. 3 law introducing patent treaties |